To provide an inspection device capable of classifying a type of solder based on differences in a shape (texture) of a solidification structure that appears on a surface of solder that is an inspection object. An inspection device includes an imaging unit that captures an image of an inspection object and a controlling unit, wherein the controlling unit captures an image of a solder portion on the inspection object with the imaging unit and acquires image data, extracts a feature of a shape of a solidification structure that appears on a surface of the solder portion from the image data, and classifies a type of solder used in the solder portion based on the feature.
To provide an inspection device capable of reducing time required for inspection (takt time) by managing processing of loading and imaging an inspection object and processing of inspection and count with different conveyance units. An inspection device includes an imaging unit, a conveying unit, and a controlling unit, the conveying unit includes first and second conveyance units, an operation of each of the conveyance units can be individually controlled by the controlling unit, the first conveyance unit is arranged in an imaging area, and the second conveyance unit is arranged in an inspection/count area (standby area). In addition, when an image of an inspection object having been moved to the imaging area by the first conveyance unit is being captured, the controlling unit causes the second conveyance unit to unload another inspection object from the inspection/count area.
Provided are an image data generation method and an inspection device for generating seamless cross-sectional image data by generating cross-sectional image data along a substrate inspection surface of an object under inspection. An image data generation method for: rotating, in mutually parallel planes, two elements from among a radiation generator 22, a detector 26, and a holding part 24 for holding an object 12 under inspection; and generating cross-sectional image data for the object 12 under inspection using at least two items of transmission image data for the object 12 under inspection, the at least two items of transmission image data being acquired at different positions in a plane and being obtained by detecting, by means of the detector 26, light emitted from the radiation generator 22 and transmitted through the object 12 under inspection. The value of a pixel in the cross-sectional image data for a substrate inspection surface of the object 12 under inspection is generated from the value of a pixel for position information corrected on the basis of position information for the substrate inspection surface in the transmission image data.
G01N 23/044 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux en utilisant la laminographie ou la tomosynthèse
G01N 23/18 - Recherche de la présence de défauts ou de matériaux étrangers
G06T 1/00 - Traitement de données d'image, d'application générale
An inspection device includes: a first image unit that captures an image of an inspection object from a vertical direction; a plurality of dome-shaped reflector plates being arranged between the first image unit and the inspection object and having aperture parts on a side of the first image unit and a side of the inspection object, respectively; a plurality of annular light sources that illuminate the respective reflector plates; and apparatuses for inspection (second image unit and projection unit) that are provided outside of the reflector plates and are capable of capturing an image of the inspection object 12 or irradiating the inspection object with light. Optical axes of the apparatuses for inspection are arranged so as to pass through through-holes provided in the reflector plates.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
5.
IMAGE CONVERTOR FOR VISUAL INSPECTION AND IMAGE CONVERSION METHOD FOR VISUAL INSPECTION
An image convertor for visual inspection to convert images captured by two visual inspection devices, each of which comprises a main imaging unit that vertically captures images of an inspected object to be subjected to visual inspection, and a plurality of light sources installed between the main imaging unit and the inspected object comprises an image storage unit that stores a first image group and a second image group, a training data set generation unit that generates a pair of images in the first image group and corresponding images in the second image group as a training data set and an image conversion model learning unit that performs machine learning using the generated training data set to generate an image conversion model that converts an image in the first image group into the corresponding image in the second image group.
