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2016
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Invention
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Apparatus for measuring impurities on wafer and method of measuring impurities on wafer. Provided... |
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Invention
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Wire sawing apparatus. A wire sawing apparatus of one embodiment comprises: a wire for cutting an... |
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2015
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Invention
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Control system and control method for diameter of single crystal ingot. An embodiment of the pres... |
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Invention
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Method of preparing for re-operation of reactor for growing epitaxial wafer.
Provided is a re-op... |
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Invention
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Method for preparing restart of reactor for epitaxial growth on wafer.
Provided is a process of ... |
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Invention
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Method for preparing restart of reactor for epitaxial growth on wafer. An embodiment comprises: a... |
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Invention
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Method of preparing for re-operation of reactor for growing epitaxial wafer. As a preparation sta... |
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Invention
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Wafer cleaning device. The present invention relates to a wafer cleaning device which can adjust ... |
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Invention
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Monocrystal growth system and method capable of controlling shape of ingot interface. The present... |
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Invention
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Wafer manufacturing apparatus and method. An embodiment provides a wafer manufacturing apparatus ... |
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Invention
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Apparatus and method for growing silicon single crystal ingot.
An embodiment provides a method f... |
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Invention
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Device and method for growing silicon monocrystal ingot. An embodiment provides a method for grow... |
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Invention
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Epitaxial wafer growing apparatus. Embodiments relate to an apparatus for manufacturing an epitax... |
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Invention
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Seed chuck and ingot growing apparatus including same.
The present invention relates to a seed c... |
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Invention
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Seed chuck and ingot growing apparatus including same. The present invention relates to a seed ch... |
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Invention
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Defect measuring device for wafers. The present invention relates to a defect measuring device fo... |
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Invention
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Wafer loading apparatus of wafer polishing equipment and method for adjusting wafer loading posit... |
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Invention
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Wafer polishing apparatus. A wafer polishing apparatus includes a lower surface plate, an upper s... |
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Invention
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Method for preparing silicon single crystal ingot, and silicon single crystal ingot prepared by p... |
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Invention
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Silicon single crystal growing apparatus and silicon single crystal growing method using same. An... |
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Invention
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Wafer polishing apparatus. Disclosed is a wafer polishing apparatus including a base, a lower sur... |
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Invention
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Wafer transfer device. An embodiment comprises: a guide moving in the vertical direction or the h... |
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Invention
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Wafer polishing apparatus and wafer polishing method using same. An embodiment comprises: a lower... |
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2014
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Invention
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Slurry supply device and polishing apparatus including the same. Disclosed is a slurry supply dev... |
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Invention
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Single crystal growing apparatus. An embodiment comprises: a chamber; a crucible provided in the ... |
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Invention
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Heat shield body and silicon monocrystral ingot manufacturing device comprising same.
An embodim... |
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Invention
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Heat shield body and silicon monocrystal ingot manufacturing device comprising same. An embodimen... |
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Invention
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Epitaxial wafer growth apparatus.
An epitaxial wafer growth apparatus for growing an epitaxial l... |
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Invention
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Epitaxial wafer growth apparatus. The present invention relates to an epitaxial wafer growth appa... |
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Invention
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Upper heat shielding body, ingot growing apparatus having the same and ingot growing method using... |
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Invention
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Method of measuring depth of damage of wafer. The method of an embodiment includes the steps of: ... |
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Invention
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Crucible and ingot growing device comprising same.
Provided is an ingot growing apparatus. The i... |
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Invention
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Crucible and ingot growing device comprising same. An ingot growing device according to the prese... |
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Invention
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Cooling rate control apparatus and ingot growing apparatus including same. The present invention ... |
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Invention
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View port for observing ingot growth process and ingot growth apparatus including same. A view po... |
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Invention
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Method and apparatus for analyzing shape of wafer. A method for analyzing the shape of a wafer ac... |
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Invention
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Epitaxial wafer and method for manufacturing wafer for epitaxial. An epitaxial wafer according to... |
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Invention
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Wafer grinding device. An embodiment of the present invention comprises: a chuck table adsorbing ... |
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Invention
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Silicon single crystal growing device and method of growing the same. An apparatus for growing a ... |
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Invention
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Silicon single crystal ingot and wafer for semiconductor.
A silicon single crystal ingot and a w... |
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Invention
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Plate and dual side wafer grinding device including same. An embodiment of the present invention ... |
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Invention
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Semiconductor substrate. Provided is a semiconductor substrate including a seed layer disposed on... |
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2013
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Invention
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Single-crystal growth apparatus. Disclosed is a single-crystal growth apparatus including a chamb... |
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Invention
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Susceptor for epitaxial growing and method for epitaxial growing.
The present disclosure relates... |
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Invention
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Wafer polishing apparatus and method. Disclosed is a wafer processing apparatus. The wafer proces... |
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Invention
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Device for growing monocrystalline silicon and method for manufacturing the same.
One embodiment... |
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Invention
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Single crystal silicon ingot and wafer, and apparatus and method for growing said ingot.
The sin... |
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2012
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Invention
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Wire guide, wire saw apparatus including the same, and method for slicing ingot using the same. D... |
