Provided is a composition containing ceramic particles α having a primary particle diameter of less than 10 nm, ceramic particles β having a primary particle diameter of 10 nm or greater, a carboxylic acid having fewer than 5 carbon atoms, a binder, and an organic solvent, the ratio (ceramic particles β/ceramic particles α) of the ceramic particles β to the ceramic particles α being 1-20 by mass ratio, and the average primary particle diameter of the ceramic particles β being 20 nm or greater.
C04B 38/00 - Mortiers, béton, pierre artificielle ou articles de céramiques poreuxLeur préparation
B01D 39/20 - Autres substances filtrantes autoportantes en substance inorganique, p. ex. papier d'amiante ou substance filtrante métallique faite de fils métalliques non-tissés
A solar cell (1) is provided with, in order from a substrate (2), an electron transport layer (4), a porous electron transport layer (5), a spacer layer (6), and a hole transport layer (7). The porous electron transport layer (5) and the spacer layer (6) each include a perovskite compound in the pore portions therein. The spacer layer (6) has a porosity of 70% or higher.
H10K 30/40 - Dispositifs organiques sensibles au rayonnement infrarouge, à la lumière, au rayonnement électromagnétique de plus courte longueur d'onde ou au rayonnement corpusculaire comprenant une structure p-i-n, ayant p. ex. un absorbeur pérovskite entre des couches de transport de charge de type p et de type n
Provided is an electrostatic chuck member including: a dielectric substrate having a placement surface on which a sample is mounted, wherein the dielectric substrate comprises a first supporting plate and a second supporting plate which are stacked in a thickness direction thereof; and an adsorption electrode embedded in the dielectric substrate, in which a gas flow path is provided by a recessed groove, which is provided between the first supporting plate and the second supporting plate which have surfaces facing each other, wherein the recessed groove is formed in at least one of the surfaces thereof and is covered with the other thereof, a dimension of the gas flow path in a height direction is 90 μm or more and 300 μm or less, and a width dimension of the gas flow path is 500 μm or more and less than 3000 μm.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
4.
METHOD FOR CONTROLLING GYPSUM CONVERSION REACTION AND METHOD FOR PRODUCING CALCIUM CARBONATE
The present invention provides a method for controlling a gypsum conversion reaction and a method for producing calcium carbonate, wherein in a gypsum conversion reaction, in which calcium carbonate is obtained by bringing a gypsum-containing material into contact with a solution A containing a specific alkali metal salt A that has high versatility and can be applied to a wide variety of materials, that can be done with minimal handling and easy operation, one condition selected from among the pH of the reaction solution of the solution A and the gypsum-containing material, and at least one concentration selected from among the carbonate ion concentration, the hydrogen carbonate ion concentration, and the calcium ion concentration in the reaction solution, is monitored, and the end point of the reaction is determined.
KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION (Japon)
Inventeur(s)
Kikuchi, Sadato
Nakamura, Shogo
Oizumi, Risa
Konishi, Masayoshi
Higa, Mitsuru
Taniguchi, Ikuo
Abrégé
A method in which carbon dioxide can be efficiently fixed, calcium carbonate that is a valuable can be efficiently produced from carbon dioxide, and a waste gypsum board can be effectively recycled without being wasted as it is by using the waste gypsum board for fixing carbon dioxide. This method includes: bringing a first solution containing an alkali metal hydroxide and gas containing carbon dioxide into contact with each other to produce a second solution containing an alkali metal salt; and bringing the second solution and a gypsum-containing material into contact with each other to produce calcium carbonate.
B01D 53/14 - Séparation de gaz ou de vapeursRécupération de vapeurs de solvants volatils dans les gazÉpuration chimique ou biologique des gaz résiduaires, p. ex. gaz d'échappement des moteurs à combustion, fumées, vapeurs, gaz de combustion ou aérosols par absorption
B01D 53/78 - Procédés en phase liquide avec un contact gaz-liquide
MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, AND METHOD FOR MANUFACTURING MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE
This member for a semiconductor manufacturing device includes a pair of ceramic plates, and an internal electrode sandwiched between the pair of ceramic plates. The ceramic plates each include an insulating material and a first electroconductive material. The internal electrode contains, as materials, a second electroconductive material and an element included in the first electroconductive material. Diffusion layers containing a higher amount of the aforementioned element than the interior of the internal electrode are formed on portions of the internal electrode that are in contact with the ceramic plates.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
Disclosed is an electrostatic chuck device which is provided with: an electrostatic chuck member that contains a ceramic material as a constituent material; a base that contains a metal-based composite material as a constituent material; and an adhesive layer that bonds the electrostatic chuck member and the base to each other. The adhesive layer contains a resin material and a thermally conductive filler. The absolute value of the thermal expansion coefficient difference between the ceramic material and the metal-based composite material is 10 ppm/K or less. The content ratio of the thermally conductive filler in the adhesive layer is 50% by mass to 80% by mass inclusive.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
Provided is an electrostatic chuck device including: an electrostatic chuck plate including a dielectric substrate that includes a placement surface on which a sample is mounted and an adsorption electrode that is positioned inside the dielectric substrate; and a base that supports the electrostatic chuck plate from a side opposite to the placement surface, in which in the electrostatic chuck plate, a first through-hole through which gas is supplied to the placement surface is provided, a porous body that allows passage of the gas is inserted into the first through-hole, a first adhesive layer that bonds an inner peripheral surface of the first through-hole and an outer peripheral surface of the porous body to each other is provided between the inner peripheral surface and the outer peripheral surface, and a thickness dimension of the first adhesive layer is 0 mm or more and 0.15 mm or less, at least in a region of 0.1 mm from the placement surface.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
9.
OPTICAL WAVEGUIDE DEVICE, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION APPARATUS USING SAME
An object of the present invention is to provide an optical waveguide device that prevents peeling of an optical waveguide substrate and that suppresses a propagation loss of a light wave of an optical waveguide.
An object of the present invention is to provide an optical waveguide device that prevents peeling of an optical waveguide substrate and that suppresses a propagation loss of a light wave of an optical waveguide.
An optical waveguide device of the present invention includes an optical waveguide substrate 1 on which an optical waveguide 10 is formed, a reinforcing substrate 11 disposed under the optical waveguide substrate, a lower buffer layer B1 disposed between the optical waveguide substrate and the reinforcing substrate to join both of the optical waveguide substrate and the reinforcing substrate, and an upper buffer layer B2 disposed on an upper side of the optical waveguide substrate in contact with the optical waveguide substrate, in which a thickness d2 of the upper buffer layer is formed to be smaller than a thickness d1 of the lower buffer layer (d2
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
10.
OPTICAL MODULATOR AND OPTICAL TRANSMISSION DEVICE USING SAME
The purpose of the present invention is to provide an optical modulator in which short circuiting in wiring or the like of a wiring board is reduced even when an electronic circuit element such as a driver circuit and the wiring board are disposed close to each other. Provided is an optical modulator in which a light modulation element and an electronic circuit element (4) for inputting a high frequency signal to the light modulation element are housed in a housing (1), said optical modulator being characterized in that: the electronic circuit element (4) is adhesively fixed to the opposite surface of a block (40) from one surface in the housing (1) to which the block (40) is fixed; the optical modulator comprises wiring boards (3, 3') which are each disposed adjacent to the electronic circuit element (4) and fixed to the one surface and which are each provided, on the opposite surface thereof from the one surface, with wiring electrically connected to the electronic circuit element (4); and with reference to the one surface, the height (h1) to the surface of the block (40) to which the electronic circuit element (4) is adhesively fixed and the height (h2) to the surface of each of the wiring boards (3, 3') on which the wiring is provided differ from each other.
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
An electrostatic chuck device comprises: an electrostatic chuck part that has a dielectric substrate having a placement surface on which a plate-like sample is placed, and an attraction electrode arranged inside the dielectric substrate; and a base that supports the electrostatic chuck part from a rear surface side opposite to the placement surface and can adjust the temperature of the electrostatic chuck part. The electrostatic chuck part protrudes upward from an outer peripheral part of the upper surface of the dielectric substrate, and has an annular protrusion formed in an annular shape when viewed in the thickness direction of the electrostatic chuck part. The base is located at least partially on an inner side in a radial direction with respect to the annular protrusion when viewed in the thickness direction.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
A wafer support device includes a dielectric substrate and an RF electrode provided in the dielectric substrate. The RF electrode is divided into a plurality of zone electrodes arranged in a planar direction of the dielectric substrate. The wafer support device has: a short-circuit member interconnecting the plurality of zone electrodes; and a main power supply rod connected to the short-circuit member from a back side of the dielectric substrate.
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
13.
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
An electrostatic chuck member comprises: a plate-like dielectric substrate provided with a placement surface on which a plate-like sample is placed and a gas hole penetrating in the thickness direction; an attraction electrode arranged inside the dielectric substrate; a bias electrode arranged inside the dielectric substrate; a conductive cylindrical member surrounding the gas hole; and a conductive shield layer arranged on a side opposite to the placement surface side with respect to the attraction electrode and the bias electrode inside the dielectric substrate, and extending outward in a radial direction with the cylindrical member as a center from an outer peripheral surface of the cylindrical member.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION (Japon)
Inventeur(s)
Kikuchi, Sadato
Nakamura, Shogo
Oizumi, Risa
Konishi, Masayoshi
Higa, Mitsuru
Taniguchi, Ikuo
Abrégé
Provided is a calcium carbonate generation method and system in which calcium carbonate having a high purity can be generated using a calcium-containing waste. Provided is a calcium carbonate generation method of generating calcium carbonate from a calcium-containing waste, the calcium carbonate generation method including: a calcium dissolution step of adding aqueous hydrochloric acid to a calcium-containing waste and dissolving calcium to generate an aqueous solution containing a calcium ion; a separation step of adjusting a hydrogen ion concentration index of the aqueous solution containing a calcium ion and separating a component containing at least one selected from the group consisting of Si, Al, Mg, and heavy metal from the aqueous solution; and a calcium carbonate collection step of generating calcium carbonate using an aqueous solution obtained in the separation step and an aqueous solution containing potassium carbonate and/or sodium carbonate.
This temperature control member is formed of an electrically conductive ceramic, and has a flow path through which a heating medium flows. The electrically conductive ceramic contains a highly thermally conductive material and an electrically conductive material. The volume ratio of the highly thermally conductive material and the electrically conductive material is 10:90 to 90:10. The coefficient of thermal expansion of the electrically conductive ceramic at 800°C is at most 10×10-6/K.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
C04B 37/00 - Liaison des articles céramiques cuits avec d'autres articles céramiques cuits ou d'autres articles, par chauffage
16.
