Workpieces are disposed between a pair of side walls in a heat treatment chamber. A centrifugal fan is disposed to face the workpieces inside the heat treatment chamber, and sucks gas from the workpiece side and generates air current. In regions at the respective side wall sides relative to an intermediate position between the pair of side walls, an air current regulation unit regulates the air current so as to restrict flows of the air current from the centrifugal fan to the respective side wall sides when a rotary blade of the centrifugal fan rotates in regions in which outer circumferential edge portions of the rotating rotary blade separate from the respective side walls, and allows the flows in regions in which the outer circumferential edge portions of the rotating rotary blade approach the respective side walls.
C21D 9/00 - Traitement thermique, p.ex. recuit, durcissement, trempe ou revenu, adapté à des objets particuliers; Fours à cet effet
F27B 9/30 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité - Parties constitutives, accessoires ou équipement particuliers aux fours de ces types
F27B 9/10 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité chauffés électriquement chauffés par air ou gaz chauds
2.
Supporting structure for induction heating coil, and induction heating device
Provided is a supporting structure for an induction heating coil and an induction heating device in which a surface of an induction heating coil is not formed of a coating film for insulation that generates a gas, and movement of the induction heating coil when the induction heating coil is energized can be suppressed. A supporting structure 4 of an induction heating device 1 includes a supporting column 20 and a plurality of restricting members 21. The supporting column 20 is disposed at an outer side in a radial direction of winding portions 13 of the induction heating coil 3, and extends in an axial direction S1. The restricting members 21 receive the induction heating coil 3 to restrict movement of the induction heating coil 3 in the axial direction S1 in an insulated state, and are supported by the supporting column 20.
H05B 6/44 - Agencements des bobines impliquant plusieurs bobines ou segments de bobine
F27D 11/12 - Aménagement des éléments pour le chauffage électrique dans ou sur les fours avec champs électromagnétiques agissant directement sur le matériau à chauffer
3.
Induction heating coil and method for manufacturing induction heating coil
An induction heating coil includes a coil section configured to heat a treatment target by induction, a power supply section configured to supply power to the coil section, and a cooling medium passage that is arranged in the power supply section and the coil section, and is configured to supply a cooling medium to the coil section. The coil section, the power supply section, and the cooling medium passage are formed using a metal additive fabrication method.
B23K 26/346 - Travail par rayon laser, p.ex. soudage, découpage ou perçage en combinaison avec du soudage ou du découpage couvert par les groupes , p.ex. en combinaison avec le soudage par résistance
Provided is a heat treatment apparatus capable of more reliably conveying a workpiece along a desired conveyance path by a simple configuration.
A heat treatment apparatus 1 includes a heating chamber 7, a cooling chamber 8 disposed adjacent to the heating chamber 7, a conveyance tray 2 to support the workpiece 100, and a first conveyance mechanism 3 to convey the conveyance tray 2 along a conveyance path B1 from the outside of the heating chamber 7 to the outside of the cooling chamber 8 through the heating chamber 7 and the cooling chamber 8.
F27B 9/26 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité caractérisés par le procédé de déplacement de la charge pendant le traitement la charge se déplaçant sur un trajet sensiblement rectiligne sur ou dans des wagonnets, des traîneaux ou des réceptacles
F27D 3/12 - Supports ou réceptacles pour charges, mobiles ou à translation
C21D 9/32 - Traitement thermique, p.ex. recuit, durcissement, trempe ou revenu, adapté à des objets particuliers; Fours à cet effet pour roues d'engrenage, roues hélicoïdales, ou équivalent
C21D 9/40 - Traitement thermique, p.ex. recuit, durcissement, trempe ou revenu, adapté à des objets particuliers; Fours à cet effet pour roulements de paliers
C21D 9/34 - Traitement thermique, p.ex. recuit, durcissement, trempe ou revenu, adapté à des objets particuliers; Fours à cet effet pour jantes
F27D 3/00 - Chargement; Déchargement; Manutention des charges
C21D 9/00 - Traitement thermique, p.ex. recuit, durcissement, trempe ou revenu, adapté à des objets particuliers; Fours à cet effet
An induction heating coil includes a coil section configured to heat a treatment target by induction, a power supply section configured to supply power to the coil section, and a cooling medium passage that is arranged in the power supply section and the coil section, and is configured to supply a cooling medium to the coil section. The coil section, the power supply section, and the cooling medium passage are formed using a metal additive fabrication method.
