TRANSFORMATION SYSTEM FOR CONNECTING A PLASMA PROCESS CONTROL SYSTEM TO AN IMPEDANCE MATCHING CIRCUIT, PLASMA-GENERATING SYSTEM HAVING SUCH A TRANSFORMATION SYSTEM, AND METHOD FOR GENERATING A TRANSFORMATION TABLE AND/OR A TRANSFORMATION FUNCTION
A transformation system (10) is used for connecting a plasma process control system (2) to an impedance matching circuit A (9), wherein the impedance matching circuit A (9) is connectable to an RF generator (3) and a plasma chamber (5). A first transformation device (10a) and a communication device (14) are provided, wherein the communication device (14) is connectable to the plasma process control system (2). The communication device (14) is designed to receive control data B for an impedance matching circuit B (4) from the plasma process control system (2). The first transformation device (10a) is designed to transform the control data B for the impedance matching circuit B (4) into control data A for the impedance matching circuit A (9). The transformation system (10) is designed to provide the control data A for the control of the impedance matching circuit A (9). Additionally or alternatively, information data A may also be received from the impedance matching circuit A (9) and transformed into information data B for an impedance matching circuit B (4) and transmitted to the plasma process control system (2).
The invention relates to a plasma process supply system (100), in particular for pulsed plasma processes, comprising an RF generator (2) which has at least one amplifier circuit (30), an impedance matching circuit (3), and a control device (1). The plasma process supply system (100) can be connected to a plasma chamber (4). The RF generator (2) is connected to the impedance matching circuit (3), the impedance matching circuit (3) being designed to set a target impedance (10) as an input impedance for the RF generator (2). The control device (1) is designed to set the target impedance (10) such that a trajectory (40), which describes an impedance curve for the input impedance in a settling period (41), runs from a starting impedance region (42) through an ignition impedance region (43) to a target impedance region (44), the RF generator (2) delivering, in the ignition impedance region (43), a power level which is higher than a target power level in the subsequent target impedance region (44).
The invention relates to a power supply assembly (1) having: a) a plurality of microwave power supplies (2a, 2b, 2c, 2d, 2n), each of which is designed to generate a microwave power signal with an output of ≥ 100 W and a frequency of ≥ 300 MHz in order to generate a plasma (7) in a plasma process chamber (6), and b) a base (3) with an upper face (3a) and a lower face (3b), wherein c) the microwave power supplies can be arranged on the upper face (3a) of the base (3) as an assembly (2), d) the upper face (3a) of the base (3) has plug contacts (4), e) the microwave power supplies have mating plug elements (5) which match the plug contacts (4), f) the mating plug elements of the microwave power supplies are plugged onto the plug contacts of the base and can be mechanically secured, g) one, in particular a plurality, of the microwave power supplies can be separated from the base individually, in particular while said microwave power supply/supplies and/or one or a plurality of other microwave power supplies are being operated, and h) the base is designed such that the base is connected to the plasma process chamber and can be separated therefrom without having to separate the assembly (2) of microwave power supplies from the base.
The invention relates to an RF power amplifier unit (10) for coupling RF signals, in particular for a plasma process supply system, said unit comprising a) a first RF power amplifier stage arrangement (AU1), b) a second RF power amplifier stage arrangement (AU2), c) a first and a second transmission line arrangement (TL1, TL2) each connected to the output of the two RF power amplifier stage arrangements (AU1, AU2), d) a coupling line arrangement (TLC) designed to transmit the sum of the output powers of the two RF power amplifier stage arrangements (AU1, AU2), wherein e) the two transmission line arrangements (TL1, TL2) are each connected to the coupling line arrangement (TLC) in order to be able to transmit the output powers of the first and second RF power amplifier stage arrangements (AU1, AU2) to the coupling line arrangement (TLC), f) a measuring device (M1) designed to determine a variable that describes the power output by the RF power amplifier stage arrangements and/or the RF power amplifier unit, said measuring device being positioned on at least one of the transmission and/or coupling line arrangements (TL1, TL2, TLC).
H03F 3/195 - Amplificateurs à haute fréquence, p. ex. amplificateurs radiofréquence comportant uniquement des dispositifs à semi-conducteurs dans des circuits intégrés
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
5.
POWER COMBINER FOR COUPLING RF SIGNALS FOR A PLASMA PROCESS SUPPLY SYSTEM AND A PLASMA PROCESS SYSTEM
The invention relates to a power combiner (1) for coupling RF signals, in particular designed for a plasma process supply system and a plasma process system, the power combiner (1) being designed for a predefined operating frequency range with a frequency in the range of 2 MHz to 200 MHz, in particular in the range of 10 MHz to 50 MHz, designed for an output power ≥ 2 kW, preferably ≥ 4 kW, said power combiner comprising: e) a plurality of inputs (In1-In4) designed for connecting RF power amplifier stages (AS1-AS4), f) a main output (OUT), g) a plurality of coupling elements, in particular in the form of inductors (L1-L4), wherein each coupling element connects one input (In1-In4) to the main output (OUT), h) a balancing circuit (B) which connects the inputs (In1-In4) to one another, having: iii) an energy absorber, in particular in the form of a resistor (R1-R4), and a balancing line (W1-W4) with a fixed characteristic impedance and a length of n*λ/2, where n ∈ ℕ.
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
H01P 5/12 - Dispositifs de couplage présentant au moins trois accès
6.
CONTROL DEVICE FOR CONTROLLING A PLASMA PROCESS SUPPLY SYSTEM, A PLASMA PROCESS SUPPLY SYSTEM HAVING SUCH A CONTROL DEVICE, AND A METHOD FOR OPERATING A CONTROL DEVICE
The invention relates to a control device (1) used for controlling a plasma process supply system (100). The plasma process supply system comprises an RF generator (101) and an impedance matching circuit (101) used for connection to a load (103). The control device (1) is designed to determine a supply power of the RF generator (101) and an output power of the impedance matching circuit (102). The control device (1) is designed to adjust the RF generator (101) and/or the impedance matching circuit (102), in particular to change the frequency of the RF generator (101), so that an overall efficiency of the plasma process supply system (100), which results from the determined supply power of the RF generator (101) and the output power of the impedance matching circuit (102), is increased.
The invention relates to a microwave-assisted processing apparatus (10), having a deformation apparatus (8) designed to change the shape of, in particular to divide up, a body (7) having one or more hard-material components, and a microwave heating device (1) designed to heat the body assisted by microwave technology, having: - a plurality of microwave antennas (2a – 2n) which are designed and arranged in a group such that a. no relative movement is possible between the microwave antennas, and, at the same time, b. microwave radiation (5), the direction, distribution and intensity of which are able to be oriented, can be irradiated via said microwave antennas onto the body, - a plurality of semiconductor-based power amplifiers (3, 3a-3n) each designed to amplify a microwave signal, which can be specified to said power amplifiers, to a microwave power of greater than or equal to 100 W, wherein - each microwave antenna is connected to at least one semiconductor power amplifier, and - the power amplifiers can be adjusted with respect to one another in terms of their power output and phase, wherein - the orientation and emission characteristics of the microwave antennas and the adjustability of the power amplifiers are designed such that, in the body, a non-uniform temperature distribution is generated for generating thermal stresses in the lattice structures of the body.
1P1P1P1PP) at the input or output of the second impedance matching unit is greater than the resistance of the impedance that would arise at the input or output of the second impedance matching unit at the maximum permissible current of the semiconductor switching element and/or the variable reactance.
The invention relates to an impedance matching module for powers of ≥500 W and frequencies in the range from 2 to 100 MHz for an impedance matching circuit, a plasma process supply system and a plasma process system, having a) an insulating circuit board (3), b) planar conductor tracks (2), arranged on an top side (3a) and a bottom side (3b) of the insulating circuit board (3), c) a plurality of semiconductor switching elements (5), in particular transistors or PIN diodes, d) a substrate (4), in particular a ceramic plate, e) wherein the planar conductor tracks (2) are designed to connect the semiconductor switching element connections (5a) to one another and to other components, f) wherein the semiconductor switching elements (5) are arranged on the top side (3a) of the insulating circuit board (3) and are designed to connect and disconnect reactances (6), for example capacitors and/or coils, in order to change an impedance from the input to the output of an impedance matching circuit (11), g) wherein the substrate (4) is thicker than the insulating circuit board (3) and is fixedly connected to the surface of the insulating circuit board (3) over the majority of the bottom side (3b) of the circuit board (3), and h) wherein the substrate (4) is designed such that the planar conductor tracks (2) can be spaced apart, by means of said substrate (4), from a cooling body (7) in order to be electrically insulated from same, and i) wherein the substrate (4) and the connection of the circuit board (3) to the substrate are configured to dissipate the heat of the planar conductor tracks (2) and semiconductor switching elements (5) to a cooling body (7).
The invention relates to an impedance matching circuit (1) for a plasma process supply system and a plasma process system designed for powers of ≥ 500 W and frequencies in the range from 2 MHz to 100 MHz, comprising: a) a matching unit (2, 2a-2f) having one or more reactances (C4a, L4a, C4b, C4b'; L4b, C5a, C5a', L5a, C5b, C5b', C5d, C5d', L5d, L5e, C5f', L5f), b) a resonator (3), c) wherein the impedance matching circuit (1) is designed for operation at a predefined HF power signal with a predefined basic frequency (f0) and AFT bandwidth (20), limited by a predefined upper AFT frequency (f2) and a predefined lower AFT frequency (f1), wherein the resonator (3) is designed to influence the HF power signal slightly, in particular to not influence same, at the basic frequency (f0), and to damp the HF power signal and/or influence it in the phase at least at one of the two AFT frequencies (f1, f2), in particular at both AFT frequencies (f1, f2).
The invention relates to an impedance matching module (1) for an impedance matching circuit (11), a plasma process supply system (8) and a plasma process system (9) for assembly on a cooling body (7) designed for powers of ≥ 500 W and frequencies in the range from 2 to 100 MHz, having: a) a planar inductor (2), b) an insulating circuit board (3), c) a substrate (4), in particular a ceramic plate, d) wherein the planar inductor (2) is divided into two equally long planar conductor tracks (2a, 2b) which are connected in parallel and which are arranged on both sides of and congruently on the insulating circuit board (3), e) wherein the two conductor tracks (2a, 2b) are electrically connected at their ends by terminals (5a, 5b, 5c, 5d, 5e) and/or vias (6a, 6b, 6c, 6d), f) wherein the substrate (4) is thicker than the insulating circuit board (3) and is fixedly connected to the surface of the insulating circuit board (3) over the majority of the underside (3b) of the insulating circuit board (3), and g) wherein the planar conductor tracks (2a, 2b) can be spaced apart, by way of the substrate (4), from a cooling body (7) in order to be electrically insulated therefrom, and h) wherein the substrate (4) and the connection of the circuit board (3) to the substrate (4) is suitable for dissipating the heat of the planar conductor tracks to a cooling body (7).
The invention relates to a circuit arrangement (10) set up for charging and/or discharging a high-power battery (12) and to a method for operating a circuit arrangement (10) of this kind. The circuit arrangement (10) comprises a transformer (22), which divides the circuit arrangement (10) into a primary part (14) and a secondary part (16), a first AC/DC converter circuit (20) in the primary part (14), and a second AC/DC converter circuit (28) and a DC link capacitor (30) in the secondary part (16). The DC link capacitor (30) can be precharged using power from the high-power battery (12). To this end, the current from the high-power battery (12) can be limited, in particular, using a precharging circuit (38, 38'). The circuit arrangement (10) is thus capable of black starting.
The invention relates to a connection assembly (1) for limiting the quality and maintaining the bandwidth for a plasma process flow supply system (10), having: a) a first inner conductor (2) which is designed to provide a first direct voltage by means of a first DC power supply (5), b) a second inner conductor (4) which is designed to provide a second direct voltage by means of a second DC power supply (8), and c) an outer conductor (9) which surrounds the two inner conductors (2, 4) in order to shield same and displays the reference potential of the two inner conductors (2, 4), wherein d) the connection assembly (1) is designed to be connected to: i. a plasma process assembly (6), the DC power supplies (5, 8), and an HF power supply (9) or ii. an impedance adaptation circuit (7) and a plasma process assembly (6) and/or iii. an impedance adaptation circuit (7), the DC power supplies (5, 8), and an HF power supply (9); and e) the connection assembly (1) is designed to guide an HF power signal related to the outer conductor (9) via the two inner conductors (2, 4) in order to supply the plasma process assembly (6) with HF power by means of the HF power supply (3).
