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2024
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Invention
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Method for processing substrates, in particular wafers, masks or flat panel displays, with a semi... |
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2023
|
Invention
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Vibration isolator having a coil spring and an actuator. The invention generally relates to an ac... |
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Invention
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Compensation element, method and system for the active damping of a medium. The invention relates... |
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2022
|
Invention
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Apparatus and method for analysing a sample by means of electrically charged particles.
The pres... |
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Invention
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Apparatus and method for analysing a sample by means of electrically charged particles. ZZZ is pr... |
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2021
|
Invention
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Device and method for imaging an object in at least two views.
The present disclosure relates to... |
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Invention
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Device and method for imaging an object in at least two views. The invention relates to a device ... |
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2020
|
Invention
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Stationary vibration isolation system and control method thereof. A stationary vibration isolatio... |
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Invention
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Vibration isolation system with one or more magnetic actuators. An active vibration isolation sys... |
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Invention
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Vibration isolation system having a magnetic actuator, and magnetic actuator. The invention relat... |
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2017
|
Invention
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Isolator for a stationary vibration isolation system. An isolator for a stationary vibration isol... |
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Invention
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Pneumatic actuator and method for operating an active vibration isolation system. A pneumatic act... |
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Invention
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Maintenance apparatus. A maintenance apparatus, in particular for lifting and moving components o... |
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2016
|
Invention
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Vibration isolator with a vertically effective pneumatic spring. A vibration isolator with a pneu... |
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Invention
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End effector of a wafer handling system, and wafer handling system. The invention relates to an e... |
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Invention
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Service cart.
The invention relates to a maintenance apparatus for a clean room or for systems i... |
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Invention
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Service device for a plant module. The invention relates to a service module, by which a conditio... |
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Invention
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Service cart. The invention relates to a service cart for a clean room or for systems in the clea... |
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2015
|
Invention
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Vibration isolator with pneumatic spring. The invention relates to a vibration isolator with a pn... |
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2014
|
Invention
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Vibration isolation system with support divided into sections, and method for controlling same. A... |
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Invention
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Vibration isolator with coil spring. The invention relates to a vibration isolator that includes ... |
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Invention
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Stationary vibration isolation system and method for controlling a vibration isolation system. Th... |
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2013
|
Invention
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Active absorber for low-frequency vibrating structures. An active vibration absorber is provided ... |
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2012
|
Invention
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Integrable magnetic field compensation for use in scanning and transmission electron microscopes.... |
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2010
|
Invention
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Magnetic actor and a method for its installation. The invention relates to a magnetic actor in wh... |
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Invention
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Active vibration isolation system. The present invention relates to a method for regulating an ac... |
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Invention
|
Compensation of electromagnetic interfering fields. A system for compensating electromagnetic int... |
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Invention
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Magnetic field compensation. A device for compensating magnetic fields, comprising a single magne... |
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Invention
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Combined motion sensor for use in feedback control systems for vibration isolation. The present i... |
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2009
|
Invention
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Active vibration isolation system. The invention relates to an active vibration isolation system ... |
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2008
|
Invention
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Vibration isolator for use in a vacuum. The invention relates to a vibration isolator for use in ... |
|
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Invention
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Method and device for frequency-response correction in vibration isolation systems. To achieve im... |
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Invention
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Method for adapting a vibration isolation system. The invention relates to a method for adapting ... |
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|
Invention
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Air bearing with consideration of high-frequency resonances. A vertically and horizontally effect... |
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Invention
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Control system for active vibration isolation of a supported payload. The invention relates to a ... |
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2007
|
Invention
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Combined motion control system. An examination and processing machine, in particular a lithograph... |
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|
Invention
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Environmental noise shielding apparatus. The invention relates to an environmental noise shieldin... |
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Invention
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Active oscillation isolation system by means of a hysteresis-free pneumatic bearing. Method and a... |
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Invention
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Magnetic filed compensation system with increased bandwidth. The invention relates to a device fo... |
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|
Invention
|
Active vibration isolation system with improved sensor/actuator matching.
The invention relates ... |
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Invention
|
Active vibration isolation system which is more effective against seismic vibration. The inventio... |
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Invention
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Active vibration isolation system with a combined position actuator. The invention relates to a v... |
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Invention
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Method and apparatus for regulating vibration isolation systems. The invention relates to the con... |
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2006
|
Invention
|
Control of an active vibration isolation system. Control of an active vibration isolation system ... |
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Invention
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Supporting device for supporting vibration sensitive components. The invention is in particular a... |
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Invention
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Device for monitoring the relative positions of several devices. An apparatus is presented for mo... |
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Invention
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Device for monitoring the relative position of a plurality of installations. The invention relate... |
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2005
|
Invention
|
Apparatus for handling of a disklike member, especially for handling of a wafer. There is provide... |