B23K 26/346 - Travail par rayon laser, p.ex. soudage, découpage ou perçage en combinaison avec du soudage ou du découpage couvert par les groupes , p.ex. en combinaison avec le soudage par résistance
A fuel tank producing apparatus that allows the thickness of a resin on the surface of a tank container to be uniform and that is capable of improving the curing quality of the tank container. The fuel tank producing apparatus includes a conveyor for conveying the tank container, a plurality of heating chambers for heating the tank container during the conveyance, a cooling furnace for cooling the tank container at a position downstream of the plurality of heating chambers in the conveying direction, a gas supplier for supplying gas to the plurality of heating chambers, a plurality of nozzles for blowing the gas supplied from the gas supplier onto the surface of the tank container in the plurality of heating chambers, and a plurality of plug heaters for heating the gas between the gas supplier and the plurality of nozzles.
B29C 35/04 - Chauffage ou durcissement, p.ex. réticulation ou vulcanisation avec des liquides, des gaz ou de la vapeur d'eau
F27B 9/10 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité chauffés électriquement chauffés par air ou gaz chauds
B29C 70/32 - Façonnage par empilage, c.à d. application de fibres, de bandes ou de feuilles larges sur un moule, un gabarit ou un noyau; Façonnage par pistolage, c.à d. pulvérisation de fibres sur un moule, un gabarit ou un noyau sur un moule, un gabarit ou un noyau rotatifs
F27B 9/12 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité avec dispositions particulières pour le préchauffage ou le refroidissement de la charge
A heat treatment apparatus 1 includes a coolant passage defining body 42 to define a coolant passage 48 to supply a coolant to a workpiece 100. The coolant passage defining body 42 includes an upper member 50 and a lower member 40 as a plurality of coolant passage defining members, and is configured so that, by displacing these members 49 and 50 so as to approach each other along an up-down direction Z1 crossing a conveyance direction, the coolant passage 48 is defined in a state housing the workpiece 100. In addition, the coolant passage defining body is configured so that, by displacing the members 49 and 50 described above so as to separate from each other along the up-down direction Z1, the workpiece 100 is allowed to be let into and out of the coolant passage 48 along the conveyance direction A1.
C21D 9/00 - Traitement thermique, p.ex. recuit, durcissement, trempe ou revenu, adapté à des objets particuliers; Fours à cet effet
F27B 9/26 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité caractérisés par le procédé de déplacement de la charge pendant le traitement la charge se déplaçant sur un trajet sensiblement rectiligne sur ou dans des wagonnets, des traîneaux ou des réceptacles
F27D 3/12 - Supports ou réceptacles pour charges, mobiles ou à translation
F27B 9/12 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité avec dispositions particulières pour le préchauffage ou le refroidissement de la charge
F27B 9/02 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité à plusieurs chambres; Combinaisons de fours
C21D 1/00 - Procédés ou dispositifs généraux pour le traitement thermique, p.ex. recuit, durcissement, trempe ou revenu
Provided is a fuel tank producing apparatus capable of uniformly heating a tank container in a short period of time. The fuel tank producing apparatus includes a heat curing furnace for heating the tank container and a hot air generator for generating hot air. The heat curing furnace is internally provided with a nozzle for blowing the hot air onto the surface of the tank container, and externally provided with a rotating portion for rotating the tank container about the central axis thereof. The nozzle is located at a position displaced to the left relative to the vertical direction to the central axis of the tank container as viewed from the direction of the central axis of the tank container. The rotating portion is configured to rotate the tank container in the reverse direction of a direction in which the hot air is blown from the nozzle.
