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2024
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Invention
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Laser apparatus and method for manufacturing electronic devices.
A laser apparatus includes a fi... |
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Invention
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Laser apparatus, method for controlling wavelength of laser light from laser apparatus, and metho... |
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Invention
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Line narrowing laser device, and electronic device manufacturing method.
A line narrowing laser ... |
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Invention
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Laser apparatus, method for measuring spectral linewidth, and method for manufacturing electronic... |
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Invention
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Method of baking chamber of gas laser apparatus and electronic device manufacturing method.
A me... |
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Invention
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Chamber of gas laser apparatus and electronic device manufacturing method.
In a chamber of a gas... |
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Invention
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Chamber for gas laser device, gas laser device, and electronic device manufacturing method.
A ch... |
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Invention
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Gas laser device and electronic device manufacturing method.
A gas laser device includes a chamb... |
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Invention
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Training model creating method, laser device, and electronic device manufacturing method.
A trai... |
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Invention
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Residual pulse cost calculation method and processor.
A residual pulse cost calculation method f... |
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Invention
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Gas laser device and electronic device manufacturing method.
A gas laser device includes a power... |
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Invention
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Laser device, laser processing system, and laser processing method.
A laser device, to be used i... |
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Invention
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Discharge electrode, method of manufacturing discharge electrode, and electronic device manufactu... |
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Invention
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Laser processing apparatus and method for processing workpiece.
A laser processing apparatus inc... |
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Invention
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Laser apparatus, optical path adjusting method, and electronic device manufacturing method.
A la... |
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Invention
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Laser system and electronic device manufacturing method.
A laser system includes a first semicon... |
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Invention
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Gas laser device and electronic device manufacturing method.
A gas laser device includes a laser... |
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Invention
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Photomask creating method, data creating method, and electronic device manufacturing method.
Pro... |
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Invention
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Electronic device manufacturing method, laser device, and wavelength sequence calculation system.... |
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Invention
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Laser system, pulse laser light generating method, and electronic device manufacturing method.
A... |
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Invention
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Optical pulse stretcher, laser apparatus, and electronic device manufacturing method.
An optical... |
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Invention
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Extreme ultraviolet light generation chamber device and electronic device manufacturing method.
... |
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Invention
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Laser processing system, laser processing method, and electronic device manufacturing method.
A ... |
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Invention
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Pulse stretcher and electronic device manufacturing method.
A pulse stretcher includes a beam sp... |
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Invention
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Laser processing method and laser processing system.
A laser processing method includes a first ... |
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2023
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Invention
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Euv light generation apparatus and electronic device manufacturing method.
An EUV light generati... |
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Invention
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Performance prediction method and training method. A performance prediction method according to o... |
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Invention
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Display method and display device. One aspect of the present disclosure pertains to a display met... |
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Invention
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Performance prediction method and training method. One aspect of the present disclosure pertains ... |
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Invention
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Target supply device and electronic device manufacturing method.
A target supply device is confi... |
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Invention
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Laser apparatus and method for manufacturing electronic device. A laser apparatus according to on... |
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Invention
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Wavelength detection device, laser device, and method for manufacturing electronic device. This w... |
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Invention
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Gas laser apparatus and method for manufacturing electronic device. This gas laser apparatus ampl... |
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Invention
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Narrow-band module, narrow-band laser device, and method for manufacturing electronic device. In ... |
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Invention
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Laser device and optical element deterioration determination method. This laser device comprises:... |
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Invention
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Laser device, exposure device, and method for manufacturing electronic device. This laser device ... |
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Invention
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Laser system and method for manufacturing electronic device. This laser system comprises: a laser... |
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Invention
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Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device. A l... |
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Invention
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Gas laser apparatus and method for manufacturing electronic device. This gas laser apparatus comp... |
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Invention
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Laser apparatus, method for controlling laser apparatus, and method for manufacturing electronic ... |
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Invention
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Gas laser device and method for manufacturing electronic device. This gas laser device amplifies ... |
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Invention
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Gas laser apparatus and electronic device manufacturing method. A gas laser apparatus according t... |
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Invention
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Discharge-excited laser device, method for controlling discharge-excited laser device, and method... |
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Invention
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Gas laser device, method for controlling temperature of laser gas, and method for manufacturing e... |
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Invention
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Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device. Thi... |
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Invention
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Degradation estimation method, laser device, and electronic device manufacturing method. The pres... |
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Invention
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Laser chamber device, gas laser device, and method for manufacturing an electronic device. A lase... |
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Invention
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Gas laser device discharge chamber and electronic device manufacturing method. Provided is a gas ... |
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Invention
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Spectrum measuring instrument, laser device, and method for identifying peak position of referenc... |
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2022
|
G/S
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Laser apparatus, namely, a laser machine for semiconductor manufacturing; extreme ultraviolet lig... |
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G/S
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Laser apparatus for semiconductor manufacturing; extreme
ultraviolet light generation apparatus ... |
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2018
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G/S
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Computer software platforms for managing semi-conductor manufacturing machines; computer software... |
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G/S
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Computer software platforms used for semi-conductor
manufacturing machines; computer software us... |
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2016
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G/S
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Laser apparatus namely, a laser machine for semiconductor manufacturing; extreme ultraviolet ligh... |
