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2024
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Invention
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Heater block and substrate heat treatment apparatus including same. The present invention relates... |
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Invention
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Heater block and apparatus for heating substrate having the same.
The present disclosure relates... |
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Invention
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Power control device for temperature control, thermal processing system having the same, and temp... |
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Invention
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Deposition module and thin film deposition apparatus comprising same. The present invention relat... |
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2023
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Invention
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Heater block and substrate heating device including same. The present invention relates to a heat... |
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Invention
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Deposition device and deposition method. The present invention relates to a deposition device and... |
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Invention
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Exhaust wall liner for semiconductor manufacturing apparatus |
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Invention
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Chamber wall liner for a semiconductor manufacturing apparatus |
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2022
|
Invention
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Magnetic levitation rotation apparatus and substrate processing apparatus using same. The present... |
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Invention
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Magnetic levitation rotating apparatus and magnetic levitation rotating method. The present inven... |
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Invention
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Substrate processing apparatus and substrate processing method.
The present inventive concept re... |
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Invention
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Substrate processing apparatus and substrate processing method. The present invention relates to ... |
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Invention
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Laser machining suction device and laser machining apparatus comprising same. The present inventi... |
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2021
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Invention
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Apparatus for processing substrate and method for measuring temperature of substrate. Provided ar... |
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Invention
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Thin film manufacturing apparatus. The present disclosure relates to a thin film manufacturing ap... |
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Invention
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Apparatus and method for forming thin film.
Provided are an apparatus and method for forming a t... |
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Invention
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Apparatus and method for forming thin film. The present invention relates to an apparatus and met... |
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2020
|
Invention
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Edge ring and heat treatment apparatus having the same. Provided are an edge ring and a heat trea... |
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Invention
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Multi-beam processing method and multi-beam processing apparatus. The present invention relates t... |
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2018
|
Invention
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Substrate treatment method and substrate treatment apparatus. t0). |
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Invention
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Emergency stop apparatus and method. Provided are an emergency stop apparatus including a switch ... |
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Invention
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Gas spraying apparatus, substrate processing facility including the same, and method for processi... |
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2017
|
Invention
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Door apparatus and glove box.
Provided is a door apparatus that is installed on a chamber includ... |
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Invention
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Conductive adhesive film attaching device. Disclosed is a conductive adhesive film attaching devi... |
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Invention
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Laser bonding apparatus and laser bonding method. Disclosed is a laser bonding apparatus for alig... |
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Invention
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Laser bonding apparatus. An embodiment according to the present invention relates to a laser bond... |
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Invention
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Alignment inspection apparatus and alignment inspection method using same. According to one embod... |
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2016
|
Invention
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Method of manufacturing shadow mask using hybrid processing and shadow mask manufactured thereby.... |
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Invention
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Method for manufacturing shadow mask using hybrid processing method, and shadow mask manufactured... |
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Invention
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Device for feeding high-frequency power and substrate processing apparatus having the same.
The ... |
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Invention
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Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor devic... |
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Invention
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Heater block and substrate processing apparatus.
Present disclosure relates to a heater block in... |
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2015
|
Invention
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Apparatus for manufacturing shadow mask using laser patterning and method for manufacturing shado... |
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Invention
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3d patterning method using laser. The present invention is for forming a pattern made of a 3D str... |
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2014
|
Invention
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Apparatus and method for cleaning photomask. This invention relates to an apparatus and method fo... |
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Invention
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Apparatus and method of detecting temperature and apparatus for processing substrate. Disclosed a... |
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Invention
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Apparatus for calibrating pyrometer. Disclosed is a calibrating apparatus which is adapted to rem... |
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Invention
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Substrate support and substrate treating apparatus having the same. Provided are a substrate supp... |
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2013
|
Invention
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Apparatus for substrate treatment and method for operating the same. The present invention relate... |
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|
Invention
|
Heater block and a substrate treatment apparatus. The present invention relates to a heater block... |
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Invention
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Apparatus for substrate treatment and heating apparatus. The present invention relates to an appa... |
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Invention
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Heater block and heat treatment apparatus having the same. A heater block according to the presen... |
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2011
|
Invention
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Horizontal adjusting part and substrate joining apparatus including same. According to the presen... |
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Invention
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Imprint device and method for imprinting using same. The present invention relates to an imprint ... |
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2010
|
Invention
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Sputtering device having a dual chamber. The present invention relates to a sputtering device hav... |
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Invention
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Heater block for a rapid thermal processing apparatus in which a cooling water flow is divided in... |
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Invention
|
Heater block for a rapid thermal processing apparatus. The present invention relates to a heater ... |
