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2023
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Invention
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Mems motion sensor and method of manufacturing.
A MEMS motion sensor and its manufacturing metho... |
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Invention
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Multi-mass mems motion sensor.
A micro-electro-mechanical system (MEMS) motion sensor is provide... |
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2018
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Invention
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Methods and systems for motion determination of sensor elements in sensor systems using mems imus... |
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2017
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Invention
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System and method for determining the position of sensor elements in a sensor array. Systems and ... |
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2016
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Invention
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Integrated mems system. An integrated MEMS system having a MEMS chip, including a MEMS transducer... |
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Invention
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Multiple degree of freedom mems sensor chip and method for fabricating the same.
A single Micro-... |
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Invention
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Multiple degree of freedom mems sensor chip and method for fabricating the same. A single Micro-E... |
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Invention
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3d mems device with hermetic cavity. A three dimensional (3D) micro-electro-mechanical system (ME... |
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Invention
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3d mems device with hermetic cavity. A MEMS sensor is provided and comprises an electrically cond... |
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2015
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Invention
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3d mems magnetometer and associated methods. A micro-electro-mechanical system (MEMS) magnetomete... |
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Invention
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Fabrication method for 3d inertial sensor. A method for manufacturing a three dimensional MEMS se... |
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Invention
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Mems motion sensor and method of manufacturing. A MEMS motion sensor and its manufacturing method... |
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Invention
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3d mems device and method of manufacturing. A MEMS device is provided. The device includes a MEMS... |
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Invention
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Mems pressure sensor.
The present invention provides a MEMS pressure sensor and a manufacturing ... |
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Invention
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Mems pressure sensor. The present invention provides a MEMS pressure sensor and a manufacturing m... |
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Invention
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Multi-mass mems motion sensor. A micro-electro-mechanical system (MEMS) motion sensor is provided... |
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2014
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Invention
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Integrated mems system. The present invention provides a 3D System ("3DS") MEMS architecture that... |
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Invention
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Mems device including support structure and method of manufacturing.
A micro-electro-mechanical ... |
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Invention
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Mems device including support structure and method of manufacturing. A micro-electro-mechanical s... |
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Invention
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Mems components and method of wafer-level manufacturing thereof. A MEMS and a method of manufactu... |
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Invention
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Mems device including an electrode guard ring and method of manufacturing the same. A MEMS device... |
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Invention
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Mems motion sensor for sub-resonance angular rate sensing. A MEMS device for angular rate measure... |
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Invention
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Mems device and method of manufacturing. A MEMS device is provided. The device includes a MEMS wa... |
