COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES (France)
ULIS (France)
Inventeur(s)
Cortial, Sébastien
Guillaumont, Marc
Pelenc, Denis
Zucchi, Xavier
Abrégé
An infrared radiation detector includes an array of elementary imaging bolometric detectors, each of the elementary bolometric detectors being formed of a bolometric membrane including a film made of vanadium oxide VOx, having a resistivity in the range from 6 ohm·cm to 50 ohm·cm, said membrane being suspended above a substrate integrating a signal for reading out the signal generated by said elementary detectors and for sequentially addressing the elementary detectors. The detector includes at least one getter intended to ensure the trapping of residual gas during and after the forming of the detector, and includes a hermetically-sealed cavity having said array and said at least one getter housed therein, having an upper cap including a window transparent to infrared radiation, said cap being sealed by means of a seal on a chip supporting the array of elementary detectors or on a package at the bottom of which the chip supporting the array of elementary detectors has been attached, said cavity being under vacuum or a low pressure.
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
G01N 21/3504 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p. ex. spectrométrie d'absorption atomique en utilisant la lumière infrarouge pour l'analyse des gaz, p. ex. analyse de mélanges de gaz
An image sensor includes on a support a plurality of first pixels and a plurality of second pixels intended to detect an infrared radiation emitted by an element of a scene. Each of the pixels includes a bolometric membrane suspended above a reflector covering the support, wherein the reflector of each of the first pixels is covered with a first dielectric layer, and the reflector of each of the second pixels is covered with a second dielectric layer differing from the first dielectric layer by its optical properties.
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
H04N 5/33 - Transformation des rayonnements infrarouges
3.
HIGH DYNAMIC DEVICE FOR INTEGRATING AN ELECTRIC CURRENT
IEVOUTOUT Tintint int ); and - a storage circuit configured to store said number of initiations that occurred during said integration duration. The received electric current is computed as a function of said output voltage as well as of said number of initiations multiplied by said modification of said output voltage induced by said modification circuit.
H03F 3/00 - Amplificateurs comportant comme éléments d'amplification uniquement des tubes à décharge ou uniquement des dispositifs à semi-conducteurs
H03F 1/08 - Modifications des amplificateurs pour réduire l'influence défavorable de l'impédance interne des éléments amplificateurs
H03F 3/185 - Amplificateurs à basse fréquence, p. ex. préamplificateurs à fréquence musicale comportant uniquement des dispositifs à semi-conducteurs comportant des dispositifs à effet de champ
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
H03M 1/52 - Intégration du signal d'entrée avec retour linéaire au niveau de référence
H03M 1/18 - Commande automatique pour modifier la plage des signaux que le convertisseur peut traiter, p. ex. réglage de la plage de gain
4.
DETECTOR OF ELECTROMAGNETIC RADIATION AND IN PARTICULAR INFRARED RADIATION, AND PROCESS FOR PRODUCING SAID DETECTOR
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES (France)
ULIS (France)
Inventeur(s)
Cortial, Sébastien
Guillaumont, Marc
Pelenc, Denis
Zucchi, Xavier
Abrégé
This detector of infrared radiation comprises: an imaging matrix array of elementary bolometric detectors, each of the elementary bolometric detectors consisting of a bolometric membrane (1) comprising a film (5) made of vanadium oxide VOx the resistivity of which is comprised between 6 ohm.cm and 50 ohm.cm, said membrane being suspended above a substrate (4) incorporating a circuit for reading the signal generated by said elementary detectors and for sequentially addressing the elementary detectors; at least one getter intended to trap residual gas during and after production of the detector; a hermetic cavity in which said matrix array and said at least one getter are housed, the top cover of said cavity comprising a window that is transparent to the infrared radiation, said cover being sealed by means of a seal to a chip bearing the matrix array of elementary detectors or to a package to the bottom of which the chip bearing the matrix array of elementary detectors has been fastened, said cavity being under vacuum or at a low pressure.
