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2024
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Invention
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Sealing process. Herein is provided a method for sealing a chip (100), the method comprising arra... |
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Invention
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Bond force concentrator. Herein is provided a method for bonding a first substrate with a second ... |
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Invention
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Mems resonator arrangement.
The invention relates to a microelectromechanical resonator, compris... |
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Invention
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Mems resonator with a coupler. A MEMS, microelectromechanical systems, resonator (100) comprising... |
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Invention
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Through silicon vias. Herein is provided an apparatus, comprising a silicon layer (100), and a sp... |
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Invention
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Mems resonator comprising in-phase and out-of-phase elements. A MEMS, microelectromechanical syst... |
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Invention
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Slanted resonator. A MEMS, microelectromechanical systems, resonator (10) comprising a slanted re... |
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2023
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Invention
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Mems resonator. A microelectromechanical (MEMS) resonator includes a resonator structure having a... |
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2022
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Invention
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Mems resonator.
A MEMS (microelectromechanical system) resonator assembly (100), comprising a su... |
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Invention
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Temperature-stable mems resonator.
A MEMS (microelectromechanical system) resonator (150) compri... |
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2021
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Invention
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Mems resonator with high quality factor and its use. A MEMS (microelectromechanical system) reson... |
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Invention
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Mems resonator and manufacturing method.
A MEMS (microelectromechanical system) resonator includ... |
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Invention
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Microelectromechanical system resonator assembly. A silicon microelectromechanical system, MEMS, ... |
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2020
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Invention
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Spring-mass microelectromechanical resonator. A microelectromechanical (MEMS) resonator includes ... |
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2019
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Invention
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Mems resonator array arrangement. A microelectromechanical resonator, including a support structu... |
