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2022
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Invention
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Gallium precursors for deposition of gallium-containing oxide films.
A method of deposition of a... |
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Invention
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Gallium precursors for deposition of gallium-containing oxide films. A method of deposition of a ... |
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2020
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Invention
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Iodine-containing compounds for etching semiconductor structures. z, wherein a=1-3, x=0-6, y=1-7,... |
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2019
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Invention
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Deterministic feedback blender. Methods and systems for high precision, continuous blending of mi... |
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2018
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Invention
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Sin selective etch to sio2 with non-plasma dry process for 3d nand device applications. Methods f... |
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Invention
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Hydrofluorocarbons containing -nh2 functional group for 3d nand and dram applications. 2432433453... |
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Invention
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Chemistries for tsv/mems/power device etching. z, with 1≤x<7, 1≤y≤13, and 1≤z≤13. The replacement... |
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2017
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Invention
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Methods for minimizing sidewall damage during low k etch processes. Methods for minimizing sidewa... |
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Invention
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Sin selective etch to sio2 with non-plasma dry process for 3d nand device applications. 2) and co... |
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Invention
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Iodine-containing compounds for etching semiconductor structures. A method for etching silicon-co... |
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Invention
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N-h free and si-rich perhydridopolysilzane compositions, their synthesis, and applications. 3x2yy... |
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Invention
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2 functional group for 3d nand and dram applications. 6N) to selectively plasma etching silicon c... |
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Invention
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Group 4 transition metal-containing film forming compositions for vapor deposition of group 4 tra... |
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2016
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Invention
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Methods for minimizing sidewall damage during low k etch processes.
Methods for minimizing sidew... |
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Invention
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Load cell failure detection and delayed repair. Liquid tank measuring systems that weigh/measure ... |
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Invention
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Clean storage packaging article and method for making and using. A packing article for the storag... |
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Invention
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Deterministic feedback blender.
Methods and systems for high precision, continuous blending of m... |
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2015
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Invention
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Smart canister.
Disclosed are smart canisters for use in the materials industry. The smart canis... |
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Invention
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Chemistries for tsv/mems/power device etching. z, with 1 ≦x<7, 1≦y≦13, and 1≦z≦13. The replacemen... |
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2014
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Invention
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Silicon containing compounds for ald deposition of metal silicate films.
Disclosed are silicon c... |
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G/S
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CHEMICAL BLENDING AND DELIVERY SYSTEMS AND APPARATUS, NAMELY, MIXERS AND DISPENSERS SOLD AS A UNI... |
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2013
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Invention
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Synthesis methods for carbosilanes. 3. |
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2012
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Invention
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Systems and methods for managing fluids in a processing environment using a liquid ring pump and ... |
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Invention
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Point-of-use process control blender systems and corresponding methods.
A blender system is prov... |
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Invention
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Reclaim function for semiconductor processing system. Systems for controlling fluids in semicondu... |
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Invention
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Synthesis method for carbosilanes. 2. |
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2011
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Invention
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Process of purifying ruthenium precursors.
Disclosed are methods of purifying a ruthenium contai... |
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Invention
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2se. 2Se through an AW-500 molecular sieve. |
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Invention
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Systems for managing fluids in a processing environment using a liquid ring pump and reclamation ... |
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Invention
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Silicon precursors and method for low temperature cvd of silicon-containing films. Novel silicon ... |
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Invention
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Methods for forming a ruthenium-based film on a substrate. Methods for forming a film on a substr... |
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2010
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Invention
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Cdte surface treatment for stable back contacts.
Disclosed are etching compositions and processe... |
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Invention
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Manufacturing of adduct free alkaline-earth metal cp complexes.
Methods and compositions for the... |
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2009
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Invention
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Process of purifying ruthenium precursors.
The present invention provides for two separate proce... |
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Invention
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Alkali earth metal precursors for depositing calcium and strontium containing films. Methods and ... |
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2008
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Invention
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Low decomposition storage of a tantalum precursor. Methods of storing a precursor which decreases... |
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Invention
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Methods for checking and calibrating concentration sensors in a semiconductor processing chamber.... |
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Invention
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Reclaim function for semiconductor processing systems. In one embodiment, a method of controlling... |
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Invention
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Non-flammable solvents for semiconductor applications.
Methods and compositions for purging and ... |
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2007
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Invention
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Methods and apparatus for providing a high purity acetylene product.
Methods and apparatus for t... |
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Invention
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Method for volumetrically calibrating a liquid flow controller while maintaining the liquid in a ... |
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Invention
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Method for producing a high purity trisilane product from the pyrolysis of disilane. Methods for ... |
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Invention
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Electrolyte formulation for electrochemical mechanical planarization.
Compositions and methods s... |
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Invention
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Deposition of silicon germanium nitrogen precursors for strain engineering.
Methods for making a... |
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Invention
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Method and apparatus for dispensing liquid with precise control. The present invention provides m... |
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2001
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G/S
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ANALYTICAL SERVICES, NAMELY, ANALYSIS OF WATER, CHEMICALS, GASES, AIR, EQUIPMENT, COMPONENTS, THI... |
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1998
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G/S
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NON-MOTORIZED MOBILE CHEMICAL COLLECTION AND DELIVERY SYSTEM FEATURING A CONTAINER FOR LIQUID CHE... |
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1987
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G/S
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ELECTRONIC AUTOMATIC APPARATUS FOR DRAWING LIQUID CHEMICALS FROM BULK SOURCES AND DELIVERING AND ... |
