|
2023
|
Invention
|
Substrate processing apparatus and operating method therefor. The present invention relates to a ... |
|
|
Invention
|
Batch-type substrate-processing apparatus. The present invention relates to a batch-type substrat... |
|
|
Invention
|
Apparatus for processing substrate.
In accordance with an exemplary embodiment of the present in... |
|
|
Invention
|
Substrate processing apparatus and substrate processing method. According to one embodiment of th... |
|
|
Invention
|
Substrate transfer apparatus and operation method thereof. The present invention relates to a sub... |
|
|
Invention
|
Wafer transfer device and method for judging abnormalities of wafer transfer device. The present ... |
|
|
Invention
|
Batch type substrate processing apparatus.
Provided is a batch type substrate processing apparat... |
|
|
Invention
|
Apparatus and method for processing substrate.
According to an embodiment of the present inventi... |
|
2022
|
Invention
|
Apparatus for processing a substrate and method of operating the same.
An apparatus for processi... |
|
|
Invention
|
Showerhead and substrate processing apparatus including the same.
According to an embodiment of ... |
|
|
Invention
|
Lift pin protection assembly and substrate processing apparatus. According to an embodiment of th... |
|
|
Invention
|
Substrate transfer device and substrate processing apparatus having the same.
The present disclo... |
|
|
Invention
|
Method for removing impurities in thin film and substrate processing apparatus. The present inven... |
|
2021
|
Invention
|
System for processing substrate.
Provided is a system for processing a substrate. The system for... |
|
|
Invention
|
Plasma processing apparatus.
A plasma treatment apparatus according to the present invention inc... |
|
|
Invention
|
Substrate processing apparatus and operation method for substrate processing apparatus.
In one e... |
|
|
Invention
|
Substrate processing device. According to an embodiment of the present invention, a substrate pro... |
|
2020
|
Invention
|
Substrate processing apparatus.
In accordance with an exemplary embodiment of the present invent... |
|
|
Invention
|
Substrate processing apparatus. A substrate processing apparatus, according to one embodiment of ... |
|
|
Invention
|
Thin film deposition apparatus and thin film deposition method.
The present invention relates to... |
|
|
Invention
|
Substrate support assembly and substrate processing apparatus.
In accordance with an exemplary e... |
|
|
Invention
|
Substrate support assembly and substrate processing apparatus. According to an embodiment of the ... |
|
|
Invention
|
Apparatus for processing substrate with plasma.
In accordance with an exemplary embodiment of th... |
|
|
Invention
|
Plasma treatment apparatus. A plasma treatment apparatus according to an embodiment of the presen... |
|
|
Invention
|
Batch-type substrate processing apparatus and operation method thereof. Provided is a batch-type ... |
|
|
Invention
|
Batch type substrate processing apparatus. Provided is a substrate processing apparatus. The subs... |
|
|
Invention
|
Substrate processing device. A substrate processing device according to one embodiment of the pre... |
|
2019
|
Invention
|
Apparatus and method of processing a substrate.
An apparatus for processing a substrate includes... |
|
|
Invention
|
Method for forming a thin film.
According to an embodiment of the present invention, a method fo... |
|
|
Invention
|
Method for forming thin film. According to one embodiment of the present invention, a method for ... |
|
|
Invention
|
Substrate processing system. A substrate processing system includes: first and second process tub... |
|
|
Invention
|
Substrate treatment apparatus and substrate treatment method.
The present disclosure relates to ... |
|
2018
|
Invention
|
Icp antenna and plasma treatment device. A plasma treatment device according to the present inven... |
|
|
Invention
|
Showerhead and substrate processing apparatus including the same. According to an embodiment of t... |
|
|
Invention
|
Showerhead and substrate processing apparatus. According to one embodiment of the present inventi... |
|
|
Invention
|
Batch type plasma substrate processing apparatus. Provided is a batch-type substrate processing a... |
|
|
Invention
|
Substrate processing apparatus. The substrate processing method according to one embodiment of th... |
|
|
Invention
|
Plasma processing apparatus having injection ports at both sides of the ground electrode for batc... |
|
|
Invention
|
Apparatus for processing substrate. The present disclosure relates to an apparatus for processing... |
|
2017
|
Invention
|
Substrate processing apparatus. The present disclosure relates to a substrate processing apparatu... |
|
|
Invention
|
Icp antenna and substrate processing device including the same. Provided is an ICP antenna used i... |
|
|
Invention
|
Icp antenna and substrate treatment apparatus comprising same. 본 발명의 ICP 안테나는 플라즈마 처리 장치에 사용되는 IC... |
|
|
Invention
|
Method for forming epitaxial layer at low temperature. Provided is a method for forming an epitax... |
|
2016
|
Invention
|
Substrate processing apparatus. In accordance with an exemplary embodiment, a substrate processin... |
|
|
Invention
|
Substrate processing apparatus and method for assembling tube assembly. In accordance with an exe... |