The invention relates to a low-impedance, high-current coaxial line (1) for a plasma process system (10), having: a) a tubular thermally conductive electric insulator (2), e.g. made of ceramic, b) an electric outer conductor (3) which is arranged on the insulator in the form of an outer layer, and c) an electric inner conductor (4) which is arranged in the insulator in the form of an inner layer, the inner and outer diameter of the insulator (2) being dimensioned such that a line impedance of ≤ 20 Ω can be achieved, wherein e) the low-impedance, high-current coaxial line (1) is designed to connect to an impedance adaptation circuit (6) and a plasma process assembly (7), and f) the low-impedance, high-current coaxial line (1) is designed to supply the plasma process assembly (7) with HF power by means of an HF power supply (9).
The invention relates to a device (10, 10a, 10b) for generating at least one plasma flame (12), a plasma generation unit (100) comprising a plurality of devices (10, 10a, 10b), a high-temperature process plant, in particular a melting plant (26) for melting a material (28) by means of melting heat, and a method for operating such a device (10, 10a, 10b), such a plasma generation unit (100) or such a high-temperature process plant, in particular a melting plant (26).
The invention relates to an apparatus (10) for creating a plasma (12) comprising a process gas supply (14) for supplying a process gas to the apparatus (10), a plasma creation chamber (16) for creating the plasma (12) by ionising the process gas, an energy supply (18) for supplying the apparatus (10) with energy, an ignition device (20) for igniting and/or re-igniting the plasma (12), wherein a power fed by means of the energy supply (18) into the plasma creation chamber (16) is in a range from 100 kilowatt to 1 gigawatt. The invention also relates to a high-temperature process plant, in particular a melting plant, having such an apparatus (10), and to a method for operating such an apparatus (10) or high-temperature process plant, in particular melting plant (34).
A workpiece treatment apparatus (1) comprises a signal amplification arrangement (2) which is designed to amplify an RF signal (5). The amplified RF signal (7) can be output to a resonator (8), into which a workpiece (9) to be machined can be introduced. A measurement device (10) and a processing device (11) are provided, wherein the processing device (11) is designed to use the measurement device (10) to determine a resonant frequency (12) that is produced in the resonator (8). The processing device (11) is also designed to track a progression of a shift in the resonant frequency (12) during operation. The processing device (11) is designed to compare the progression (28) of the shift in the resonant frequency (12) with a stored workpiece-dependent progression (27) and to output a status message (13) corresponding to progress of the process.
H05B 6/80 - Appareils pour applications spécifiques
19.
PLASMA STATE MONITORING DEVICE FOR CONNECTION TO AN IMPEDANCE MATCHING CIRCUIT FOR A PLASMA PRODUCTION SYSTEM, A PLASMA PRODUCTION SYSTEM AND A METHOD FOR MONITORING THE PLASMA PRODUCTION SYSTEM
A plasma state monitoring device (1) for a plasma production system (100) having an impedance matching circuit (50) is designed: a) to capture a first group of time-variant measurement values (30) which are associated with the impedance and which are able to be detected at one of the connections (50a, 50b) of the impedance matching circuit (50) and which are recorded in temporal succession, b) to capture a second group of time-variant measurement values (31) of at least one measurement variable, wherein the at least one measurement variable is selected from voltage (32), current (33) and a phase relationship (34) between voltage (32) and current (33), wherein the time-variant measurement values (31) are recorded in temporal succession, c) to represent the first group in a first graph (35), wherein the first graph (35) is a graph with no time axis, and to represent the second group in a second graph (36), wherein the second graph (36) comprises two axes (36a, 36b), one axis (36b) of which is a time axis. The time-variant measurement values (30, 31) of both groups are captured in the same period of time.
A method for igniting and supplying a laser or a processing plasma in a discharge chamber (30) with electrical power more efficiently comprises: a. providing power from an output terminal (24) of an amplifier (12) to the discharge chamber (30), wherein the amplifier (12) comprises at least two amplifier paths (14, 16), each of which delivers a signal to a coupler (22), wherein the coupler (22) has an output terminal (24) and an isolation terminal (26) and is configured in such a way that it combines the signals depending on their amplitude or phase relationship and delivers power to the output terminal (24) and/or the isolation terminal (26), b. controlling, according to a first control mode, an impedance switching unit (27, 27a, 27b) connected to the isolation terminal (26) and ground, in order to ignite the laser or processing plasma, c. controlling, according to a second control mode, the impedance switching unit (27, 27a, 27b) connected to the isolation terminal (26), in order to operate a laser or to maintain a processing plasma in the discharge chamber (30).
A control device (1) for a plasma production system (100) is used to actuate an impedance-matching circuit (50) comprising an input terminal (50a) and an output terminal (50b). The impedance-matching circuit (50) is connected between a HF generator (60) and a load (70). The control device (1) is designed to determine a target impedance value for the input terminal (50a) of the impedance-matching circuit (50) on the basis of: a) a specifiable operating frequency of the HF generator (60); b) a specified target power of the HF generator (60); and c) model parameters of the HF generator (60), wherein the target impedance value has a value which deviates from the rated impedance in order to increase an operating characteristic value of the HF generator (60), in particular the efficiency, for the specifiable operating frequency and the specifiable target power.
The invention relates to a method for igniting and/or maintaining a plasma with a pulsed high-frequency signal, said method comprising the method steps of: i. generating a pulsed high-frequency signal, ii. changing the frequency of the high-frequency signal according to a frequency sweep and/or changing the amplitude of the high-frequency signal according to a power sweep during a predefined first time interval (I) within a pulse (10), iii. monitoring at least one process parameter of the plasma process, i. determining a correlation of the process parameter to the sweep performed, and ii. detecting whether the monitored process parameter(s) associated with the sweep(s) each occupy a predefined value or lie within a predefined value range.
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
23.
RF COMBINER ARRANGEMENT FOR AN RF AMPLIFIER ARRANGEMENT FOR A PARTICLE ACCELERATOR, AN RF AMPLIFIER ARRANGEMENT OF THIS TYPE, AND A PARTICLE ACCELERATOR OF THIS TYPE
An RF combiner arrangement (2) comprises a multiplicity of signal paths (20), wherein each signal path (20) has a signal conductor (21), an input connection contact (22) for the hot-swappable connection of an amplifier module (3), and a signal interruption apparatus (23). The individual signal conductors (21) are electrically connected to one another at a summation point (24). The respective signal interruption apparatus (23) is designed to be operated in a first operating mode and in a second operating mode. The respective signal interruption apparatus (23) is designed to interrupt the power flow on the respective signal conductor (21) from the summation point (24) in the direction of the respective input connection contact (22) in the first operating mode. The respective signal interruption apparatus (23) is designed to allow the power flow between the respective input connection contact (22) and the summation point (24) in the second operating mode.
H03F 3/217 - Amplificateurs de puissance de classe DAmplificateurs à commutation
24.
CLOCK SIGNAL GENERATOR FOR GENERATING A REFERENCE SIGNAL AND A CLOCK SIGNAL, SYSTEM HAVING SAME, AND METHOD FOR SYNCHRONISING A PLURALITY OF PARTICIPANTS IN A SYSTEM
In a clock signal generator (10) for generating a reference signal (144) and a clock signal (142) for a plurality of microwave signal generators, in particular microwave solid state power amplifier modules, the clock signal generator has: a. a reference signal generator (12) for generating a reference signal (144) with a reference frequency, for example in the range of 1-50 MHz, preferably 30 MHz; b. a frequency divider arrangement (20) which is connected to the reference signal generator such that the reference signal (144) can be supplied to the frequency divider arrangement and is configured to generate from the reference signal (144) a clock signal (142) with a clock signal frequency that is lower than the reference frequency; c. at least one signal output (16, 30) at which the reference signal (144) and/or the clock signal (142) is output. Also disclosed is a system (100) having such a clock signal generator (10), and a method for synchronising a plurality of system participants (106, 108, 110, 112) in such a system (100). In this way, interference in a load is better able to be controlled and reproduced.
H03K 5/15 - Dispositions dans lesquelles des impulsions sont délivrées à plusieurs sorties à des instants différents, c.-à-d. distributeurs d'impulsions
25.
CIRCUIT BREAKER TRIPPING ACCELERATION ARRANGEMENT, CURRENT TRANSFORMER ARRANGEMENT, AND ENERGY STORAGE SYSTEM
The invention relates to a circuit breaker tripping acceleration arrangement (24) designed for being positioned between a bidirectional voltage transformer (5, 6) of a current transformer device (1) and an energy store (20, 22) having at least one electrochemical energy converter (7-10), in particular an energy converter in the form of a flow battery, for example a redox flow battery, wherein the circuit breaker tripping acceleration arrangement (24) has: a. two connections (26, 28) on the energy store side, b. two connections (30, 32) on the current transformer side, c. at least one circuit breaker (34, 36) which is connected between one of the connections (26, 28) on the energy store side and one of the connections (30, 32) on the current transformer side, and d. an energy storage device (38), in particular in the form of a voltage source, having a predefined internal resistance and being electrically connected in parallel to the connections (26, 28) on the energy store side.
H02H 3/087 - Circuits de protection de sécurité pour déconnexion automatique due directement à un changement indésirable des conditions électriques normales de travail avec ou sans reconnexion sensibles à une surcharge pour des systèmes à courant continu
H02H 7/18 - Circuits de protection de sécurité spécialement adaptés aux machines ou aux appareils électriques de types particuliers ou pour la protection sectionnelle de systèmes de câble ou de ligne, et effectuant une commutation automatique dans le cas d'un changement indésirable des conditions normales de travail pour pilesCircuits de protection de sécurité spécialement adaptés aux machines ou aux appareils électriques de types particuliers ou pour la protection sectionnelle de systèmes de câble ou de ligne, et effectuant une commutation automatique dans le cas d'un changement indésirable des conditions normales de travail pour accumulateurs
H02H 3/05 - Circuits de protection de sécurité pour déconnexion automatique due directement à un changement indésirable des conditions électriques normales de travail avec ou sans reconnexion Détails avec des moyens pour accroître la fiabilité, p. ex. dispositifs redondants
H02J 7/00 - Circuits pour la charge ou la dépolarisation des batteries ou pour alimenter des charges par des batteries
26.
MODULE AND METHOD FOR GENERATING A PULSED MICROWAVE OUTPUT SIGNAL
A module (10, 10.1) for generating a pulsed microwave output signal and for controlling a microwave solid-state power amplifier module (110, 112, 114, 124, 126, 128) comprises a. An input member (S1), which has a microwave signal input (12) and at least a first and a second microwave signal output (14, 16), b. An output member (S2), which has at least a first and a second microwave signal input (18, 20) and a microwave signal output (22), c. A first signal path (24) between the first microwave signal output (14) of the input member (S1) and the first microwave signal input (18) of the output member (S2), d. A second signal path (26) between the second microwave signal output (16) of the input member (S1) and the second microwave signal input (20) of the output member (S2), e. A damping member (18) provided in the second signal path (26), wherein i. the input member (S1) has a control signal input (30) and is configured to connect its microwave signal input (12) to its first or second microwave signal output (14, 16) depending on a pulsed signal (40) arriving at the control signal input (30), and/or ii. the output member (S2) has a control signal input (32) and is configured to connect its first microwave signal input (18) or its second microwave signal input (20) to its microwave signal output (22) depending on a pulsed signal (40) arriving at the control signal input (32).
The invention relates to an energy supply assembly (10) for a plurality of plasma generators (17a, 17b, 17n), which are each designed in particular to excite a gas, at a remote location from a plasma processing process, to form a gas plasma, having: f) a power input terminal (2) for connecting a supply power (7), g) a data terminal (13) for connection to a controller (4), h) wherein the energy supply assembly is designed to convert power from the power input terminal (2) into an AC voltage output using an AC voltage generator stage (6), i) wherein the energy supply assembly is designed, by means of a data terminal (13), - to determine that the AC voltage power can be provided to a first load (9a) as a first AC voltage power and to a second load (9b), located remotely from the first, as a second AC voltage power, wherein in particular the two loads cannot be energised at the same time, and - to be controllable in such a way that the first and the second AC voltage power sets different characteristics at least for one or more of the follow control values: - output current, - output voltage, - output frequency, - output power, - output curve of current and/or voltage, and wherein the energy supply assembly (10) is designed to emit a control signal for an impedance adaptation device (15a, 15b, 15n) associated with one of the AC voltage powers.