G06V 10/14 - Caractéristiques optiques de l’appareil qui effectue l’acquisition ou des dispositifs d’éclairage
G06V 10/32 - Normalisation des dimensions de la forme
G06V 10/75 - Organisation de procédés de l’appariement, p. ex. comparaisons simultanées ou séquentielles des caractéristiques d’images ou de vidéosApproches-approximative-fine, p. ex. approches multi-échellesAppariement de motifs d’image ou de vidéoMesures de proximité dans les espaces de caractéristiques utilisant l’analyse de contexteSélection des dictionnaires
G06V 10/764 - Dispositions pour la reconnaissance ou la compréhension d’images ou de vidéos utilisant la reconnaissance de formes ou l’apprentissage automatique utilisant la classification, p. ex. des objets vidéo
G06V 10/774 - Génération d'ensembles de motifs de formationTraitement des caractéristiques d’images ou de vidéos dans les espaces de caractéristiquesDispositions pour la reconnaissance ou la compréhension d’images ou de vidéos utilisant la reconnaissance de formes ou l’apprentissage automatique utilisant l’intégration et la réduction de données, p. ex. analyse en composantes principales [PCA] ou analyse en composantes indépendantes [ ICA] ou cartes auto-organisatrices [SOM]Séparation aveugle de source méthodes de Bootstrap, p. ex. "bagging” ou “boosting”
The present invention provides an inspection device which is positioned with respect to a conveyance device that is installed separately from the inspection device, and can perform inspection with good accuracy even when an object to be inspected is carried in and out by using the conveyance device. An inspection device 10 that is positioned with respect to a conveyance device 50 and inspects an object 12 to be inspected that is carried in by using the conveyance device 50 includes: an imaging unit 20 that moves relative to the object 12 to be inspected and images the object; and a control unit 30 that controls operation of the imaging unit 20 to acquire image data. The control unit 30 is configured to splice a plurality of pieces of image data on the basis of the three-dimensional shape of the object 12 to be inspected calculated by a height measurement portion 32b to generate entire image data of the object 12 to be inspected, and inspect the object 12 to be inspected on the basis of the entire image data. The control unit 30 performs calibration by using a reference jig 60 that is positioned at a location different from a substrate placement surface of the conveyance device 50.
Provided is an inspection device capable of suppressing the generation of sound and vibration when accelerating an inspection object (holding part) stopped at a standby position. In an inspection device 1 having a radiation generator 22, a holding part 24 for holding an inspection object 12, a detector 26, and a control unit 10, a holding part driving unit 18 for moving the holding part 24 has an X driving part 18e for moving the holding part 24 in the X-axis direction, and a Y driving part 18c for moving the holding part 24 in the Y-axis direction. The control unit 10 determines a standby position PS and an input position Pi so as to reduce the larger value among a component in the X-axis direction of weight moved by the X driving part 18e and a component in the Y-axis direction of weight moved by the Y driving part 18c when the holding part 24 moves on a feeding track 28i.
G01N 23/18 - Recherche de la présence de défauts ou de matériaux étrangers
G01N 23/044 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux en utilisant la laminographie ou la tomosynthèse
Provided is an inspection device in which determination accuracy is improved by combining a plurality of inspection methods. An inspection device 10 includes an imaging unit 20 that images an object 12 being inspected and outputs image data, and a control unit 30 that performs inspection on the basis of the image data. At least one inspection region from among inspection regions set in the object 12 being inspected has a first inspection method and a second inspection method set thereto. The control unit 30 executes: a first step for selecting first inspection information on the basis of information set in the inspection region; a second step for applying the first inspection method to the image data for the inspection region and determining, on the basis of the first inspection information, whether the image data is satisfactory or unsatisfactory; a third step for selecting one or more items of second inspection information on the basis of the first inspection information and an "unsatisfactory" classification; and a fourth step for applying the second inspection method to the image data for the inspection region and determining, on the basis of the second inspection information, whether the image data is satisfactory or unsatisfactory.
Provided is an inspection device for calculating a distance (height information) from a reference surface of an object to be inspected to a prescribed surface of a component attached to the object to be inspected, on the basis of three-dimensional image data of the object to be inspected. A control unit 10 of an inspection device 1 executes: a first step for generating three-dimensional image data comprising a cross-sectional image of an object 12 to be inspected; a second step for extracting a prescribed number of cross-sectional image data from the prescribed reference surface; a third step for determining the position of a component (slave component 12d) in the extracted cross-sectional image data; a fourth step for calculating the amount of blurriness in the outline of the image of the slave component 12d in the extracted cross-sectional image data, and determining the position of a prescribed surface 12f of the slave component 12d; and a fifth step for calculating height information from the reference surface to the prescribed surface on the basis of the position of the reference surface and the position of the prescribed surface.
G01B 15/04 - Dispositions pour la mesure caractérisées par l'utilisation d'ondes électromagnétiques ou de radiations de particules, p. ex. par l'utilisation de micro-ondes, de rayons X, de rayons gamma ou d'électrons pour mesurer des contours ou des courbes
G01N 23/046 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux en utilisant la tomographie, p. ex. la tomographie informatisée
10.
IMAGE DATA CORRECTION METHOD, AND INSPECTION DEVICE
Provided are an image data correction method and an inspection device capable of efficiently removing only images constituting noise, among images having periodicity, from transmission image data or cross-sectional image data. A control unit 10 of an inspection device 1 executes: a first step for storing information (position and value) of pixels satisfying a first condition, among pixels of image data (transmission image data or cross-sectional image data) of an inspection target object 12; a second step for subjecting the image data to a Fourier transform to generate frequency image data; a third step for correcting the values of pixels satisfying a second condition, among pixels of the frequency image data; a fourth step for subjecting the corrected frequency image data to an inverse Fourier transform to generate corrected image data; and a fifth step for replacing the values of the pixels at the positions stored in the first step with the stored values, in the corrected image data.
