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2024
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Invention
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Heat treatment apparatus, method of maintaining heat treatment apparatus, and method of regenerat... |
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Invention
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Heat treatment apparatus and semiconductor substrate manufacturing method.
By accurately detecti... |
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Invention
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Method of manufacturing semiconductor wafers and method of manufacturing semiconductor devices.
... |
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Invention
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Method of manufacturing semiconductor wafer and semiconductor device.
A method of manufacturing ... |
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Invention
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Method of manufacturing silicon wafers.
To provide a method of manufacturing silicon wafers havi... |
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2023
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Invention
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Single crystal pulling device and single crystal pulling method. The present invention precisely ... |
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Invention
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Silicon single crystal. Provided is a silicon single crystal which is grown by intermittently ins... |
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Invention
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Method for evaluating silicon single crystal ingot. Provided is a method for evaluating a silicon... |
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2022
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Invention
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Method for measuring thickness of high-resistance silicon wafer, and method for measuring flatnes... |
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Invention
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Silicon epitaxial substrate production method and silicon epitaxial substrate. Provided are: a si... |
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Invention
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Method for producing silicon single crystal, and single crystal pulling apparatus. The purpose of... |
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Invention
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Method for producing silicon monocrystal. The purpose of the present invention is to maintain the... |
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Invention
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Method for cleaning silicon wafer. The purpose of the present invention is to provide a method fo... |
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Invention
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Method for manufacturing silicon wafer and silicon wafer.
A clean silicon wafer, having a DZ lay... |
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Invention
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Method for producing silicon wafer, and silicon wafer. According to the present invention, there ... |
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2021
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Invention
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Method for producing three-dimensional structure, method for producing vertical transistor, verti... |
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Invention
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Silicon wafer and method for producing silicon wafer.
A silicon wafer is provided which is a Czo... |
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Invention
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Silicon wafer and method for producing silicon wafer. A Czochralski wafer (1) made of silicon, wh... |
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Invention
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Device for cleaning silicon raw material. The present invention effectively reduces the amount of... |
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Invention
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Manufacturing method for semiconductor silicon wafer.
Provided is a method for manufacturing a s... |
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Invention
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Manufacturing method for semiconductor silicon wafer.
The substrate is doped with P, has a resis... |
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Invention
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Manufacturing method for semiconductor silicon wafer. 3. The method includes steps of mirror-poli... |
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Invention
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Semiconductor silicon wafer manufacturing method. Provided is a silicon wafer manufacturing metho... |
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Invention
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Method for manufacturing semiconductor silicon wafer. Provided is a method for manufacturing a si... |
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Invention
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Method for predicting occurrence of defect in epitaxial silicon wafer and method for manufacturin... |
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Invention
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Method for producing silicon monocrystal. Provided is a method for producing a silicon monocrysta... |
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Invention
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Method for producing silicon single crystal. The purpose of the present invention is to provide a... |
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2020
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Invention
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Method and apparatus for pulling single crystal. A method and an apparatus of pulling single crys... |
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Invention
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Single crystal pulling method and single crystal pulling device. Provided are a single crystal pu... |
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Invention
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Method for producing silicon single crystal. Provided is a method for producing a silicon single ... |
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Invention
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Lamination wafers and method of producing bonded wafers using the same.
The occurrence of breaki... |
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Invention
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Lamination wafer and laminated-wafer manufacturing method using same. The present invention addre... |
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2019
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Invention
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Method for measuring extremely low oxygen concentration in silicon wafer. 2 film, nitride film or... |
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Invention
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Method for measuring ultra-low oxygen concentration in silicon wafer. Provided is a method for me... |
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Invention
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Method for heat-treating silicon wafer.
Provided is a method for heat-treating a silicon wafer i... |
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Invention
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Method for heat-treating silicon wafer. Provided is a method for heat-treating a silicon wafer in... |
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Invention
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Method of manufacturing epitaxial silicon wafers. A method for manufacturing an epitaxial silicon... |
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2018
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Invention
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Evaluation method of metal contamination. 3 or less, slicing silicon wafers from the Si single cr... |
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Invention
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Metal contamination evaluation method. The present invention addresses the problem of highly accu... |
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Invention
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Evaluation method of silicon wafer. 2 or less and the existence of strain in each of the sections... |
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Invention
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Method for evaluating silicon wafer. Provided is a method for evaluating a silicon wafer by which... |
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Invention
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Method for producing three-dimensional structure, method for producing vertical transistor, wafer... |
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2017
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Invention
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Calibration curve determination method, carbon concentration measurement method, and silicon wafe... |
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Invention
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Thermal processing method for silicon wafer. d−0.511 (Formula (B)) of an oxygen partial pressure ... |
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Invention
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Silicon wafer thermal processing method. A thermal process is performed in a range in which a pro... |
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Invention
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Silicon wafer. 3 or over. |
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Invention
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Silicon wafer. The present invention configures a silicon wafer comprising: a denuded zone (10), ... |
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Invention
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Protective-film forming method for semiconductor substrate. A protective-film forming method for ... |