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
5.
DETECTOR OF ELECTROMAGNETIC RADIATION AND IN PARTICULAR INFRARED RADIATION, AND PROCESS FOR PRODUCING SAID DETECTOR
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES (France)
ULIS (France)
Inventeur(s)
Cortial, Sebastien
Guillaumont, Marc
Pelenc, Denis
Zucchi, Xavier
Abrégé
This detector of infrared radiation comprises: an imaging matrix array of elementary bolometric detectors, each of the elementary bolometric detectors consisting of a bolometric membrane (1) comprising a film (5) made of vanadium oxide VOx the resistivity of which is comprised between 6 ohm.cm and 50 ohm.cm, said membrane being suspended above a substrate (4) incorporating a circuit for reading the signal generated by said elementary detectors and for sequentially addressing the elementary detectors; at least one getter intended to trap residual gas during and after production of the detector; a hermetic cavity in which said matrix array and said at least one getter are housed, the top cover of said cavity comprising a window that is transparent to the infrared radiation, said cover being sealed by means of a seal to a chip bearing the matrix array of elementary detectors or to a package to the bottom of which the chip bearing the matrix array of elementary detectors has been fastened, said cavity being under vacuum or at a low pressure.
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
The invention relates to an infrared image sensor comprising, on a base (10), a plurality of first pixels (32) and a plurality of second pixels (34) intended to capture infrared radiation emitted by an element in a scene, each pixel comprising a bolometric membrane (14) suspended above a reflector (12) covering the base, the reflector of each first pixel being covered with a first dielectric layer (40) and the reflector of each second pixel being covered with a second dielectric layer (42) different from the first dielectric layer by virtue of the optical properties thereof.
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
The invention relates to an infrared image sensor comprising, on a base (10), a plurality of first pixels (32) and a plurality of second pixels (34) intended to capture infrared radiation emitted by an element in a scene, each pixel comprising a bolometric membrane (14) suspended above a reflector (12) covering the base, the reflector of each first pixel being covered with a first dielectric layer (40) and the reflector of each second pixel being covered with a second dielectric layer (42) different from the first dielectric layer by virtue of the optical properties thereof.
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
Method of manufacturing an infrared detector having a micro-cavity and a low refraction index step at an interface with a transparent cap, and associated infrared detector
Commissariat A L'Energie Atomique Et Aux Energies Alternatives (France)
Inventeur(s)
Vilain, Michel
Favier, Jérôme
Yon, Jean-Jacques
Frey, Laurent
Abrégé
10 respectively greater than or equal to 3.4 and smaller than or equal to 2.3; forming a vent of access to the sacrificial layer through a portion of the cap, and then applying, through the vent, an etching to totally remove the sacrificial layer.
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application. The volume includes a volume of a first transducer material electrically connecting the two electrodes of the membrane and forming walls of a closed enclosure having each of the electrodes at least partially housed therein; and a volume of a second transducer material, electrically connecting the two electrodes and housed in the enclosure, the electric resistivity of the second material being smaller than the electric resistivity of the first material; and the two transducer materials having a negative thermal coefficient of resistivity TCR.
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
10.
DETECTION DEVICE FOR SUSPENDED BOLOMETRIC MEMBRANES WITH HIGH ABSORPTION PERFORMANCE AND SIGNAL-TO-NOISE RATIO
Bolometric detection device comprising a substrate comprising a read circuit, a matrix of elementary detectors, each comprising a membrane suspended above the substrate and connected to the read circuit by at least two electrical conductors, said membrane comprising electrically conductive electrodes respectively connected to two electrical conductors, and a volume of transducing material electrically connecting the two electrodes The read circuit is configured in this material to apply an electrical stimulus between the two electrodes of the membrane and to form an electrical signal in response to said application. Said volume comprises a volume of a first transducing material electrically connecting the two electrodes and a volume of a second transducing material electrically connecting the two electrodes and lodged in the enclosure, the electrical resistivity of the second material being less than the electrical resistivity of the first material, and both transducing materials presenting a negative thermal coefficient of resistivity (TCR).
