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2024
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Invention
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Precursor for forming scandium- or yttrium-containing thin film, method for forming scandium- or ... |
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Invention
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Precursor for forming yttrium- or scandium-containing thin film, method for forming yttrium-or sc... |
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Invention
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Precursor for forming lanthanide metal-containing thin film, method for forming lanthanide metal-... |
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Invention
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Precursor for forming high-purity group 4 transition metal-containing thin film and manufacturing... |
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Invention
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Precursor for forming metal-silicon-containing thin film, thin film deposition method using same,... |
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Invention
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Precursor for forming metal-silicon containing thin film, thin film deposition method using same,... |
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Invention
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Precursor for forming low-k thin film and method for forming low-k silicon-containing thin film u... |
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Invention
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Precursor for forming low dielectric constant silicon-containing thin film and method for forming... |
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2023
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Invention
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Precursor for forming metal-containing thin film, method for forming thin film using same, and de... |
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Invention
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Precursor for forming silicon-containing thin film, method for forming silicon-containing thin fi... |
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Invention
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Compound for inhibiting growth of thin film and thin film forming method using same. The present ... |
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Invention
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Precursor for forming yttrium- or scandium-containing thin film, method for forming yttrium- or s... |
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Invention
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High-purity molybdenum dichloride dioxide and preparation method therefor. The present invention ... |
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Invention
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Novel amidinate ligand, and thin film formation precursor comprising ligand. The present inventio... |
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Invention
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Molybdenum oxyhalide and preparation method thereof. 2422), and a high-purity molybdenum oxyhalid... |
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2022
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Invention
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Precursor for forming low dielectric constant silicon-containing thin film, method for forming lo... |
