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2021
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Invention
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Iron catalyzed hydrochlorination of silicon tetrachloride to trichlorosilane. In the hydrochlorin... |
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2020
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Invention
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Controlled hydrolysis of hazardous silicon polymer residue. A polymer handling method for a polyc... |
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2019
|
Invention
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Method of fragmenting or method of generating cracks in semiconductor material, and method of man... |
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Invention
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Packaging method for polycrystalline silicon, double-packaging method for polycrystalline silicon... |
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2018
|
Invention
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Controlled silicon polymer treatment method. 2), is inert and is easily removed. |
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Invention
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Method to prevent grounding from a silicon rod to a plate in polycrystalline silicon reactor. A m... |
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|
Invention
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Primary distillation boron reduction. The present invention relates to an apparatus and a method ... |
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2017
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Invention
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Mechanical seed coupling. An apparatus and method of manufacturing silicon seed rod in which two ... |
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Invention
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Polycrystalline silicon rod and method for producing same. The present invention provides a polyc... |
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2016
|
Invention
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Packing box, packing method and unpacking method. A packing box including lattice members which a... |
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2015
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Invention
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Method for producing trichlorosilane. An apparatus for producing trichlorosilane, including: a re... |
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2014
|
Invention
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Bubble size minimizing internals for fluidized bed reactors. The present invention relates to int... |
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|
Invention
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Rinsing apparatus and rinsing method for polycrystalline silicon lump. A rinsing apparatus for po... |
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2013
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Invention
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Polycrystalline silicon rod. A polycrystalline silicon rod comprises a seed rod made of polycryst... |
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Invention
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Method of generating cracks in polycrystalline silicon rod and crack generating apparatus. A meth... |
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|
Invention
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Apparatus for producing polycrystalline silicon. A polycrystalline silicon producing method with ... |
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Invention
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Hydrogen chloride gas ejecting nozzle, reaction apparatus for producing trichlorosilane and metho... |
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Invention
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Silicon seed rod assembly of polycrystalline silicon, method of forming the same, polycrystalline... |
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Invention
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Fluidized bed reactor heater. This invention is a heater used to heat the feed process gas from 4... |
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Invention
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Fz seed holder and pre-heater. The device of according to the present invention is a device for h... |
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2012
|
Invention
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Apparatus for fracturing and method for producing fractured fragments. An apparatus for fracturin... |
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Invention
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Apparatus and method for producing purified hydrogen gas by a pressure swing adsorption processes... |
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|
Invention
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Reactor for polycrystalline silicon and polycrystalline silicon production method. The reactor fo... |
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Invention
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Method for manufacturing trichlorosilane. This method for manufacturing trichlorosilane, includes... |
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Invention
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Reaction apparatus for producing trichlorosilane and method for producing trichlorosilane. A reac... |
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|
Invention
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Apparatus and method for producing polycrystalline silicon having a reduced amount of boron compo... |
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|
Invention
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Method for producing fractured fragments of polycrystalline silicon. A method for producing fract... |
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Invention
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Apparatus for producing trichlorosilane and method for producing trichlorosilane. An apparatus fo... |
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|
Invention
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Method and apparatus for manufacturing trichlorosilane. a of the center tube 3 so as to stir the ... |
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2011
|
Invention
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Clean bench and method of producing raw material for single crystal silicon. A clean bench compri... |
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Invention
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Reactor cleaning apparatus. In a reactor cleaning apparatus 1 which cleans an inner wall surface ... |
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|
Invention
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Apparatus for producing polycrystalline silicon. An apparatus for producing polycrystalline silic... |
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|
Invention
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Apparatus and method for washing polycrystalline silicon. Disclosed is a polycrystalline silicon ... |
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2010
|
Invention
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Apparatus and method of manufacturing silicon seed rod. A manufacturing apparatus of silicon seed... |
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|
Invention
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Method for producing polycrystalline silicon. A polycrystalline silicon producing method with pre... |
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|
Invention
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Polycrystalline silicon producing method. A polycrystalline silicon producing method includes: th... |
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|
Invention
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Polycrystalline silicon reactor. A polycrystalline silicon reactor in which the polycrystalline s... |
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|
Invention
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Manufacturing apparatus of polycrystalline silicon. An apparatus for manufacturing polycrystallin... |
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2009
|
Invention
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Method of washing polycrystalline silicon, apparatus for washing polycrystalline silicon, and met... |
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2008
|
Invention
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Apparatus for manufacturing seeds for polycrystalline silicon manufacture. An apparatus for manuf... |
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2007
|
Invention
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Method for producing polycrystalline silicon, and facility for producing polycrystalline silicon.... |