G01N 23/046 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux en utilisant la tomographie, p. ex. la tomographie informatisée
A captured image sorting device 1 sorts captured images of an inspection object undergoing an appearance inspection into a training dataset and a testing dataset for machine learning, and includes: an inspection image storage unit 10 that stores captured image data of the inspection object; an image sorting unit 20 that sorts an image undergoing sorting, which is stored in the inspection image storage unit, into the training dataset or the testing dataset for machine learning; a training dataset storage unit 30 that stores the images of the training dataset; and a testing dataset storage unit 40 that stores the images of the testing dataset. The image sorting unit 20 determines how to sort the image undergoing sorting in accordance with the degree of similarity between the image undergoing sorting, and the images stored in the training dataset storage unit 30 and the images stored in the testing dataset storage unit 40.
This visual inspection image transforming device transforms images captured by two visual inspection devices comprising a main imaging unit for imaging, from a vertical direction, an object under inspection, to be subjected to a visual inspection, and a plurality of light sources situated between the main imaging unit and the object under inspection, the visual inspection image transforming device including: an image storage unit for storing a first group of images of the object under inspection, captured by a first visual inspection device, and a second group of images of the same object under inspection, captured by a second visual inspection device provided with a main imaging unit and light sources having a different configuration to the first visual inspection device; a training dataset creating unit for creating, as a training dataset, pairs comprising an image within the first group of images and a corresponding image within the second group of images; an image transformation model learning unit for performing machine learning using the training dataset to create an image transformation model for transforming an image within the first group of images into the corresponding image within the second group of images; and an image transforming unit for using the created image transformation model to create a transformed image for use with the second visual inspection device from an image captured by the first visual inspection device.
Provided is an inspection device that determines a search range in a reconstructed image from height information pertaining to a body being inspected and, by comparing the reconstructed image (cross-sectional image) within the search range and a reference image, determines a cross-sectional image of an inspection subject. A control device 10 of this inspection device 1, which has driving units (e.g., a substrate-holding-part-driving unit 18) that change the relative positions of a radiation generator 22, a body being inspected 12 held by a substrate-holding part 24, and a detector 26, as well as the relative positions of the body being inspected 12 and a height-information-acquiring unit 50, executes: a step for acquiring height information pertaining to the body being inspected 12 by using the height-information-acquiring unit 50; a step for generating a cross-sectional image of the body being inspected 12 from a transmission image of the body being inspected 12; a step for determining a prescribed height-direction range on the basis of the height information, and determining the cross-sectional image of an inspection subject from the cross-sectional image within this range; and a step for carrying out inspection on the basis of the cross-sectional image of the inspection subject.
G01N 23/046 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux en utilisant la tomographie, p. ex. la tomographie informatisée
G01N 23/04 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux
G01N 23/18 - Recherche de la présence de défauts ou de matériaux étrangers
Provided is an inspection device that can reduce dead spots of illumination light on an object to be imaged, and improve measurement accuracy. This inspection device 10 includes: a first imaging unit 21 that images a subject 12 from the vertical direction; a plurality of dome-shaped reflectors 230a-230c that are disposed between the first imaging unit 21 and the subject 12 and respectively have openings 233-236 on the first imaging unit 21 side and the subject 12 side; a plurality of annular light sources 23a-23c that respectively illuminate the reflectors 230a-230c; and inspection devices (second imaging unit 22, projection unit 24) that are on the outside of the reflectors 230a-230c and image or irradiate the subject 12 with light, wherein the optical axes of the inspection devices are disposed so as to pass through through-holes 237, 238 provided in the reflectors 230a-230c.
Provided is an inspecting device with which a time (tact time) required for inspection can be reduced by using different conveying units to manage loading/imaging processing and inspection and aggregation processing of an object being inspected. An inspecting device 10 comprises an imaging unit 20, a conveying portion 40, and a control unit 30, wherein: the conveying portion 40 includes first and second conveying units 41, 42; operations of each of the conveying units can be controlled individually by the control unit 30; the first conveying unit 41 is disposed in an imaging area; and the second conveying unit 42 is disposed in an inspection aggregation area (standby area). Furthermore, when an object 12 being inspected, that has been moved to the imaging area by the first conveying unit 41, is being imaged, the control unit 30 causes a separate object being inspected to be unloaded from the inspection aggregation area by the second conveying unit 42.
