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2018
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Invention
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Electron beam inspection apparatus stage positioning. An electron beam apparatus includes an elec... |
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Invention
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Methods of inspecting samples with multiple beams of charged particles. Disclosed herein is an ap... |
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Invention
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Systems and methods for charged particle flooding to enhance voltage contrast defect signal. Syst... |
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Invention
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Systems and methods for compensating dispersion of a beam separator in a multi-beam apparatus. Sy... |
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Invention
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An apparatus using multiple beams of charged particles. Disclosed herein is an apparatus comprisi... |
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Invention
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System for evacuating a chamber. Systems and methods are provided for evacuating a chamber (101).... |
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Invention
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Load lock system for charged particle beam imaging. A load lock system for charged particle beam ... |
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Invention
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Method and apparatus for charged particle detection. Systems and methods are provided for charged... |
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Invention
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Defect pattern grouping method and system. A defect pattern grouping method is disclosed. The def... |
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Invention
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Cascade defect inspection. A defect inspection system is disclosed. According to certain embodime... |
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Invention
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Defect displaying method. A defect displaying method is provided in the disclosure. The method co... |
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Invention
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Knowledge recommendation for defect review. A server for knowledge recommendation for defect revi... |
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2017
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Invention
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An apparatus using multiple charged particle beams. The present disclosure proposes an anti-rotat... |
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Invention
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Charged particle beam inspection of ungrounded samples. Disclosed herein is a method comprising :... |
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Invention
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System and method for determining and calibrating a position of a stage. System and method for dy... |
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Invention
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A vent valve system. Systems and methods for venting gas into a chamber 304 at an accelerated spe... |
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Invention
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System for dynamically compensating position errors of a sample. Systems and methods are provided... |
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Invention
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System for parallel data processing with multi-layer workload management. A data processing syste... |
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Invention
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Apparatus of plural charged-particle beams. A new multi-beam apparatus with a total FOV variable ... |
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2016
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Invention
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Apparatus of plural charged-particle beams. A secondary projection imaging system in a multi-beam... |
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Invention
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Apparatus of plural charged-particle beams. A multi-beam apparatus for observing a sample with hi... |
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2011
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Invention
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Apparatus of plural charged particle beams with multi-axis magnetic lens. An apparatus basically ... |
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2010
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Invention
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Thermal field emission cathode.
A thermal field emission cathode which is employed in an electro... |
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Invention
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Cluster e-beam lithography system.
A hybrid lithography system is disclosed to achieve high thro... |
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Invention
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A multi-axis magnetic lens. The present invention relates to a multi-axis magnetic lens for a cha... |
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2009
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Invention
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Method and machine for examining wafers.
Method and machine utilizes the real-time recipe to exa... |
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2004
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Invention
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Method and system for monitoring ic process.
A method and system for determining process uniform... |
