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2020
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Invention
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Deposition device.
A deposition device includes: a generation chamber; a deposition chamber; a t... |
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2017
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Invention
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Deposition method, deposition apparatus, and structure. A deposition method includes: introducing... |
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2015
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Invention
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Deposition method. A deposition method includes: introducing a gas into an airtight container con... |
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2013
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Invention
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Deposition method using an aerosol gas deposition for depositing particles on a substrate. A depo... |
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2010
|
Invention
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Deposition method. A deposition method is provided to enable fine particles having a relatively l... |
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Invention
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Film forming method. [Problem] To provide a film forming method that enables microparticles havin... |
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Invention
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Method for forming zirconia film. [Object] To provide a method for forming a zirconia film, which... |
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Invention
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Method for forming zirconia film. Disclosed is a method for forming a zirconia film, wherein good... |
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2007
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Invention
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Apparatus and method for producing carbon nanohorn. Disclosed is an apparatus for producing a car... |
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2006
|
Invention
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Method for forming a film of lithium metal or lithium alloys and an apparatus for the same.
A li... |
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1995
|
Invention
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Ultra fine particle gas deposition apparatus. In a gas deposition apparatus includes: an ultra fi... |
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1994
|
Invention
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Ultra fine particle gas deposition apparatus. In a gas deposition apparatus including: an ultra f... |