Provided is an inspection device that is capable of classifying the type of a solder on an inspection object on the basis of a difference in the shape (texture) of a solidified structure that appears on a surface of the solder. An inspection device 10 has an imaging unit 20 that captures an image of the inspection object 12, and a control unit 30, the control unit 30 acquiring image data by image capture of a solder portion on the inspection object 12 by the imaging unit 20, extracting a feature value of the shape of a solidified structure that appears on a surface of the solder portion from the image data, and classifying the type of the solder that is used in the solder portion on the basis of the feature value.
To provide an inspection device capable of imaging a transmission image while changing relative positions of a radiation source, an inspection object, and a detector. An inspection device comprises a radiation generator, a substrate holding unit for holding an inspection object, a detector, a substrate holding unit driving unit and a detector driving unit, a substrate position detection unit and a detector position detection unit, and a control unit, wherein the control unit executes a step for causing the detector to start acquiring an image while the relative positions of the radiation generator, the substrate holding unit and the detector are changing, a step for acquiring information relating to the positions of the substrate holding unit and the detector when the detector starts acquiring an image, and a step for storing the image acquired by the detector and the information relating to the position in association with each other.
G01N 23/044 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux en utilisant la laminographie ou la tomosynthèse
G01N 23/083 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et mesurant l'absorption le rayonnement consistant en rayons X
In an inspection device having a storage unit and an exposure dose calculation unit, the exposure dose calculation unit executes a first step for calculating the dose when an image is acquired by irradiating radiation from a radiation generator based on the reference dose stored in the storage unit, a second step for calculating the dose when the relative position between the radiation generator and an inspection object is changed, a third step for calculating the total value of the dose irradiated to the inspection object, and a fourth step for outputting the total value.
G01N 23/06 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et mesurant l'absorption
G01N 23/04 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux
19.
Inspection position identification method, three-dimensional image generation method, and inspection device
An inspection position identification method that allows accurate inspection to be performed without in-advance identification of the position of an inspection plane in an inspected target. A three-dimensional image generation method that allows generation of a three-dimensional image for inspection without in-advance identification of the position of an inspection plane in an inspected target and then allows inspection to be performed. An inspection device including the methods. An inspection device includes a storage unit, which stores a radiation transmission image of an inspected object and a three-dimensional image generated from the radiation transmission image, and a control unit. The process carried out by the control unit for identifying an inspection position in a three-dimensional image includes identifying the position of a transmission picture of the inspection position in the radiation transmission image and identifying the inspection position in the three-dimensional image from the position of the transmission picture.
G01N 23/044 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux en utilisant la laminographie ou la tomosynthèse
G01N 23/083 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et mesurant l'absorption le rayonnement consistant en rayons X
G01N 23/18 - Recherche de la présence de défauts ou de matériaux étrangers
G06T 7/33 - Détermination des paramètres de transformation pour l'alignement des images, c.-à-d. recalage des images utilisant des procédés basés sur les caractéristiques
Provided is an inspection apparatus that can image a transparent image while changing relative positions between a ray source, an object to be inspected, and a detector. An inspection apparatus 1 comprises: a radiation generator 22; a board holding unit 24 for holding an object to be inspected; a detector 26; a board holding unit driving unit 18 and a detector driving unit 20; a board position detecting unit 29 and a detector position detecting unit 31; and a control unit 10. The control unit 10 executes: a step for controlling the detector 26 to start acquisition of an image in a state where relative positions between the radiation generator 22, the board holding unit 24, and the detector 26 are being changed; a step for acquiring information about positions of the board holding unit 24 and the detector 26 when the detector 26 starts acquisition of the image; and a step for storing the image acquired by the detector 26 and the information about the positions in association with each other.
G01N 23/044 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux en utilisant la laminographie ou la tomosynthèse
Provided is an inspection device capable of estimating a dose of irradiation on an inspection target during an inspection without measuring an exposure dose through irradiation using a dosimeter. An inspection device 1 comprising a storage unit 34 and an exposure dose calculation unit 50, wherein the exposure dose calculation unit 50 carries out a first step for calculating a dose during acquisition of an image through irradiation from a radiation generator 22 on the basis of a reference dose stored in the storage unit 34, a second step for calculating a dose during changes of a relative position between the radiation generator 22 and an inspection target, a third step for calculating a total value of doses of irradiation on the inspection target, and a fourth step for outputting the total value.
