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2016
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Invention
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Micromechanical coriolis rate of rotation sensor. A micromechanical sensor that can detect shock ... |
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2015
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Invention
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Micro-gyroscope for detecting motions. The invention relates to a micro-gyroscope for detecting m... |
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Invention
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Micro rate of rotation sensor and method for operating a micro rate of rotation sensor. The prese... |
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Invention
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Mems sensors and methods for detecting rotation rates. Micro-electro-mechanical-systems (MEMS) se... |
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Invention
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Micro-gyroscope and method for operating a micro-gyroscope. A micro-gyroscope for determining a r... |
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2014
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Invention
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Mems pressure sensor with improved insensitivity to thermo-mechanical stress. This invention rela... |
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Invention
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Systems and methods for mems gyroscope shock robustness. Various embodiments of the invention all... |
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Invention
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Shock-robust integrated multi-axis mems gyroscope. Various embodiments of the invention integrate... |
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Invention
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Micromechanical sensor. A micromechanical sensor comprising a substrate (5) and at least one mass... |
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Invention
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Mems gyroscope for determining rotational movements about an x, y, and/or z axis. The invention r... |
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Invention
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Method and device for contactless sensing rotation and angular position using orientation trackin... |
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Invention
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Systems and methods to determine stiction failures in mems devices. Various embodiments of the in... |
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2013
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Invention
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Method for varied topographic mems cap process. A device includes sidewalls formed in a wafer sur... |
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Invention
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Systems and methods to reduce sensor bias. Various embodiments of the invention provide for autom... |
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Invention
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Wafer level micro-electro-mechanical systems package with accelerometer and gyroscope. The invent... |
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Invention
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Systems and methods to stabilize high-q mems sensors. Various embodiments of the invention allow ... |
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Invention
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Recovery system and methods for mems devices. Various embodiments of the invention reduce stictio... |
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Invention
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Innovative angular sensor read-out multi-axes digital front-end chain. The invention relates to a... |
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Invention
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Method and apparatus for an isolating structure. The present invention relates to a method and ap... |
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Invention
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Electro-mechanical resonance loop. The invention relates to a controller, and more particularly, ... |
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2012
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Invention
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Comprehensive sensor fusion algorithm. The present invention relates to a signal processor, and m... |
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Invention
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Micromechanical coriolis rate of rotation sensor. A micromechanical Coriolis rate of rotation sen... |
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Invention
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Microelectromechanical z-axis out-of-plane stopper. The present invention relates to a microelect... |
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Invention
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Micro-electromechanical structure with low sensitivity to thermo-mechanical stress. The invention... |
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Invention
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System and method to reduce power consumption in a multi-sensor environment. Various embodiments ... |
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2010
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Invention
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Mems rotational sensor with improved anchoring. A MEMS sensor is provided with a substrate and a ... |
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Invention
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Microgyroscope for determining rotational motions about at least one of three perpendicular spati... |
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Invention
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Micromechanical sensor with multiple spring bars. A micromechanical sensor comprising a substrate... |
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Invention
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Micro gyroscope for determining rotational movements about three spatial axes which are perpendic... |
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Invention
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Microgyroscope for determining rotational movements about an x and/or y and z axis. The invention... |
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Invention
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Method for detecting accelerations and rotation rates, and mems sensor. The invention concerns a ... |
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Invention
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Mems gyroscope for detecting rotational motions about an x-, y-, and/or z-axis. The invention rel... |
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Invention
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Mems gyroscope for detecting rotational motions about an x-, y- and/or z- axis. The invention rel... |
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Invention
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Electromechanic microsensor. The invention relates to an electromechanic microsensor (MEMS) compr... |
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Invention
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Electromechanic microsensor. The invention relates to an electromechanic microsensor (MEMS) (1) c... |
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Invention
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Electrostatic mems driver with on-chip capacitance measurement for autofocus applications. A driv... |
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2009
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Invention
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Microgyroscope. A microgryroscope for determining rotational movements about an x, y or z axis. A... |
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Invention
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Microgyroscope. The invention relates to a microgyroscope for determining rotational movements ab... |
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2008
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Invention
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Micromechanical rate-of-rotation sensor. A micromechanical rate-of-rotation sensor for detecting ... |
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Invention
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Micromechanical rate-of-rotation sensor. The present invention relates to a micromechanical Corio... |
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2007
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Invention
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Orientation-dependent etching of deposited aln for structural use and sacrificial layers in mems.... |