OPTICAL TRANSMITTER, OPTICAL TRANSCEIVER USING SAME, AND OPTICAL COMMUNICATION SYSTEM
The purpose of the present invention is to provide an optical transmitter in which abnormal oscillation of a laser light source is suppressed and optical loss is reduced even when the optical transmitter is constituted by using a heterogenous optical integrated circuit constituted by connecting different kinds of material substrates to each other. The present invention is an optical transmitter characterized by comprising a first substrate S1 provided with a first optical waveguide OW1 constituting an optical modulation part, a second substrate S2 joined to the first substrate S1 and provided with a second optical waveguide OW2 that inputs a light wave to the first optical waveguide OW1, and a third substrate S3 joined to the first substrate S1 and provided with a third optical waveguide OW3 that outputs a light wave from the first optical waveguide OW1, the second optical waveguide OW2 constituting a portion of a laser light source, and a junction interface between the first optical waveguide OW1 and the second optical waveguide OW2 being a resonance end face of the laser light source.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
H01S 5/026 - Composants intégrés monolithiques, p. ex. guides d'ondes, photodétecteurs de surveillance ou dispositifs d'attaque
An electrostatic chuck device, comprising: a plate-form electrostatic chuck part that has a placement surface on which a plate-form sample is placed, and that has an electrostatic attraction electrode provided to the interior thereof; and a base part that is formed in a disc shape centered on a center axis line and that, on a support surface thereof, supports the electrostatic chuck part from the side opposite from the placement surface. Inside the base part, a refrigerant flow path is provided extending along the support surface. The refrigerant flow path has a first flow path part that is centered on at least one through-hole penetrating the base part in the axial direction of the center axis line and that is formed at an interval from the hole on the radially outer side of the hole, and second flow path parts that are respectively positioned at the two sides of the first flow path part in the extension direction of the refrigerant flow path. The flow path cross-sectional area of the first flow path part is less than the flow path cross-sectional area of the second flow path part.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
C23C 16/458 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement caractérisé par le procédé utilisé pour supporter les substrats dans la chambre de réaction
H01L 21/31 - Traitement des corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour former des couches isolantes en surface, p. ex. pour masquer ou en utilisant des techniques photolithographiquesPost-traitement de ces couchesEmploi de matériaux spécifiés pour ces couches
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
18.
OPTICAL WAVEGUIDE ELEMENT AND OPTICAL MODULATION DEVICE USING SAME, AND OPTICAL TRANSMISSION DEVICE
The objective of the present invention is to provide an optical waveguide element in which a radius of curvature of an optical waveguide can be small and coupling between the TE mode and the TM mode are suppressed. The present invention is characterized in that, in an optical waveguide element including a rib-type optical waveguide 10, the rib-type optical waveguide has a straight portion AR1 and a curved portion AR3 formed at a constant curvature, the straight portion AR1 and the curved portion AR3 are connected via a curvature conversion portion AR2 having a continuously varying curvature, the straight portion and the curved portion of the rib-type optical waveguide are different from each other in height and width, and, in the curvature conversion portion AR2, the height and the width of the rib-type optical waveguide are formed such that the height and the width of the straight portion continuously change to the height and width of the curved portion, respectively.
An optical waveguide device includes a first substrate including a first optical waveguide and a low refractive index layer covering the first optical waveguide and being formed of a material having a lower refractive index than a refractive index of the first optical waveguide, and a second substrate joined to the first substrate and including a rib type optical waveguide which is a second optical waveguide and is formed of a material having an electro-optic effect, in which the first optical waveguide and the second optical waveguide have parts optically coupled to each other, and in plan view of the optical waveguide device, a protruding portion is formed in the second substrate in a boundary portion where the first optical waveguide overlaps with the second substrate, and a thickness of the second substrate in the protruding portion is set to be thinner than a thickness of the second substrate in the second optical waveguide.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
20.
OPTICAL WAVEGUIDE ELEMENT AND OPTICAL MODULATION DEVICE USING SAME, AND OPTICAL TRANSMISSION DEVICE
The purpose of the present invention is to provide an optical waveguide element having an optical waveguide substrate with a cladding layer placed on the lower surface of a thin plate in which an optical waveguide is formed, and suppressing deterioration in extinction ratio and complication of work for alignment with an optical member. The present invention relates to an optical waveguide element having a thin plate (1) in which an optical waveguide (10) is formed and an optical waveguide substrate with a clad layer (2) placed in contact with the lower surface of the thin plate, the optical waveguide element being characterized in that the optical waveguide has a light input part and a light output part arranged on the same side surface of the optical waveguide substrate, and a light absorber (LA), which is placed between the light input part and the light output part and has an exposed part on the side surface, is provided.
G02B 6/12 - Guides de lumièreDétails de structure de dispositions comprenant des guides de lumière et d'autres éléments optiques, p. ex. des moyens de couplage du type guide d'ondes optiques du genre à circuit intégré
21.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION APPARATUS USING SAME
An optical waveguide element according to the present invention has a composite substrate provided with: a thin plate (1) in which an optical waveguide (10) is formed; and a holding substrate (4) to which the thin plate (1) is joined with an intermediate layer (2) therebetween. The optical waveguide element is characterized in that: a level difference is formed at a portion of side surfaces of the composite substrate; at the level difference, the position of a first side surface (B1) including the thin plate (1) is retreated inward of the composite substrate from the position of a second side surface (B2) including a holding substrate (3); and a protective film (PC) is disposed on the first side surface (B1).
G02B 6/122 - Éléments optiques de base, p. ex. voies de guidage de la lumière
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
22.
OPTICAL WAVEGUIDE ELEMENT, OPTICAL MODULATION DEVICE USING SAME, AND OPTICAL TRANSMISSION APPARATUS
The purpose of the present invention is to provide an optical waveguide element which is formed by joining together a thin plate having an electro-optical effect and a holding substrate with an intermediate layer interposed therebetween and in which a DC drift and a temperature drift are suppressed by releasing electric charges accumulated at an interface between the thin plate and the intermediate layer. The present invention pertains to an optical waveguide element which has a thin plate (1) having an electro-optical effect, a holding substrate (3) for holding the thin plate (1), and an intermediate layer (2) interposed between the thin plate (1) and the holding substrate (3), and in which the thin plate (1) has an optical waveguide (10) formed thereon, and electrodes (E1-E3) for applying an electric field to the optical waveguide are provided on the thin plate, said optical waveguide element being characterized in that a part of each of the electrodes reaches the intermediate layer (2) via a through-hole (12) in the thin plate.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
23.
METHOD FOR PRODUCING AMMONIUM NITRATE USING NITROGEN DIOXIDE IN CEMENT EXHAUST GAS
A method for producing ammonium nitrate comprises: a nitrogen dioxide recovery step in which nitrogen dioxide in a cement exhaust gas is brought into contact with water to produce an NOx-containing solution; a reduction reaction step in which a reductive catalyst is brought into contact with the NOx-containing solution to produce ammonia; an ammonia recovery step in which ammonia is vaporized with a waste heat gas; a solid-liquid separation step in which a remaining material obtained after the recovery of ammonia is subjected to solid-liquid separation to separate iron hydroxide from NOx in the unused remaining portion; a neutralization step in which a nitrate nitrogen-/nitrite nitrogen-containing solution that has been separated in the preceding step and the NOx-containing solution are brought into contact with the vaporized and recovered ammonia to prepare ammonium nitrate; and a catalyst production step in which magnetite to be used in the reduction reaction step is produced by reacting iron sulfate with an aqueous sodium hydroxide solution and then subjecting a resultant product to solid-liquid separation, the aqueous sodium sulfate solution in the solid-liquid separation is separated into sodium hydroxide and sulfuric acid by electrodialysis, and the sodium hydroxide is used in a circulatory manner in the preparation of the magnetite. By employing this method, nitrogen dioxide in a cement exhaust gas is treated easily and highly efficiently and environmental load is reduced.
Provided are: a combustion method using a fuel combustion device provided with a fuel supply mechanism having a combustible-powder supply mechanism that supplies a combustible powder, a fuel-gas supply mechanism that supplies a fuel gas, and a non-combustible-powder supply mechanism that supplies a non-combustible powder, the combustion method including maintaining the radiation heat transfer amounts of various burners while reducing the amount of fossil fuel used as fuel supplied to fuel combustion devices provided to various facilities such as cement firing facilities, whereby the amount of heat transferred to an object being heated such as a powder raw material of cement clinker is maintained, a state suitable for firing is maintained, the discharge amount of carbon dioxide discharged from the various facilities is reduced, and the various facilities can be operated at low cost; a cement manufacturing method; and a cement firing facility.
F23C 1/12 - Appareils à combustion spécialement adaptés à la combustion de plusieurs sortes de combustibles simultanément ou alternativement, au moins un des combustibles étant fluide ou étant un combustible solide en suspension dans l’air du combustible gazeux et du combustible pulvérulent
This electrostatic chuck device is provided with: an electrostatic chuck plate having a dielectric substrate that has a mounting surface on which a sample is to be placed, and an attraction electrode positioned inside the dielectric substrate; and a base that supports the electrostatic chuck plate from the opposite side of the mounting surface. The electrostatic chuck plate has gas holes penetrating in the thickness direction of the electrostatic chuck plate. The gas holes are each provided with a gas hole member through which gas passes. The volume resistivity of the material of the gas hole member is 1.0×103Ω·cm to 1.0×1010Ω·cm.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
C23C 16/458 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement caractérisé par le procédé utilisé pour supporter les substrats dans la chambre de réaction
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
In an optical waveguide device having a plurality of intersections between a convex optical waveguide and a signal electrode, the generation of disturbance modulation at the intersections is effectively reduced, thereby achieving good operating characteristics. An optical waveguide device includes a substrate on which an optical waveguide is formed, an intermediate layer formed on the substrate, and a signal electrode and a ground electrode formed on the intermediate layer, in which the optical waveguide includes a protruding portion extending on the substrate, the signal electrode has an action portion that extends along the optical waveguide and controls a light wave propagating through the optical waveguide, and an intersection that crosses over the optical waveguide, and the intermediate layer is formed such that a thickness at the intersection is thicker than a thickness at the action portion.