A radio-frequency (RF), more particularly microwave, generator arrangement (500) comprising a combiner (400), wherein the combiner (400) has: • an RF socket (120), more particularly a plurality thereof, and • an RF generator (410a, 410b… 410n), more particularly a plurality thereof, preferably one each for each RF socket (120), wherein • each RF generator (410a, 410b... 410n) has at its MW output a plug (110) matching the RF socket (120), wherein • the radio-frequency (RF) socket (120) is suitable for transmitting an RF signal, more particularly a high-power signal, more particularly a high-power microwave signal, and has: a. an opening (132) with an opening cross-section (132a) designed for receiving a matching plug (110), b. an exterior contact (121) suitable for being connected to a ground connection, c. an interior contact (123) suitable for being connected to an RF power signal, more particularly microwave signal, d. wherein the socket (120) has an opening-narrowing device (130), which is designed to reduce the opening in such a way that, when the plug is removed, the opening (132) of the socket assumes an opening-reduced state (132b) in which the cross-section of this opening (132) is reduced, more particularly closed, by comparison with the opening cross-section (132a).
H01R 24/40 - Dispositifs de couplage en deux pièces, ou l'une des pièces qui coopèrent dans ces dispositifs, caractérisés par leur structure générale ayant des contacts disposés concentriquement ou coaxialement spécialement adaptés à la haute fréquence
H01R 13/658 - Dispositions pour le blindage en haute fréquence, p. ex. protection contre les parasites électromagnétiques ou les impulsions électromagnétiques
29.
POWER SUPPLY AND METHOD FOR OPERATING A POWER SUPPLY
The invention relates to a method for operating a high-power component, in particular a power supply 100, capable of providing a power greater than 500 W, the method having the following steps: determining the amount of heat generated by the high-power component; determining the amount of heat that can be dissipated by the coolant flow; determining the difference between the amount of heat generated and the amount of heat that can be dissipated; and, on the basis of the analysis of the difference in the amounts of heat, at a first operating point, at which the volume flow of the coolant is able to dissipate an amount of heat that is greater than the amount of heat generated, reducing the volume flow of the coolant; at a second operating point, at which the volume flow of the coolant is able to dissipate an amount of heat that is less than the amount of heat generated, increasing the volume flow; and, at a third operating point, at which the maximum volume flow of the coolant is not able to dissipate a quantity of heat that is greater than or equal to the quantity of heat produced, reducing the amount of heat generated, in particular by reducing the output power of the high-power component, in particular by switching off the high-power component and/or emitting a warning.
The invention relates to a plasma system (100) and to a method for operating same, having a power supply unit (110), an adaptation network (120), a plasma processing chamber (130), a controller (141), and a data processing device (140), said method having the steps of: a. generating a first and a second output signal (123) for a plasma process using a first and a second current supply unit, b. supplying the first output signal to an adaptation network, c. adapting the first output signal in the adaptation network, d. supplying the adapted output signal to the plasma processing chamber, e. supplying the plasma process with the adapted output signal, f. receiving data in the form of parameters of the two output signals and/or process variables and/or state variables relating to the plasma process from at least two of the following units: the first and second power supply unit, the adaptation network, and the plasma processing chamber, g. synchronizing and preparing the received data, h. receiving results of the plasma process, i. analyzing the data, in particular by comparing the data with stored data, including a process of checking and generating a parameter bundle in order to improve the results of the plasma process, and j. adapting parameters, according to the parameter bundle, from at least two of the following units: the first and second power supply unit, the adaptation network, and the plasma processing chamber.
A method for supplying a laser or a processing plasma in a discharge chamber (30) with electrical power comprises: a. providing power from an output terminal (24) of a balanced amplifier (12) to the discharge chamber (30), wherein the balanced amplifier (12) comprises at least two amplifier paths (14, 16), each of which delivers a signal to a coupler (22), wherein the coupler (22) has an output terminal (24) and an isolation terminal (26) and is configured such that it combines the signals depending on the phase relationship thereof and delivers power to the output terminal (24) and/or the isolation terminal (26), b. setting a first phase relationship of the signals for a predefined time in order to trigger the laser or ignite the plasma, c. setting a second phase relationship, different from the first phase relationship, in order to operate a laser or to maintain a plasma in the discharge chamber (30).
A plasma ignition detection device (1) for connection to an impedance matching circuit (50) for a plasma generating system (100), wherein the plasma ignition detection device (1) is designed: a) for processing first time-variable measurement values, from a first predefined point of the impedance matching circuit (50), wherein the first reactive and/or active power present is determinable from these first time-variable measurement values; b) for processing second time-variable values associated with a second point of the impedance matching circuit (50), wherein the second point is different from the first predefined point, wherein the second reactive and/or active power present is determinable from these second values; c) for determining a first time-variable quantity from the first measurement values; d) for determining a second time-variable quantity from the second values; e) in order, depending on the first and second time-variable quantities, to generate an output signal describing a plasma state.
Plasma power supply system (1) for a plasma processing system (60) with a first plasma source (16ab) and a second plasma source (16cd), both in adjacent sections (6ab, 6cd) of one plasma chamber (6) where a substrate (10, 10a, 10b) may be processed by the plasma (7) in the plasma chamber (6), the power supply system (1) comprising: a. a first power supply (2ab) configured to supply AC power to the first plasma source (16ab), b. a second power supply (2cd) configured to supply AC power to the second plasma source (16cd), c. a first sensor (28a, 28ab, 29ab) for monitoring a plasma process parameter of the first plasma source (16ab), d. a control unit (5, 5ab, 5cd) configured i. to determine a first operating data related to the plasma process parameter of the first plasma source (16ab), and ii. to control the second power supply (2cd) related to this operating data, in particular in order to decrease crazing on the substrate (10, 10a, 10b).
To heat a medium (12), in particular to generate a plasma, using an HF signal, an HF feed signal (18) is generated with a defined first operating frequency and a defined first signal power. The HF feed signal (18) is coupled into the medium (12) via a transmission path (20). A first HF signal reflection along the transmission path (18) is determined, and the first operating frequency is modified according to the first HF signal reflection in order to reduce subsequent HF signal reflections. The first operating frequency is increased by a defined first frequency value during a first test interval in order to couple the first HF feed signal into the medium (12) with an increased first operating frequency for a limited time. During a second test interval, the first operating frequency is reduced by a defined second frequency value in order to couple the first HF feed signal into the medium (12) with a reduced first operating frequency for a limited time. A second HF signal reflection is determined during the first test interval, and a third HF signal reflection is determined during the second test interval. After the second test interval has elapsed, the HF feed signal is generated with a second operating frequency, which is selected according to the first, second and third HF signal reflection.
A control circuit (1) for at least two drivers (10,11), the drivers are each configured to switch on and off electrically driven switching elements (12,13) which are electrically connected to each other, comprises:- a first parallel-to-serial-converter (2) comprising a first parallel in-put port (4) and a first serial output-port (6) connectable to a first driver (10),- a second parallel-to-serial-converter (3) comprising a second paral-lel input port (5) and a second serial output-port (7) connectable to a sec-ond driver (11),- a processor unit (8) configured to - send a first data package stream (21) to the first parallel input port (4) and - send a second data package stream (22) to the second parallel in-put port (5), where - the both package streams are configured to be converted to serial-data-streams (23, 24) at the output-ports (6,7) and - the serial data-streams (23, 24) are configured to control the driv-ers (10,11).
H03K 17/10 - Modifications pour augmenter la tension commutée maximale admissible
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
H03K 17/687 - Commutation ou ouverture de porte électronique, c.-à-d. par d'autres moyens que la fermeture et l'ouverture de contacts caractérisée par l'utilisation de composants spécifiés par l'utilisation, comme éléments actifs, de dispositifs à semi-conducteurs les dispositifs étant des transistors à effet de champ
36.
SIGNAL-PROCESSING SYSTEM, AND POWER SUPPLY DEVICE COMPRISING A SIGNAL-PROCESSING SYSTEM
The invention relates to a signal-processing system for determining and providing a data stream describing a plasma process, said signal-processing system comprising: a) a detection device (10) which is designed to detect a signal curve (100, 101) which repeats in a predefined time interval (n=T1....T8) and which changes depending on the plasma process state; b) a determination device (12, 14) which is designed to generate the data stream based on at least two signal curves (100, 101) which are each detected in a time interval, the data stream having a continuously determined stability indicator for the plasma process. The invention also relates to: a power supply device (1) for generating a pulsed electric high-frequency power signal for a plasma, said power supply device comprising a power generator (2), an impedance adjusting assembly (6) which is connected to the power generator, and such a signal-processing system; and a process control assembly for a plasma process designed to use the stability indicator from such a signal-processing system.
The invention relates to an inductor assembly (1) for inductively heating a load (10) which can be connected to an induction excitation assembly (2), said inductor assembly comprising: a) an inductor (12) which is divided into a plurality of inductor sections (5, 6) which are connected in particular in series, the inductor sections (5, 6) being designed to be positioned in the vicinity of a load (10) to be heated in such a way that said inductor sections (5, 6) can induce a current in the load (10), which current can heat the load (10); b) an impedance (7) which is connected to a connecting point (9) of two inductor sections (5, 6); c) a control device (8), in particular a switch device, which is connected to the impedance (7) and which is designed in such a way that it can influence the current using one of the inductor sections (6). Such an assembly can be used to control, in an open-loop or closed-loop manner, the temperature or power output of the portion of the load which is located in the vicinity of the inductor section that can be influenced by the control device.
The invention relates to a method for establishing a supply voltage by means of multiple, independently controlled VISMA inverters (12, 14, 16), which are collectively connected to a load, wherein the load requires more power than any individual one of said inverters (12, 14, 16) can deliver, comprising the following method steps: a. supplying each inverter (12, 14, 16) with power; b. starting a VISMA control in every inverter (12, 14, 16) by specifying a target supply voltage; c. transferring a synchronisation event to all VISMA inverters (12, 14, 16); d. establishing an output AC voltage with an adjusted phase according to the target supply voltage and the synchronisation event in each VISMA inverter (12, 14, 16); e. simultaneously establishing the supply voltage (56) by means of all VISMA inverters (12, 14, 16) with the output AC voltages.
H02J 3/48 - Dispositions pour l’alimentation en parallèle d’un seul réseau, par plusieurs générateurs, convertisseurs ou transformateurs contrôlant la répartition de puissance entre les générateurs, convertisseurs ou transformateurs contrôlant la répartition de la composante en phase
H02J 5/00 - Circuits pour le transfert d'énergie électrique entre réseaux à courant alternatif et réseaux à courant continu
H02J 3/10 - Systèmes d'alimentation en courant constant
H02J 3/38 - Dispositions pour l’alimentation en parallèle d’un seul réseau, par plusieurs générateurs, convertisseurs ou transformateurs
H02J 3/40 - Synchronisation d'un générateur pour sa connexion à un réseau ou à un autre générateur
39.
METHOD FOR IMPEDANCE MATCHING, IMPEDANCE MATCHING ARRANGEMENT AND PLASMA SYSTEM
ininterininterinter) and a model of the impedance matching network (2), d) changing the state of at least one of the matching stages (10, 12) based on the target change value (dXP, dXS), e) repeating steps a) to d).
H03H 7/40 - Adaptation automatique de l'impédance de charge à l'impédance de la source
G05B 13/04 - Systèmes de commande adaptatifs, c.-à-d. systèmes se réglant eux-mêmes automatiquement pour obtenir un rendement optimal suivant un critère prédéterminé électriques impliquant l'usage de modèles ou de simulateurs
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
The invention relates to a power supply device (1) for generating an electric high-frequency power signal for a plasma, comprising a power generator (2) and an impedance adjustment arrangement (6) connected to the power generator (2), wherein the power supply device (1) is configured to determine an impedance variable, in particular at the input (5) of the impedance adjustment arrangement (6) or at the output (3) of the power generator (2), and to determine and output an impedance-based quality variable (17) in a predefined time period.
