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2024
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Invention
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Blank mask and photomask using the same.
A blank mask including a transparent substrate, a phase... |
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Invention
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Composition for semiconductor process, method for preparing composition for semiconductor process... |
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Invention
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Polishing composition for semiconductor process, and method for polishing substrate by using same... |
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Invention
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Polishing composition for semiconductor process and substrate polishing method using same. A poli... |
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Invention
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Blank mask and method of fabricating the same.
A method of fabricating a blank mask, the method ... |
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Invention
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Blank mask and method of fabricating the same.
A method of fabricating a blank mask. The method ... |
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Invention
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Polishing pad with adjusted content of chlorine and process for preparing semiconductor device us... |
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Invention
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Polishing pad and preparing method of semiconductor device.
The present invention provides a pol... |
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Invention
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Polishing pad and preparation method thereof.
The embodiment relates to a polishing pad for use ... |
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Invention
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Polishing pad, pyrolysis oil obtained therefrom, and process for preparing the same.
The embodim... |
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Invention
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Apparatus for fabricating blank mask and method of fabricating the same.
Disclosed is an apparat... |
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Invention
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Polishing composition for semiconductor process and method for polishing a substrate using the sa... |
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Invention
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Polishing composition for semiconductor processing and method of polishing a substrate.
A compos... |
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2023
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Invention
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Polishing pad and method of monitoring a polishing process using the same.
The embodiment relate... |
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Invention
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Blank mask and photomask using the same.
A blank mask includes a light transmissive substrate an... |
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Invention
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Method for manufacturing a polishing sheet and a polishing pad.
The embodiments provide a proces... |
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Invention
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Blank mask and photomask using the same.
A blank mask includes a light transmissive substrate, a... |
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Invention
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Composition for semiconductor processing and method of fabricating semiconductor device using the... |
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Invention
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Etching-resistant ceramic part and method for manufacturing same. Embodiments provide an etching-... |
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Invention
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Shadow mask and method of manufacturing blank mask using the same.
A shadow mask includes a mask... |
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Invention
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Conditioning device and method for controlling the conditioning device.
A conditioning device in... |
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Invention
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Polishing pad with improved wettability and method for preparing same.
The present invention dis... |
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Invention
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Composition for semiconductor processing and polishing method of semiconductor device using the s... |
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Invention
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Composition for semiconductor processing and manufacturing method of semiconductor device using t... |
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Invention
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Photomask for extreme ultraviolet.
An extreme ultraviolet photomask includes a conductive layer;... |
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Invention
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Composition for semiconductor process, method for preparing the same and method for preparing sem... |
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2022
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Invention
|
Blank mask and photomask using the same.
A blank mask includes a transparent substrate and a lig... |
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Invention
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Method and apparatus for forming a blank mask and a layer for a blank mask.
A method and apparat... |
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Invention
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Blank mask and photomask using the same.
A blank mask includes a light-transmitting substrate; a... |
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Invention
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Method of preparing laminate and laminate for optical use.
The method of preparing a laminate in... |
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Invention
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Laminate for blank mask and manufacturing method for the same.
A laminate for a blank mask inclu... |
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Invention
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Polishing pad and method for manufacturing semiconductor device using same.
Through a combinatio... |
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Invention
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Blank mask and photomask using the same.
The blank mask according to one embodiment of the prese... |
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Invention
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Method and apparatus for manufacturing a photomask from a blank mask.
A blank mask includes a tr... |
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Invention
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Polishing pad and preparing method of semiconductor device using the same.
The present disclosur... |
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Invention
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Blank mask and photomask using the same.
A blank mask including a transparent substrate and a li... |
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Invention
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Method of cleaning substrate for blank mask, substrate for blank mask, and blank mask including t... |
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Invention
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Polishing device and method for manufacturing semiconductor device.
Provided are a polishing dev... |
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Invention
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Polishing pad and method for manufacturing semiconductor device using same.
The present disclosu... |
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Invention
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Polishing pad and method for manufacturing semiconductor device using same.
Provided is a polish... |
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Invention
|
Blank mask and photomask using the same.
Disclosed is a blank mask including a transparent subst... |
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Invention
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Polishing pad and method for manufacturing semiconductor device using the same.
Provided are a p... |
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2021
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Invention
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Polishing composition for semiconductor processing,method for preparing polishing composition, an... |
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Invention
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Polishing composition for semiconductor processing polishing composition preparation method, and ... |
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Invention
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Polishing compostion for semiconductor process, manufacturing method of polishing composition and... |
