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2025
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Invention
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Calibration of bandwidth metrology apparatus. An apparatus includes: a cell defining an interior ... |
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Invention
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Apparatus for and method of modulating a light source wavelength.
Apparatus for and method of co... |
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Invention
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Discharge chamber accommodating multiple discharges. A discharge chamber for use in a deep ultrav... |
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Invention
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Maintenance of modules for light sources used in semiconductor photolithography.
Systems for mai... |
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Invention
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Dual comb radiation source and heterodyne detection for alignment metrology. Dual comb radiation ... |
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Invention
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Apparatuses and processes for light source system status tracking and maintenance utilizing data ... |
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Invention
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Conduit system, radiation source, lithographic apparatus, and methods thereof.
A pulsed-discharg... |
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Invention
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Dual comb radiation source and heterodyne detection for overlay metrology systems and methods. Du... |
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Invention
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Metrology apparatus for mirror. A metrology apparatus includes: a light source generating radiati... |
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Invention
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Repetition rate agile laser apparatus and method. In an apparatus for generating laser radiation ... |
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Invention
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Electrodes in discharge chamber for radiation source. A discharge chamber comprises a housing, a ... |
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Invention
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Apparatus for and methods of combining multiple laser beams.
Apparatus for and methods of combin... |
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Invention
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Laser configuration data comparison and graphical display. A method includes accessing a first da... |
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Invention
|
Systems and methods for predicting a next pulse in a light source. An optical system includes a p... |
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Invention
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Pressure-controlled spectral feature adjuster.
An apparatus includes a gas discharge system incl... |
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Invention
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Systems and methods for electrode position sensing and adjustment. A light source includes a cham... |
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Invention
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Adjustable mounting apparatus for optical element. An optical system is in a pulse stretcher of a... |
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Invention
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Duv light source and method of operation. A process for replacing a gas lasing medium in a laser ... |
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Invention
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Gas purge systems for a laser source.
A laser source includes a laser chamber configured to gene... |
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Invention
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Method and system for wavelength measurement for a lithographic apparatus or an inspection appara... |
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Invention
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Configurable resonant charging supply and method for a pulsed power laser platform. A resonant ch... |
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Invention
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Calibration apparatus. A calibration apparatus for a wavelength-tunable deep ultraviolet (DUV) li... |
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2024
|
Invention
|
Capacitor system for a radiation source of a lithographic apparatus. A lithographic apparatus inc... |
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Invention
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Fan, fan housing, radiation source, lithographic apparatus, and methods thereof. A pulsed-dischar... |
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Invention
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Discharge chamber gas replenishment system. A lasing gas replenishment system for a discharge cha... |
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Invention
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Chamber erosion byproduct filter. A lithographic apparatus includes a chamber that produces radia... |
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Invention
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Laser chamber gas flow and acoustic control. In an apparatus for generating laser radiation from ... |
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Invention
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Laser maintenance using tree-based machine learning models incorporating target-based functions. ... |
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Invention
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Laser beam aperture. A light source for a lithography system includes an optical component and an... |
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Invention
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Apparatus for and method of wavelength control for multifocal imaging. Apparatus for and methods ... |
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Invention
|
System for controlling gas flow in a laser discharge chamber. A discharge chamber for use in a de... |
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Invention
|
Pre-ionization tube for acoustics mitigation in light source. A lithography system includes a lig... |
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Invention
|
Systems and methods for real-time time-integral squared (tis) and speckle contrast (sc) control i... |
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Invention
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Methods and systems for providing loopback diagnostics. Methods and systems for validating one or... |
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Invention
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Compensation for a disturbance in a light source. An apparatus includes an offload processing sys... |
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Invention
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Laser chamber with discharge system having acoustic scattering surfaces. An apparatus for generat... |
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2023
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Invention
|
Reducing energy consumption of a gas discharge chamber blower.
A control apparatus for a light s... |
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Invention
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Adjuster using torsionally stiff coupler and actuator system using same.
Disclosed is an apparat... |
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Invention
|
Spectral feature control apparatus.
A deep ultraviolet laser system includes a line narrowing mo... |
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Invention
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Apparatus for and method of control for spectrum separation.
Apparatus for and methods of rapidl... |
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Invention
|
Apparatus for and method of conditioning light source after idle period.
A method of and apparat... |
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Invention
|
Apparatus for and method of aligning a laser system.
Disclosed is an apparatus for and method of... |
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Invention
|
Passive dust trap, illumination system, and lithography system.
A system includes first and seco... |
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Invention
|
Apparatus for and method of vibration cancellation for laser wavelength and bandwidth stability. ... |
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|
Invention
|
Optical pulse stretcher apparatus.
An optical pulse stretcher apparatus includes: a hermetically... |
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|
Invention
|
Status monitoring and reporting for ultraviolet light sources.
A computing device including a di... |
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2022
|
Invention
|
Determination of a property of an exposure light beam.
An apparatus includes: an estimation syst... |
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Invention
|
Metrology apparatus and method.
A metrology apparatus includes: a probe apparatus configured to ... |
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Invention
|
Control voltage threshold selection to facilitate multifocal imaging.
Disclosed is an apparatus ... |
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Invention
|
Apparatus for and method of conditioning laser electrodes.
Disclosed are apparatus for and metho... |
|
2020
|
G/S
|
Lasers and wave meters, and components thereof, including light measuring instrumentation, not fo... |
|
2017
|
G/S
|
Scientific, nautical, optical, electro-optical, weighing, measuring, signaling, checking (supervi... |
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2014
|
G/S
|
Laser-controlled optical assembly modules for use in
enhancing the performance of photolithograp... |
|
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G/S
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Optical assemblies for use in controlling lasers for enhancing the performance of photolithograph... |
|
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G/S
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Computer software for use in enhancing the operational performance of laser-based photolithograph... |
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2011
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G/S
|
Computer hardware and software for data mining, data
monitoring, data analysis, and control of t... |
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G/S
|
Computer hardware and software for data mining, data
monitoring, and data analysis of performanc... |
|
|
G/S
|
computer hardware and software for data mining, data monitoring, and data analysis of performance... |
|
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G/S
|
computer hardware and software for data mining, data monitoring, data analysis, and control of th... |
|
|
G/S
|
Light source equipment for non-medical use (terms too vague
in the opinion of the International ... |
|
|
G/S
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Laser light sources for use in semiconductor manufacturing |
|
2007
|
G/S
|
Maintenance, repair, and servicing of light sources used in
industrial applications. |
|
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G/S
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Computer and technical consultation services, namely
monitoring, testing, and diagnosis of light... |
|
|
G/S
|
maintenance, repair, and servicing of light sources used in industrial applications |
|
|
G/S
|
computer and technical consultation services, namely, monitoring, testing, and diagnosis of light... |
|
2006
|
G/S
|
Scientific, nautical, optical, electro-optical, weighing, measuring, regulating, signaling, check... |
|
|
G/S
|
Lasers and parts and fittings therefor including measuring instruments for waves and other light. |
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2001
|
G/S
|
Information services in the field of industrial applications for excimer lasers, particulary semi... |
|
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G/S
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Providing information via information networks, namely, the internet and intranets, in the field ... |
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1999
|
G/S
|
Lasers and wave meters, and components thereof, namely, light measuring instrumentation, not for ... |
|
1990
|
G/S
|
Excimer lasers.
Excimer lasers for industrial use. |
|
1989
|
G/S
|
EXCIMER LASERS FOR INDUSTRIAL USE |
