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2024
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Invention
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Gate valve, gate valve control mechanism and control method therefor, and semiconductor manufactu... |
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Invention
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High-temperature diaphragm valve. Provided is a high-temperature diaphragm valve capable of stabl... |
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2023
|
Invention
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Gate valve, substrate processing apparatus, and substrate processing method.
A gate valve, a sub... |
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2022
|
Invention
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Valve for semiconductor manufacturing device. A valve for semiconductor manufacturing device is p... |
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2021
|
Invention
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Diaphragm valve and method for exchanging valve seat thereof. A diaphragm valve includes an outer... |
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Invention
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Manually-operated diaphragm valve. A manually-operated diaphragm valve in which the open/close ra... |
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Invention
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Diaphragm valve and method for exchanging valve seat thereof. Provided is a diaphragm valve for w... |
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Invention
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Manually-operated diaphragm valve. Provided is a manually-operated diaphragm valve that can set t... |
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2020
|
Invention
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Set of jigs for assembling a valve, and a diaphragm valve assembled with the same. By preventing ... |
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Invention
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Vacuum bellows hot valve. A vacuum bellows hot valve with durability and drivability not impaired... |
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2019
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Invention
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Vacuum gate valve. A compact vacuum gate valve capable of reducing a kink and sliding between a s... |
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2018
|
Invention
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Lock device for pipe coupling and valve coupling part. Provided is a lock device that is suitable... |
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G/S
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Metal valves not including machine elements; metal junctions for pipes; anti-loosing devices for ... |
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|
Invention
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Fluid control valve and fluid control valve assembling method. To provide a fluid control valve f... |
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Invention
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Diaphragm valve assembling method, diaphragm valve assembly structure, and diaphragm valve. A dia... |
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|
Invention
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Attachment structure for actuator-specific solenoid valve and actuator-equipped valve. An attachm... |
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Invention
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One-touch lock valve and raw material container. A one-touch valve including a valve main body (1... |
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Invention
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One-touch lock valve and raw material container. The present invention can be operated with excel... |
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Invention
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Metal diaphragm valve. A metal diaphragm valve includes a body with a valve seat provided to a va... |
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G/S
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Metal valves not being parts of machines |
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2017
|
Invention
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Diaphragm valve. A diaphragm valve includes a valve seat disposed in a valve chamber in a body, a... |
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Invention
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Valve actuator and diaphragm valve including the same. Provided is a valve actuator in a simple s... |
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Invention
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Diaphragm valve. Provided is a diaphragm valve which is capable of exhibiting a high flow and a s... |
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Invention
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Valve actuator, and diaphragm valve provided with same. The purpose of the present invention is t... |
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Invention
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Vacuum gate valve. A vacuum gate valve includes a valve body open/close drive body provided betwe... |
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Invention
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Diaphragm valve and flow rate control device for semiconductor manufacturing apparatus. A diaphra... |
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Invention
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Diaphragm valve, and flow rate control device for semiconductor manufacturing equipment. Provided... |
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2016
|
Invention
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Valve with locking mechanism, and integrated valve. A valve with a locking mechanism and an integ... |
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Invention
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Block valve and block valve for raw material container. A block valve and a block valve for a raw... |
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Invention
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Block valve and block valve for raw material container. Provided are a block valve and a block va... |
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2014
|
Invention
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High-pressure automatic diaphragm valve. Provided is a high-pressure automatic NC diaphragm valv... |
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2013
|
Invention
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Treatment device and exhaust switching device therefor, and exhaust switching unit and switching ... |
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Invention
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Butterfly pressure control valve. A butterfly pressure control valve including a valve opening/cl... |
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Invention
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Treatment device, exhaust switching device therefor, exhaust switching unit and switching valve b... |
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Invention
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Butterfly pressure control valve. Provided is a butterfly pressure control valve with a simple st... |
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2012
|
Invention
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Substrate processing apparatus and solid raw material replenishing method.
Disclosed is a substr... |
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Invention
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Resin end-face butt joint, method for welding the joints, and piping member. A resin end-face but... |
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Invention
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Resin end-face butt joint, method for welding this joint, and piping member. The present inventio... |
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2008
|
Invention
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Pressure control butterfly valve with opening/closing mechanism. A pressure control butterfly val... |
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2006
|
Invention
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Slide valve. A slide valve is provided, in which the conductance in the minimum region is control... |
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Invention
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Slide valve. A slide valve in which stabilized control can be ensured by making it possible to co... |
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2005
|
Invention
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Diaphragm valve. A diaphragm valve for opening or closing itself through making direct contact of... |
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|
Invention
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Integrated gas control device.
An integrated gas control device comprising a flow path plate pro... |
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2004
|
Invention
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Composite valve for gas supply system. An automatic-and-manual operation composite valve includes... |
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Invention
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Liquid supply method and apparatus. There is provided a liquid supply method in which, when prepa... |
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|
Invention
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Method of liquid feeding and apparatus therefor. A method capable of determining with high precis... |
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Invention
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Non-rubbing gate valve for semiconductor fabrication apparatus. A gate valve includes a valve mai... |
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Invention
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Block body for integrated valve unit |
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2002
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G/S
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Semiconductor manufacturing machines and parts therefor namely heaters, pipes. |
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G/S
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Manually-operated metal valves, metal couplings for gas or liquid piping, metal pipe couplings fo... |
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2001
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G/S
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Valves of metal (other than parts of machines); metal
junctions for pipes, iron (unwrought or se... |
|
|
Invention
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Integrated gas control device. An integrated gas control device has an elongated base having a pa... |
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2000
|
Invention
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Valve for controlling flow rate of gas. A valve has a valve body having a passage including a hol... |
