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2024
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Invention
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Fluid control valve, fluid control device, and material supply system.
A fluid control valve inc... |
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Invention
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Fluid control valve, fluid control device, and protection method for fluid control valve. Accordi... |
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Invention
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Computation device, pressure measurement device, computation method, and computation program. The... |
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Invention
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Fluid control valve and fluid control device.
A fluid control valve improves position stability ... |
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Invention
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Piezo element diagnosis device, piezo element diagnosis method, piezo element diagnosis program, ... |
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Invention
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Fluid control device, fluid control system, storage medium storing a program for fluid control de... |
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Invention
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Concentration control device, raw material vaporization system, concentration control method, and... |
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Invention
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Wafer temperature control device, wafer temperature control method and wafer temperature control ... |
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2023
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G/S
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Semiconductor manufacturing machines, and structural part and fittings therefor; machines for man... |
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G/S
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Semiconductor manufacturing machines, and part and fittings
therefor; machines for manufacturing... |
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Invention
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Vaporizer and liquid material vaporizing device.
A vaporizer includes a vaporization chamber in ... |
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G/S
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Hydrogen gas generators for use with measuring or testing
machines and instruments; hydrogen gen... |
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Invention
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Liquid material vaporization device and liquid material vaporization system. A liquid material va... |
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G/S
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Machines for manufacturing semiconductor, solar cell, light
emitting diode, display, liquid crys... |
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Invention
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Fluid control valve and fluid control device. The present invention can be used in a semiconducto... |
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Invention
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Wafer temperature control device, wafer temperature control method, and wafer temperature control... |
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Invention
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Liquid material vaporizer and liquid material vaporization method. This liquid material vaporizer... |
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Invention
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Gas analysis device, fluid control system, gas analysis program, and gas analysis method.
The pr... |
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Invention
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Fluid supply mechanism and fluid supply method. Provided is a fluid supply mechanism 100 that rep... |
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Invention
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Fluid resistance element, fluid controller, and method of manufacturing fluid resistance element.... |
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Invention
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Fluid control valve and fluid control apparatus.
The present invention enables fluid control wit... |
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Invention
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Polymerization apparatus.
A polymerization apparatus for performing anionic polymerization inclu... |
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Invention
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Analysis device, analysis method, and analysis program.
The present invention is aimed to perfor... |
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Invention
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Fluid control valve, fluid control device, and method for manufacturing orifice. The present inve... |
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Invention
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Fluid control valve, fluid control device, and fluid control valve manufacturing method. The pres... |
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Invention
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Valve orifice insert. A valve orifice insert has a stepped-shaped wall including a first tubular ... |
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Invention
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Concentration measurement device, concentration measurement method, starting material vaporizatio... |
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Invention
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Gas analysis apparatus and gas analysis method.
Provided are a gas cell into which a gas is intr... |
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2022
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Invention
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Fluid control device, fluid control method, and fluid control program.
A fluid control device in... |
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Invention
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Optical measurement cell, optical analyzer, window forming member, and method of manufacturing op... |
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Invention
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Flow restrictor for fluid flow device. A flow restrictor is provided, comprising a first sheet in... |
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Invention
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Fluid control device, vaporization system, and piezo actuator.
The present invention is one whic... |
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Invention
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Fluid control valve and fluid control apparatus. The present invention is intended to improve the... |
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Invention
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Flow rate controller, flow rate control method, and program recording medium for flow rate contro... |
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Invention
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Vaporization device, vaporization device control method, storage medium for vaporization device p... |
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Invention
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Flow rate control valve, method for producing flow rate control valve, and flow rate control devi... |
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Invention
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Fluid control device, fluid control system and fluid control method.
A fluid control device incl... |
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Invention
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Liquid material vaporizing device.
The present invention is a liquid material vaporizing device ... |
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Invention
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Hybrid flow ratio controller system with channels for flow ratio control, flow rate or pressure c... |
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Invention
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Fluid control device and gas supply system. In order to make it possible to keep a device compact... |
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Invention
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Wafer temperature control device, control method for wafer temperature control device, and progra... |
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Invention
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Valve control device, valve control method, valve control program, and fluid control device. sets... |
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Invention
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Gas analysis device and laser light transmission mechanism.
In order to provide a more practical... |
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Invention
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Fluid control device, fluid control system, fluid control device program, and fluid control metho... |
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Invention
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Flow measurement system and method.
A flow measurement system is provided, which is configured t... |
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Invention
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Gas analysis device, fluid control system, program for gas analysis, and gas analysis method.
A ... |
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Invention
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Flow restrictor for fluid flow device.
A flow restrictor is provided, comprising a first sheet i... |
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2021
|
Invention
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Gas analyzing device.
A gas analyzing device that irradiates a gas with a laser beam and detects... |
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Invention
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Gas analysis device and gas analysis method.
The present invention is a gas analysis device that... |
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G/S
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Liquid flow meters |
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G/S
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Electronic digital liquid flow meters for manufacturing semiconductor devices, solar cells, light... |
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Invention
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Quadrupole mass spectrometer and residual gas analysis method.
The present invention is aimed to... |
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Invention
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Electrostatic chuck device, pressure calculation method and program.
An electrostatic chuck devi... |
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G/S
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Machines and parts for manufacturing semiconductor, solar
cell, light emitting diode, display, l... |
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G/S
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Machines and structural parts therefor for manufacturing semiconductors, solar cells, light emitt... |
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Invention
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Vaporization system.
A vaporization system includes: a vaporization device that is configured to... |
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2020
|
Invention
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Thermal flow meter, flow rate control device, thermal flow rate measurement method, and program f... |
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2019
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G/S
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Machines and parts for manufacturing semiconductor, solar cell, light emitting diode, display, li... |
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2018
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G/S
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Machines and parts of machines for manufacturing semiconductor, solar cell, light emitting diode,... |
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G/S
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Machines and structural parts therefor for manufacturing semiconductors, solar cells, light-emitt... |
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G/S
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Test and measurement machines and instruments, namely, technical measuring, testing and checking ... |
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2017
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G/S
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Machines and parts therefor for manufacturing semiconductors, solar cells, light-emitting diodes,... |
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2013
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G/S
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[ Machines and machine parts in the nature of filters, purifiers, vaporizers, liquid supply appar... |
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2011
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G/S
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Fluid flow controllers (parts of machines for manufacturing semiconductor, solar cell, light emit... |
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2007
|
G/S
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Mass flow controllers for controlling fluid, mass flow
controllers for controlling gas flow, mas... |
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1986
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G/S
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GAS FLOWMETERS |
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G/S
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GAS FLOW CONTROLLERS |
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G/S
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ELECTRONICALLY CONTROLLED FLUID FLOW APPARATUS, NAMELY, GAS FLOW CONTROLLERS, DIGITAL GAS FLOW ME... |