The invention relates to an inverter (13) for charging and discharging at least two series-connected batteries (B1, B2) comprising: a) at least one AC voltage connection (Ea, Eb, Ec) for connection to an AC voltage network; b) a converter stage (14) for converting an AC voltage to a DC voltage and/or vice versa, which converter stage i. is connected to the at least one AC voltage connection (Ea, Eb, Ec) and ii. has at least two series-connected, controllable, in particular switching, converter-stage elements (Sa1-Sc4); c) an intermediate circuit (12) which i. is connected to the converter stage (14) and ii. has two series-connected capacitors (C1, C2); d) a first and a second DC connection (DC+, DC-) and a connecting-point connection (N), which are connected to the intermediate circuit (12), wherein i. the first DC connection (DC+) is provided for connecting a first battery of the two series-connected batteries (B1, B2), ii. the second DC connection (DC-) is provided for connecting a second battery of the two series-connected batteries (B1, B2) and iii. the connecting-point connection (N) is provided for the common connection of the two series-connected batteries (B1, B2); and e) a compensating device which is configured to influence the voltage distribution across the capacitors (C1, C2) of the intermediate circuit (12).
The invention relates to a switchable-reactor unit (100, 101), comprising: - a high-frequency terminal (112) for connecting to a transmission line (114) for the transmission of a signal at a frequency in the range of 1–200 MHz; and - a circuit assembly (116) having a plurality of switching elements (T1-T3) used in parallel, which each have a gate terminal (G), characterized in that each switching element is connected, via at least one individual reactor (C11-C13, C21-C23) assigned to the switching element and connected in series with the switching element, to the high-frequency terminal (12), wherein the switching elements can be or are controlled via their gate terminals in such a way that the switching elements switch simultaneously. The invention also relates to a variable reactor (18, 20, 22) comprising a switchable-reactor unit (100). The invention also relates to an impedance adjustment assembly (11), comprising a switchable-reactor unit (100, 101) and a controller (32). The invention also relates to a high-frequency power generator (40) comprising at least one variable reactor (18, 20, 22). The invention also relates to a plasma supply system (1), comprising a high-frequency power generator (40), a load (28) in the form of a plasma process operated with high frequency (HF), for coating or etching a substrate, and an impedance adjustment assembly (11). The invention also relates to a method for operating an impedance adjustment assembly (11) and/or a high-frequency power generator (40), e.g. in a plasma supply system (1).
An impedance matching circuit (11), a plasma supply system (1) comprising such an impedance matching circuit, and a method for operating such an impedance matching circuit, in particular in such a plasma supply system comprising a series circuit (10) connected to a radio-frequency terminal (RFin), wherein the series circuit comprises at least one reactance, in particular capacitance (C1, C2), and at least one switching element (T1, T2) having a control input (G), to which a control circuit (12) is connected, characterized in that the control circuit is connected to an enable signal input via a coupler (13). In this regard, it is possible to achieve short switching times in conjunction with low losses in the switching element(s).
The invention relates to a high-frequency high-voltage waveguide device (10) with an electrical conductor (13, 14), designed for operation with a high-frequency high voltage over a gaseous environment (3) and/or the mass body (11, 12), wherein the conductor (13, 14) is in contact with an electrically conductive contact device (15, 16) at least at one point, which device is arranged on an electrically insulating bracket (17, 18), wherein an electrically conductive field distribution assembly (19, 20) is arranged on the electrically conductive contact device (15, 16), which assembly is electrically conductively connected to the contact device (15, 16), and more particularly is at least partially arranged in the inside of the bracket (17, 18).
The invention relates to a power supply device for generating at least one electric high-frequency power signal for a plasma which has at least one first plasma state and a second plasma state. The power supply device is designed to ascertain a first variable which characterizes a power reflected by the plasma in the first plasma state, to ascertain a second variable which characterizes a power reflected by the plasma in the second plasma state, to form a third variable depending on the first and second variable, and to influence the frequency and/or the power of the high-frequency power signal depending on the third variable.
Disclosed is a printed circuit board comprising an A.C. component connected via a first line and a second line to a terminal array, wherein at least segments of the first and the second line are parallel to each other and the lines are spaced apart in a direction of height of the printed circuit board, and the terminal array has a first terminal electrically conductively connected to the first line and a second terminal electrically conductively connected to the second line, which are spaced apart in a direction of height of the printed circuit card, one of the terminals being disposed on an upper side and one of the terminals being disposed on a lower side of the printed circuit board. The terminals are configured for contacting two parallel strip conductor segments, and the terminals are further configured in such a way that the strip conductor segments can be connected to the terminals in such away that the ratio of the distance between the strip conductor segments at the terminals to the distance between the lines is less than ten.
A device for determining an electrical power reflected by a plasma, wherein the plasma can be acted on by a first high-frequency power signal having a first frequency and by at least one second high-frequency power signal having at least a second frequency, the second frequency being smaller than the first frequency. The device is designed to determine a first variable characterising a power in the range of the first frequency which is reflected by the plasma and a second variable characterising the power in a first frequency range which is reflected by the plasma, the first frequency range having a predefinable number of sum frequencies and/or difference frequencies formed from the first frequency and an integer multiple of the second frequency. The device can differentiate between the power in the range of the first frequency which is reflected by the plasma and the power in the aforesaid first frequency range which is reflected by the plasma.
A radiofrequency power measurement device (100, 200, 300) has a signal processor (11, 211) and a directional coupler (10) that has a main line (1) and at least two auxiliary lines (2a, 3a) electromagnetically coupled to the main line (1) in a coupling region (K), each of which auxiliary lines (2a, 3a) has an output (7, 8), wherein the directional coupler (10) is designed such that a signal is output at each output (7, 8), which signal is correlated with a signal transmitted on the main line (1), wherein the outputs (7, 8) of the auxiliary lines (2a, 3a) are connected to the signal processor (11, 211, 311), which is designed to output an output signal and has a signal combiner (12, 212, 312) and a signal changer (13, 213, 313).
H01P 5/18 - Dispositifs à accès conjugués, c.-à-d. dispositifs présentant au moins un accès découplé d'un autre accès consistant en deux guides couplés, p. ex. coupleurs directionnels
G01R 21/01 - Dispositions pour procéder aux mesures de la puissance ou du facteur de puissance dans des circuits comportant des constantes réparties
An arrangement (1) for cooling at least one electrically operated, heat-generating component (2, 333), in particular for cooling a component (2, 333) of this kind in an electrical high-power converter circuit, comprising a) a cooling arrangement (3, 332) with i) a heat sink (4) composed of a first material, ii) a coolant guide (5) composed of a second material, iii) wherein the coolant guide (5) is arranged in a thermally conductive manner in or on the heat sink (4), b) wherein the cooling arrangement (3) is designed such that the electrically operated component (2, 333) can be arranged in the region of the cooling arrangement (3), in particular on the heat sink (4), c) wherein the second material is designed so as to be electrically insulating and/or resistant to an ionizing liquid, and d) wherein the coolant guide (5) is designed to be connected to an electrolyte reservoir (320) of a redox flow battery (301).
B60L 58/27 - Procédés ou agencements de circuits pour surveiller ou commander des batteries ou des piles à combustible, spécialement adaptés pour des véhicules électriques pour la surveillance et la commande des batteries pour la commande de la température des batteries par chauffage
51.
METHOD FOR IGNITING A PLASMA IN A PLASMA CHAMBER AND IGNITION CIRCUIT
Method and circuit (1) for igniting a plasma in a plasma chamber (2), wherein the plasma, in the ignited state, can be supplied by a high-frequency power supply (10) via an impedance matching network (7), in particular with an operating power of greater than or equal to 500 W and an operating frequency of greater than or equal to 2 MHz, having: c) an ignition power supply (3) for generating an ignition power, which is lower than an operating power, with an ignition frequency, and also d) a voltage converter (5) which is designed such that the ignition power can be supplied to it and to generate an ignition AC voltage, wherein - the ignition circuit (1) is designed to supply the ignition AC voltage to the output of the impedance matching network (7) and an excitation apparatus (6a, 6b) of the plasma chamber (2), and wherein - the ignition circuit (1) further has a frequency sweeper (4) for varying the ignition frequency.
A directional coupler (100) having an improved coupling and directional accuracy comprises: - a main line (1), which is designed to transmit a signal having a frequency in the range of 1-200 MHz, a power greater than 1 kW and a voltage greater than 200 V, and - at least one secondary line (2), which is electromagnetically coupled to the main line (1) in a coupling region (K) and has an output (3) for outputting an output signal, wherein a) the main line in the coupling region extends in a straight line in a longitudinal direction (LR), b) the main line has a width of at least 3 mm in a width direction (BR) perpendicular to the longitudinal direction (LR), c) the longitudinal direction (LR) and the width direction (BR) define a main line plane, d) the secondary line (2) has a first secondary line portion (2a) and a second secondary line portion (2b), which are arranged in different parallel planes, e) the first secondary line portion is arranged in a plane that is spaced apart from the main line plane and that is parallel to the main line plane.
H01P 5/18 - Dispositifs à accès conjugués, c.-à-d. dispositifs présentant au moins un accès découplé d'un autre accès consistant en deux guides couplés, p. ex. coupleurs directionnels
The invention relates to a cooling unit (1, 10) having a heat sink (2, 20) which is formed from a first material with a first thermal conductivity, wherein the heat sink (2, 20) comprises at least one refrigerant duct, and having at least one cooling element (3a-3d, 30) which is formed from a second material having a second thermal conductivity, wherein the second thermal conductivity is higher than the first thermal conductivity, wherein the refrigerant duct is formed completely as a refrigerant pipe (4a-4d, 40) so that in operation a refrigerant in the refrigerant pipe (4a-4d, 40) does not come into chemical contact with the cooling element (3a-3d, 30) or the heat sink (2, 20), and wherein at least one source of heat, more particularly an electronic component (33), is arranged on the cooling unit (1, 10).
H01L 23/373 - Refroidissement facilité par l'emploi de matériaux particuliers pour le dispositif
H01L 23/473 - Dispositions pour le refroidissement, le chauffage, la ventilation ou la compensation de la température impliquant le transfert de chaleur par des fluides en circulation par une circulation de liquides
H01M 8/04007 - Dispositions auxiliaires, p. ex. pour la commande de la pression ou pour la circulation des fluides relatives à l’échange de chaleur
H01M 10/60 - Chauffage ou refroidissementCommande de la température
F28D 21/00 - Appareils échangeurs de chaleur non couverts par l'un des groupes
54.
HIGH FREQUENCY AMPLIFIER ARRANGEMENT AND METHOD FOR DESIGNING A HIGH FREQUENCY AMPLIFIER ARRANGEMENT
The invention relates to a high frequency amplifier arrangement (1) comprising: a) an amplifier part (2), which has an output (100) having two output connections (101,102), b) a balun transformer (7), which has an input (105) having two input connections (106, 107) and an output (110) having two output connections (111, 112), wherein i) one output connection (101, 102) each of the amplifier part (2) is connected to an input connection (106, 107) of the balun transformer (7), ii) an output connection (112) of the balun transformer (7) is connected to ground, iii) an output connection (111) of the balun transformer (7) can be connected to a load, iv) a first capacitance (44) is provided between the one input connection (106) of the balun transformer (7) and ground, v) a second capacitance (45) is provided between the second input connection (107) of the balun transformer (7) and ground, wherein the first capacitance (44) is not equal to the second capacitance (45).
H03F 1/32 - Modifications des amplificateurs pour réduire la distorsion non linéaire
H03F 3/19 - Amplificateurs à haute fréquence, p. ex. amplificateurs radiofréquence comportant uniquement des dispositifs à semi-conducteurs
H03F 3/30 - Amplificateurs push-pull à sortie uniqueDéphaseurs pour ceux-ci
H03F 3/21 - Amplificateurs de puissance, p. ex. amplificateurs de classe B, amplificateur de classe C comportant uniquement des dispositifs à semi-conducteurs
H03F 3/26 - Amplificateurs push-pullDéphaseurs pour ceux-ci
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
H01P 5/10 - Dispositifs de couplage du type guide d'ondes destinés au couplage de lignes ou de dispositifs de différentes sortes destinés au couplage de lignes ou de dispositifs équilibrés avec des lignes ou des dispositifs déséquilibrés
55.
POWER CONVERTER UNIT, PLASMA PROCESSING EQUIPMENT AND METHOD OF CONTROLLING SEVERAL PLASMA PROCESSES
Power converter unit (1, 1') capable to convert an electrical input power into a bipolar output power and to deliver this output power to at least two independent plasma processing chambers (9a, 9b,.. 9n), the unit (1, 1') comprising: - one power input port (2) for connection to an electrical power delivering grid (7), - at least two, preferably more than two, power output ports (3a, 3b,.. 3n) each for connection to one of the plasma process chambers (9a, 9b,.. 9n), - a control device (4) configured to control the unit (1, 1') to deliver the bipolar output power to the power output ports (3a, 3b,.. 3n), using control parameters of at least one of: power, voltage, current, excitation frequency, or threshold for protective measures, such the control device (4) comprising a virtual power supply (24a, 24b,.. 24n) for every output port (3a, 3b,.. 3n), every virtual power supply (24a, 24b,.. 24n) comprising a separate complete set of all fixed and time varying parameters and internal states associated with the operation of every individual output port (3a, 3b,.. 3n) is kept in the control device (4).
