|
2025
|
Invention
|
Electrostatic chuck assembly for plasma processing apparatus.
An electrostatic chuck including a... |
|
2024
|
Invention
|
Control system for adaptive control of a thermal processing system.
A control system operable to... |
|
|
Invention
|
Support structure for thermal processing systems.
Support plates and support structures for ther... |
|
|
Invention
|
Gas delivery system for a thermal processing apparatus.
A gas delivery system for a thermal proc... |
|
|
G/S
|
Semiconductor wafer processing equipment; semiconductor wafer processing machines; machines for t... |
|
|
Invention
|
Atomic layer etch process using plasma in conjunction with a rapid thermal activation process.
A... |
|
|
Invention
|
Cooled shield for icp source.
Provided is a plasma processing apparatus or system including a pl... |
|
|
Invention
|
Gas delivery system for a thermal processing apparatus. A gas delivery system for a thermal proce... |
|
|
Invention
|
Plasma processing apparatus. Disclosed is a plasma processing apparatus including a processing ch... |
|
|
Invention
|
Transfer apparatus and processing system.
The present disclosure provides a transfer apparatus a... |
|
|
G/S
|
Machines for manufacturing semiconductor substrates, namely, machines for heating or annealing se... |
|
|
Invention
|
Workpiece processing apparatus and methods for the treatment of workpieces.
Systems and methods ... |
|
|
Invention
|
Workpiece processing apparatus and methods for the treatment of workpieces. Systems and methods f... |
|
|
Invention
|
Method for processing workpiece, plasma processing apparatus and semiconductor device.
A method ... |
|
|
Invention
|
Workpiece processing apparatus with plasma and thermal processing systems. A processing apparatus... |
|
2023
|
Invention
|
Workpiece processing apparatus with contact temperature sensor.
A semiconductor fabrication appa... |
|
|
Invention
|
Workpiece processing apparatus with contact temperature sensor. A semiconductor fabrication appar... |
|
|
Invention
|
Methods of processing workpieces using organic radicals.
Processes treating a workpiece are prov... |
|
|
G/S
|
Semiconductor processing equipment, namely, processing
chambers for semiconductor substrates for... |
|
2022
|
G/S
|
Semiconductor substrate processing equipment, namely, processing chambers for semiconductor subst... |
|
|
Invention
|
Systems and methods for workpiece processing. A processing system for processing a plurality of w... |
|
2021
|
Invention
|
Conductive member for cleaning focus ring of a plasma processing apparatus.
A pedestal assembly ... |
|
|
Invention
|
Workpiece support for a thermal processing system. A workpiece support for a thermal processing s... |
|
|
Invention
|
Electrostatic chuck assembly for plasma processing apparatus. An electrostatic chuck including a ... |
|
|
Invention
|
Workpiece processing apparatus with thermal processing systems. A processing apparatus for a ther... |
|
|
Invention
|
Induction coil assembly for plasma processing apparatus. An induction coil assembly is disclosed ... |
|
|
Invention
|
Directly driven hybrid icp-ccp plasma source. Systems and methods for processing a workpiece are ... |
|
|
Invention
|
Workpiece processing apparatus with vacuum anneal reflector control. A workpiece processing appar... |
|
|
Invention
|
Workpiece processing apparatus with gas showerhead assembly. A processing apparatus for a thermal... |
|
|
Invention
|
Arc lamp with forming gas for thermal processing systems. Apparatus, systems, and methods for pro... |
|
|
Invention
|
Generation of hydrogen reactive species for processing of workpieces.
Methods, systems, and appa... |
|
|
Invention
|
Method for processing workpiece, plasma processing apparatus and semiconductor device. A method f... |
|
|
Invention
|
Transfer apparatus and processing system. The present disclosure provides a transfer apparatus an... |
|
|
Invention
|
Pressure control system for a multi-head processing chamber of a plasma processing apparatus.
A ... |
|
|
Invention
|
Lift pin assembly for a plasma processing apparatus. A lift pin assembly for a lift pin of a plas... |
|
|
Invention
|
Plasma strip tool with movable insert. Plasma processing apparatus for processing a workpiece are... |
|
|
Invention
|
Rapid thermal processing system with cooling system. Apparatus, systems, and methods for processi... |
|
|
Invention
|
Methods and apparatus for pulsed inductively coupled plasma for surface treatment processing. App... |
|
|
Invention
|
Processing of workpieces using fluorocarbon plasma. Methods for processing a workpiece are provid... |
|
|
Invention
|
Support structure for thermal processing systems. Support plates and support structures for therm... |
|
|
Invention
|
Transmission-based temperature measurement of a workpiece in a thermal processing system. A therm... |
|
2020
|
Invention
|
Systems and methods for removal of hardmask. Apparatus, systems, and methods for conducting a har... |
|
|
Invention
|
Control system for adaptive control of a thermal processing system. A control system operable to ... |
|
|
Invention
|
Selective etch process using hydrofluoric acid and ozone gases. Systems and methods for etching t... |
|
|
Invention
|
Methods for the treatment of workpieces. Systems and methods for thermal treatment of a workpiece... |
|
|
Invention
|
Silicon oxide selective dry etch process. Systems and methods for processing a workpiece are prov... |
|
|
Invention
|
Spacer etching process. Systems and methods for processing a workpiece are provided. In one examp... |
|
|
Invention
|
Methods for processing a workpiece using fluorine radicals. Methods for processing a workpiece wi... |
|
|
G/S
|
Semiconductor wafer processors. |
|
2019
|
G/S
|
Machinery in the nature of equipment for the treatment and
processing of semiconductor substrate... |
|
2018
|
G/S
|
Machinery in the nature of equipment for the treatment and processing of semiconductor substrates... |
|
|
G/S
|
Equipment for the treatment and processing of semiconductor
substrates and other semiconductor w... |
|
|
G/S
|
Semiconductor processing equipment. |
|
2017
|
G/S
|
semiconductor processing equipment |
|
|
G/S
|
equipment for the treatment and processing of semiconductor substrates and other semiconductor wo... |
|
|
G/S
|
servicing of equipment for the treatment and processing of substrates and other workpieces, semic... |
|
2007
|
G/S
|
Semiconductor manufacturing equipment, namely, semiconductor wafer processing chambers |
|
|
G/S
|
Semiconductor wafer processors |
|
|
G/S
|
Semiconductor processing equipment, namely processing
chambers for semiconductor substrates for ... |
|
2006
|
G/S
|
Semiconductor processing equipment, namely, processing chambers for semiconductor substrates for ... |
|
|
G/S
|
Processing chambers for semiconductor wafers including
equipment for stripping photoresist mater... |
|
2005
|
G/S
|
Semiconductor manufacturing equipment, namely, processing chambers for stripping photoresist mate... |
|
1986
|
G/S
|
ELECTRIC ULTRA-HIGH INTENSITY LAMPS AND PARTS THEREFOR |