G02F 1/225 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence dans une structure de guide d'ondes optique
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
G02F 1/21 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence
Disclosed is an electrostatic chuck device which is provided with: an electrostatic chuck member that contains a ceramic material; a base that contains silicon carbide as a material; and a bonding layer that is composed of a metal material and bonds the electrostatic chuck member and the base to each other. The electrostatic chuck member contains 50% by volume or more of aluminum oxide if the entire electrostatic chuck member is taken as 100% by volume, and the base contains 75% by volume to 100% by volume (inclusive) of silicon carbide if the entire base is taken as 100% by volume.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
C04B 37/00 - Liaison des articles céramiques cuits avec d'autres articles céramiques cuits ou d'autres articles, par chauffage
28.
OPTICAL DEVICE, OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION DEVICE
An object is to provide an optical device for which size reduction can be achieved, and for which an increase in manufacturing cost is suppressed. An optical device of the present invention is an optical device in which an optical component is accommodated inside a case, the optical device including an optical component fixing member OF on which the optical component is mounted, in which a side surface portion CS and a bottom surface portion CB of the case are joined, and the optical component fixing member OF abuts on the side surface portion CS and is joined to the bottom surface portion CB.
G02B 6/30 - Moyens de couplage optique pour usage entre fibre et dispositif à couche mince
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
A ceramic joined body includes: a pair of ceramic plates; and an electrode layer and an insulating layer that are interposed between the pair of ceramic plates and, in which the insulating layer is formed of an insulating material and a conductive material.
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
30.
OPTICAL WAVEGUIDE ELEMENT, OPTICAL MODULATION DEVICE USING THE SAME, AND OPTICAL TRANSMITTER
Provided is an optical waveguide element that can suppress insertion loss related to coupling to an optical fiber or the like while achieving a reduction in size of an optical waveguide element, and has a SSC structure with high light resistance, heat resistance, or manufacturing efficiency. An optical waveguide element includes an optical waveguide substrate 1 having a rib-type optical waveguide 10 formed of a material having an electro-optic effect, and a holding member 2 that is disposed and fixed at a position where an input end or an output end of the rib-type optical waveguide is formed, to overlap the optical waveguide substrate, in which another optical waveguide 20 with a mode field diameter greater than that of the rib-type optical waveguide is formed on a surface of the holding member facing the rib-type optical waveguide, and the optical waveguide substrate and the holding member are bonded through an adhesive layer 30.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
31.
ELECTROSTATIC CHUCK DEVICE AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK DEVICE
This electrostatic chuck device comprises: a plate-like electrostatic chuck that has a mounting surface directed toward one side in the thickness direction, that supports a planar sample on the mounting surface, and that includes an inner electrode for electrostatic suction; a base that supports the electrostatic chuck from the other side in the thickness direction; a plurality of spacers arranged between the electrostatic chuck and the base; and an adhesive layer that has an adhesive and a filler introduced into the adhesive and that is filled between the electrostatic chuck and the base. The adhesive layer is provided, as seen in the thickness direction, with an arrangement region in which the plurality of spacers are dispersed and arranged, and a blank region in which no spacer is arranged. As seen in the thickness direction, the blank region of the adhesive layer extends in a belt-like manner from the center of the adhesive layer toward the outside in radial directions, and the width of the blank region is 10-100 mm.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
C04B 37/02 - Liaison des articles céramiques cuits avec d'autres articles céramiques cuits ou d'autres articles, par chauffage avec des articles métalliques
Provided is a cement firing facility in which, by effectively utilizing the combustion offgas generated at the cement firing facility, the concentration of carbon dioxide emitted from the cement firing facility is increased, carbon dioxide is efficiently recovered, and fuel combustibility is improved thereby increasing the thermal efficiency of the cement firing facility. Also provided is a firing method employed at the cement firing facility.
Provided are: a method which is for recycling and effectively utilizing waste from a cement production process, and in which calcium carbonate generated by utilizing the waste from the cement production process, and hydrochloric acid generated in the middle of the process, are effectively utilized to prepare a vinyl chloride resin or the like; and a system useful for carrying out the method. This method for reusing and recycling waste from a cement production process comprises: performing an electrodialysis treatment on an aqueous solution containing potassium chloride obtained by washing chlorine bypass dust from the cement production process with water, to generate hydrochloric acid water and an aqueous solution containing potassium hydroxide; adding a portion of the hydrochloric acid water to calcium-containing waste to generate an aqueous solution containing calcium ions; adjusting the pH of the aqueous solution containing calcium ions to separate impurities; bringing carbon dioxide from the cement production process into contact with the aqueous solution containing potassium hydroxide obtained by the electrodialysis treatment to generate an aqueous solution containing potassium carbonate; generating an aqueous solution containing calcium carbonate and potassium chloride by using potassium carbonate and the aqueous solution containing calcium ions obtained through the separation step; and utilizing a portion of the hydrochloride acid water obtained by the electrodialysis and the generated calcium carbonate in the preparation of a vinyl chloride resin or the like.
B09B 3/70 - Traitement chimique, p. ex. ajustement du pH ou oxydation
B09B 3/80 - Destruction de déchets solides ou transformation de déchets solides en quelque chose d'utile ou d'inoffensif impliquant une étape d'extraction
The purpose of the present invention is to provide an optical waveguide element which reduces the entrance of noise beams into a light-receiving element. An optical waveguide element equipped with a substrate (1) on which an optical waveguide (2) is formed, said optical waveguide element being characterized: in that the optical waveguide (2) has a main waveguide (2) and a branch waveguide (5) which branches off from one section of said main waveguide (2); and by being further equipped with a diffraction grating (GT) positioned at an end section of the branch waveguide (5), a light-receiving element (PD) which receives a light wave diffracted by the diffraction grating and is positioned on the substrate, and a metal film (MET1) positioned on the substrate so as to surround said diffraction grating.
G02B 6/12 - Guides de lumièreDétails de structure de dispositions comprenant des guides de lumière et d'autres éléments optiques, p. ex. des moyens de couplage du type guide d'ondes optiques du genre à circuit intégré
G02B 6/125 - Courbures, branchements ou intersections
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
35.
OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION APPARATUS USING SAME
The purpose of the present invention is to provide an optical modulation device in which a flexible circuit substrate can be bent by a simple configuration independently of the material of a housing thereof, and stress that occurs in the housing of the flexible circuit substrate or a part for attachment to a printed substrate is alleviated. The present invention is an optical modulation device in which an optical modulation element OME is accommodated in a housing CA, the optical modulation device being disposed on an external circuit substrate PCB, and the optical modulation device having a flexible circuit substrate FPC that is electrically connected to an electric line on the external circuit substrate, wherein the optical modulation device is characterized in that a protruding part B is formed on a surface of the flexible circuit substrate FPC that is in contact with the surface of the housing, and the flexible circuit substrate is bent toward the external circuit substrate by contact of the protruding part with the housing.
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
36.
SURFACE-MODIFIED METAL OXIDE PARTICLES, SEALING MATERIAL, SEALING MEMBER, LIGHT-EMITTING DEVICE, AND METHOD FOR MANUFACTURING LIGHT-EMITTING DEVICE
These surface-modified metal oxide particles are metal oxide particles that have been surface-modified using a silane compound. The refractive index of the metal oxide particles before surface modification is 1.70-2.00, and the average primary particle diameter of the metal oxide particles before surface modification is 5-100 nm. The particle diameter D50 is 0.1-1.30 µm when the cumulative volume percentage of the dry particle size distribution of the metal oxide particles that have been surface modified is 50%.
C01B 13/14 - Méthodes de préparation des oxydes ou hydroxydes en général
C01F 7/021 - Post-traitement des oxydes ou des hydroxydes
C09K 11/02 - Emploi de substances particulières comme liants, revêtements de particules ou milieux de suspension
C09K 11/80 - Substances luminescentes, p. ex. électroluminescentes, chimiluminescentes contenant des substances inorganiques luminescentes contenant des métaux des terres rares contenant de l'aluminium ou du gallium
H01L 23/29 - Encapsulations, p. ex. couches d’encapsulation, revêtements caractérisées par le matériau
H01L 23/31 - Encapsulations, p. ex. couches d’encapsulation, revêtements caractérisées par leur disposition
H01L 33/56 - Matériaux, p.ex. résine époxy ou silicone
37.
METHOD FOR PRODUCING YELLOW PHOSPHORUS USING WASTE COMBUSTION EXHAUST HEAT
The purpose is to provide a method for producing yellow phosphorus using waste combustion exhaust heat with which it is possible to form an environmentally excellent circulation cycle suited to cement factories, etc., in particular and to reduce environmental impact by using combustion exhaust heat from burning waste and effectively using the residue discharged in the process for producing yellow phosphorus as a cement raw material. This method for producing yellow phosphorus using waste combustion exhaust heat comprises a step (1) in which an acid or alkali is added to phosphorus-containing waste or phosphate ore to extract crude phosphoric acid from the waste and the residue is used as a cement raw material, then a step (2) in which a reducing agent is added to the extracted crude phosphoric acid and dehydration is performed at 100-300°C using exhaust heat, then a step (3) in which the dehydrated crude phosphoric acid is heated to 300-1300°C using exhaust heat from a cement factory to perform direct reduction and generate yellow phosphorus.
An optical waveguide device includes an optical waveguide formed on a substrate, in which a protuberant portion is formed on a surface of the substrate, the optical waveguide is disposed on the protuberant portion and is formed to have a larger width than a width of a part of the protuberant portion, and a low refractive index layer is disposed to cover the optical waveguide and to be in contact with at least a part of the protuberant portion, and has a lower refractive index than the optical waveguide.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
39.
Optical Waveguide Device, and Optical Modulation Device and Optical Transmission Apparatus Using Same
An optical waveguide device includes an optical waveguide formed on a substrate, in which an optical modulator section that modulates a light wave propagating through the optical waveguide is formed in a part of the optical waveguide, in which a first dielectric layer covers the optical waveguide, and a second dielectric layer formed of a different material from the first dielectric layer is disposed on the first dielectric layer in a part of the optical waveguide excluding the optical modulator section.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
G02F 1/03 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr
40.
Optical Waveguide Device, and Optical Modulation Device and Optical Transmission Apparatus Using Same
An optical waveguide device including an optical waveguide formed on a substrate is provided, in which a directional coupler is disposed in a part of the optical waveguide, the directional coupler includes one center waveguide and two side waveguides disposed to interpose the center waveguide between the side waveguides, the side waveguides are disposed to come close to the center waveguide from a position where the side waveguides are separated from the center waveguide and then to be separated again from the center waveguide in a traveling direction of a light wave, and the center waveguide and the side waveguides are not in contact with each other.