H01J 37/34 - Tubes à décharge en atmosphère gazeuse fonctionnant par pulvérisation cathodique
H02J 3/36 - Dispositions pour le transfert de puissance électrique entre réseaux à courant alternatif par l'intermédiaire de haute tension à courant continu
H02M 7/00 - Transformation d'une puissance d'entrée en courant alternatif en une puissance de sortie en courant continuTransformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant alternatif
56.
POWER CONVERTER UNIT, PLASMA PROCESSING EQUIPMENT AND METHOD OF CONTROLLING SEVERAL PLASMA PROCESSES
Power converter unit (1, 1') capable to convert an electrical input power into a bipolar output power and to deliver this output power to at least two independent plasma processing chambers (9a, 9b.. 9n), the unit (1, 1') comprising : one power input port (2) for connection to an electrical power delivering grid (7), at least two, preferably more than two, power output ports (3a, 3b,.. 3n) each for connection to one of the plasma process chambers (9a, 9b,... 9n), a control device (4) configured to control the unit (1, 1') to deliver the bipolar output power to the power output ports (3a, 3b,.. 3n), using control parameters of at least one of: power, voltage, current, excitation frequency, or threshold for protective measures, such that at least one of the control parameters at a first power output port (3a) is different from the corresponding control parameter at a different power output port (3b,... 3n).
H01J 37/34 - Tubes à décharge en atmosphère gazeuse fonctionnant par pulvérisation cathodique
H02M 7/00 - Transformation d'une puissance d'entrée en courant alternatif en une puissance de sortie en courant continuTransformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant alternatif
57.
POWER CONVERTER UNIT, PLASMA PROCESSING EQUIPMENT AND METHOD OF CONTROLLING SEVERAL PLASMA PROCESSES
Power converter unit (1, 1') capable to convert an electrical input power into a bipolar output power and to deliver this output power to at least two independent plasma processing chambers (9a, 9b.. 9n), the unit (1, 1') comprising : one power input port (2) for connection to an electrical power delivering grid (7), at least two, preferably more than two, power output ports (3a, 3b,.. 3n) each for connection to one of the plasma process chambers (9a, 9b,... 9n), a control device (4) configured to control the unit (1, 1') to deliver the bipolar output power to the power output ports (3a, 3b,.. 3n), using control parameters of at least one of: power, voltage, current, excitation frequency, or threshold for protective measures, by obtaining a full set of desired values for the parameters for the output ports (3a, 3b,.. 3n), calculating whether the power converter unit (1, 1') is capable of delivering every desired parameter to every for the output ports (3a, 3b,.. 3n), and if this is the case, calculating a sequence of pulses of power delivery to the output ports (3a, 3b,.. 3n) in order to supply the power to the plasma processes.
H01J 37/34 - Tubes à décharge en atmosphère gazeuse fonctionnant par pulvérisation cathodique
H02M 7/00 - Transformation d'une puissance d'entrée en courant alternatif en une puissance de sortie en courant continuTransformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant alternatif
58.
METHOD FOR PRODUCING A HIGH-FREQUENCY POWER AT A PREDEFINED FREQUENCY, AND POWER CONVERTER
A method for producing a high-frequency power at a predefined frequency, in particular between 3 and 180 MHz, which can be supplied to a plasma load (49), comprises the method steps of: a. generating an analogue signal by supplying digital data containing an item of frequency information from a logic circuit (22) to a first digital/analogue converter (DAC) (29-32); b. generating an analogue amplitude value by supplying digital data to a second DAC (41); c. multiplying the analogue signal by the amplitude value by means of an analogue multiplier (37-39) in order to generate an amplitude-modulated output signal; d. supplying the amplitude-modulated output signal to a first amplifier (42, 43) in order to produce the high-frequency power at the predefined frequency.
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
H02M 1/00 - Détails d'appareils pour transformation
H02M 7/5387 - Transformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant alternatif sans possibilité de réversibilité par convertisseurs statiques utilisant des tubes à décharge avec électrode de commande ou des dispositifs à semi-conducteurs avec électrode de commande utilisant des dispositifs du type triode ou transistor exigeant l'application continue d'un signal de commande utilisant uniquement des dispositifs à semi-conducteurs, p. ex. onduleurs à impulsions à un seul commutateur dans une configuration en pont
In a protection arrangement (1) for protecting a transformer (2), an AC source (6) and/or AC sink (6), comprising a transformer (2), of which one winding (3) is connected to an AC source (6) or to an AC sink via a first and a second line (4, 5), a DC measuring arrangement (7) is connected electrically in parallel with one of the lines (4, 5), the inductance value of said DC measuring arrangement being greater than the inductance value of the first or of the second line (4, 5) and said DC measuring arrangement having a DC current measuring device (12).
H01F 27/42 - Circuits spécialement adaptés à la modification ou la compensation des caractéristiques électriques des transformateurs, réactances ou bobines d'arrêt
G01R 15/00 - Détails des dispositions pour procéder aux mesures des types prévus dans les groupes , ou
H02H 1/00 - Détails de circuits de protection de sécurité
H02M 1/40 - Moyens pour empêcher la saturation magnétique
H02M 3/335 - Transformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant continu avec transformation intermédiaire en courant alternatif par convertisseurs statiques utilisant des tubes à décharge avec électrode de commande ou des dispositifs à semi-conducteurs avec électrodes de commande pour produire le courant alternatif intermédiaire utilisant des dispositifs du type triode ou transistor exigeant l'application continue d'un signal de commande utilisant uniquement des dispositifs à semi-conducteurs
60.
METHOD FOR ADJUSTING THE IMPEDANCE OF A LOAD TO THE OUTPUT IMPEDANCE OF A POWER GENERATOR AND IMPEDANCE ADJUSTMENT ASSEMBLY
The invention relates to a method for adjusting the impedance of a load (28) to the output impedance of a power generator (40), comprising the following steps : a. generating a power by means of a power generator (40); b. supplying the power to a load (28) via an impedance adjustment assembly (10) with at least one reactance (18, 20, 22) that can be changed via a control element (12, 14, 16), wherein the impedance adjustment assembly (10) converts the load impedance (27) at the input of the load (18) into a transformed load impedance (29) at the input of the impedance adjustment assembly (10); c. detecting or determining a power reflected in the load (28) or at least a variable relating thereto; d. based on the reflected power of the at least one related variable, checking whether a maladjustment has occurred; e. determining a trajectory (50) in a complex load plane, in particular in the Smith chart (60), according to at least one predetermined criterium; f. controlling the at least one control element (12, 14, 16) such that the transformed load impedance (29) follows the trajectory (50).
An inductor (1) for induction heating comprises a feed line (8) and a return line (10) as well as a main winding part (2) which has at least one main winding (5) having a first winding sense. A counter-winding portion (3, 4) having a sense of winding opposite to that of the first sense of winding is contiguous to both ends of the main winding part (2). The main winding part (2) has more windings than at least one counter-winding portion (3, 4) and the counter-winding portions (3, 4), and the main winding part (2) are concentric to each other, each having a cylindrical shape. The main winding part (2) is directly connected to the counter-winding portions (3, 4) by means of a series circuit.
The invention relates to a power combiner (12) in the form of a balanced LC combiner. Inputs (14a, b) of the power combiner (12) are isolated from one another via at least one RC-5 adapter (28). The at least one RC adapter (28) is preferably dimensioned in such a way that the connection between the inputs (14a, b) is at a stable potential during operation of the power combiner (12) at at least one position. The power combiner (12) is also preferably formed in a planar design, and has electrically conductive layers running parallel to one another. Preferably at least inductivities (24a, b) and a combiner-capacitor (26) are formed in the electrically conductive layers. The invention also relates to a power combiner arrangement (10) comprising said power combiner (12) and high-frequency signal sources (16a, b) attached at at least two inputs (14a, b), and which are designed preferably in the form of frequency-agile transistor amplifiers.
H01P 5/16 - Dispositifs à accès conjugués, c.-à-d. dispositifs présentant au moins un accès découplé d'un autre accès
H03H 7/48 - Réseaux pour connecter plusieurs sources ou charges, fonctionnant sur la même fréquence ou dans la même bande de fréquence, à une charge ou à une source commune
The invention relates to a directional coupler (1) which is formed at least partly in a printed circuit board (2), in particular a multilayer printed circuit board, comprising a main line (3) for transmitting an output and at least one secondary line (6, 7) which is arranged parallel and at a distance from the main line (3) in a coupling region with a coupling section (4, 5). The main line (3) and/or the at least one secondary line (6, 7) is arranged in the interior of the printed circuit board (2) in the coupling region. The invention is characterized in that m first additional coupling lines (12 - 15), m ≥ 1, are provided which have a coupling section (8 - 11) that runs parallel to and at a distance from the coupling section (4, 5) of the at least one secondary line (6, 7). The first additional coupling lines (12 - 15) have a connection (16 -1 9) which is arranged on the outer face of the printed circuit board (2) in order to connect to ground or to an external connection.
H01P 5/18 - Dispositifs à accès conjugués, c.-à-d. dispositifs présentant au moins un accès découplé d'un autre accès consistant en deux guides couplés, p. ex. coupleurs directionnels
64.
DEVICE FOR GENERATING A PLURALITY OF CLOCK SIGNALS OR HIGH-FREQUENCY SIGNALS
The invention relates to a device (1) for generating a plurality of clock signals or high-frequency signals, comprising a reference frequency generator (2), which is connected to an oscillator (3) and generates at its output (5) a reference signal with a reference frequency fx, and at least one signal processing component (10-14), in particular DDS, which is connected to the reference frequency generator (2) via a first signal line (15) and to which the reference signal with the reference frequency fx is supplied, and which is configured to generate an output signal having a frequency < fx.
A power supply system (2) comprises an amplifier stage (14) that includes at least one transistor (15), in particular an LDMOS transistor, which is connected to a supply voltage via a power connection (16); the control connection (17) of the transistor (15) is controlled by a control voltage; a first controller (22) is provided for adjusting the control voltage of the transistor (15), and a second controller (23) is provided for adjusting the supply voltage; one of the controllers (22, 23) is designed to feed a state signal to the other controller (23, 22), and the other controller (23, 22) is designed to evaluate the state signal.
H03F 1/02 - Modifications des amplificateurs pour augmenter leur rendement, p. ex. étages classe A à pente glissante, utilisation d'une oscillation auxiliaire
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
H03F 3/193 - Amplificateurs à haute fréquence, p. ex. amplificateurs radiofréquence comportant uniquement des dispositifs à semi-conducteurs comportant des dispositifs à effet de champ
H03F 3/20 - Amplificateurs de puissance, p. ex. amplificateurs de classe B, amplificateur de classe C
66.
METHOD FOR SCANNING A COMPOSITE SIGNAL RELATING TO A PLASMA PROCESS
The invention relates to a method for scanning a composite signal relating to a plasma process, wherein the composite signal has at least one plasma signal (1-3) that is of interest and superimposed by at least one interfering signal (7, 7c, 20, 22, 23, 24), said method comprising the following method steps: a. identifying the at least one interfering signal (7, 7c, 20, 22, 23, 24); b. digitalising the composite signal, wherein the composite signal is scanned with a scanning frequency (fS); c. varying the scanning frequency (fS) during the operation of the plasma process according to the frequency of the plasma signal (1-3) of interest and/or the frequency of the at least one interfering signal (7, 7c, 20, 22, 23, 24).
