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2025
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Invention
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Metrology and process control for semiconductor manufacturing.
A semiconductor metrology system ... |
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2024
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Invention
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Vertically-resolved metrology with asymmetry-sensitive measurement. A system and methods for OCD ... |
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Invention
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Accurate raman spectroscopy.
An optical measurement system, which include an illumination path t... |
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Invention
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Accurate raman spectroscopy.
An optical measurement system, the optical measurement system compr... |
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Invention
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Raman spectroscopy based measurements in patterned structures.
A method for use in measuring one... |
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Invention
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Motor thermal management by field-oriented control currents. Apparatus and methods are provided f... |
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Invention
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Multi purpose channel for optical metrology. An integrated metrology system that includes a metro... |
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Invention
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Method and system for optimizing optical inspection of patterned structures.
A system for use in... |
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Invention
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Detecting outliers and anomalies for ocd metrology machine learning.
A system and methods for OC... |
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Invention
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An interferometry technique. An interferometry system for evaluating a sample having a region of ... |
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Invention
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Broadband interferometry. A broadband interferometry system that includes (i) an interferometer t... |
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Invention
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High throughput optical metrology. There is provided an integrated system that includes (i) an in... |
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Invention
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Optics for use in generating an x-ray beam. A system for perturbations based evaluation of a prop... |
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Invention
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Configurable illumination source for optical metrology and related methods. The application perta... |
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Invention
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Optical technique for material characterization. A polarized Raman Spectrometric system for defin... |
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Invention
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Optical phase measurement method and system.
A measurement system for use in measuring parameter... |
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Invention
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Raman spectroscopy based measurement system.
A method and system are presented for use in measur... |
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Invention
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Full wafer metrology. A method for operating an integrated evaluation system, the method includes... |
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Invention
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Method and system for optical characterization of patterned samples.
A method and system are pre... |
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Invention
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Optical metrology system and method. A measurement system for use in optical metrology, the measu... |
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Invention
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Accurate raman spectroscopy. A method, a system, and a non-transitory computer readable medium fo... |
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2023
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Invention
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Secondary ion mass spectrometry analysis. A SIMS-based analysis system, that includes (a) a memor... |
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Invention
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Machine and deep learning methods for spectra-based metrology and process control. A system and m... |
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Invention
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Coherent spectroscopy for tsv. Imeasuredmeasured Imeasuredmeasured measured , to solve for non-z-... |
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Invention
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Metrology and process control for semiconductor manufacturing. A semiconductor metrology system i... |
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Invention
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Self-supervised representation learning for interpretation of ocd data.
A system and methods for... |
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Invention
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X-ray based measurements in patterned structure. A method and system are presented for use in X-r... |
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Invention
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Evaluation of abnormalities of a sample. A method for evaluating a sample, the method includes pe... |
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Invention
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Optical critical dimensions (ocd) metrology for thick stacks. A method for evaluating a thick tra... |
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Invention
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Full-wafer metrology up-sampling.
A system and methods for OCD metrology are provided including ... |
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Invention
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Full-wafer metrology up-sampling. A system and methods for OCD metrology are provided including r... |
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Invention
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High frequency modulation chopper.
A system for evaluating a sample, the system includes (i) a c... |
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Invention
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High frequency modulation chopper. A system for evaluating a sample, the system includes (i) a ch... |
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Invention
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Combined photothermal and ocd for semi-opaque structures.
A metrology system that may include (i... |
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Invention
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Combined photothermal and ocd for semi-opaque structures. A metrology system that may include (i)... |
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Invention
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System and method for determining parameters of patterned structures from optical data.
A contro... |
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2022
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Invention
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High throughput optical measurement system. There is provided an optical measurement system that ... |
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Invention
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Moving apparatus along multiple axes. Positioning apparatus by determining multiple candidate pat... |
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Invention
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Systems and methods for optical measuring of properties of samples using polarized optical beams.... |
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Invention
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Device and method for holding a workpiece. A workpiece holding device and method are disclosed. T... |
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Invention
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Image-based autofocus for metrology. Apparatus and methods are provided for autofocusing of a met... |
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Invention
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System and method for library construction and use in measurements on patterned structures. A com... |
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Invention
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Metrology technique for semiconductor devices.
A method for semiconductor device metrology. The ... |
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Invention
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Time-domain optical metrology and inspection of semiconductor devices.
A semiconductor device me... |
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2021
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Invention
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Evaluating x-ray signals from a perturbed object.
A method, a system, and a non-transitory compu... |
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Invention
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Systems and methods for optical metrology. Systems and methods for metrology of workpieces such a... |
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2020
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G/S
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Optical monitoring, measurement and inspection equipment for measuring dimensional and/or materia... |
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2018
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G/S
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Monitoring, measurement and inspection equipment for measuring physical dimensions of samples, th... |
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G/S
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Monitoring, measurement and inspection equipment and systems
for process control of semiconducto... |
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2005
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G/S
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Optical test equipment, namely, monitoring, measuring and inspection instruments and computer ope... |
