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2023
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Invention
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Gallium compound, composition for thin film deposition, comprising same, and thin film manufactur... |
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Invention
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Gallium compound, composition comprising same for depositing thin film, and method for manufactur... |
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Invention
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Gallium compound, thin film deposition composition containing same, and method for producing thin... |
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2022
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Invention
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Filter module and organometallic compound supply apparatus comprising same. The present invention... |
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Invention
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Large-capacity sublimation apparatus for high-purity semiconductor. The present invention relates... |
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Invention
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Organometallic compound supply device. The present invention relates to an organometallic compoun... |
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Invention
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Organometallic compound supplying device. The present invention relates to an organometallic comp... |
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Invention
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Organometallic compound supply apparatus. The present invention relates to an organometallic comp... |
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2021
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Invention
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Tantalum compound, preparation method therefor, and tantalum-containing thin film deposition comp... |
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2016
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Invention
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Method for manufacturing organic light-emitting diode. The present invention relates to a method ... |
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2015
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Invention
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Apparatus for supplying measured amount of source material for semiconductor manufacturing proces... |
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Invention
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Vaporizer system for use in semiconductor manufacturing. The present disclosure relates to a vapo... |
