The invention provides a master disc comprising a stack of a substrate (10), a phase transition material layer (40), a heat absorption layer (30) provided between the substrate and the phase transition layer, and an anisotropic heat sink layer (20) provided between the substrate and the absorption layer. Further, a method of manufacturing a master disc is provided. A stack having an upper side (41) and a lower side (11) is provided, wherein the stack comprises a substrate provided at the lower side of the stack, a phase transition material layer, a heat absorption layer provided between the substrate and the phase transition layer, and an anisotropic heat sink layer provided between the substrate and the absorption layer. The upper side of the stack is exposed to a laser beam and developed.
G11B 7/26 - Appareils ou procédés spécialement établis pour la fabrication des supports d'enregistrement
G11B 23/00 - Supports d'enregistrement, non spécifiques du procédé d'enregistrement ou de reproductionAccessoires, p. ex. réceptacles, spécialement adaptés pour coopérer avec des appareils d'enregistrement ou de reproduction
2.
PRODUCTION OF STAMPS, MASKS OR TEMPLATES FOR SEMICONDUCTOR DEVICE MANUFACTURING
The invention provides a method of manufacturing a substrate comprising at least two areas with the same or different pattern(s) on the surface of the substrate. The process comprises the steps of providing the substrate applying a layer of a radiation sensitive material on the substrate, recording the pattern(s) on the at least two areas (2a to 2d) in the layer of radiation sensitive material by circularly moving a focused recording spot in one sweep over the entire substrate (1) in the layer of sensitive material by moving a focused laser spot in one sweep over the entire substrate, and developing the layer of sensitive material. The invention further provides a method for manufacturing at least two stamps or masks for manufacturing of semiconductor devices using a mastering process.
G03F 7/00 - Production par voie photomécanique, p. ex. photolithographique, de surfaces texturées, p. ex. surfaces impriméesMatériaux à cet effet, p. ex. comportant des photoréservesAppareillages spécialement adaptés à cet effet
G11B 7/26 - Appareils ou procédés spécialement établis pour la fabrication des supports d'enregistrement
The present invention relates to an integrated mastering system and a method for manufacturing master discs for optical media. The system according to the invention comprises means for recording information on a master disc including means for applying a material layer to a master disc, a laser beam recorder for illuminating the material layer in a desired pattern based on the information to be recorded, means for developing the material layer, means for determining the quality of the developed layer based on measurement of a light beam diffracted by the pattern recorded on the master disc, and means for controlling the means for recording on the basis of the quality of the master disc. According to the method of the present invention, the quality of the developed layer of a master disc is determined and the mastering process settings of a subsequent master disc are controlled.
A method for controlling handling of a plurality of substrates to be processed in an integrated mastering system and an integrated mastering system for performing the method of the invention is provided. The system comprises various treating stations to be passed through by the substrates in a predetermined order, a buffer for temporarily storing the substrates and a handler for moving the substrates between the buffer and the treating stations. According to the method each one of the plurality of substrates is moved to the buffer upon completion of processing in each one of said treating stations.
The present invention relates to a laser beam recorder for mastering an optical medium, including a laser for producing a laser beam, means for focusing the laser beam on a surface of the optical medium, and an acousto-optic modulator. According to the present invention, an amplitude and a frequency of an electric signal applied to the acousto-optic modulator is controlled in a way that both, the intensity and a deflection angle of the focused laser beam are controlled by the single acousto-optic modulator.
G11B 7/26 - Appareils ou procédés spécialement établis pour la fabrication des supports d'enregistrement
G11B 7/125 - Sources de faisceau lumineux correspondantes, p. ex. circuits de commande de lasers spécialement adaptés pour les dispositifs d'enregistrement optiqueModulateurs, p. ex. moyens de commande de la taille ou de l'intensité des spots optiques ou traces optiques
The present invention provides a linear motor for a laser beam recorder for mastering of optical media. The linear motor comprises a base and an actuator, the actuator being mounted on the base in a flexible way, such as via a leaf spring. The actuator may comprise a balance mass acting as a counter mass. The balance mass is preferably formed by an essential component of the linear motor.
G11B 7/09 - Dispositions ou montage des têtes ou des sources lumineuses par rapport aux supports d'enregistrement comportant des dispositions pour déplacer le rayon lumineux ou son plan focal dans le but de maintenir l'alignement relatif du rayon lumineux et du support d'enregistrement pendant l'opération de transduction, p. ex. pour compenser les irrégularités de surface ou pour suivre les pistes du support
G11B 7/26 - Appareils ou procédés spécialement établis pour la fabrication des supports d'enregistrement
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