G01J 5/24 - Utilisation de circuits spécialement adaptés, p. ex. de circuits en pont
H03F 1/26 - Modifications des amplificateurs pour réduire l'influence du bruit provoqué par les éléments amplificateurs
H03F 3/00 - Amplificateurs comportant comme éléments d'amplification uniquement des tubes à décharge ou uniquement des dispositifs à semi-conducteurs
H03M 1/18 - Commande automatique pour modifier la plage des signaux que le convertisseur peut traiter, p. ex. réglage de la plage de gain
H03F 3/08 - Amplificateurs comportant comme éléments d'amplification uniquement des tubes à décharge ou uniquement des dispositifs à semi-conducteurs comportant uniquement des dispositifs à semi-conducteurs commandés par la lumière
The invention relates to a method for correcting bad pixels in a pixel array of an image-capturing device that is sensitive to infrared radiation. The method includes: receiving a first input image (RAW) and correcting the first input image by applying gain and offset values, detecting at least one bad pixel in the corrected first input image and adding said at least one bad pixel to a bad pixel list (LSPUR), receiving a second input image (RAW) and correcting the second input image by applying the gain and offset values, and calculating gain and offset correction values (sOff, sGain) for said at least one bad pixel on the basis of the first and second corrected input images.
H04N 5/33 - Transformation des rayonnements infrarouges
H04N 5/365 - Traitement du bruit, p.ex. détection, correction, réduction ou élimination du bruit appliqué au bruit à motif fixe, p.ex. non-uniformité de la réponse
H04N 5/367 - Traitement du bruit, p.ex. détection, correction, réduction ou élimination du bruit appliqué au bruit à motif fixe, p.ex. non-uniformité de la réponse appliqué aux défauts, p.ex. pixels non réactifs
13.
DETECTION OF BAD PIXELS IN AN INFRARED IMAGE-CAPTURING APPARATUS
The invention relates to a method for detecting bad pixels from a pixel array of a device, for capturing an image, that is sensitive to infrared radiation. The method includes: receiving an input image captured by the pixel system, and calculating a score for a plurality of target pixels including at least some of the pixels from the input image. The score for each target pixel is generated on the basis of k pixels of the input image that are selected in a window of H by H pixels around the target pixel. H is an odd integer greater than or equal to 3, and k is an integer between 2 and 5. Each pixel, from the set formed of the k pixels and the target pixel, share at least one border or corner with another pixel from said set, and the values of the k pixels are at respective distances from the value of the target pixel, the k pixels being selected on the basis of the k distances. The method also includes detecting that at least one of the target pixels is a bad pixel on the basis of the calculated scores.
H04N 5/33 - Transformation des rayonnements infrarouges
H04N 5/365 - Traitement du bruit, p.ex. détection, correction, réduction ou élimination du bruit appliqué au bruit à motif fixe, p.ex. non-uniformité de la réponse
H04N 5/367 - Traitement du bruit, p.ex. détection, correction, réduction ou élimination du bruit appliqué au bruit à motif fixe, p.ex. non-uniformité de la réponse appliqué aux défauts, p.ex. pixels non réactifs
14.
METHOD FOR MANUFACTURING A DEVICE COMPRISING A HERMETICALLY SEALED VACUUM HOUSING AND GETTER
A method of manufacturing a device having a microelectronic component housed in a hermetically sealed vacuum housing, involves creating a gas trap in said housing, pumping and heating the device in order to release the gases from the elements housed in said housing, after said pumping, hermetically sealing the housing without the use of flux. Furthermore, each material of which the device is made that is capable of degassing into the internal volume is a mineral material, the gas trap is capable of trapping substantially only hydrogen and is inert to oxygen and/or to nitrogen and the heating and sealing are performed at a temperature below 300°C.