The invention relates to a high-frequency amplifier arrangement (1) suitable for generating power outputs ≥ 1kW at frequencies ≥ 2MHz, for the purpose of plasma excitation, comprising a. two LDMOS transistors (S1, S2) each connected by their source connection to an earth connection point (5), wherein the LDMOS transistors (S1, S2) have the same design and are arranged in an assembly (3) (package), b. a circuit board (2) lying flat against a metallic cooling plate (25) and connected, by means of a plurality of earth connections (8, 19, 21, 24), to said cooling plate (25) which can be connected to the earth (26), wherein the assembly (3) is arranged on or against the circuit board (2), c. a power transformer (7) whose primary winding (6) is connected to the drain connections of the LDMOS transistors (S1, S2), and d. a signal transmitter (10) whose secondary winding (13) is connected, with a first end and via one or more resistive elements (14), to the gate connection (15) of one LDMOS transistor (S1) and connected, with a second end and via one or more resistive elements (16), to the gate connection (17) of the other LDMOS transistor (S2), wherein each gate connection (15, 17) is connected to the earth (19, 21) via at least one voltage-limiting structural element arrangement (18, 20, 18', 20').
H03F 3/193 - Amplificateurs à haute fréquence, p. ex. amplificateurs radiofréquence comportant uniquement des dispositifs à semi-conducteurs comportant des dispositifs à effet de champ
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
H03F 3/30 - Amplificateurs push-pull à sortie uniqueDéphaseurs pour ceux-ci
68.
POWER COMBINER HAVING A SYMMETRICALLY ARRANGED COOLING BODY AND POWER COMBINER ARRANGEMENT
The invention relates to a power combiner (10) comprising a cooling body (40). The power combiner (10) hast at least one first electrical conductor (14) and one second electrical conductor (16). The first electrical conductor (14) and the second electrical conductor (16) are generally mostly arranged equidistant from the cooling body (40). In addition, the first electrical conductor (14) and the second electrical conductor (16) can be arranged alternatingly near or at a distance from the cooling body (40). Alternatively or in addition, the cooling body (40) can be arranged between the first electrical conductor (14) and the second electrical conductor (16). Alternatively or in addition, the first electrical conductor (14) and the second electrical conductor (16) can be divided mostly into parallel conductor parts (14a, 14b, 16a, 16b), wherein the conductor parts (14a, 14b, 16a, 16b) are distanced from the cooling body (40) in such a way that the first electrical conductor (14) and the second electrical conductor (16) are generally mostly at equal distance from the cooling body (40).
H01P 5/18 - Dispositifs à accès conjugués, c.-à-d. dispositifs présentant au moins un accès découplé d'un autre accès consistant en deux guides couplés, p. ex. coupleurs directionnels
The invention relates to a non-linear high-frequency amplifier arrangement (1) suitable for generating power outputs ≥ 1kW at frequencies of ≥ 1MHz for the purpose of plasma excitation, comprising: a. two LDMOS transistors (S1, S2) each connected by their source connection to an earth connection point (5), wherein the LDMOS transistors (S1, S2) have the same design and are arranged in an assembly (package) (3), b. a power transformer (7) whose primary winding (6) is connected to the drain connections of the LDMOS transistors (S1, S2), c. a signal transmitter (11) whose secondary winding (13) is connected by a first end to the gate connection (15) of one LDMOS transistor (S1) and by a second end to the gate connection (17) of the other LDMOS transistor (S2), and d. a feedback path (34, 35) from the drain connection to the gate connection (15, 17) of each of the LDMOS transistors (S1, S2).
H03F 3/193 - Amplificateurs à haute fréquence, p. ex. amplificateurs radiofréquence comportant uniquement des dispositifs à semi-conducteurs comportant des dispositifs à effet de champ
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
H03F 3/217 - Amplificateurs de puissance de classe DAmplificateurs à commutation
H03F 3/30 - Amplificateurs push-pull à sortie uniqueDéphaseurs pour ceux-ci
A high-frequency amplifier arrangement (1) which is suitable for producing output powers of ᡶ= 1 kW at frequencies of ᡶ= 2 MHz for plasma excitation, comprising: a. two transistors (S1, S2), the source and emitter connections of which are each connected to an earth connection point (5), wherein the transistors (S1, S2) have an identical design and are arranged on a multilayer printed circuit board (2), b. a power transformer (7), the primary winding (6) of which is connected to the drain and collector connections of the transistors (S1, S2), c. the primary winding (6) and the secondary winding (4) of the power transformer (7) are each in the form of planar conductor tracks which are arranged in different upper layers (61, 62) of the multilayer printed circuit board (2).
H03F 3/193 - Amplificateurs à haute fréquence, p. ex. amplificateurs radiofréquence comportant uniquement des dispositifs à semi-conducteurs comportant des dispositifs à effet de champ
The invention relates to a redox flow battery system (1), comprising a controller (17) and a battery inverter (2), which is suitable for charging and/or discharging a battery (11-13), wherein the battery inverter (2) comprises: a) a plurality of battery connections (8-10), to each of which at least one battery (11-13) can be connected; b) a first measuring device (14-16), which is suitable for measuring the voltage at a battery connection (8-10) and which is connected to the controller (17) with regard to signaling; c) a second measuring device (30), which is suitable for measuring the current at a battery connection (8-10) and which is connected to the controller (17) with regard to signalling; d) a grid connection (4), which can be connected to an alternating-current supply grid, wherein e) the battery inverter (2) has a plurality of DC/DC converters (5, 6, 7), of which at least one has a first bridge circuit (40) directly connected to a battery connection (8-10).
G01R 31/36 - Dispositions pour le test, la mesure ou la surveillance de l’état électrique d’accumulateurs ou de batteries, p. ex. de la capacité ou de l’état de charge
H01M 8/18 - Éléments à combustible à régénération, p. ex. batteries à flux REDOX ou éléments à combustible secondaires
H02M 1/32 - Moyens pour protéger les convertisseurs autrement que par mise hors circuit automatique
H02H 7/12 - Circuits de protection de sécurité spécialement adaptés aux machines ou aux appareils électriques de types particuliers ou pour la protection sectionnelle de systèmes de câble ou de ligne, et effectuant une commutation automatique dans le cas d'un changement indésirable des conditions normales de travail pour convertisseursCircuits de protection de sécurité spécialement adaptés aux machines ou aux appareils électriques de types particuliers ou pour la protection sectionnelle de systèmes de câble ou de ligne, et effectuant une commutation automatique dans le cas d'un changement indésirable des conditions normales de travail pour redresseurs pour convertisseurs ou redresseurs statiques
H02M 3/158 - Transformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant continu sans transformation intermédiaire en courant alternatif par convertisseurs statiques utilisant des tubes à décharge avec électrode de commande ou des dispositifs à semi-conducteurs avec électrode de commande utilisant des dispositifs du type triode ou transistor exigeant l'application continue d'un signal de commande utilisant uniquement des dispositifs à semi-conducteurs avec commande automatique de la tension ou du courant de sortie, p. ex. régulateurs à commutation comprenant plusieurs dispositifs à semi-conducteurs comme dispositifs de commande finale pour une charge unique
H02J 7/00 - Circuits pour la charge ou la dépolarisation des batteries ou pour alimenter des charges par des batteries
72.
INVERTER FOR CHARGING AND/OR DISCHARGING BATTERIES
The invention relates to an inverter (1, 101, 103, 104, 101') for charging and/or discharging batteries (2, 3, 4), in particular redox flow batteries, comprising a controllable component (7), which is connected to a data connection, the data connection is designed as a digital signal transmission bus (6), which extends from a communication interface (5) of the inverter (1, 101, 103, 104, 101'), which is provided for the data connection of the inverter (1, 101, 103, 104, 101') to further inverters (1, 101, 103, 104, 101') and/or to a superordinate controller (107), to the controllable component (7), wherein an accommodating device (9) is provided for accommodating a control processor unit (102) and an internal interface (8) is provided for connecting the control processor unit (102) to the digital signal transmission bus (6).
H02J 3/32 - Dispositions pour l'équilibrage de charge dans un réseau par emmagasinage d'énergie utilisant des batteries avec moyens de conversion
H02J 13/00 - Circuits pour pourvoir à l'indication à distance des conditions d'un réseau, p. ex. un enregistrement instantané des conditions d'ouverture ou de fermeture de chaque sectionneur du réseauCircuits pour pourvoir à la commande à distance des moyens de commutation dans un réseau de distribution d'énergie, p. ex. mise en ou hors circuit de consommateurs de courant par l'utilisation de signaux d'impulsion codés transmis par le réseau
73.
INVERTER, FLOW BATTERY SYSTEM, AND METHOD FOR CHARGING AND DISCHARGING A FLOW BATTERY
The invention relates to an inverter (1) for a flow battery system (100), having the following: - a bidirectionally operatable AC/DC converter (2) with a network terminal (3) and an HVDC terminal (4a, 4b), - multiple battery terminal pairs (8a, 8b, 9a, 9b, 10a, 10b) for connecting to batteries of the flow battery system (100), and - at least two DC/DC converter units (5, 6, 7), each of which comprises a first DC terminal pair (5a, 5b, 6a, 6b, 7a, 7b) and a second DC terminal pair (15a, 15b, 16a, 16b, 17a, 17b), each pair being designed to transport power bidirectionally from the first DC terminal pair (5a, 5b, 6a, 6b, 7a, 7b) to the second DC terminal pair (15a, 15b, 16a, 16b, 17a, 17b) as well as in the opposite direction, wherein - each first DC terminal pair (5a, 5b, 6a, 6b, 7a, 7b) is connected to a battery terminal pair (8a, 8b, 9a, 9b, 10a, 10b), - the first DC terminal pair (5a, 5b, 6a, 6b, 7a, 7b) is galvanically insulated from the second DC terminal pair (15a, 15b, 16a, 16b, 17a, 17b), and - the second DC terminal pairs (15a, 15b, 16a, 16b) of at least two DC/DC converter units (5, 6, 7) are connected in a series circuit, wherein a terminal (15b) of the second DC terminal pair (15a, 15b) of a first DC/DC converter unit (5) is connected to a terminal (16a) of a second DC terminal pair (16a, 16b) of another DC/DC converter unit (6), and the series circuit is connected to the HVDC terminal (4a, 4b).
In a power supply system (1) for a plasma process comprising a first power supply (2) and a second, structurally identical or structurally similar, redundant power supply (3), wherein the first and second power supplies (2, 3) are connected in terms of data via a data exchange connection (4), the first power supply (2) is designed, in a standby mode, to obtain data from the second power supply (3) operating in the normal operating mode, which data are necessary in order that the power delivered to the plasma process hitherto by the second power supply (3) is fed to the plasma process in place of the second power supply (3).
The invention relates to a method and a device for overvoltage limiting of an output voltage at the output of an AC voltage generation arrangement (131) with an inverter circuit unit (14) by means of a surge-limiting device (1), comprising: - two input terminals (11, 12) for connection to the inverter circuit unit; - two output terminals (21, 22) for connection to an intermediate circuit voltage unit (20) of the AC voltage generation arrangement; - a rectifier device (2) connected to the output terminals; - an AC voltage converter device (3) connected to the input terminals and the rectifier device, wherein, in the case of exceeding positive and negative AC voltage peak values over a predetermined amount at the input terminals, power is transported from the input terminals via the AC voltage converter device and the rectifier device to the output terminals and thus the AC voltage is limited at the input terminals to a further predeterminable amount.
H02M 1/32 - Moyens pour protéger les convertisseurs autrement que par mise hors circuit automatique
H02H 7/122 - Circuits de protection de sécurité spécialement adaptés aux machines ou aux appareils électriques de types particuliers ou pour la protection sectionnelle de systèmes de câble ou de ligne, et effectuant une commutation automatique dans le cas d'un changement indésirable des conditions normales de travail pour convertisseursCircuits de protection de sécurité spécialement adaptés aux machines ou aux appareils électriques de types particuliers ou pour la protection sectionnelle de systèmes de câble ou de ligne, et effectuant une commutation automatique dans le cas d'un changement indésirable des conditions normales de travail pour redresseurs pour convertisseurs ou redresseurs statiques pour onduleurs, c.-à-d. convertisseurs de courant continu en courant alternatif
H02H 9/04 - Circuits de protection de sécurité pour limiter l'excès de courant ou de tension sans déconnexion sensibles à un excès de tension
76.
METHOD FOR OPERATING AN MF POWER GENERATOR, AND AN MF POWER GENERATOR
A method for operating an MF power generator (1, 100) in which an output signal (102, 105, 107, 111, 114, 116) is controlled in closed-loop or open-loop mode is characterized in that the output signal (102, 105, 107, 111, 114, 116) is controlled in closed-loop or open-loop mode according to a predefined target value curve (101, 104, 106, 110, 113, 115), the target value curve influencing the output signal in its progression within one, in particular within a plurality of, particularly preferably within each half-wave.
