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2024
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Invention
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Electrostatic chuck assembly for plasma processing apparatus.
An electrostatic chuck including a... |
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Invention
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Transfer apparatus and processing system.
The present disclosure provides a transfer apparatus a... |
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Invention
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Support plate for localized heating in thermal processing systems.
Support plates for localized ... |
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Invention
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Rapid thermal processing system with cooling system.
Apparatus, systems, and methods for process... |
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Invention
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Airflow control method for air flotation cyclone operation of low-pressure heat treatment device.... |
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Invention
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Temperature control method for semiconductor process.
Provided is a temperature control method f... |
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Invention
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Process platform.
Provided is a process platform, relating to the field of semiconductor technol... |
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Invention
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Workpiece processing apparatus with thermal processing systems.
A processing apparatus for a the... |
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Invention
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Gas distribution element and heat treatment device containing the same.
Provided is a gas distri... |
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Invention
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Low-pressure oxidation treatment method and device for semiconductor workpieces.
Provided is a l... |
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Invention
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Dual frequency matching circuit for inductively coupled plasma (icp) loads.
Matching circuitry i... |
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Invention
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Heat treatment apparatus and accurate temperature measurement method for semiconductor workpiece.... |
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Invention
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Heat treatment apparatus and temperature regulating method for semiconductor workpiece.
A heat t... |
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Invention
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Reaction chamber and oxidation device.
Provided is a reaction chamber and an oxidation device. T... |
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Invention
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Workpiece processing apparatus and methods for the treatment of workpieces.
Systems and methods ... |
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Invention
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Preheat processes for millisecond anneal system.
Preheat processes for a millisecond anneal syst... |
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Invention
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Workpiece processing apparatus and methods for the treatment of workpieces. Systems and methods f... |
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Invention
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Method for processing workpiece, plasma processing apparatus and semiconductor device.
A method ... |
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Invention
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Variable mode plasma chamber utilizing tunable plasma potential.
Plasma processing apparatus and... |
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Invention
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Transmission-based temperature measurement of a workpiece in a thermal processing system.
A ther... |
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Invention
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Workpiece processing apparatus with plasma and thermal processing systems.
A processing apparatu... |
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2023
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Invention
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Workpiece processing apparatus with contact temperature sensor.
A semiconductor fabrication appa... |
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Invention
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Electrostatic chuck assembly for plasma processing apparatus. An electrostatic chuck including a ... |
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Invention
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Workpiece processing apparatus with contact temperature sensor. A semiconductor fabrication appar... |
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Invention
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Methods of processing workpieces using organic radicals.
Processes treating a workpiece are prov... |
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Invention
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Reaction chamber and wafer etching device. The present disclosure relates to the technical field ... |
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Invention
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Gas conveying device and system, and plasma processing device. The present disclosure relates to ... |
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Invention
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Reaction chamber and wafer etching apparatus. The present disclosure relates to the technical fie... |
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Invention
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Heat treatment apparatus, control method and apparatus, electronic device, storage medium, and pr... |
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Invention
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Wafer stage, reaction chamber and wafer etching device. Provided in the present disclosure are a ... |
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Invention
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Radio frequency probe, radio frequency matcher, radio frequency power supply, and radio frequency... |
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Invention
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Covering structure, covering method, and semiconductor device. The present disclosure relates to ... |
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Invention
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Enhanced ignition in inductively coupled plasmas for workpiece processing.
Plasma processing app... |
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Invention
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Workpiece processing apparatus with thermal processing systems. An apparatus for combining plasma... |
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Invention
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Temperature control using temperature control element coupled to faraday shield.
Plasma processi... |
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Invention
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Arc lamp with forming gas for thermal processing systems. Apparatus, systems, and methods for pro... |
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Invention
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Control system for adaptive control of a thermal processing system. A control system operable to ... |
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Invention
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Transmission-based temperature measurement of a workpiece in a thermal processing system. A therm... |
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2022
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Invention
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Support plate for localized heating in thermal processing systems. Support plates for localized h... |
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Invention
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Apparatus for hydrogen assisted atmospheric radical oxidation. Apparatus, systems, and methods fo... |
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Invention
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Transfer position for workpieces and replaceable parts in a vacuum processing apparatus.
Systems... |
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Invention
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Storage cassette for replaceable parts for plasma processing apparatus.
A cassette for a workpie... |
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Invention
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Systems and methods for workpiece processing. A processing system for processing a plurality of w... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus including a processing chamber having... |
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2021
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Invention
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Conductive member for cleaning focus ring of a plasma processing apparatus.
A pedestal assembly ... |
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Invention
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Pressure control system for a multi-head processing chamber of a plasma processing apparatus.
A ... |
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Invention
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Lift pin assembly for a plasma processing apparatus. A lift pin assembly for a lift pin of a plas... |
