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2023
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Invention
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Process chamber with uv irradiance. A semiconductor processing apparatus includes a process chamb... |
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Invention
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Increasing adhesion of metal-organic interfaces by silane vapor treatment. A method of improving ... |
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Invention
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Apparatus and method for coating removal. A method of removing a coating from a substrate compris... |
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Invention
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Substrate handling device.
A substrate handling device may include a central hub configured to c... |
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2022
|
Invention
|
Coating removal apparatus and method.
A coating removal apparatus includes multiple pairs of rot... |
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Invention
|
Plate gas heater.
A heating unit includes a base plate and a cover plate. A passage extends thro... |
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Invention
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Method of using processing oven. A method of using a processing oven may include disposing at lea... |
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Invention
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Method of using processing oven. A method of using a solder reflow oven can include disposing at ... |
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Invention
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Method of using a processing oven. A method of using an oven includes supporting a substrate on a... |
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2021
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Invention
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Batch processing oven for magnetic anneal. A batch processing oven includes a processing chamber,... |
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G/S
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vapor deposition machines for use in manufacturing semiconductors, microelectromechanical systems... |
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Invention
|
Solder reflow oven for batch processing. A solder reflow oven may include a reflow chamber and a ... |
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Invention
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Processing oven. A solder reflow oven includes a processing chamber that defines an enclosure. Th... |
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G/S
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Semiconductor manufacturing machines |
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G/S
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Environment-friendly semiconductor manufacturing machines |
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G/S
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Machines for precision treatment of surfaces, namely, environment-friendly monolayer thin film co... |
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G/S
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Chemical vapor deposition equipment, namely, environment-friendly chemical vapor deposition appar... |
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Invention
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Method for the rapid processing of polymer layers in support of imidization processes and fan out... |
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Invention
|
Batch processing oven and operating methods. A batch processing oven comprising a processing cham... |
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G/S
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Semiconductor manufacturing machines; Cleaning machines, namely, machines for removing impurities... |
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G/S
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Curing machines for use in the manufacture of semiconductors, namely, vacuum curing machines for ... |
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G/S
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Chemical vapor deposition equipment, namely, chemical vapor deposition apparatus for use in research |
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2020
|
Invention
|
Plasma spreading apparatus and system.
A device and method of spreading plasma which allows for ... |
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Invention
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Batch processing oven and method. The present disclosure is directed to a compact vertical oven f... |
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2019
|
Invention
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Combination vacuum and over-pressure process chamber and methods related thereto. A process chamb... |
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Invention
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Plasma spreading apparatus and system, and method of spreading plasma in process ovens.
A device... |
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Invention
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Interchangeable edge rings for stabilizing wafer placement and system using same.
A device and m... |
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2018
|
Invention
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Plasma spreading apparatus and method of spreading plasma in process ovens. A device and method o... |
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2010
|
Invention
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Apparatus for manufacture of solar cells. The present invention relates to equipment used to manu... |
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2008
|
Invention
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Method for efficient coating of substrates including plasma cleaning and dehydration. A process f... |
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2005
|
Invention
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Apparatus for the efficient coating of substrates including plasma cleaning. A process for the co... |
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2003
|
Invention
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Apparatus for the efficient coating of substrates. A process for the coating of substrates compri... |