H02M 7/5387 - Transformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant alternatif sans possibilité de réversibilité par convertisseurs statiques utilisant des tubes à décharge avec électrode de commande ou des dispositifs à semi-conducteurs avec électrode de commande utilisant des dispositifs du type triode ou transistor exigeant l'application continue d'un signal de commande utilisant uniquement des dispositifs à semi-conducteurs, p. ex. onduleurs à impulsions à un seul commutateur dans une configuration en pont
H02M 1/00 - Détails d'appareils pour transformation
77.
METHOD FOR OPERATING A BIDIRECTIONALLY OPERABLE INVERTER AND BATTERY MANAGEMENT SYSTEM
The invention relates to a method for operating a bidirectionally operable inverter (2), the mains connection (4) of which is connected to an alternating current power supply network and at least one battery connection (8-10) of which is connected to a flow battery (11-13), having the method steps of: a) monitoring the charge state of a flow battery (11-13), b) operating the inverter (2), according to the charge state, in a first or a second charge operating mode, wherein, in the first and second charge operating modes, AC power is taken from the alternating current supply network on the mains connection (4) and DC power is provided on the battery connection (8-10) of the flow battery (11-13), wherein a maximum current flowing on the battery connection (8-10) is specified, and c) in the first charge operating mode, a lower maximum current is specified than in the second charge operating mode.
H02J 3/32 - Dispositions pour l'équilibrage de charge dans un réseau par emmagasinage d'énergie utilisant des batteries avec moyens de conversion
H01M 8/18 - Éléments à combustible à régénération, p. ex. batteries à flux REDOX ou éléments à combustible secondaires
H02M 7/42 - Transformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant alternatif sans possibilité de réversibilité
H02M 7/66 - Transformation d'une puissance d'entrée en courant alternatif en une puissance de sortie en courant continuTransformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant alternatif avec possibilité de réversibilité
H02J 7/34 - Fonctionnement en parallèle, dans des réseaux, de batteries avec d'autres sources à courant continu, p. ex. batterie tampon
78.
METHOD FOR MEASURING THE CHARGE STATE OF A FLOW-BATTERY STACK AND BATTERY MANAGEMENT SYSTEM
The invention relates to a method for measuring the charge state of a flow-battery stack (11-13), which is connected to a battery connection (8-10) of a battery inverter (2), wherein the battery connection (8-10) is switched currentless for a first predefined period of time (Δt1) and the idle voltage at the battery connection (8-10) is measured.
H01M 8/18 - Éléments à combustible à régénération, p. ex. batteries à flux REDOX ou éléments à combustible secondaires
G01R 31/36 - Dispositions pour le test, la mesure ou la surveillance de l’état électrique d’accumulateurs ou de batteries, p. ex. de la capacité ou de l’état de charge
79.
CURRENT TRANSFORMER DEVICE, ENERGY STORAGE SYSTEM AND METHOD FOR OPERATING A CURRENT TRANSFORMER DEVICE
The present invention relates to a current transformer device (100) for charging and discharging an energy store (400), an energy storage system (700) and a method for operating a current transformer device. Here, the current transformer device (100) comprises: at least one bi-directional voltage transformer (10), which can be connected to an electrical grid (300) and to the energy store (400); a control device (20), which is connected to the voltage transformer (10) and is configured to control the voltage transformer (10) with respect to the energy flow direction thereof; an auxiliary grid unit (30) on the grid side, which is configured to draw energy from the electrical grid (300) and to provide the control device (20) with energy at an operating voltage; an auxiliary grid unit (40) on the energy store side, which is configured to draw energy from the energy store (400) and to provide the control device (20) with energy at the operating voltage; wherein the control device (20) is configured to control the auxiliary grid unit (30) on the grid side and the auxiliary grid unit (40) on the energy store side depending on the energy flow direction of the voltage transformer (10).
H02J 3/38 - Dispositions pour l’alimentation en parallèle d’un seul réseau, par plusieurs générateurs, convertisseurs ou transformateurs
H02J 7/02 - Circuits pour la charge ou la dépolarisation des batteries ou pour alimenter des charges par des batteries pour la charge des batteries par réseaux à courant alternatif au moyen de convertisseurs
In a method in which a generator (2) that is connected to a line voltage (3) is operated in a nominal operating mode, the line voltage (3) or a variable derived therefrom is monitored as to the occurrence of at least one given event, and when the at least one given event occurs, a predefined operating mode of the generator (2) is triggered, said predefined operating mode being different from the nominal operating mode.
H02J 9/06 - Circuits pour alimentation de puissance de secours ou de réserve, p. ex. pour éclairage de secours dans lesquels le système de distribution est déconnecté de la source normale et connecté à une source de réserve avec commutation automatique
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
81.
CONTROL ARRANGEMENT, CONTROL SYSTEM AND HIGH-FREQUENCY POWER GENERATION APPARATUS
A control arrangement (6), in particular for controlling the power and/or matching the output impedance of a high-frequency power generator to the impedance of a load, in particular a plasma discharge, has: a. a first controller (13) which is supplied with a first desired value (14) and a first actual value (12) and a correction value (15), wherein the first controller (13) is set up to generate a first manipulated variable (22) taking into account the correction value (15), b. a correction value determination apparatus (16) which is supplied with a check value (24) and is set up to determine the correction value (15) taking into account the check value (24) and a default value (17), wherein c. the correction value determination apparatus (16) and the first controller (13) are designed in such a manner that, if the check value (24) differs from the default value (17), the correction value (15) influences the first controller (6) such that the first actual value (12) differs from the first desired value (14) in the adjusted state of the first controller (6).
G05B 11/06 - Commandes automatiques électriques dans lesquelles le signal de sortie représente une fonction continue de l'écart par rapport à la valeur désirée, c.-à-d. commande continue
H03H 7/40 - Adaptation automatique de l'impédance de charge à l'impédance de la source
82.
ELECTRIC POWER CONVERSION DEVICE AND METHOD FOR CHARGING AND DISCHARGING ENERGY STORAGE DEVICES
An electric power conversion device (1) for charging and discharging energy storage devices having at least one bidirectional voltage converter (2, 5, 6) which can be connected to a power supply network (3) and to at least one electrochemical energy converter (7-10) for an energy storage device, configured as a flow battery and having a circulation arrangement for electrolytes. The electric power conversion device (1) has a controller (11) which is connected to the voltage converter (2, 5, 6) and is designed to control the voltage converter (2, 5, 6) with regard to the power flow direction thereof, characterized in that the controller (11) is designed to control one or more of the following energy storage peripheral devices depending on the power flow direction of the voltage converter (2, 5, 6) specified by the controller (11): - pumps (33, 34) for circulating the electrolytes, - flow regulator (35, 36) for controlling the electrolyte flow volume, - temperature controller for setting the electrolyte temperature, - pressure controller for setting the electrolyte pressure, and wherein the controller (11) has at least one control port (17) for connection of at least one of these energy storage peripheral devices.
An electric power conversion device (1) for charging and discharging energy storage devices having at least one bidirectional voltage converter (2, 5, 6) which can be connected to a power supply network (3) and to at least one electrochemical energy converter (7-10) for an energy storage device, configured as a flow battery and having a circulation arrangement for electrolytes. The electric power conversion device (1) has a controller (11) which is connected to the voltage converter (2, 5, 6) and is designed to control the voltage converter (2, 5, 6) with regard to the power flow direction thereof, characterized in that the controller (11) is designed to control one or more of the following energy storage peripheral devices depending on the power flow direction of the voltage converter (2, 5, 6) specified by the controller (11): - pumps (33, 34) for circulating the electrolytes, - flow regulator (35, 36) for controlling the electrolyte flow volume, - temperature controller for setting the electrolyte temperature, - pressure controller for setting the electrolyte pressure, and wherein the controller (11) has at least one control port (17) for connection of at least one of these energy storage peripheral devices.
The invention relates to an energy storage system (1) with a first voltage transformer (2) that can be connected to an electricity grid (3), a DC link (4), connected to the first voltage transformer (2), and a second and a third voltage transformer (5, 6) connected to the DC link (4), at least one energy storage device (7-10) being connectable to each of the second and third voltage transformers (5, 6), characterised in that the energy storage system (1) has a control device (11) which is connected to the second and third voltage transformers (5, 6) and is designed to control the direction of the flow of power in the second and third voltage transformers (5, 6), more particularly is designed to control the direction of the flow of power in the second voltage transformer (5) so that it flows in the opposite direction to the flow of power in the third voltage transformer (6).
H02J 3/32 - Dispositions pour l'équilibrage de charge dans un réseau par emmagasinage d'énergie utilisant des batteries avec moyens de conversion
H02J 3/36 - Dispositions pour le transfert de puissance électrique entre réseaux à courant alternatif par l'intermédiaire de haute tension à courant continu
H02J 7/00 - Circuits pour la charge ou la dépolarisation des batteries ou pour alimenter des charges par des batteries
H02J 9/06 - Circuits pour alimentation de puissance de secours ou de réserve, p. ex. pour éclairage de secours dans lesquels le système de distribution est déconnecté de la source normale et connecté à une source de réserve avec commutation automatique
H02M 7/68 - Transformation d'une puissance d'entrée en courant alternatif en une puissance de sortie en courant continuTransformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant alternatif avec possibilité de réversibilité par convertisseurs statiques
85.
ENERGY STORAGE SYSTEM AND METHOD FOR INCREASING THE EFFICIENCY OF AN ENERGY STORAGE SYSTEM
The invention relates to an energy storage system (1) with a first voltage transformer (2) that can be connected to an electricity grid (3), a DC link (4), connected to the first voltage transformer (2), and a second and a third voltage transformer (5, 6) connected to the DC link (4), at least one energy storage device (7-10) being connectable to each of the second and third voltage transformers (5, 6), characterised in that the energy storage system (1) has a control device (11) which is connected to the second and third voltage transformers (5, 6) and is designed to control the direction of the flow of power in the second and third voltage transformers (5, 6), more particularly is designed to control the direction of the flow of power in the second voltage transformer (5) so that it flows in the opposite direction to the flow of power in the third voltage transformer (6).
H02J 3/32 - Dispositions pour l'équilibrage de charge dans un réseau par emmagasinage d'énergie utilisant des batteries avec moyens de conversion
H02J 3/36 - Dispositions pour le transfert de puissance électrique entre réseaux à courant alternatif par l'intermédiaire de haute tension à courant continu
H02J 7/00 - Circuits pour la charge ou la dépolarisation des batteries ou pour alimenter des charges par des batteries
H02M 7/68 - Transformation d'une puissance d'entrée en courant alternatif en une puissance de sortie en courant continuTransformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant alternatif avec possibilité de réversibilité par convertisseurs statiques
H02J 9/06 - Circuits pour alimentation de puissance de secours ou de réserve, p. ex. pour éclairage de secours dans lesquels le système de distribution est déconnecté de la source normale et connecté à une source de réserve avec commutation automatique
86.
POWER SUPPLY SYSTEM WITH MULTIPLE AMPLIFIER PATHS AND A METHOD FOR EXCITING A PLASMA
A power supply system (2, 20) comprising a power converter (3, 30) generating a high-frequency power signal and connectable to a load (6) for supplying a plasma or gas laser process with power, wherein the power converter (3, 30) has at least one amplifier stage (40) comprising one first and one second amplifier path (42, 43) having in each case an amplifier (42a, 43a), wherein the first amplifier path (42) emits a first amplifier path output signal at the output thereof and the second amplifier path (43) emits a second amplifier path output signal at the output thereof, which has a phase offset in relation to the first amplifier path output signal and which is not equal to, and in particular greater than, 0º and not equal to, and in particular smaller than, 180º, wherein the amplifier paths (42, 43) are connected to a phase shifting coupler unit (47), which couples the output signals from the amplifier paths (42, 43) to a high-frequency power signal, is characterized in that at least one amplifier (42a, 43a) comprises a field effect transistor (60, T1, T2), which is realised in a semiconductor component (61), the semiconductor structure thereof being constructed substantially in layers, in particular being realized as a planar semiconductor component, which comprises a channel (71), wherein the current flow in channel (71) takes place overwhelmingly in the lateral direction, i.e. substantially parallel to the layers of the semiconductor structure.
The invention relates to a power supply system (20). In order to be able to handle load jumps, an amplitude control of a high-frequency signal is combined with a voltage control of the supply voltage of an amplifier (38, 39) which amplifies the high-frequency signal.