A device (60) for integrating an electrical current during a period Tint, comprises an operational amplifier (62), and a capacitor (64) connected between a first input and an output of the amplifier (62), a second input of the amplifier (62) being brought to a voltage VBUS, the output voltage Vout of the amplifier (62) saturating at a high voltage VSatH and at a low voltage VsatH depending on the amount of charge on the capacitor (64). The device (60) also comprises: a circuit (72) for switching the terminals of the capacitor (64); and a circuit (74) for triggering the circuit (72) at least once during the period Tint when the voltage Vout is both increasing and substantially equal to a reference voltage VREF, said voltage VREF being lower than or equal to the voltage VsatH, and the reference voltage VREF and the voltage VBUS (62) being chosen so as to respect relationship 2. VBUS - VREF≥VsatL; and a circuit (76) for memorising the number of times the circuit (72) is triggered between the start time and end time of the integration period.
H03F 3/00 - Amplificateurs comportant comme éléments d'amplification uniquement des tubes à décharge ou uniquement des dispositifs à semi-conducteurs
G01J 5/24 - Utilisation de circuits spécialement adaptés, p. ex. de circuits en pont
H03F 3/04 - Amplificateurs comportant comme éléments d'amplification uniquement des tubes à décharge ou uniquement des dispositifs à semi-conducteurs comportant uniquement des dispositifs à semi-conducteurs
Commissariat à l'énergie atomique et aux énergies alternatives (France)
ULIS (France)
Inventeur(s)
Yon, Jean-Jacques
Bercier, Emmanuel
Abrégé
Infrared detection device comprising a gas detection device comprising a resistive layer, a first portion of which is able to emit infrared radiation able to be absorbed by the gas to be detected, and a second portion of which is thermally coupled to a first element for the thermoresistive transduction of the infrared radiation; a substrate comprising an electronic circuit for controlling and reading the gas detection device; portions of electrically conductive material electrically connecting the first portion and the first thermoresistive transduction element to the electronic circuit, and providing mechanical holding of the first and second portions opposite the substrate so that a distance between the first portion and the substrate is substantially equal to a distance between the second portion and the substrate.
G01N 21/00 - Recherche ou analyse des matériaux par l'utilisation de moyens optiques, c.-à-d. en utilisant des ondes submillimétriques, de la lumière infrarouge, visible ou ultraviolette
G01N 21/3504 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p. ex. spectrométrie d'absorption atomique en utilisant la lumière infrarouge pour l'analyse des gaz, p. ex. analyse de mélanges de gaz
G01J 3/42 - Spectrométrie d'absorptionSpectrométrie à double faisceauSpectrométrie par scintillementSpectrométrie par réflexion
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
G01J 5/00 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique
Method of diagnosing the state of signal-forming chains of a detector including an array of detection bolometers, each chain comprising a bolometer, a circuit of stimulation, and a circuit forming a signal according to said stimulation, including forming an image of a substantially uniform scene on the array; applying at least first and second stimulations to the chains; reading the formed signals; and for each chain in a predetermined set, defining a neighborhood of chains; calculating coefficients of a polynomial interpolating the values of signals formed by said chain; calculating, for each chain of the neighborhood, coefficients of a polynomial interpolating the values of signals formed by said neighborhood chain; calculating an average and standard deviation of said coefficients of the neighborhood chains or of the set of neighborhood chains and said chain; and diagnosing if said chain is defective using the coefficients and the calculated average and standard deviation.
