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2024
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Invention
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Apparatus for producing an ion beam. The present invention relates to an apparatus for producing ... |
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Invention
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Apparatus for producing an ion beam. The present invention provides an apparatus for producing an... |
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2009
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Invention
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Gas discharge electron source. A plasma bridge neutraliser (10) comprising: a cathode (2); an ano... |
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2008
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Invention
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Apparatus for producing a charged particle beam. Apparatus for the production of a charged partic... |
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Invention
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Apparatus. Apparatus for the production of a charged particle beam, comprising: an ion source pla... |
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Invention
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Apparatus.
An apparatus for accelerating an ion beam, comprising at least one electrode mounted ... |
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Invention
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Ion beam accelerating apparatus with electrodes mounted in a movable mount. An apparatus (100) fo... |
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2007
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Invention
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Apparatus. An apparatus (200) for accelerating an ion beam comprising: a) a first electrode (202)... |
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Invention
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Apparatus for accelerating an ion beam. An apparatus (200) for accelerating an ion beam comprisin... |
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2000
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Invention
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Vacuum sputtering apparatus. A vacuum sputtering apparatus (1) is described in which a target (7)... |
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1999
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Invention
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Low energy ion gun having multiple multi-aperture electrode grids with specific spacing requireme... |
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Invention
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Magnet array. An electro-magnet array for use in a sputtering apparatus. The array has a magnetis... |
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1991
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Invention
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Filamentless ion source for thin film processing and surface modification. A filamentless (withou... |
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1987
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Invention
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Plasma processing apparatus. An electrode assembly is described for use in plasma processes, such... |