Apparatus and method for monitoring a discharge in a plasma process, in particular between electrodes of a cathode sputtering arrangement (13), to which power is supplied from a power generator with a periodically changing output signal of the power generator, said method comprising the following steps: a. detecting at least one first signal characteristic (2) of at least one plasma supply signal (19) within at least one first time interval within at least one period of the plasma supply signal, b. detecting at least one second signal characteristic (6) of at least one plasma supply signal (19) within at least one second time interval, which is at that point in at least one further period of the plasma supply signal which corresponds to the first time interval, c. generating an identification signal when the second signal characteristic deviates from the first signal characteristic by at least one spacing, wherein the spacing has a minimum time difference (22) and a minimum signal amplitude difference (21). In particular arcs can be identified in this way in a very reliable manner and very quickly.
The invention relates to a cooling device (10) for cooling at least one electronic component and an electronic arrangement with a cooling device (10) and an electronic component. Said cooling device (10) comprises at least one cooling body (12) through which a cooling medium can flow. Said cooling device (10) also comprises at least one cooling plate (16) made of shaped sheet metal having a through recess (14) in which the cooling body (12) is at least partially arranged. Said through recess (14) is particularly simple to manufacture, as a result of which the cooling device (10) can be produced economically. Preferably, at least one cooling pipe (26, 28) is provided for transporting the cooling medium to and from the cooling body (12), said cooling pipe being in direct contact with the cooling plate (16) and/or with the electronic component which is to be cooled resulting in that said cooling device (10) can effectively absorb the heat produced on the electronic component.
A method for controlling a control loop (7) by means of a control circuit (Rk) comprising a controller (6) and a plurality of control channels, wherein each control channel comprises an actual value and a target value for a control variable, comprising the following method steps: specifying the target values; determining the actual values; determining a selected control channel, wherein the selected control channel is determined using a selection variable which is dependent on the actual value; determining a selected control difference (23) from the target value and the actual value of the selected control channel (K2), controlling the control loop (7) by means of the selected control difference (23); characterized in that the selection variable is standardized to a standardized selection variable by the target value of the corresponding control channel; and in that the selected control channel (K2) is determined based on a comparison of the standardized selection variable against another similar variable.
G05B 5/01 - Dispositions pour éliminer l'instabilité électriques
G05B 11/42 - Commandes automatiques électriques avec les dispositions nécessaires pour obtenir des caractéristiques particulières, p. ex. proportionnelles, intégrales, différentielles pour obtenir une caractéristique à la fois proportionnelle et dépendante du temps, p. ex. P.I., P.I.D.
91.
ARC EXTINGUISHING METHOD AND POWER SUPPLY SYSTEM HAVING A POWER CONVERTER
An arc extinguishing method for extinguishing arcs in a plasma chamber (6) of a plasma system (1), comprising the method steps of: a. producing power during a plasma operation for producing plasma in said plasma chamber and for carrying out a plasma-processing process using the produced plasma, in which a digital-to-analog converter (DAC) (41) generates an analog signal that is supplied to an amplifier path (31, 32) and amplified there; b. monitoring the plasma system with regard to the presence of an arc by means of arc identification; c. if an arc is identified in step b. : controlling the DAC by the arc identification in such a way that an analog output signal of the DAC is modified.
A power supply system (2, 20) having a power converter (3, 30) which produces a high frequency signal and which can be connected to a load (6) in order to supply a plasma or gas laser process with power, wherein said power converter has at least a first amplifier path (31), an audio signal generated by a DAC (41) from a digital signal being supplied to at least one amplifier path (31-36), is characterized in that a logic circuit unit (42) for generating the digital signal supplied to the DAC is provided upstream of the DAC, said logic circuit unit having - a signal data store (61) in which signal data values for generating an analog signal form are stored, - an amplitude data store (62) in which amplitude data values for influencing the amplitudes of the analog signals are stored, - a multiplier (63) for multiplying the signal data values with the amplitude data values. In a method for producing high frequency power that can be supplied to a load, in which an analog signal is produced by a DAC and amplified in an amplifier path (31-36), the amplitude of the analog signal is modulated.
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
H05H 1/46 - Production du plasma utilisant des champs électromagnétiques appliqués, p. ex. de l'énergie à haute fréquence ou sous forme de micro-ondes
H02M 7/5387 - Transformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant alternatif sans possibilité de réversibilité par convertisseurs statiques utilisant des tubes à décharge avec électrode de commande ou des dispositifs à semi-conducteurs avec électrode de commande utilisant des dispositifs du type triode ou transistor exigeant l'application continue d'un signal de commande utilisant uniquement des dispositifs à semi-conducteurs, p. ex. onduleurs à impulsions à un seul commutateur dans une configuration en pont
H03F 3/217 - Amplificateurs de puissance de classe DAmplificateurs à commutation
93.
HF POWER INVERTER CIRCUIT, HF POWER INVERTER SYSTEM, AND METHOD FOR SWITCHING A SWITCHING ELEMENT ON AND OFF
The invention relates to an HF power inverter circuit (100) comprising at least one switching element (12, 13, 17, 18) that has a control connection to which a control arrangement (30) is connected, said control arrangement switching the switching element (12, 13, 17, 18) on and off. The control arrangement has a programmable logic unit that has a first signal delay path (37, 38), which comprises at least one logic element, for delaying at least one switch-on signal part and a second signal delay path (37, 38), which is different from the first signal delay path (37, 38) and which comprises at least one logic element, for delaying at least one switch-off signal part.
H02M 1/38 - Moyens pour empêcher la conduction simultanée de commutateurs
H02M 1/08 - Circuits spécialement adaptés à la production d'une tension de commande pour les dispositifs à semi-conducteurs incorporés dans des convertisseurs statiques
H02M 1/00 - Détails d'appareils pour transformation
A directional coupler (1), particularly for systems for plasma excitation and/or laser excitation, formed as a multi-layer circuit board component comprising: • a main line (2) for transferring a power; • a first secondary line (4), which runs in a coupling area (3) of the main line (2) at a distance from said main line, wherein the main line (2) is arranged in a first position and the first secondary line (4) is arranged in a second, in particular, a parallel position; • a first shield (12, 12.1, 12.2), which has a plurality of strips (14, 14.1, 14.2) that are electronically connected to one another, wherein the strips (14, 14.1, 14.2) do not have an electrical load on the free end (16) thereof, wherein the first shield is arranged in a third position. A directional coupler of this kind has high accuracy and weak coupling.
H01P 5/18 - Dispositifs à accès conjugués, c.-à-d. dispositifs présentant au moins un accès découplé d'un autre accès consistant en deux guides couplés, p. ex. coupleurs directionnels
95.
METHOD FOR THE PHASE BALANCING OF SEVERAL HF POWER GENERATING UNITS OF AN HF POWER SUPPLY SYSTEM, AND POWER SUPPLY SYSTEM
The invention relates to a method for the phase balancing of several HF power generating units (12-14) of an HF power supply system (10), comprising the following method steps: a. measuring a signal that is related to the power reflected at a load and arriving at a first HF power generating unit (12-14); b. transmitting at least one value related to the measured signal to a system controller (11) or transmitting the measured signal to a system controller (11) and determining a value related to the measured signal in the system controller (11); c. determining a reference value for the value of the first HF power generating unit (12-14) in the system controller (11) or specifying a reference value for the value of the first HF power generating unit (12-14) to the system controller (11); d. changing the frequency and/or the phase of the output signal of the first HF power generating unit (12-14); e. measuring again a signal that is related to the power reflected at a load and arriving at the first HF power generating unit (12-14); f. transmitting a value related to the signal measured in step e. to the system controller (11) or transmitting the signal measured in step e. to the system controller (11) and determining a value related to the signal measured in step e. in the system controller (11); and g. repeating steps c. to f. or d. to f. until a specified result occurs, wherein h. steps 1.a. to 1.g. are performed for one or more additional load generating units (12-14).
H03H 7/40 - Adaptation automatique de l'impédance de charge à l'impédance de la source
H03F 3/21 - Amplificateurs de puissance, p. ex. amplificateurs de classe B, amplificateur de classe C comportant uniquement des dispositifs à semi-conducteurs
In a radio-frequency class D MOSFET amplifier module (10) suitable for operation from supply voltages ≥ 100 V and at output powers ≥ 500 W and frequencies ≥ 3 MHz, comprising a half bridge formed from two series-connected switching elements (11, 12) embodied as MOSFETs and at least one driver (15), a driver supply voltage connection (43) and an output connection (24a, 24b) are arranged on an identical connection side of the amplifier module (10).
A heat sink system for an electrical device has at least two heat sink segments (2, 3, 30, 50, 51, 71, 72, 90, 110, 115, 130, 150, 151, 160, 175, 176, 190, 191, 211-213, 221-223) that can be interconnected so as to be ready for assembly, wherein at least one heat sink segment (2, 3, 30, 50, 51, 71, 72, 90, 110, 115, 130, 150, 151, 160, 175, 176, 190, 191, 211-213, 221-223) has an assembly profile (8, 9, 10, 37, 54, 53, 57, 61, 73, 78, 79, 91, 92, 111, 112, 116, 117, 131, 132, 152, 153, 177, 178, 192, 193) on at least one side for the assembly-ready connection to a housing part (11, 55, 56, 62, 80, 81), wherein at least two heat sink segments can be interconnected and one heat sink segment and one housing part can be interconnected so as to be ready for assembly without screws, wherein the connection between two heat sink segments and the connection from one heat sink segment to the housing part is designed to ensure an electrical resistance of less than 0.1 ohm at a current greater than 5 A with a frequency greater than 1 MHz.
H01L 23/40 - Supports ou moyens de fixation pour les dispositifs de refroidissement ou de chauffage amovibles
H01L 23/473 - Dispositions pour le refroidissement, le chauffage, la ventilation ou la compensation de la température impliquant le transfert de chaleur par des fluides en circulation par une circulation de liquides
F28F 3/02 - Éléments ou leurs ensembles avec moyens pour augmenter la surface de transfert de chaleur, p. ex. avec des ailettes, avec des évidements, avec des ondulations
98.
METHOD AND APPARATUS FOR PROTECTING PASSIVE COMPONENTS CONNECTED TO A RADIO-FREQUENCY GENERATOR
A method for protecting passive components (14, 53, 54) connected to a radio-frequency generator (11, 11.1, 51, 52) comprises the method steps of: a. producing a radio-frequency power at a fundamental frequency by means of the radio-frequency generator (11, 11.1, 51, 52); b. transmitting the radio-frequency power to a load (16) via a radio-frequency cable (14, 53, 54); c. determining a variable related to the radio-frequency load on at least one passive component connected to the RF generator, in particular the radio-frequency cable (14, 53, 54); d. comparing the determined variable with a reference variable which describes the maximum load on at least one connected passive component; e. adapting the radio-frequency power produced by the radio-frequency generator (11, 11.1, 51, 52) at the fundamental frequency on the basis of the comparison result.
The invention relates to a method for generating an arc detection signal on the basis of a plurality of observation signals, comprising the method steps of: a. generating one arc detection partial signal for at least two observation signals, wherein the generation of each arc detection partial signal comprises: i. correlating the associated observation signal or a modified observation signal with a correlation signal, in that the correlation signal is influenced by the respective observation signal or by the modified observation signal, and in this manner a correlation result is generated; ii. generating or modifying a coefficient on the basis of the correlation result; and iii. weighting the respective observation signal with an associated coefficient; and b. the addition of the arc detection partial signals to the arc detection signal.
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
100.
METHOD FOR IMPEDANCE MATCHING THE OUTPUT IMPEDANCE OF A HIGH-FREQUENCY POWER SUPPLY ARRANGEMENT TO THE IMPEDANCE OF A PLASMA LOAD, AND HIGH FREQUENCY POWER SUPPLY ARRANGEMENT
The invention relates to a method for impedance matching the output impedance of a high-frequency power supply arrangement (1) to the impedance of a plasma load (2), comprising the following method steps: a. generating a high-frequency signal by means of a high-frequency signal generator (6); b. in a first impedance matching mode, impedance matching the output impedance of the high-frequency power supply arrangement (1) exclusively by changing the frequency of the generated high-frequency signal; c. monitoring the frequency of the generated high-frequency signal to ascertain whether said frequency is within a predetermined frequency range; d. if the frequency is outside the predetermined frequency range, in a second impedance matching mode, impedance matching the output impedance of the high-frequency power supply arrangement (1) by mechanically and/or electrically changing a circuit (11) connected downstream of the high-frequency signal generator (6).
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