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2024
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Invention
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Microelectromechanical devices for higher order passive temperature compensation and methods of d... |
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Invention
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Dual-output microelectromechanical resonator and method of manufacture and operation thereof.
An... |
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2023
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Invention
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Tuning the frequency-temperature response of mems resonators using composite eigenmodes. A MEMS r... |
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Invention
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Methods and devices for microelectromechanical resonators. A MEMS device may include: (i) a lower... |
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Invention
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Reference clock frequency correction by mixing with digitally-controlled low-frequency compensati... |
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Invention
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Ultra-high frequency mems resonators with first and second order temperature-induced frequency dr... |
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Invention
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Dual-output microelectromechanical resonator and method of manufacture and operation thereof. An ... |
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2022
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Invention
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Methods and devices for microelectromechanical resonators. MEMS based sensors, particularly capac... |
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Invention
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Dual-output microelectromechanical resonator and method of manufacture and operation thereof. A d... |
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2019
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Invention
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Dual-output microelectromechanical resonator and method of manufacture and operation thereof. The... |
