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2012
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Invention
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Method and device for impedance matching. The invention relates to a method for impedance matchin... |
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Invention
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Method for impedance matching and high frequency power supply. The invention relates to a method ... |
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2011
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Invention
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Ignition circuit for igniting a plasma fed with alternating power. In an ignition circuit (20) fo... |
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Invention
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Arc quenching assembly and method for quenching arcs. The invention relates to a method for quenc... |
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Invention
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Method and device for hot forming and heat treatment of coated sheet metal. In a method for hot s... |
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Invention
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Plasma supply arrangement with a quadrature coupler. A plasma supply arrangement for supplying po... |
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Invention
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Plasma supply assembly comprising a plurality of power coupling stages. In a plasma supply assemb... |
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2010
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Invention
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Method for operating an industrial process. The invention relates to a method for operating a pla... |
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Invention
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Self-balancing rf plasma power supply. The invention relates to an RF process energy supply (1) h... |
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2009
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Invention
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Module for a plasma supply unit and plasma supply unit. The invention relates to a module (11, 12... |
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Invention
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Method for supplying power to a plasma process and plasma supply device. The invention relates to... |
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2008
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Invention
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Plasma power supply arrangement. The invention relates to a plasma power supply arrangement (10) ... |
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Invention
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Plasma power supply. In the case of an RF power amplifier arrangement (11) having a DC electrical... |
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Invention
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Method for operation of a plasma supply device and a plasma supply device. A method for operation... |
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Invention
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Plasma supply arrangement. The invention relates to a plasma supply arrangement (200, 201, 202) h... |
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Invention
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Method for the protection of high-frequency amplifiers of a plasma supply device and plasma suppl... |
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Invention
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Plasma supply device. A plasma supply device generates an output power greater than 500 W at an e... |
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Invention
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Plasma supply system. Plasma supply system (10, 10') generating an output power > 500 W at an ess... |
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Invention
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Measurement method and measurement device for a plasma supply device. A method for determination ... |
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Invention
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Plasma supply device and method for operation of a full bridge of a plasma supply device. The inv... |
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Invention
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Method and arrangement for measurement of parameters of a plasma supply device. The invention rel... |
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Invention
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Radio-frequency power supply arrangement, in particular a plasma supply device and method for ope... |
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Invention
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Directional coupler. In a directional coupler (10, 20) with a. coupling loss in the forward direc... |
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2007
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Invention
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Method for operating at least one inverter in a plasma power supply device, and a plasma power su... |
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Invention
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Method for determining the wave delay time between at least one inverter in a plasma power supply... |
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Invention
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Decentralized plasma arc control. A plasma power supply system (205), which produces electrical p... |
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Invention
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Method for operating a plasma process and plasma system. A method for operating one or more plasm... |
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Invention
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Method for identifying an arc discharge in a plasma process and arc discharge identification appa... |
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Invention
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Plasma supply device. The invention relates to a plasma supply device (10, 10') for the generatio... |
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Invention
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Plasma process system with an electrostatic sample holding arrangement and method for decoupling ... |
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2005
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Invention
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Arc discharge detection device. The invention relates to an arc discharge detection device (1), f... |
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Invention
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Cooling device. The invention relates to a cooling device for an electronic unit, in particular, ... |
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2004
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Invention
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90° hybrid. Disclosed is a 90° hybrid that is used for interconnecting two high-frequency amplifi... |
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Invention
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High-frequency excitation system comprising a limiting circuit. Disclosed is a method for limitin... |
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Invention
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Power supply unit for a gas discharge process. The invention relates to a method for generating a... |
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Invention
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Power supply control unit. Disclosed are a power supply control unit (1) and a method for regulat... |
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2003
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Invention
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Method for the generation of a high-frequency ac voltage and corresponding high-frequency power a... |
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Invention
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Power amplifier. The invention relates to a method and device for amplifying power using a modifi... |
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2002
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Invention
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High frequency excitation system. The invention relates to a high frequency excitation system (1)... |
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2000
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Invention
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Electric supply unit for plasma installations. The invention relates to an electric supply unit f... |
