|
2025
|
Invention
|
Method of performing feature detection of image features, scanning probe microscopy system and ma... |
|
|
Invention
|
Method for determining a probe tip shape. A method of determining a tip shape indication of a tip... |
|
2024
|
Invention
|
An acoustic subsurface inspection device and method. The present application discloses an acousti... |
|
|
Invention
|
Encoder scale for an encoder system, encoder system, manufacturing method for an encoder system, ... |
|
|
Invention
|
Scanning probe microscopy system. Scanning probe microscopy system comprising an optical microsco... |
|
|
Invention
|
Method of and system for processing three-dimensional measurement data from a scanning probe micr... |
|
|
Invention
|
Multi-head afm for defect inspection and review. Method of inspecting and reviewing defects in su... |
|
|
Invention
|
Method of analyzing a probe tip deflection signal of a scanning probe microscopy system. The inve... |
|
2023
|
Invention
|
System and method for automatically loading and testing afm-probes. An apparatus (2) is disclosed... |
|
|
Invention
|
Method of and scanning probe microscopy system for measuring a topography of a side wall of a str... |
|
2022
|
Invention
|
Scanning probe microscopy system and method of operating such a system.
The present document rel... |
|
|
Invention
|
Atomic force microscope (afm) device and method of operating the same. Atomic Force Microscope (A... |
|
|
Invention
|
Scanning probe microscopy system and method of operating such a system. The present document rela... |
|
|
Invention
|
Active dither balancing of a motion stage for scanning probe microscopy.
The present disclosure ... |
|
|
Invention
|
Active dither balancing of a motion stage for scanning probe microscopy. The present disclosure c... |
|
|
Invention
|
Laser diode arrangement, method of operating a laser diode and scanning microscope device compris... |
|
|
Invention
|
Method of and system for refurbishing a probe for use in a scanning probe microscopy device, and ... |
|
|
Invention
|
System for performing atomic force microscopy, including a grid plate qualification tool.
An ato... |
|
|
Invention
|
System for performing atomic force microscopy, including a grid plate qualification tool. An atom... |
|
|
Invention
|
Method of calibrating in a scanning probe microscopy system an optical microscope, calibration st... |
|
|
Invention
|
Fiducial marker design, fiducial marker, scanning probe microscopy device and method of calibrati... |
|
|
Invention
|
Compact optical microscope, metrology device comprising the optical microscope and a wafer positi... |
|
|
Invention
|
Automated landing method of a scanning probe microscopy system and scanning probe microscopy syst... |
|
|
G/S
|
Machines for the production of semiconductors namely metrology and inspection applications for se... |
|
|
Invention
|
Positioning system and method.
A grid plate encoder based positioning system (1) for positioning... |
|
|
Invention
|
Positioning system and method. A grid plate encoder based positioning system (1) for positioning ... |
|
2021
|
Invention
|
Cassette for holding a probe.
Aspects of the present disclosure pertain to a probe cassette for ... |
|
|
Invention
|
Cassete for holding a probe. Aspects of the present disclosure pertain to a probe cassette for ho... |
|
|
Invention
|
Alignment system and method for aligning an object having an alignment mark. An alignment system ... |
|
|
Invention
|
Method of monitoring at least one of an overlay or an alignment between layers of a semiconductor... |
|
|
Invention
|
Arrangement for and method of determining cantilever deflection in a scanning probe microscopy sy... |
|
|
Invention
|
Method, system and parts for enabling navigation in a scanning probe microscopy system. The prese... |
|
|
Invention
|
A probe cassette and method for storing, transporting and handling one or more probe devices for ... |
|
|
Invention
|
A probe cassette for storing, transporting and handling one or more probe devices for a probe bas... |
|
|
Invention
|
Method of determining dimensions of features of a subsurface topography, scanning probe microscop... |
|
|
G/S
|
Machines for the production of semiconductors; Semiconductor wafer processing equipment. Semicond... |
|
2020
|
Invention
|
A method and system for performing characterization measurements on an elongated substrate. The i... |
|
|
Invention
|
A method and system for performing sub-surface measurements on a sample. A method and system for ... |
|
|
Invention
|
Method of and arrangement for mapping structural features on a surface of a sample by scanning pr... |