G01N 23/044 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux en utilisant la laminographie ou la tomosynthèse
G01N 23/18 - Recherche de la présence de défauts ou de matériaux étrangers
22.
Inspection position identification method, three-dimensional image generation method, and inspection device
An inspection position identification method that allows accurate inspection to be performed without in-advance identification of the position of an inspection plane in an inspected target. A three-dimensional image generation method that allows generation of a three-dimensional image for inspection without in-advance identification of the position of an inspection plane in an inspected target and then allows inspection to be performed. An inspection device including the methods. An inspection device includes a storage unit, which stores a radiation transmission image of an inspected object and a three-dimensional image generated from the radiation transmission image, and a control unit. The process carried out by the control unit for identifying an inspection position in a three-dimensional image includes identifying the position of a transmission picture of the inspection position in the radiation transmission image and identifying the inspection position in the three-dimensional image from the position of the transmission picture.
G01N 23/044 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux en utilisant la laminographie ou la tomosynthèse
G01N 23/083 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et mesurant l'absorption le rayonnement consistant en rayons X
G01N 23/18 - Recherche de la présence de défauts ou de matériaux étrangers
G06T 7/33 - Détermination des paramètres de transformation pour l'alignement des images, c.-à-d. recalage des images utilisant des procédés basés sur les caractéristiques
23.
INSPECTION POSITION SPECIFICATION METHOD, THREE-DIMENSIONAL IMAGE GENERATION METHOD, AND INSPECTION DEVICE
Provided are: an inspection position specification method with which accurate inspection is possible without specifying in advance the position (Z-direction position) of an inspection surface on an object to be inspected; a three-dimensional image generation method with which a three-dimensional image necessary for inspection can be generated without specifying in advance the position (Z-direction position) of an inspection surface on an object to be inspected, and with which inspection can be performed using the image; and an inspection device including these methods. An inspection device 100 comprises: a storage unit 34 that stores a radiation transmission image of an object to be inspected (substrate) and a three-dimensional image generated from the radiation transmission image; and a control unit 10. A process executed by the control unit 10 for specifying an inspection position in the three-dimensional image includes: a step for specifying, in the radiation transmission image, the position of a transmission image of an inspection position; and a step for specifying an inspection position in the three-dimensional image from the position of the transmission image.
G01N 23/046 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux en utilisant la tomographie, p. ex. la tomographie informatisée
G01N 23/18 - Recherche de la présence de défauts ou de matériaux étrangers
The present invention, which enables alignment of liquid crystal molecules when no voltage is applied thereto and also enables control of the pretilt angle of the liquid crystal molecules, relates to a composition for liquid crystal alignment films, and the like, said composition containing the components (A)-(D) described below. (A) A meta-phenylenediamine derivative represented by general formula (1) (B) A meta-phenylenediamine derivative represented by general formula (2) (C) A para-arylenediamine represented by general formula (3) (D) A tetracarboxylic acid represented by general formula (4) or a tetracarboxylic acid anhydride represented by general formula (4') (In the formulae, R1 represents an alkyl group having 1-6 carbon atoms, or the like; R2 represents an alkyl group having 8-20 carbon atoms, or the like; each of t-number Ra moieties represents an alkyl group having 1-3 carbon atoms, or the like; n represents an integer of 1-3; t represents an integer of 0-4; T represents an oxygen atom or the like; Y represents an amino group; and Z represents a tetravalent hydrocarbon group.)
A substrate surface detection unit performs image analysis of cross-sectional images of an object to be inspected including a substrate and an electronic component and specifies a surface image on which the surface of the substrate is photographed. A pseudo cross-sectional image creation unit specifies a region of the solder for joining the substrate and the electronic component, the solder being photographed on the cross-sectional images, and creates a pseudo cross-sectional image in which an imaged region is made to have a thickness in a pseudo manner by piling up the cross-sectional images on which the solder is photographed. An inspection unit estimates whether the joint state of the solder is good or bad by performing image analysis on the region of the solder photographed on the surface image and the pseudo cross-sectional image.