G02F 1/225 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence dans une structure de guide d'ondes optique
G02F 1/21 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence
41.
OPTICAL WAVEGUIDE DEVICE, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION APPARATUS USING SAME
An object of the present invention is to suppress deterioration in a drift characteristic by removing unnecessary light propagating through a substrate. Furthermore, an optical waveguide device that can also suppress a propagation loss of a high-frequency signal is provided. An optical waveguide device of the present invention is an optical waveguide device including an optical waveguide 10 formed on a substrate 1, and an electrode (SE1, GE1) disposed on the substrate, in which a first underlayer 21 of a first material formed on an upper surface of the substrate 1 and a second underlayer 20 of a second material different from the first material formed on an upper surface of the first underlayer are disposed in at least a part of a region on the substrate in which the electrode is formed, and the electrode is formed on an upper side of the second underlayer.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
G02F 1/03 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr
42.
OPTICAL WAVEGUIDE DEVICE, AND OPTICAL TRANSMISSION APPARATUS AND OPTICAL MODULATION DEVICE USING SAME
An optical waveguide device in which deterioration of characteristics such as velocity matching, characteristic impedance matching, and an optical loss caused by positional deviation of each electrode layer is suppressed even in a case where a control electrode is formed with a plurality of electrode layers is provided. An optical waveguide device includes a substrate 1 consisting of a material having an electro-optic effect, an optical waveguide 2 formed on the substrate 1, and control electrodes (E1, E2) disposed on the substrate to interpose the optical waveguide between the control electrodes in order to apply an electric field to the optical waveguide 2, in which the control electrodes include at least two or more electrode layers disposed in a sequence of first electrode layers E1 and second electrode layers E2 on the substrate, an insulating layer IL that covers a space between the first electrode layers between which the optical waveguide is interposed and that extends to at least a part of upper surfaces of the first electrode layers is disposed, and at least a part of the second electrode layers E2 is formed on an upper surface of the insulating layer IL.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
43.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL TRANSMISSION APPARATUS AND OPTICAL MODULATION DEVICE USING SAME
Provided is an optical waveguide device including an optical waveguide, and a spot size converter connected to the optical waveguide, in which a propagation loss is further suppressed even in a case where an insulating layer covering the optical waveguide is disposed. An optical waveguide device includes an optical waveguide 2 formed on a substrate 1, and a spot size converter SSC that changes a mode field diameter of a light wave propagating through the optical waveguide in at least one end of the optical waveguide 2, in which an insulating layer IL that covers at least an upper surface of the optical waveguide is provided, and the insulating layer IL is continuously disposed to the spot size converter SSC along the optical waveguide.
An optical waveguide device in which an optical loss is reduced by removing an air bubble inside an adhesive layer for joining a reinforcing member from near an optical waveguide or the like even in a case where a protruding part such as a rib type optical waveguide or a spot size converter is formed on an optical waveguide substrate is provided. An optical waveguide device includes an optical waveguide substrate (1, 2) provided with an optical waveguide (10, 12), and a reinforcing member (3) disposed on an upper side of the optical waveguide (10, 12) near an end portion of the optical waveguide (10, 12), the optical waveguide substrate (1, 2) and the reinforcing member (3) being joined through an adhesive layer (4), in which a protective layer (13) that covers the optical waveguide (10, 12) is provided on the optical waveguide (10, 12) positioned on a lower side of the reinforcing member (3), and the adhesive layer (4) is disposed outside the protective layer (13).
An object is to provide an optical waveguide device including a dielectric layer covering an optical waveguide, in which occurrence of a problem such as peeling or cracking of the dielectric layer is suppressed. An optical waveguide device of the present invention includes an optical waveguide 2 formed on a substrate 1, and a dielectric layer IL covering the optical waveguide, in which the optical waveguide 2 is a rib type optical waveguide, and at least a part of a side surface of the rib type optical waveguide along a longitudinal direction has a slope shape formed with a curved surface (R6).
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
G02F 1/03 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr
46.
OPTICAL WAVEGUIDE ELEMENT, OPTICAL MODULATOR, AND OPTICAL TRANSMISSION DEVICE
This optical waveguide element comprises: an optical waveguide (31) that is disposed on a main surface of an optical substrate (30); and a control electrode (42) that controls light waves propagating through the optical waveguide (31). The control electrode (42) includes a first control electrode (43) and a second control electrode (44) facing each other on the main surface of the optical substrate (30) with the optical waveguide (31) therebetween. The first control electrode (43) and the second control electrode (44) each include: a common electrode (43a), (44a) that extends along the optical waveguide (31); multiple segment electrodes (43c), (44c) that are divided along the extending direction of the optical waveguide (31) and that are disposed closer to the optical waveguide (31) than the common electrode (43a), (44a) is; multiple connection electrodes (43b), (44b) that connect the segment electrodes (43c), (44c) to the common electrode (43a), (44a); and an auxiliary electrode (43d), (44d) that extends in the extending direction of the optical waveguide (31) and connects the adjacent connection electrodes (43b), (44b) to each other.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
This electrostatic chuck device comprises: a plate-shaped electrostatic chuck portion that supports a planar sample on a mounting surface thereof facing one side in a thickness direction, and that contains an internal electrode for electrostatic adhesion; a base portion that supports the electrostatic chuck portion from the other side in the thickness direction and cools the electrostatic chuck portion; an adhesive layer that is positioned between the electrostatic chuck portion and the base portion, and includes a first adhesive portion fixing the electrostatic chuck portion and the base portion; and a tubular insulator. The electrostatic chuck portion is provided with a first through-hole extending along the thickness direction. The base portion is provided with a second through-hole extending along the thickness direction and communicating with the first through-hole. The insulator is disposed in the second through-hole. The base portion has an opposing surface opposing the electrostatic chuck portion, and a curved surface which is positioned at the opening of the second through-hole and is continuous with the opposing surface.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
48.
OPTICAL WAVEGUIDE ELEMENT, OPTICAL MODULATOR, AND OPTICAL TRANSMISSION DEVICE
An optical waveguide element includes an optical waveguide arranged on a main surface of an optical substrate, and a control electrode configured to control light waves propagating through the optical waveguide. The control electrode includes a first control electrode and a second control electrode facing each other across the optical waveguide on the main surface of the optical substrate. The first control electrode and the second control electrode each include a common electrode extending along the optical waveguide, a plurality of segment electrodes arranged closer to the optical waveguide than the common electrode and divided along an extending direction of the optical waveguide, and a plurality of connection electrodes connecting each of the plurality of segment electrodes to the common electrode. A low dielectric layer having a relative dielectric constant lower than a relative dielectric constant of the optical substrate is arranged between the common electrode and the optical substrate.
G02F 1/225 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence dans une structure de guide d'ondes optique
G02F 1/21 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence
49.
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
An electrostatic chuck member which has a substrate, one main surface of which is a placement surface on which a plate-shaped sample is placed, and an electrostatic adsorption electrode provided inside the substrate or on the side thereof opposite the placement surface, wherein: the lateral circumferential surface of the substrate which is contiguous with the placement surface at least has a first curved surface, which is a convex surface provided in the circumferential direction in the circumferential edge section of the placement surface, and a second curved surface provided in the circumferential direction at a height position which differs from that of the first curved surface; the substrate has a ring-shaped projecting section provided along the circumferential edge section of the placement surface; the outer edge of the electrostatic adsorption electrode overlaps the ring-shaped projecting section when seen from a planar view; the outer-circumferential side of the ring-shaped projecting section is provided with at least part of the first curved surface; and the inner-circumferential side of the ring-shaped projecting section has a third curved surface, which is a convex surface provided in the circumferential direction of the inner circumference.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
50.
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
This electrostatic chuck member has a substrate having one main surface as a placement surface on which a plate-like sample is placed, and an electrostatic adsorption electrode provided on the side opposite to the placement surface or inside the substrate, has at least a first curved surface which is a convex curved surface provided in the circumferential direction at a peripheral edge portion of the placement surface, and a second curved surface provided in the circumferential direction at a height position which differs from the first curved surface, in a side peripheral surface of the substrate, which is continuous with the placement surface, and has an electric field dispersion structure that disperses the electric field at the outer edge of the electrostatic adsorption electrode, near the outer edge of the electrostatic adsorption electrode.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
C23C 16/458 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement caractérisé par le procédé utilisé pour supporter les substrats dans la chambre de réaction
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
51.
LENS UNIT, OPTICAL WAVEGUIDE DEVICE, AND OPTICAL TRANSMISSION DEVICE
Mechanical strength of a lens that optically couples an optical waveguide and an optical fiber provided on a substrate is improved. A lens unit that optically couples an optical waveguide provided on a substrate and an optical fiber has a lens portion and a holding portion that holds the lens portion, and the holding portion has a thick portion, along one side surface that is not a surface through which an optical axis passes, in which a thickness measured in a direction of the optical axis is larger than a thickness of an other portion of the holding portion.
An optical waveguide device including: an optical waveguide composed of a protruding portion extending on a substrate; a signal electrode that is formed on the substrate and controls light waves propagating through the optical waveguide, in which the optical waveguide includes a Mach-Zehnder optical waveguide including two parallel waveguides having curved portions, the signal electrode includes two signal lines for transmitting a differential signal, respectively intersecting the two parallel waveguides at the curved portions, and in an intersection region, which is a region on the substrate where the two signal lines and the two parallel waveguides intersect, at least one of the two signal lines has a signal propagation velocity faster than in a portion other than the intersection region or one of the two signal lines has a signal propagation velocity faster than an other signal line.
G02F 1/225 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence dans une structure de guide d'ondes optique
G02F 1/21 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence
53.
OPTICAL WAVEGUIDE ELEMENT, OPTICAL MODULATION DEVICE USING OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL TRANSMISSION DEVICE USING OPTICAL WAVEGUIDE ELEMENT
Provided is an optical waveguide element whereby it is possible to prevent dropout of an optical component due to internal stress that occurs in a joint between the optical component and an optical waveguide member including a substrate on which an optical waveguide is formed, and to simplify a manufacturing step pertaining to polishing of a joining surface. An optical waveguide element comprising: an optical waveguide member including a substrate 1 on which an optical waveguide is formed; and an optical component 3 that is fixed to an optical waveguide member end surface (B0) on which an input part or an output part of the optical waveguide is disposed, and that transmits input light inputted to the input part or transmits output light outputted from the output part, wherein the optical waveguide element is characterized in that portions (B1, B2) having greater roughness than the end surface (B0) of the optical waveguide member including the input part or the output part are provided in at least a portion of the optical waveguide member, which is the portion thereof to which the optical component 3 is fixed.