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
An infrared detector including an array of detection bolometers each having a bolometric membrane suspended above a substrate, and associated with each bolometer: a detection branch, including the bolometer and a circuit performing a biasing according to a voltage set point, a compensation branch, including a compensation bolometer thermalized to the substrate, a circuit performing a biasing according to a voltage set point, an integrator for generating a voltage by integrating a difference between the currents flowing through said branches, a circuit generating a quantity depending on substrate temperature, including: a bolometer thermalized to the substrate, and a circuit for biasing the bolometer, and a circuit for generating the voltage set points according to said quantity. When the array is exposed to a uniform reference scene, the average of the differences between currents flowing through said branches is within the integrator dynamic range for a substrate temperature range from −30° C.-90° C.
G01J 5/00 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique
H01L 25/00 - Ensembles consistant en une pluralité de dispositifs à semi-conducteurs ou d'autres dispositifs à l'état solide
G01T 5/00 - Enregistrement des mouvements ou des tracés de particulesTraitement ou analyse de ces tracés
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
Method for correcting the drift of an infrared radiation detector comprising an array of resistive imaging bolometers and device implementing such a method
A method for detecting infrared radiation includes the steps of: providing a resistive bolometer retina including a plurality of resistive bolometers suspended above a substrate of a bolometric detector; acquiring the infrared radiation by the resistive bolometer retina to produce a plurality of raw read signals provided by the bolometers; correcting a response dispersion of the resistive bolometers in the raw read signals using a gain table, each gain of the gain table being associated with a bolometer of the resistive bolometer retina.
The infrared detector includes a sensitive retina capable of detecting a radiation in the wavelength range between 8 and 14 micrometers; and a package containing the sensitive retina and including a window located opposite to the retina, said window comprising a substrate at least partially transparent in the wavelength range between 2 and 14 micrometers; and a set of optical filters formed on the window to attenuate an incident radiation on the retina in a wavelength range between 2 and 8 micrometers, and respectively an optical filter formed on a first surface of the window and attenuating the incident radiation in a first interval of the wavelength range between 2 and 8 micrometers, and a periodic diffraction grating formed on a second surface of the window and attenuating the incident radiation in a second interval of the wavelength range between 2 and 8 micrometers, different from the first interval.
OFFICE NATIONAL D'ETUDES ET DE RECHERCHES AEROSPATIALES (ONERA) (France)
ULIS (France)
Inventeur(s)
Druart, Guillaume
De La Barriere, Florence
Crastes, Arnaud
Abrégé
The imaging system for imaging field rays comprises a detection surface, a device for focusing the field rays with said detection surface, and a diaphragm. Said device comprises a Fresnel lens comprising a first dioptre, the non-plane surface of which, called the active zone, makes it possible to focus the field rays towards said detection surface, and said diaphragm allows controlled distribution of the field rays over said active zone.
G02B 13/14 - Objectifs optiques spécialement conçus pour les emplois spécifiés ci-dessous à utiliser avec des radiations infrarouges ou ultraviolettes
G02B 3/08 - Lentilles simples ou composées à surfaces non sphériques à surfaces discontinues, p. ex. lentille de Fresnel
H01L 31/052 - Moyens de refroidissement directement associés ou intégrés à la cellule PV, p.ex. éléments Peltier intégrés pour refroidissement actif ou puits thermiques directement associés aux cellules PV
22.
Device and method for detecting infrared radiation through a resistive bolometer matrix
An infrared radiation detection device comprising: a substrate; a matrix of at least one line of elements for detecting the radiation, each comprising a resistive imaging bolometer, the matrix being formed above the substrate; a bolometer reading circuit, a temperature measuring device for measuring the temperature in at least one point of the substrate; and a compensation circuit and data processing device for correcting the signal formed from each bolometer as a function of the temperature measured in at least one point of the substrate. The compensation circuit and data processing device capable of correcting the signal formed from the imaging bolometer by using a predetermined physical model of the temperature behavior of the signal.