G06K 9/00 - Méthodes ou dispositions pour la lecture ou la reconnaissance de caractères imprimés ou écrits ou pour la reconnaissance de formes, p.ex. d'empreintes digitales
G01R 31/04 - Essai de connexions, p.ex. de fiches de prises de courant ou de raccords non déconnectables
H05K 13/08 - Contrôle de la fabrication des ensembles
A board surface detection unit (38) conducts imagery analysis of cross-sectional images of inspected bodies including boards and electronic parts, thereby specifying, out of the aforementioned cross-sectional images, the surface images which show board surfaces. A pseudo-cross-sectional-image generation unit (40) specifies, on the basis of the aforementioned surface images, the region of solder that joins the aforementioned board and the aforementioned electronic parts both of which are shown in the aforementioned cross-sectional images. Then the pseudo-cross-sectional-image generation unit (40) generates, in the imaging range, pseudo-cross-sectional-images which are thickened on a pseudo basis by piling up the aforementioned cross-sectional images which show the aforementioned solder. An inspection unit (42) conducts imagery analysis of the region of the aforementioned solder shown by the aforementioned surface images and of the region of the aforementioned solder shown by the aforementioned pseudo-cross-sectional-images, thereby estimating the acceptability of the joining condition of the aforementioned solder.
G01N 23/04 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux
A holding unit fixes a body which is to be inspected and is integrally constituted with a jig. An inspecting unit detects radiation which has passed through the body to be inspected or the jig and generates a transfer image. A shift quantity specifying unit (36) acquires the transfer image of the jig, specifies the feature points of the jig in the transfer image, and calculates the shift quantity of between the feature points of the jig in the transfer image and the center of the entire transfer image. An image capture control unit (40) corrects the positional relationship between the body to be inspected and a radiation detector which obtains the transfer image of the body to be inspected based on the shift quantity.
G01N 23/04 - Recherche ou analyse des matériaux par l'utilisation de rayonnement [ondes ou particules], p. ex. rayons X ou neutrons, non couvertes par les groupes , ou en transmettant la radiation à travers le matériau et formant des images des matériaux
G01B 15/00 - Dispositions pour la mesure caractérisées par l'utilisation d'ondes électromagnétiques ou de radiations de particules, p. ex. par l'utilisation de micro-ondes, de rayons X, de rayons gamma ou d'électrons
Provided is a substrate inspecting system wherein a line sensor (38) of a first scanning unit (30) scans through a telecentric lens (40) a vertically viewed image of a surface of a substrate (2) to be inspected. The line sensor (38) of a second scanning unit (32) scans an image of a substrate (2) to be inspected, at an angle tilted to a first direction by a first angle (α) from a direction vertical to the surface to be inspected. The line sensor (38) of a third scanning unit (34) scans an image of the substrate (2) to be inspected, at an angle tilted to a second direction by a second angle (β) from the direction vertical to the surface to be inspected. A judging section calculates the height of the surface of the substrate (2) to be inspected by using image data obtained by the first scanning unit (30), the second scanning unit (32) and the third scanning unit (34).
G01B 11/02 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur
G01B 11/245 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en utilisant plusieurs transducteurs fixes fonctionnant simultanément
H05K 13/08 - Contrôle de la fabrication des ensembles
30.
Appearance inspection apparatus for inspecting inspection piece
A first imaging unit and a second imaging unit of an appearance inspection apparatus for inspecting a board scan one surface of the board by being moved relative to the board. A third imaging unit and a fourth imaging unit are provided opposite to the first imaging unit and the second imaging unit, sandwiching the board, and scan the other surface of the board by being moved relative to the board. A board transport motor moves the imaging units and the board relative to each other. Each of the imaging units completes scanning the board in a single step of movement for moving the board and the scanning units relative to each other.
G06K 9/00 - Méthodes ou dispositions pour la lecture ou la reconnaissance de caractères imprimés ou écrits ou pour la reconnaissance de formes, p.ex. d'empreintes digitales
31.
Apparatus for inspecting appearance of inspection piece
An appearance inspection apparatus for inspecting a board is provided with multiple imaging units for capturing respective images of the board. Multiple slave personal computers respectively provided for the multiple imaging units inspect the board by referring to data of images of the board captured by the respective imaging units. Each of the multiple slave personal computers transmits, to other slave personal computers, shared data that are necessary for inspection by other slave personal computers. The shared data is acquired by each of the slave personal computers from data of an image of the inspection piece captured by an associated imaging unit. Each of the slave personal computers inspects an appearance of the board by referring to the shared data received from another slave personal computer.
G06K 9/00 - Méthodes ou dispositions pour la lecture ou la reconnaissance de caractères imprimés ou écrits ou pour la reconnaissance de formes, p.ex. d'empreintes digitales