G02B 6/122 - Éléments optiques de base, p. ex. voies de guidage de la lumière
G02B 6/12 - Guides de lumièreDétails de structure de dispositions comprenant des guides de lumière et d'autres éléments optiques, p. ex. des moyens de couplage du type guide d'ondes optiques du genre à circuit intégré
54.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION DEVICE WHICH USE SAME
A method of roughening the upper surface of the slab waveguide includes a method of locally forming roughness using an electron beam and a method of roughening the upper surface via etching. As an etching condition for the rough surface, processing is performed under a condition in which roughness is generated compared to a processing condition for the rib top portion. Particularly, since the surface can be simply locally roughened by etching, the rough surface can be formed much more simply than that of the unnecessary light beam removing unit in Patent Literature No. 1. Roughness of the rough surface is preferably 10 nm or larger in arithmetic average roughness Ra. Roughness of an upper surface of the rib type optical waveguide is normally set to 1 nm or less
G02B 6/122 - Éléments optiques de base, p. ex. voies de guidage de la lumière
G02B 6/12 - Guides de lumièreDétails de structure de dispositions comprenant des guides de lumière et d'autres éléments optiques, p. ex. des moyens de couplage du type guide d'ondes optiques du genre à circuit intégré
The purpose of the present invention is to provide an optical modulator in which propagation loss related to transmission of a high-frequency signal is reduced. An optical modulator, in which an electro-optical conversion element E/OC and a driver circuit DRV for driving the electro-optical conversion element are housed in the same case CA, includes: a multiplexer MUX that converts an input modulation signal, which is input from an outside of the case, into an output modulation signal having a higher frequency than the input modulation signal, and supplies the output modulation signal to the driver circuit, in which the multiplexer is housed in the case CA.
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
56.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION DEVICE WHICH USE SAME
An optical waveguide device that enables a location in which an optical loss such as a propagation loss or a coupling loss occurs to be easily specified is provided. An optical waveguide device includes a substrate 1 on which an optical waveguide 2 is formed, and a grating 6 formed in a part of the optical waveguide 2 or a grating 6 connected to a monitoring optical waveguide 5 that merges with or branches from a part of the optical waveguide 2, in which inputting a light wave into the optical waveguide or outputting at least a part of the light wave propagating through the optical waveguide is performed through the grating 6.
In an optical waveguide device having a plurality of intersections between a convex optical waveguide and a signal electrode, the occurrence of disturbance modulation at the intersections is effectively reduced, thereby achieving good operating characteristics. The optical waveguide device includes an optical waveguide composed of a protruding portion extending on the substrate, and a signal electrode formed on the substrate and controlling a light wave propagating through the optical waveguide. The optical waveguide includes a Mach-Zehnder optical waveguide including two parallel waveguides having a curved portions, the signal electrode includes two signal lines intersecting the two parallel waveguides at the curved portions and transmitting a differential signal, and each of the two signal lines is configured such that the intersection lengths on the two parallel waveguides are the same as each other.
G02F 1/21 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence
G02F 1/225 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence dans une structure de guide d'ondes optique
58.
OPTICAL MODULATOR AND OPTICAL TRANSMISSION APPARATUS
An optical modulator includes an optical waveguide device including an optical waveguide and a signal electrode for controlling a light wave propagating through the optical waveguide, a drive circuit that outputs two high-frequency signals, and two termination resistors for respectively terminating the two high-frequency signals, in which one high-frequency signal among the high-frequency signals output from the drive circuit propagates through the signal electrode of the optical waveguide device and is terminated by a first termination resistor that is one of the termination resistors, an other high-frequency signal among the high-frequency signals output from the drive circuit is terminated by a second termination resistor that is an other one of the termination resistors, a resistance value of the first termination resistor is lower than a resistance value of the second termination resistor, and the signal electrode includes a plurality of sections having constant impedances different from each other.
G02F 1/225 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence dans une structure de guide d'ondes optique
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
G02F 1/21 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence
59.
SURFACE-MODIFIED ZINC OXIDE PARTICLES, DISPERSION LIQUID, COSMETIC PREPARATION, AND METHOD FOR PRODUCING SURFACE-MODIFIED ZINC OXIDE PARTICLES
Surface-modified zinc oxide particles of the disclosure are surface-modified zinc oxide particles in which the particle surfaces of zinc oxide particles are treated with a hydrolyzable surface treatment agent, in which the color difference ΔE before and after irradiation with simulated sunlight is 4.0 or lower.
A61Q 17/04 - Préparations topiques pour faire écran au soleil ou aux radiationsPréparations topiques pour bronzer
60.
POLYSILOXANE-COATED METAL OXIDE PARTICLES, DISPERSION LIQUID, COMPOSITION, COSMETIC, AND METHOD FOR PRODUCING POLYSILOXANE-COATED METAL OXIDE PARTICLES
The present invention addresses the problem of providing dimethylpolysiloxane-coated metal oxide particles having excellent hydrophobicity. The present invention also addresses the problem of providing a dispersion liquid, a composition and a cosmetic each containing the dimethylpolysiloxane-coated metal oxide particles. The present invention also addresses the problem of providing a method for producing the dimethylpolysiloxane-coated metal oxide particles. The present invention relates to: polysiloxane-coated metal oxide particles, in which the surfaces of metal oxide particles are coated with dimethylpolysiloxane, and which have a hydroxyl group detection ratio of 10% or less; and a method for producing polysiloxane-coated metal oxide particles, the method comprising a surface treatment step for mixing metal oxide particles with dimethylpolysiloxane having a kinematic viscosity of 500 mm2/s to 4000 mm2/s inclusive at 25°C, without using a solvent, to coat the surfaces of the metal oxide particles with the dimethylpolysiloxane and a step for subjecting the dimethylpolysiloxane-coated metal oxide particles to a heat treatment at 250°C to 380°C inclusive.
The objective of the present invention is to provide an optical waveguide element in which the absorption of light waves propagating in the optical waveguide by electrodes is suppressed while preventing a decrease in the efficiency of the electric field applied to the optical waveguide by the electrodes. An optical waveguide element according to the present invention comprises a substrate 1 in which an optical waveguide 10 is formed and an electrode 2 placed on the substrate in close proximity to the optical waveguide, and is characterized such that in an optical waveguide element in which the electrode comprises an electrode layer M1 and a foundation layer m1 disposed between the electrode layer and the substrate, the electrode layer is disposed between the optical waveguide and the foundation layer and protruding from the foundation layer, and the electrode layer is in direct contact with the top of the substrate.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
62.
OPTICAL WAVEGUIDE DEVICE, OPTICAL MODULATOR, AND OPTICAL TRANSMISSION APPARATUS
This optical waveguide device, which comprises lenses that couple an optical waveguide provided to an optical waveguide substrate and optical fibers, suppresses an increase in optical coupling loss between the optical waveguide and the optical fibers caused by the fixing structure for the optical waveguide substrate and the lenses. An optical waveguide device (3) comprises an optical waveguide substrate (20) on which an optical waveguide (30) is provided, and a plurality of lenses (42, 44, 52) optically coupling the optical waveguide (30) and optical fibers (10, 11), wherein: the optical waveguide (30) includes at least one input waveguide (36) on which input light is incident, and at least two output waveguides (38) that emit emission light which forms output light; an end (32) of the input waveguide (36) and ends (34, 35) of the output waveguides (38) are formed on one same end face (22) of the optical waveguide substrate (20); at least three lenses (42, 44, 52) are disposed on the end face (22) so as to respectively correspond to the at least one input waveguide (36) and the at least two output waveguides (38); and the at least three lenses (42, 44, 52) are constituted by a lens array (40) in which at least two lenses (42, 44) are integrally formed, and a single lens (50).
The purpose of the present invention is to provide an optical waveguide element in which light absorption is suppressed even when an electrode interval is narrowed. This optical waveguide element has a substrate (1) in which an optical waveguide (10) is formed, and a control electrode (3) that is arranged close to the optical waveguide on the substrate, wherein the optical waveguide element is characterized in that the optical waveguide (10) is a convex optical waveguide, and the shape of a side surface of the control electrode (3) that faces the optical waveguide is constituted from an inclined surface (32) having a prescribed angle from the substrate, and a curved surface (33) that connects to the inclined surface and forms a curved recess.
G02F 1/03 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr
64.
OPTICAL MODULATOR AND OPTICAL TRANSMISSION DEVICE USING SAME
The purpose of the present invention is to provide an optical modulator that suppresses the progression of over-etching and prevents electrode peeling and increases in drive voltage. This optical modulator comprises: a substrate 1 having an optical waveguide 10 formed thereon; and an electrode 2 arranged near the optical waveguide on the substrate. The optical modulator has an electrode underlayer 3 between the substrate 1 and the electrode 2 and is characterized in that uneven sections 5 are formed on the surface side of the substrate 1 in a predetermined range S2 extending from an end section of the electrode 2 near the optical waveguide to the inside of the electrode when the substrate is viewed in a planar view.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
65.
OPTICAL WAVEGUIDE ELEMENT, OPTICAL MODULATION DEVICE USING SAME, AND OPTICAL TRANSMISSION APPARATUS
The purpose of the present invention is to provide an optical waveguide element that suppresses absorption of light propagating through an optical waveguide by a control electrode, and prevents peeling of a dielectric layer covering the optical waveguide. An optical waveguide element according to the present invention comprises a substrate 1 on which an optical waveguide is formed, and a control electrode 2 disposed close to the optical waveguide on the substrate, and is characterized in that the optical waveguide is a rib-type optical waveguide 10, an end of the control electrode 2, which is close to the rib-type optical waveguide 10, is located on a first recessed portion C1 of the substrate forming the rib-type optical waveguide 10, the optical waveguide element has a dielectric layer 3 covering the rib-type optical waveguide 10, and is provided with a second recessed portion C2 that is part of the first recessed portion C1 and is further recessed from the shallowest position of the first recessed portion C1 in the vicinity of a bottom portion of the rib-type optical waveguide 10, and the dielectric layer 3 is disposed on at least part of the second recessed portion C1.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
66.
