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2020
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Invention
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Resonant filter using mm wave cavity. Systems and methods for forming a mm wave resonant filter i... |
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Invention
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Mems magnetic switch with permeable features.
Systems and methods for forming a magnetostatic ME... |
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Invention
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Microfabricated notch filter. A microfabricated RF filter uses a resonant cavity weakly coupled t... |
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Invention
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Subterahertz microfabricated spectrometer. A microfabricated spectrometer uses at least one filte... |
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2019
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Invention
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Contact surface for mems device.
Systems and methods for forming an electrostatic MEMS switch th... |
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Invention
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Low cost wafer bonding method.
The invention is directed to an inexpensive method for bonding tw... |
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Invention
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Shielded dual substrate mems plate switch and method of manufacture.
Systems and methods for for... |
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Invention
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Method for etching shapes into silicon.
The method described here uses gray scale lithography to... |
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Invention
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Microfabricated device with piezoelectric substrate and method of manufacture.
Systems and metho... |
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2018
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Invention
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Scanning optical beam source.
We describe here a scanning optical beam that is comprised of no m... |
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Invention
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Gas sensor using vcsel.
Systems and methods for forming a compact gas sensor include using a lit... |
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Invention
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Mems dual substrate switch with magnetic actuation.
Systems and methods for forming a magnetosta... |
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Invention
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Microfabricated optical apparatus with flexible electrical connector.
A microfabricated optical ... |
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2017
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Invention
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Bondline for mm-wave applications.
We describe here a method that employs through substrate vias... |
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Invention
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Rf interconnect.
We describe below a structure and process that uses through-silicon-vias and wa... |
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Invention
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Microfabricated fluid pump.
A microfabricated fluid pump is formed in a multilayer substrate by ... |
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Invention
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Method for forming through substrate vias in a trench.
A device and method for forming through s... |
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Invention
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Mems device with offset electrode.
Systems and methods for forming an electrostatic MEMS switch ... |
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Invention
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Method for making vias using a doped substrate. Described herein is a method and structure for fa... |
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Invention
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Through substrate vias using solder bumps.
A through substrate via is formed by disposing a quan... |
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2016
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Invention
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Microfabricated self-sensing actuator.
Described herein is a method and structure for fabricatin... |
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Invention
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Microfabricated optical apparatus with integrated turning surface.
A microfabricated optical app... |
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Invention
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Microfabricated optical apparatus.
A microfabricated optical apparatus that includes a light sou... |
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Invention
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Mems reed switch device.
A MEMS device, having two flexible, permeable members which are manufac... |
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Invention
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Device with separation limiting standoff.
An MEMS device, having two substantially parallel surf... |
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Invention
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Thermocompression bonding with raised feature. A method for bonding two substrates is described, ... |
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Invention
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Thermocompression bonding with raised feature.
A method for bonding two substrates is described,... |
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Invention
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Etching technique for microfabrication substrates. A method for creating small features in an Al/... |
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2015
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Invention
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Microfabricated optical apparatus. A microfabricated optical apparatus that includes a light sour... |
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Invention
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Method for forming through substrate vias. A method for forming through silicon vias (TSVs) in a ... |
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Invention
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Solder bump sealing method and device. A method for forming a cavity in a microfabricated structu... |
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Invention
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Wafer level hermetic bond using metal alloy with raised feature and wetting layer. Systems and me... |
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Invention
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Method for forming through substrate vias with tethers. A method for forming through silicon vias... |
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2014
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Invention
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Method for forming through substrate vias.
A method for forming through silicon vias (TSVs) in a... |
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Invention
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Forming through wafer vias in glass. A method for forming through substrate vias (TSVs) in a non-... |
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Invention
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Microfabricated magnetic field transducer with flux guide. A microfabricated magnetic field trans... |
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2013
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Invention
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Method for forming through wafer vias.
A method for forming through substrate vias (TSVs) in a n... |
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2012
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Invention
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Cartridge for mems particle sorting system. A disposable cartridge is described which is compatib... |
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Invention
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Mems particle sorting actuator and method of manufacture. A MEMS-based system and a method are de... |
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Invention
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Wafer bonding chamber with dissimilar wafer temperatures.
A wafer bonding chamber is disclosed, ... |
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2011
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Invention
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Inductive getter activation for high vacuum packaging. An approach to activating a getter within ... |
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Invention
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Microfabicated electromagnetic actuator with push-pull motion. A micromechanical electromagnetic ... |
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Invention
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In-plane electromagnetic mems pump. A micromechanical pumping system is formed on a substrate sur... |
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2010
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Invention
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Wafer level hermetic bond using metal alloy with keeper layer. Systems and methods for forming an... |
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2009
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Invention
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Removable/disposable apparatus for mems particle sorting device. A micromechanical particle sorti... |
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Invention
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Mems plate switch and method of manufacture. Systems and methods for forming an electrostatic MEM... |
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2008
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Invention
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Removable/disposable apparatus for mems particle sorting device.
A micromechanical particle sort... |
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Invention
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Deposition/bonding chamber for encapsulated microdevices and method of use.
A method for deposit... |