Image correction methods and systems are disclosed that correct raw values, including, subsequent to closing the shutter, acquiring a current raw value table, determining an offset correction table for the current temperature of the detector as a function of the current table and a set of stored raw value tables, and correcting the stream of raw values using the offset correction table. A maintenance process includes testing a condition for replacing a table of the current set with the current table, and if the condition is met, replacing the table of the current set with the current table. This test includes determining whether there is a new set of tables obtained by replacing a table from the current set with the current table that is more relevant than the current set with regard to subsequently determining an offset table.
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
G01J 5/62 - Pyrométrie des radiations en utilisant les techniques spécifiées dans les sous-groupes suivants utilisant des moyens pour hacher périodiquement la lumière
H04N 5/217 - Circuits pour la suppression ou la diminution de perturbations, p.ex. moiré ou halo lors de la production des signaux d'image
H04N 5/365 - Traitement du bruit, p.ex. détection, correction, réduction ou élimination du bruit appliqué au bruit à motif fixe, p.ex. non-uniformité de la réponse
G01J 5/00 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique
24.
System and method for detecting infrared radiation
A device for detecting infrared radiation comprising an array of bolometers for detecting radiation; and in order to read each bolometer, a signal shaping circuitry comprising: a circuitry capable of biasing the bolometer at a predetermined voltage in order to make current flow therethrough; a circuitry capable of generating a common-mode current; and a circuitry capable of integrating the difference between the current that flows through the bolometer and the common-mode current. According to the invention, the device comprises a circuitry capable of injecting current into each bolometer in order to shift its resistance by a predetermined quantity that depends on its offset, current injection being performed prior to readout biasing of the bolometer and the shift being performed according to the direction in which the bolometer's resistance varies as a function of temperature. In addition, correction circuitry is capable of shifting the resistances of bolometers towards a common value.
Commissariat à l'énergie et aux énergies alternatives (France)
ULIS (France)
Inventeur(s)
Yon, Jean-Jacques
Robert, Patrick
Abrégé
An electromagnetic radiation detection device including multiple elementary detectors grouped into one or more sub-assemblies each including several elementary detectors, where each elementary detector is connected by an interconnection to an impedance-matching device. The impedance-matching device is common to all the elementary detectors of a single sub-assembly, in each sub-assembly the interconnections have roughly the same resistance value.
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES (France)
Inventeur(s)
Yon, Jean-Jacques
Robert, Patrick
Abrégé
An electromagnetic radiation detection device including multiple elementary detectors (32, 320) grouped into one or more sub-assemblies (300) each including several elementary detectors (32, 320), where each elementary detector (32, 320) is connected by an interconnection (32.1, 320.1) to an impedance-matching device (33), characterised in that: the impedance-matching device (33) is common to all the elementary detectors (32, 320) of a single sub-assembly (300), in each sub-assembly (300) the interconnections (32.1, 320.1) have roughly the same resistance value.
An ADC includes a single circuit for generating reference voltages that are constant and then decreasing over time. The ADC includes a constant current source and a resistive bridge connected to the current source. A voltage source produces a decreasing voltage on a node of the bridge. The ADC also includes a contact breaker for the connection of the voltage source to the node. The ADC also includes a digitization circuit which includes a means for comparing a voltage, a means for selecting a reference voltage, a means for counting, and a means for storing on the one hand, a reference associated with the constant reference voltage which is immediately lower than or equal to the voltage for conversion, and on the other hand, the number of counted time units.
The invention relates to a method for controlling the resistance of a bolometer in a bolometer matrix of a sensor, said sensor comprising a circuit for reading said matrix which is capable of addressing said bolometer.
According to the invention, the method comprises a step (46) of adjusting the recurrence of addressing the bolometer using the read circuit.
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
29.
Electromagnetic radiation detector with micro-encapsulation, and device for detecting electromagnetic radiation using such detectors
This electromagnetic radiation detector consists of a plurality of elementary detection micro-sites, each including a micro-detector provided with a membrane (2) that is sensitive to the radiation in question and each being provided in a micro-cavity or micro-capsule defined by a substrate (1), by an upper wall (5) used as a window that is transparent to said radiation and by side walls (4), said membrane (2) being suspended above substrate (1) by means of at least two support arms (6) that include an electrically conducting layer (17), with the ends of said arms (6) being anchored in side walls (4).