BIPOLAR MEMBRANE ELECTRODIALYZER AND METHOD FOR OPERATING SAME
KYUSHU UNIVERSITY,NATIONAL UNIVERSITY CORPORATION (Japon)
Inventeur(s)
Kikuchi Sadato
Oizumi Risa
Konishi Masayoshi
Higa Mitsuru
Taniguchi Ikuo
Abrégé
Provided are: a bipolar membrane electrodialyzer which has a high electric-current efficiency and in which the cation-exchange membrane is inhibited from suffering scale deposition therein due to divalent cations; and a method for operating the bipolar membrane electrodialyzer. The method is for operating a bipolar membrane electrodialyzer configured of a bipolar membrane, a cation-exchange membrane, and an anion-exchange membrane, the method comprising using the bipolar membrane electrodialyzer to yield an acid and an alkali from brine and being characterized by conducting electrodialysis while regulating the acid solution and/or the alkali solution so as to contain a salt to be decomposed.
C02F 1/469 - Traitement de l'eau, des eaux résiduaires ou des eaux d'égout par des procédés électrochimiques par séparation électrochimique, p. ex. par électro-osmose, électrodialyse, électrophorèse
KYUSHU UNIVERSITY,NATIONAL UNIVERSITY CORPORATION (Japon)
Inventeur(s)
Kikuchi Sadato
Oizumi Risa
Konishi Masayoshi
Higa Mitsuru
Taniguchi Ikuo
Abrégé
Provided are a production method and a production system of calcium carbonate that utilize a calcium-containing waste and can control the alkali content in the obtained calcium carbonate. The calcium carbonate production method for producing calcium carbonate from a calcium-containing waste includes: a calcium dissolution step for adding an aqueous hydrochloric acid solution to the calcium-containing waste and dissolving calcium to prepare an aqueous solution containing calcium ions; a separation step for adjusting the hydrogen ion concentration index of the aqueous solution containing calcium ions to separate Mg, etc. from the aqueous solution; and a calcium carbonate preparation step for adding an aqueous solution containing potassium carbonate and/or sodium carbonate to the aqueous solution containing calcium ions obtained in the separation step and reacting to prepare calcium carbonate. In this calcium carbonate production method (system), in the calcium carbonate preparation step, the rate of the addition of the aqueous solution containing potassium carbonate and/or sodium carbonate is controlled so as to adjust κ, which is represented by a specific formula, to 3000 or less.
This carbon dioxide utilizing system utilizes carbon dioxide in exhaust gas, reduces the amount of fresh concrete sludge that is generally discarded as waste and allows efficient recycling of calcium carbonate. The carbon dioxide utilizing system comprises an flue through which exhaust gas containing carbon dioxide passes, a spray nozzle that supplies fresh concrete sludge water to the flue, and a dust collector that recovers a reactant containing calcium carbonate generated by a reaction between the carbon dioxide in the exhaust gas and the fresh concrete sludge water.
B01D 46/02 - Séparateurs de particules comportant des filtres creux faits en un matériau souple, p. ex. appareils de précipitation de poussières
B01D 53/14 - Séparation de gaz ou de vapeursRécupération de vapeurs de solvants volatils dans les gazÉpuration chimique ou biologique des gaz résiduaires, p. ex. gaz d'échappement des moteurs à combustion, fumées, vapeurs, gaz de combustion ou aérosols par absorption
B01D 53/18 - Unités d'absorptionDistributeurs de liquides
An electrostatic chuck device comprising: a plate-shaped electrostatic chuck part which has an electrostatic adsorption electrode provided therein and has a mounting surface on which a plate-shaped sample is mounted; and a base part which supports the electrostatic chuck part on a support surface thereof from an opposite side of the mounting surface, wherein the base part has a disk shape which has a central axis at a center thereof, and a coolant channel extending along the support surface is provided inside the base part, wherein the coolant channel includes an outer peripheral channel which overlaps an outer edge of the plate-shaped sample when viewed from an axial direction of the central axis, and an inner peripheral channel which is disposed on an inner side in a radical direction than the outer peripheral channel, wherein at least a portion of the inner peripheral channel extends spirally around the central axis, and a channel cross-sectional area of the inner peripheral channel decreases as a distance from the central axis increases.
Provided is an optical waveguide element including spot size conversion means with suppressed optical insertion loss without complicating a manufacturing process. An optical waveguide element includes an optical waveguide substrate (4) having a rib-type optical waveguide (10) formed of a material having an electro-optic effect, and spot size conversion means for changing a mode field diameter of a light wave propagating through the optical waveguide at a position where an input end or an output end of the rib-type optical waveguide (10) is formed, in which the spot size conversion means includes a first configuration layer (1) that is connected to the rib-type optical waveguide (10) and includes a tapered portion (11) in which a width of the optical waveguide expands, a second configuration layer (2) that is laminated on the first configuration layer (1) and has a width narrower than a width of the first configuration layer (1), and a third configuration layer (3) that is disposed to cover the second configuration layer (2) excluding a part of the second configuration layer (2) close to the rib-type optical waveguide and has a width wider than the width of the second configuration layer (2).
An optical modulator that can suppress crosstalk of a modulation signal even in a case where a wiring substrate is disposed to overlap with a modulation substrate is provided. An optical modulator includes a modulation substrate 1 that includes an optical waveguide and a modulation electrode 10 for modulating a light wave which propagates through the optical waveguide, and a wiring substrate 2 provided with wiring 22 for relaying a modulation signal to be applied to the modulation electrode 10, in which the wiring substrate is disposed to overlap with the modulation substrate to cover an action portion on which modulation is performed by the modulation electrode, and an electromagnetic wave absorption member SH is disposed at at least a part of a position facing the action portion in the wiring substrate.
G02F 1/225 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence dans une structure de guide d'ondes optique
G02F 1/21 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence
72.
DISPERSION LIQUID, COMPOSITION, SEALING MEMBER, LIGHT-EMITTING DEVICE, ILLUMINATION TOOL, DISPLAY DEVICE, METHOD FOR PRODUCING DISPERSION SOLUTION, AND METHOD FOR MODIFYING SURFACES OF METAL OXIDE PARTICLES
A dispersion liquid according to the present invention contains metal oxide particles which have been surface-modified by at least one kind of silane compound and a solvent, the silane compound contains a methyl group or a methyl group and a hydrocarbon group having 2 or more carbon atoms, in a case where a transmission spectrum of the metal oxide particles that are obtained by drying the dispersion liquid by vacuum drying is measured within a wavenumber range of 800 cm−1 to 3,800 cm−1 with a Fourier transform infrared spectrophotometer, and values of the transmission spectrum are standardized such that a maximum value of the transmission spectrum in the range is 100 and a minimum value is 0, the following expression (1) is satisfied.
A dispersion liquid according to the present invention contains metal oxide particles which have been surface-modified by at least one kind of silane compound and a solvent, the silane compound contains a methyl group or a methyl group and a hydrocarbon group having 2 or more carbon atoms, in a case where a transmission spectrum of the metal oxide particles that are obtained by drying the dispersion liquid by vacuum drying is measured within a wavenumber range of 800 cm−1 to 3,800 cm−1 with a Fourier transform infrared spectrophotometer, and values of the transmission spectrum are standardized such that a maximum value of the transmission spectrum in the range is 100 and a minimum value is 0, the following expression (1) is satisfied.
IA/IB≤3.5 (1)
C08K 9/08 - Ingrédients agglomérés par traitement avec un liant
H01L 33/56 - Matériaux, p.ex. résine époxy ou silicone
C08J 3/07 - Production de solutions, dispersions, latex ou gel par d'autres procédés que ceux utilisant les techniques de polymérisation en solution, en émulsion ou en suspension dans un milieux aqueux à partir de solutions de polymères
73.
SEMICONDUCTOR MANUFACTURING DEVICE MEMBER AND ELECTROSTATIC CHUCK DEVICE
This semiconductor manufacturing device member includes a pair of ceramic plates and an internal electrode which is sandwiched by the pair of ceramic plates. A metal plate is a material for the internal electrode. A diffusion layer is formed at a section of the ceramic plates which contacts the internal electrode, and metal atoms contained in the metal plate material are diffused in the diffusion layer.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
C23C 16/458 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement caractérisé par le procédé utilisé pour supporter les substrats dans la chambre de réaction
H01L 21/205 - Dépôt de matériaux semi-conducteurs sur un substrat, p. ex. croissance épitaxiale en utilisant la réduction ou la décomposition d'un composé gazeux donnant un condensat solide, c.-à-d. un dépôt chimique
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
74.
DISPERSION LIQUID, COMPOSITION, SEALING MEMBER, LIGHT-EMITTING DEVICE, ILLUMINATION TOOL, DISPLAY DEVICE, METHOD FOR PRODUCING DISPERSION SOLUTION, AND METHOD FOR MODIFYING SURFACES OF METAL OXIDE PARTICLES
In a dispersion liquid according to the present invention, regarding metal oxide particles that are obtained by vacuum-drying a dispersion liquid containing metal oxide particles which have been surface-modified by a methyl group and a phenyl group in a predetermined ratio, in a case where a transmission spectrum in a wavenumber range of 800 cm−1 or higher and 3,800 cm−1 or lower is measured by FT-IR, and values of the transmission spectrum are standardized, IA/IB≤3.5 is satisfied (IA represents a spectrum value standardized at 3,500 cm−1, and IB represents a spectrum value standardized at 1,100 cm−1).
National Institute of Information and Communications Technology (Japon)
Inventeur(s)
Takano, Shingo
Kataoka, Yu
Oikawa, Satoshi
Ichikawa, Junichiro
Yamaguchi, Yuya
Kanno, Atsushi
Yamamoto, Naokatsu
Kawanishi, Tetsuya
Abrégé
An optical waveguide element includes a substrate, an optical waveguide disposed inside the substrate or on the substrate, and an electrode provided along the optical waveguide, working on the optical waveguide to generate a phase change in a light wave propagating through the optical waveguide. The electrode is a traveling-wave electrode. In a modulation section where the light wave is controlled by the electrode, the electrode and the optical waveguide are configured so that the phase change generated in a first modulation section located within a predetermined distance range from a downstream side end portion along a propagation direction of a traveling wave of an electrical signal propagating through the electrode has a sign opposite to a sign of the phase change generated in a second modulation section located within a predetermined distance range from an input end of the electrical signal on an upstream side along the propagation direction.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
76.
