The Institute of Microelectronics of Chinese Academy of Sciences

China

 
Total IP 48
Total IP Rank # 28,754
IP Activity Score 0.9/5.0    2
IP Activity Rank # 467,939

Patents

Trademarks

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Last Patent 2021 - 2s thin film
First Patent 2010 - Method for fabricating black sil...

Latest Inventions, Goods, Services

2019 Invention 2s thin film. 22S thin film, involving placing a substrate in a reaction chamber for atomic layer...
Invention Electrochemical graphene transfer method assisted by multiple supporting films. The invention dis...
Invention Field emission cathode electron source and array thereof. Provided in an embodiment of the presen...
Invention Method for processing graphene thin film material. Disclosed in the present invention is a method...
2018 Invention Method and apparatus for designing resistive random access memory. The disclosure provides a meth...
Invention Method and device for obtaining surface potential. Provided is a method and device for obtaining ...
Invention Method and apparatus for designing resistance change memory. The present invention provides a met...
2016 Invention Self-gating resistive storage device and method for fabrication thereof. Provided are a self-gati...
Invention Manufacturing method of cu-based resistive random access memory, and memory. Disclosed are a manu...
Invention Manufacturing method of cu-based resistive random access memory, and memory. Provided are a manuf...
2014 Invention Packaging method and electronic system product. A packaging process and an electronic system prod...
Invention Sti stress effect modelling method and apparatus for mos device. Disclosed are an STI stress effe...
2013 Invention High-precision voltage detection circuit and method. Provided is a high-precision voltage detecti...
Invention Extreme uv light generation device with pre-shaped and enhanced target source. An extreme UV ligh...
2012 Invention Igbt structure and manufacturing method thereof. An IGBT structure and manufacturing method there...
Invention Trench-type terminal for semiconductor power device and preparation method therefor. Provided is ...
Invention High-voltage super-junction igbt manufacturing method. A high-voltage super-junction insulated ga...
Invention Plasma discharge device. A plasma discharge device comprises two radio-frequency electrodes (107)...
Invention Radiofrequency signal phase-adjustable radiofrequency power supply. Disclosed is a radiofrequency...
Invention Method for radiofrequency power supply external input signal phase synchronization. Disclosed is ...
Invention Method for utilizing atomic layer deposition to prepare thin film. Provided is a method for utili...
Invention Method for preparing co-doped zinc oxide thin film through atomic layer deposition. Disclosed is ...
Invention Method for preparing nitrogen-based dual acceptor co-doped zinc oxide thin film. Disclosed is a m...
Invention Air intake structure and plasma process apparatus. An air intake structure and a plasma process a...
Invention Method for preparing gate dielectric structure by ald. A method for preparing a gate dielectric s...
Invention Electrode lead-in structure. An electrode lead-in structure. The electrode lead-in structure is f...
Invention Atmospheric-pressure plasma free radical cleaning system. An atmospheric-pressure plasma free rad...
Invention New normal-pressure dual radio frequency electrode plasma free radical cleaning spray gun. A norm...
Invention Radio frequency power source having precise power detector. A radio frequency (RF) power source h...
Invention Method for using ald device to grow gallium nitride film. Disclosed is a method for using an ALD ...
Invention Atomic layer deposition apparatus. Provided is an atomic layer deposition apparatus, especially r...
Invention Device and method for generating neutral particle beam. A device for generating a neutral particl...
Invention Neutral particle beam producing device and method. A neutral particle beam producing device, comp...
Invention Method for simultaneously preparing vertical conduction hold and first layer of re-wiring layer. ...
Invention Defect detection system for extreme ultraviolet lithography mask. A defect detection system for a...
Invention Micro photometer. A micro photometer, comprising a micro photometric cell (1), a front support (2...
Invention Method for preparing graphene wafer. Disclosed is a method for preparing a graphene wafer. The me...
Invention Shielding structure of flexible substrate package and fabricating process thereof. The invention ...
Invention Multi-layer hybrid synchronous bonding structure and method for three-dimensional packaging. Prov...
2011 Invention Method for manufacturing front gate line electrode of solar cell. A method for manufacturing a fr...
2010 Invention Method for passivating black silicon. Disclosed is a method for passivating a black silicon, whic...
Invention Shallow junction solar battery and manufacturing method thereof. A shallow junction solar battery...
Invention In-situ preparation method for solar cell. The present invention provides an in-situ preparation ...
Invention Method for in situ fabricating doped black silicon. A method for in situ fabricating doped black ...
Invention Porous substrate and manufacturing method thereof. A porous substrate and manufacturing method th...
Invention Black silicon solar cell and its preparation method. Provided are a black silicon solar cell and ...
Invention Method for fabricating black silicon by using plasma immersion ion implantation. A method for fab...