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
H01L 31/09 - Dispositifs sensibles au rayonnement infrarouge, visible ou ultraviolet
The invention relates to a detector without temperature regulation which comprises a matrix of suspended bolometers arranged in the focal plane of a lens, a reading circuit providing a flow of raw values, and a shutter. A method for correcting raw values comprises: after closing the shutter, a first step (102) of acquiring a common table of raw values; a second step (108) of determining a table of offset corrections for the current temperature of the detector according to the common table and a set of stored tables of raw values; and a third step (60) of correcting the flow of raw values by means of the table of corrections. According to the invention, a maintenance process (122, 103) comprises: testing a condition for replacing a table of said common set with the common table; if said condition is fulfilled, replacing the table of said common set with the common table. The test comprises establishing the existence of a new set of tables, resulting from the replacement of a table of the common set with the common table, which is more relevant than the common set for the purpose of subsequently establishing the offset table.
H04N 5/217 - Circuits pour la suppression ou la diminution de perturbations, p.ex. moiré ou halo lors de la production des signaux d'image
H04N 5/33 - Transformation des rayonnements infrarouges
G01J 5/16 - Aménagements relatifs à la jonction froideCompensation de l'influence de la température ambiante ou d'autres variables
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
G01J 5/52 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant la comparaison avec des sources de référence, p. ex. pyromètres à disparition de filament
31.
SYSTEM AND METHOD FOR DETECTING INFRARED RADIATION
The invention relates to a device for detecting an infrared radiation comprising: a matrix (42) of bolometers (12) for detecting said radiation; and for reading each bolometer (12), a signal generation circuitry (14, 46) comprising: a circuitry (14) capable of polarizing the bolometer at a predetermined voltage so that a current flows therethrough; a circuitry (20) capable of generating a common mode current; and a circuitry (18) capable of integrating the difference between the current flowing in the bolometer and the common mode current. According to the invention, the device includes a circuitry (52) capable of injecting current in each bolometer for offsetting the resistance thereof by a predetermined amount depending on the offset, the current injection being carried out before the bolometer reading polarization and the offset being realized according to the direction of the bolometer resistance variation based on the temperature. The correction circuitry (52) is also capable of offsetting the resistances of the bolometers (12) towards a common value.
The invention relates to a device for the detection of an electromagnetic radiation including: a substrate; a resistive imaging bolometer; a circuit for polarizing the bolometer at a predetermined voltage; a rejection circuit generating a common mode current, comprising a compensation bolometer thermalized in the substrate and a polarization circuit thereof; and a measuring circuit for measuring the difference between the current flowing in the imaging bolometer when it is polarized and the common mode current generated by the rejection circuit. According to the invention, the rejection circuit further comprises a current generator capable of producing a current that simulates the current induced by the self-heating of the imaging bolometer under the effect of its polarization, the sum of the current passing through the compensation bolometer and the current generated by the current generator forming the common mode current.
The invention relates to a device for detecting electromagnetic radiation comprising: a resistive bolometer, a biasing circuit capable of biasing said bolometer with a predetermined bias voltage, a rejection module capable of generating a common mode current, a measuring circuit capable of being connected to a bolometer and a rejection module in order to measure the difference between the current flowing through the bolometer when it is biased and the common mode current generated by the rejection module. According to the invention, rejection module comprises: a module for estimating a current that flows through resistive bolometer when it is subjected to the bias voltage and made insensitive to the electromagnetic radiation; and a current generator which is controlled by the estimation module and generates the current estimated by the latter as a common mode current.