CERAMIC JOINED BODY, ELECTROSTATIC CHUCKING DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY
A ceramic joined body includes: a pair of ceramic plates; and an electrode layer that is interposed between the pair of ceramic plates, in which the electrode layer is embedded in at least one of the pair of ceramic plates, and in an outer edge of the electrode layer, a joint surface between the at least one of the pair of ceramic plates and the electrode layer has an inclination with respect to a thickness direction of the pair of ceramic plates and the electrode layer.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
C04B 37/00 - Liaison des articles céramiques cuits avec d'autres articles céramiques cuits ou d'autres articles, par chauffage
77.
OPTICAL MODULATOR AND OPTICAL TRANSMISSION DEVICE USING SAME
An optical modulator that suppresses poor welding between a case main body and a lid portion is provided. There is provided an optical modulator including: a case that is a rectangular parallelepiped and accommodates at least an optical waveguide element, in which the case includes a case main body 1 in which one surface of the rectangular parallelepiped forms an opening portion, and a lid portion 2 that has a rectangular shape and that closes the opening portion, the lid portion includes a peripheral part that has a thin thickness, and a protruding part 20 that is formed on the lid portion excluding the peripheral part and that protrudes toward an inside of the case, and when the lid portion is fitted into the case main body, a distance between an inner peripheral side of an end surface forming the opening portion of the case main body and an outer edge of the protruding part is set such that a distance d1 formed on a short-side side of the lid portion is larger than a distance d2 formed on a long-side side of the lid portion.
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
The optical absorption loss of the optical waveguide and the signal propagation loss of the high-frequency signal electrode are both reduced at a plurality of intersections between the convex optical waveguide and the high-frequency signal electrode, thereby achieving good operating characteristics. An optical waveguide device includes a substrate on which optical waveguides are formed, and an electrode that is formed on the substrate and has intersections crossing over the optical waveguides, in which the optical waveguides are configured by protruding portions extending on the substrate, and an intermediate layer made of a resin is provided at the adjacent intersections along the electrode to fill spaces between the protruding portions along the electrode and covers top of the protruding portions.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
An optical waveguide element includes: a substrate on which an optical waveguide is formed; and an electrode that is formed on the substrate and controls a light wave propagating through the optical waveguide. The optical waveguide includes a protruding portion extending on the substrate, and the electrode includes a base layer made of Nb, and an upper layer formed on the base layer, the base layer being formed between the substrate and the upper layer. The occurrence of loss in propagating light is effectively suppressed due to the existence of the electrode that controls the propagating light in the optical waveguide element using the protruding optical waveguide
G02F 1/225 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence dans une structure de guide d'ondes optique
G02F 1/21 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence
An optical waveguide device that can prevent fluctuations in electrical characteristics due to adhesion of foreign matter to electrodes without adversely affecting the degree of freedom in electrode design. The optical waveguide device includes a substrate, an optical waveguide formed on the substrate, an electrode for controlling a light wave propagating through the optical waveguide, and a first insulating layer disposed between two adjacent electrodes among the electrodes, in which the first insulating layer has a height from a surface of the substrate that is higher than heights of the two electrodes.
G02F 1/225 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence dans une structure de guide d'ondes optique
G02F 1/21 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence
81.
DISPERSION LIQUID, COMPOSITION, SEALING MEMBER, LIGHT-EMITTING DEVICE, LLUMINATION TOOL, DISPLAY DEVICE, METHOD FOR PRODUCING DISPERSION SOLUTION, AND METHOD FOR MODIFYING SURFACES OF METAL OXIDE PARTICLES
In a dispersion liquid according to the present invention, regarding metal oxide particles that are obtained by vacuum-drying a dispersion liquid containing the metal oxide particles which have been surface-modified by at least one kind of a silane compound containing a methyl group and a hydrocarbon group having 2 or more carbon atoms and at least one kind of silicone compound, in a case where a transmission spectrum in a wavenumber range of 800 cm-1 or higher and 3,800 cm-1 or lower is measured by FT-IR, and values of the transmission spectrum are standardized, the following expression (1) is satisfied.
In a dispersion liquid according to the present invention, regarding metal oxide particles that are obtained by vacuum-drying a dispersion liquid containing the metal oxide particles which have been surface-modified by at least one kind of a silane compound containing a methyl group and a hydrocarbon group having 2 or more carbon atoms and at least one kind of silicone compound, in a case where a transmission spectrum in a wavenumber range of 800 cm-1 or higher and 3,800 cm-1 or lower is measured by FT-IR, and values of the transmission spectrum are standardized, the following expression (1) is satisfied.
IA/IB ≤ 3.5 (1)
In a dispersion liquid according to the present invention, regarding metal oxide particles that are obtained by vacuum-drying a dispersion liquid containing the metal oxide particles which have been surface-modified by at least one kind of a silane compound containing a methyl group and a hydrocarbon group having 2 or more carbon atoms and at least one kind of silicone compound, in a case where a transmission spectrum in a wavenumber range of 800 cm-1 or higher and 3,800 cm-1 or lower is measured by FT-IR, and values of the transmission spectrum are standardized, the following expression (1) is satisfied.
IA/IB ≤ 3.5 (1)
(“IA” represents a spectrum value standardized at 3,500 cm-1, and “IB” represents a spectrum value standardized at 1,100 cm-1).
C08K 9/08 - Ingrédients agglomérés par traitement avec un liant
C08J 3/07 - Production de solutions, dispersions, latex ou gel par d'autres procédés que ceux utilisant les techniques de polymérisation en solution, en émulsion ou en suspension dans un milieux aqueux à partir de solutions de polymères
C09J 11/04 - Additifs non macromoléculaires inorganiques
This geopolymer composition contains: an active filler containing at least a blast-furnace slag fine powder; and sodium silicate as an activator. The sodium silicate is sodium orthosilicate or anhydrous sodium metasilicate. When the sodium silicate is sodium orthosilicate, the content of the sodium orthosilicate is 2-50 parts by weight with respect to 100 parts by weight of the active filler. When the sodium silicate is anhydrous sodium metasilicate, the content of the anhydrous sodium metasilicate is 10-30 parts by weight with respect to 100 parts by weight of the active filler.
An optical modulator with which electrical connection between a signal electrode and signal wiring of a wiring substrate can be reliably made even in a case where a width of the signal electrode in an action portion of an optical control substrate is narrow is provided. An optical modulator includes an optical control substrate (1) that includes an optical waveguide (OW) including at least a branched waveguide which branches one light wave into two light waves, and that includes a control electrode for applying an electrical field to the branched waveguide, and a wiring substrate provided with a wiring which relays an electrical signal to be applied to the control electrode or with a wiring which terminates the electrical signal, in which the control electrode is provided with a signal electrode (S), the wiring is provided with signal wiring, and in a part (Sc) in which electrical connection is made between the signal electrode (S) and the signal wiring, a clearance (W1) in which the branched waveguide (OW) sandwiches the signal electrode is wider than a clearance (W2) in which the branched waveguide sandwiches the signal electrode in an action portion in which the control electrode applies the electrical field to the branched waveguide.
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
The present invention pertains to zinc oxide particles that are surface-treated by using a surface treatment agent. The BET specific surface area of the zinc oxide particles is 1.5-8 m2/g. The surface treatment agent is an alkyl alkoxysilane having an alkyl group having 6-10 carbon atoms. The contained amount of the surface treatment agent is 0.70-0.92 mass%. The particle diameter D98, which is determined at a cumulative volume percentage of 98% in a dry particle size distribution, is 40 μm or less.
A method for repairing an electrostatic chuck device that is formed by bonding an electrostatic chuck member made of ceramics and a temperature-controlling base member made of metal with a first adhesive layer sandwiched therebetween is provided. The method includes a step of repairing the first adhesive layer that has been eroded by using a cold-curing adhesive.
B32B 37/12 - Procédés ou dispositifs pour la stratification, p. ex. par polymérisation ou par liaison à l'aide d'ultrasons caractérisés par l'usage d'adhésifs
B32B 7/12 - Liaison entre couches utilisant des adhésifs interposés ou des matériaux interposés ayant des propriétés adhésives
B32B 9/04 - Produits stratifiés composés essentiellement d'une substance particulière non couverte par les groupes comprenant une telle substance comme seul composant ou composant principal d'une couche adjacente à une autre couche d'une substance spécifique
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
86.
OPTICAL MODULATOR AND OPTICAL TRANSMISSION DEVICE USING SAME
It is possible to provide an optical modulator in which a transmission loss from a driver circuit element to a modulation substrate is reduced. An optical modulator includes a modulation substrate (1) that includes an optical waveguide (200) and a modulation electrode (10) for modulating a light wave propagating through the optical waveguide, a driver circuit element (2) that generates a modulation signal to be applied to the modulation electrode (10), and a case (3) that accommodates the modulation substrate (1) and the driver circuit element (2), in which an output terminal (20′) that outputs the modulation signal is provided on an upper surface side of the driver circuit element (2), and a wiring substrate (4) including a wiring that electrically connects the output terminal (20′) and the modulation electrode (10) is disposed above the driver circuit element (2) and the modulation substrate (1) to straddle both the driver circuit element (2) and the modulation substrate (1).
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
G02F 1/21 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence
G02F 1/225 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur par interférence dans une structure de guide d'ondes optique
87.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION APPARATUS USING SAME
An optical waveguide element that suppresses insertion loss related to coupling to an optical fiber or the like while miniaturizing the optical waveguide element is provided. There is provided an optical waveguide element including: a rib optical waveguide (10) that is made of a material (1) having an electro-optic effect; and the reinforcing substrate (2) that supports the optical waveguide, in which one end of the optical waveguide forms a tapered portion (11) of which a width narrows toward an end surface of the reinforcing substrate, a structure (3) made of a material having a higher refractive index than a material constituting the reinforcing substrate is provided so as to cover the tapered portion, and a coating layer (4) made of a material having a lower refractive index than the material constituting the structure is disposed so as to cover the structure.
G02B 6/42 - Couplage de guides de lumière avec des éléments opto-électroniques
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
88.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION DEVICE USING SAME
The purpose of the present invention is to provide an optical waveguide element that reduces internal stress occurring at a joining portion between a substrate or a reinforcing block and an optical component and that suppresses air bubbles from remaining in an adhesive. This optical waveguide element comprises a substrate 1 forming an optical waveguide 10, and a reinforcing block 3 that is disposed on the substrate 1 along an end face of the substrate 1 on which an input unit or an output unit of the optical waveguide 10 is disposed, the optical waveguide element being characterized in that: an optical component 4 joined to the end faces of the substrate 1 and the reinforcing block 3 is provided; a groove (CH1 (IN), etc.) is provided which is disposed on a joining surface of the optical component 4 in the vicinity of a portion corresponding to the input unit or the output unit; and a portion (CH1 (OUT), etc.) of the groove reaches a side surface adjacent to the joining surface.
