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2022
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Invention
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Plasma-resistant glass, inner chamber-component for semiconductor manufacturing process, and manu... |
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Invention
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Plasma-resistant glass, chamber interior parts for semiconductor manufacturing process, and metho... |
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2021
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Invention
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Plasma powder deposition apparatus and deposition method using same. The present invention relate... |
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Invention
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Plasma-resistant glass and manufacturing method therefor. 22322; and a manufacturing method there... |
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Invention
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Plasma-resistant glass, and method for manufacturing same. 2233, 5-30 mol% of CaO, and 0.01-10 mo... |
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2020
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Invention
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Plasma-resistant glass and manufacturing method thereof.
The present invention relates to plasma... |
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Invention
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Plasma-resistant glass and manufacturing method thereof. 2232HH is 2.0 or higher, and a plasma-re... |
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2019
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Invention
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Forming method of yttrium oxide fluoride coating film and yttrium oxide fluoride coating film pre... |
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2018
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Invention
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Coating film forming method and coating film formed thereby. An embodiment of the present inventi... |
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Invention
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A method for forming yttrium oxide fluoride coating film and yttrium oxide fluoride coating film ... |
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Invention
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Glass coating structure and method for forming same. The present invention relates to a glass coa... |
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2017
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Invention
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Method for forming transparent fluorine film, and transparent fluorine film formed thereby.
One ... |
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Invention
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Composite structure, and method for forming same. The present invention relates to a composite st... |
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Invention
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Method for forming transparent fluorine film, and transparent fluorine film formed thereby. One e... |
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2015
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Invention
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Power transmission shaft.
A power transmission shaft which alleviates phenomenon in which stress... |
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Invention
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Power transmission shaft. Disclosed is a power transmission shaft which, by alleviating the pheno... |
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Invention
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Power transmission shaft.
A power transmission shaft performs a fuse-like function when excessiv... |
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Invention
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Power transmission shaft. Disclosed is a power transmission shaft capable of performing a fuse-li... |
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2014
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Invention
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Method for forming ceramic coating having improved plasma resistance and ceramic coating formed t... |
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Invention
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Method for forming coating having composite coating particle size and coating formed thereby. The... |
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Invention
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Method for forming coating having composite coating particle size and coating formed thereby. One... |
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2011
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Invention
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Cleaning apparatus. The present invention relates to a cleaning apparatus which can remove foreig... |