The invention relates to an electromagnetic radiation detector consisting of a plurality of elementary detection micro-sites each including a micro-detector provided with a diaphragm (2) sensitive to the radiation in question, and each being provided in a micro-cavity or micro-capsule defined by a substrate (1), by an upper wall (5) used as a window transparent to said radiation, and by side walls (4), wherein the diaphragm (2) is suspended above the substrate (1) using at least two supporting arms (6) including an electrically conducting layer (17), the ends of said arms (6) being anchored in the side walls (4).
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
The invention relates to a method for controlling the resistance of a bolometer in a bolometer matrix of a sensor, said sensor comprising a circuit for reading said matrix which is capable of addressing said bolometer. According to the invention, the method includes a step (46) of adjusting the recurrence of addressing the bolometer using the reading circuit.
H04N 5/33 - Transformation des rayonnements infrarouges
G01J 5/06 - Dispositions pour éliminer les effets des radiations perturbatricesDispositions pour compenser les changements de la sensibilité
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
H01L 27/16 - Dispositifs consistant en une pluralité de composants semi-conducteurs ou d'autres composants à l'état solide formés dans ou sur un substrat commun comprenant des composants thermomagnétiques
The invention relates to an infrared radiation detection device that comprises: a substrate; a matrix (12) of at least one line of elements for detecting said radiation, each comprising a resistive imaging bolometer (14), said matrix being formed above the substrate; a means (18) for reading the bolometers of the matrix; a means (22) for measuring the temperature in at least one point of the substrate; and a means (26) for correcting the signal formed from each bolometer (14) on the basis of the temperature measured in at least one point of the substrate. The correcting means (26) is capable of correcting the signal formed from the imaging bolometer (14) by means of a predetermined physical model of the temperature behavior of said signal.
G01J 5/20 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique en utilisant des détecteurs électriques de radiations en utilisant des éléments résistants, thermorésistants ou semi-conducteurs sensibles aux radiations, p. ex. des dispositifs photoconducteurs
A detector for detecting electromagnetic radiation includes a substrate and at least one microstructure including a radiation-sensitive membrane extending substantially opposite and away from the substrate. The membrane is mechanically attached to at least two longilinear, collinear retention elements, at least one of which is mechanically connected to the substrate by an intermediate post. The membrane is in electrical continuity with the substrate. At least two collinear legs are attached to each other at the level of their ends which are attached to the membrane by a mechanical connector which is substantially co-planar with the legs and membrane. The other end of at least one of the legs is integral with a rigid cross piece which is substantially co-planar with the legs and extends substantially at right angles relative to the main dimension of the legs. The cross piece is integral with the post which is integral with the substrate.
G01J 5/00 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique
38.
Device for detecting an electromagnetic radiation comprising a resistive imaging bolometer, system comprising a matrix of such devices and method for reading an imaging bolometer of such a system
The invention relates to a device for detecting an electromagnetic radiation comprising a resistive imaging bolometer sensitive to the electromagnetic radiation to be detected, intended to be connected electrically to a signal shaping circuit, and a resistive common mode rejection bolometer that is associated electrically with the imaging bolometer, so that the current flowing through the common mode rejection bolometer is subtracted from the current flowing through the imaging bolometer, wherein it comprises means for controlling the resistance of the common mode rejection bolometer by injecting current therein.
A method of digitizing an analog quantity from an electromagnetic radiation detector including a matrix of juxtaposed elementary sensors, including, for each line or column of the matrix, the steps of: integrating the analog quantity using an integrator stage; converting the integrated analog quantity to a first numerical value via a binary counter and a memory element connected to the output of a comparator stage; converting the first numerical value to an analog signal via an analog-to-digital converter; subtracting the analog signal from the analog quantity to be digitized; amplifying the signal resulting from the subtraction with a gain representing the first numerical value; integrating to produce a second numerical value proportional to the analog signal thereby amplified and forming a second binary number representing the least significant bits; and adding said first and second numerical values to form a number representative of the analog quantity to be integrated.
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