G02B 6/122 - Éléments optiques de base, p. ex. voies de guidage de la lumière
G02F 1/03 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
89.
OPTICAL WAVEGUIDE ELEMENT, OPTICAL MODULATION DEVICE USING SAME, AND OPTICAL TRANSMISSION DEVICE
The purpose of the present invention is to provide an optical waveguide element that prevents the detachment of an optical waveguide substrate and inhibits optical wave propagation loss in an optical waveguide. This optical waveguide element has an optical waveguide substrate 1 on which an optical waveguide 10 is formed, and a reinforcing substrate 11 disposed below the optical waveguide substrate, the optical waveguide element being characterized by including a lower buffer layer B1 that is disposed between the optical waveguide substrate and the reinforcing substrate and joins both, and an upper buffer layer B2 that is disposed above the optical waveguide substrate and is disposed in contact with the optical waveguide substrate, and by the thickness d2 of the upper buffer layer being formed thinner than the thickness d1 of the lower buffer layer (d2
G02B 6/12 - Guides de lumièreDétails de structure de dispositions comprenant des guides de lumière et d'autres éléments optiques, p. ex. des moyens de couplage du type guide d'ondes optiques du genre à circuit intégré
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
90.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL TRANSMISSION APPARATUS AND OPTICAL MODULATION DEVICE USING OPTICAL WAVEGUIDE ELEMENT
The purpose of the present invention is to provide an optical waveguide element in which electrode wiring can be simplified and maintained at a length longer than that of working electrode parts. The optical waveguide element according to the present invention includes a substrate (1) on which an optical waveguide (10) is formed and an electrode which is disposed on the substrate and applies an electric field to the optical waveguide, said optical waveguide element being characterized in that: the electrode comprises working electrode parts (BE1, BE10, etc.) that are disposed in the vicinity of the optical waveguide, power feeding parts (BT1, BT10, etc.) that feed power to the electrode, and wiring parts (BW1, BW10, etc.) that link the working electrode parts and the power feeding parts; the electrode includes a plurality of the working electrode parts that are disposed at different positions on the substrate; and at least some of the wiring parts are disposed between at least some among the working electrode parts or the other wiring parts so as to overlap with an insulation layer (IN) therebetween.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
91.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION DEVICE USING SAME
The purpose of the present invention is to provide an optical waveguide element where a joining relationship between an optical waveguide substrate and a reinforcing member can be set appropriately. The present invention is an optical waveguide element provided with an optical waveguide substrate 1 (11) which is provided with an optical waveguide 10, and a reinforcing member 2 which is disposed above the optical waveguide near an end section of the optical waveguide, the optical waveguide substrate and the reinforcing member being joined by an adhesive layer AD interposed therebetween, wherein: a plurality of structures are disposed between the optical waveguide substrate and the reinforcing member so as to sandwich the optical waveguide; a first structure ST1 is configured such that the adhesive layer is disposed between a top surface of the structure and the reinforcing member, and is set such that the area of the top surface is at least a prescribed percentage of the area of the bottom surface of the reinforcing member; and a second structure ST2 is configured such that the thickness of the adhesive layer disposed between the first structure and the reinforcing member is set to a prescribed range.
G02B 6/122 - Éléments optiques de base, p. ex. voies de guidage de la lumière
G02B 6/30 - Moyens de couplage optique pour usage entre fibre et dispositif à couche mince
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
92.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION APPARATUS USING OPTICAL WAVEGUIDE ELEMENT
In order to provide an optical waveguide element which, by using as a buffer layer a thin low-resistant layer having a low electrical resistance as compared with a substrate, minimizes DC drifting and separation of the low-resistant layer from the substrate, and exerts high electrical field efficiency, and an optical modulation device and an optical transmission apparatus which use the optical waveguide element, an optical waveguide element (1) comprises: a substrate (5) which has formed therein an optical waveguide (10) and exhibits an electro-optical effect; and a plurality of control electrodes (S, G) which are formed on the obverse surface side of the substrate (5) with the optical waveguide (10) therebetween and which are for applying an electrical field to the optical waveguide (10). A low-resistant layer (9) which has a low electrical resistance as compared with the substrate (5) is formed in at least a portion of the obverse surface of the substrate (5) between the control electrodes (S, G) and/or in at least a portion of the reverse surface of the substrate (5), and the thickness of the low-resistant layer (9) is 200 nm or less.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
93.
OPTICAL DEVICE AND OPTICAL TRANSMISSION APPARATUS USING SAME
The present invention provides: an optical device in which the cross-sectional area of a heat transfer passage from a heating element that serves as a heat source to a heat dissipation part can be made larger than a conventional configuration and in which heat dissipation from the heating element can be performed more efficiently; and an optical transmission apparatus using the same. The optical device 2 comprises a modulation element unit 10 which includes an optical modulation element 15, a heat generating element 20, a heat generating element seat 31 to which the heat generating element 20 is mounted, and a housing 40 which accommodates the heat generating element seat 31 in the interior thereof. The heat generating element seat 31 has a mounting surface to which the heat generating element 20 is mounted and a mounting surface which is mounted to the housing 40, and the area of the mounting surface to which the heat generating element 20 is mounted is less than the area of the mounting surface which is mounted to the housing 40.
G02F 1/01 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur
94.
ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK MEMBER
This electrostatic chuck member has: a substrate, one main surface of which is a placement surface on which a plate-like sample is placed; and an electrostatic adsorption electrode provided on the side opposite to the placement surface or inside the substrate. A side peripheral surface, of the substrate, continuous with the placement surface has at least a first curved surface which is a convex curved surface provided in the circumferential direction at a peripheral edge portion of the placement surface, and a second curved surface provided in the circumferential direction at a height position which differs from the first curved surface.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01L 21/205 - Dépôt de matériaux semi-conducteurs sur un substrat, p. ex. croissance épitaxiale en utilisant la réduction ou la décomposition d'un composé gazeux donnant un condensat solide, c.-à-d. un dépôt chimique
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
95.
DISPERSION LIQUID, COMPOSITION, SEALING MEMBER, LIGHT EMITTING DEVICE, LIGHTING EQUIPMENT, DISPLAY DEVICE, AND METHOD FOR PRODUCING DISPERSION LIQUID
A dispersion liquid comprising: metal oxide particles that are surface-modified by a surface modifying material; and a hydrophobic solvent, wherein the metal oxide particles have a refractive index of 2.01-2.50, the surface modifying material contains a silane compound and a silicone compound, the silane compound contains a methyl group-containing silane compound, and, when the dispersion liquid and a methyl phenyl silicone are mixed such that the ratio between the total mass of the metal oxide particles and the surface modifying material to the mass of the methyl phenyl silicone becomes 3:97 and a 1 mm-thick cured product is obtained therefrom, a value obtained by dividing the scattered amount at a wavelength of 450 nm of the cured product by the scattered amount at a wavelength of 600 nm of the cured product is 1.0 or more.
An optical device includes a housing that accommodates at least an optical waveguide element, a main body portion 1 of the housing having an opening portion OP on one surface and a lead pin PN1 fixed to a side surface adjacent to the one surface, and including a metal member 2 disposed to surround the opening portion OP and a lid member 11 that closes the opening portion OP and is joined to the metal member 2, in which end portions of the metal member 2 and the lid member 11 along the side surface of the main body portion 1 at which the lead pin PN1 is disposed are located on an inner side of the main body portion 1 than the side surface of the main body portion 1.
The present invention effectively attenuates unwanted light propagating in a substrate in an optical waveguide element, while suppressing the occurrence of substrate stress. An optical waveguide element (100) includes: a substrate (102) made of an oxide; and an optical waveguide (104) formed on a main face of the substrate. The substrate has an oxygen-depleted layer (200) having less oxygen content than the other portions of the substrate. Of the region on the main face of the substrate, the oxygen-depleted layer is disposed in the region other than the waveguide path of light from a light input end (170) to a light output end (172) of the optical waveguide.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
98.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION APPARATUS USING SAME
The purpose of the present invention is to provide an optical waveguide element which is configured so that an adhesive does not flow in between electrodes or the like when a fixing member is bonded on a substrate, and in which propagation loss and the like in an optical waveguide are suppressed. Provided is an optical waveguide element having a substrate (1) on which an optical waveguide is formed, electrodes (3S, 3G, 3B) formed on the substrate (1), and fixing members (4, 5) fixed on the substrate (1) via an adhesive (AD), wherein the optical waveguide element is characterized in that protruding structures (WL3-7) are arranged on the substrate (1), the structures (WL3-7) are arranged in succession so as to divide an upper surface of the substrate (1) into two regions, and a slit connecting the two regions is provided in the middle (between the WL3 and the WL4) of the structures (WL3-7) or between the structure (WL3) and an end part (E1) of the substrate (1).
G02F 1/03 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
99.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION APPARATUS USING SAME
The purpose of the present invention is to provide an optical waveguide element that is excellent in high frequency characteristics, and is good in pattern formation of a resin layer covering an optical waveguide and bonding of a feeder line to an electrode. The optical waveguide element according to the present invention has an optical waveguide (10) formed on a substrate (1), and a signal electrode (S) and a ground electrode (G) arranged on the substrate (1), and the optical waveguide element is characterized in that the signal electrode (S) and the ground electrode (G) are each formed from a plurality of stages of electrode layers (30, 31) excluding the underlying layer, and at least two electrode layers of the plurality of stages of electrode layers have different surface roughnesses.
G02F 1/035 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des céramiques ou des cristaux électro-optiques, p. ex. produisant un effet Pockels ou un effet Kerr dans une structure de guide d'ondes optique
G02B 6/12 - Guides de lumièreDétails de structure de dispositions comprenant des guides de lumière et d'autres éléments optiques, p. ex. des moyens de couplage du type guide d'ondes optiques du genre à circuit intégré
100.
SURFACE-MODIFIED ZINC OXIDE PARTICLES, DISPERSION LIQUID AND COSMETIC PREPARATION
Surface-modified zinc oxide particles according to the present invention are obtained by treating the particle surfaces of zinc oxide particles with a hydrolyzable surface treatment agent; and the surface-modified zinc oxide particles have a color difference ∆E of 4.0 or less between before and after irradiation of simulated sunlight, while having a cyclopentasiloxane oil absorption of 20 mL/100 g or less.
