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2023
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Invention
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Plasma-resistant two-layer coating film structure and manufacturing method thereof. The present i... |
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2018
|
Invention
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Gas showerhead having gas flow channel with crackless coating film. The present invention relates... |
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2015
|
Invention
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Processing component having improved plasma etching resistance, and treatment method for reinforc... |
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Invention
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Processing component having improved plasma etch resistance, and treatment method for reinforcing... |
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Invention
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Cvd process chamber component having aluminum fluoride barrier film thereon.
Provided is a chemi... |
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Invention
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Cvd process chamber component having aluminum fluoride generation barrier film formed thereon. Th... |
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2014
|
Invention
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Electrostatic chuck and method for manufacturing electrostatic chuck. Provided is an electrostati... |
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Invention
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Electrostatic chuck and method for manufacturing electrostatic chuck. The present invention provi... |
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Invention
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Metal oxide film structure. b (X: a metal element, Y: the element oxygen, a: the atomic number of... |
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Invention
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Metal oxide film structure. The present invention relates to a metal oxide film structure formed ... |
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Invention
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Apparatus and method for coating with solid-state powder. Provided is an apparatus and a method o... |
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Invention
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Apparatus and method for coating with solid-state powder. The present invention relates to a devi... |
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2013
|
Invention
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Apparatus and method for continuous powder coating. The present invention relates to a method and... |
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2010
|
Invention
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Apparatus for power coating. The present invention relates to an apparatus which coats a substrat... |
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Invention
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Solid state powder coating device. The present invention relates to a device for transporting sol... |
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2009
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Invention
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Continuous solid powder vapour-deposition device, and a continuous solid powder vapour deposition... |