F27B 13/06 - Fours à la fois à charges fixes et à progression du chauffage, p.ex. du type circulaire, du type dans lequel un four segmentaire se déplace au-dessus de la charge fixe - Parties constitutives, accessoires ou équipement particuliers à ce type de fours
B29C 35/04 - Chauffage ou durcissement, p.ex. réticulation ou vulcanisation avec des liquides, des gaz ou de la vapeur d'eau
B29C 35/00 - Chauffage, refroidissement ou durcissement, p.ex. réticulation ou vulcanisation; Appareils à cet effet
Provided are an induction heating coil supporting structure and an induction heating device, whereby an induction heating coil surface is not formed of a gas-generating coating film for insulation, and the occurrence of movement of an induction heating coil can be suppressed when the induction heating coil is energized. A supporting structure 4 of an induction heating device 1 has a supporting column 20, and a plurality of regulation members 21. The supporting column 20 is disposed radially outside of a winding section 13 of the induction heating coil 3, and extends in the axis direction S1. The regulation members 21 receive, in an insulating state, the induction heating coil 3 for the purpose of regulating movement of the induction heating coil 3 in the axis direction S1, and are supported by means of the supporting column 20.
C21D 1/18 - Durcissement; Trempe avec ou sans revenu ultérieur
C21D 9/32 - Traitement thermique, p.ex. recuit, durcissement, trempe ou revenu, adapté à des objets particuliers; Fours à cet effet pour roues d'engrenage, roues hélicoïdales, ou équivalent
Provided is a fluid supply device with which the allowable amount of rotation of each nozzle around a prescribed rotational axis can be further increased, and the load acting on piping can be further reduced. This fluid supply device 5 has: first piping 31A-31L connected to nozzles 11A-11C and 12F-12J; a rotation support unit 10 that supports the nozzles 11A-11C and 12F-12J and the first piping 31A-31L; second flexible piping 33A-33L; and a linear guide 15. One end 33a of the second flexible piping 33A-33L is configured so as to be capable of rotating in conjunction with each first piping 31A-31L around a rotational axis L1. A movable guide part 51 of the linear guide 15 is configured so as to be capable of linear displacement in accordance with deformation of each second flexible piping 33A-33L in conjunction with the rotation of each first piping 31A-31L.
F04B 41/00 - Installations ou systèmes de pompage spécialement adaptés aux fluides compressibles
B29C 70/06 - Façonnage de matières composites, c. à d. de matières plastiques comprenant des renforcements, des matières de remplissage ou des parties préformées, p.ex. des inserts comprenant uniquement des renforcements, p.ex. matières plastiques auto-renforçantes des renforcements fibreux uniquement
Provided is a metal component manufacturing method with which it is possible to reduce heat-treatment-induced warping in a circular metal workpiece such as a ring member, and to shorten the time that the workpiece is heat-treated. A metal workpiece (100) formed in a circular shape and a heater unit (6) for radiating heat in a predetermined main radiation direction (D2) are caused to face one another. The workpiece (100) is disposed such that the inferior angle (θ1) formed by the main radiation direction (D2) and the axial direction (D1) of the workpiece (100) is 45° or less (including zero). The workpiece (100) is heated using the heater unit (6).
C21D 9/40 - Traitement thermique, p.ex. recuit, durcissement, trempe ou revenu, adapté à des objets particuliers; Fours à cet effet pour roulements de paliers
C21D 1/00 - Procédés ou dispositifs généraux pour le traitement thermique, p.ex. recuit, durcissement, trempe ou revenu
C21D 9/32 - Traitement thermique, p.ex. recuit, durcissement, trempe ou revenu, adapté à des objets particuliers; Fours à cet effet pour roues d'engrenage, roues hélicoïdales, ou équivalent
12.
RING MEMBER MANUFACTURING METHOD, AND RING HOLDER FOR HEAT TREATMENT
Provided are a ring member manufacturing method and a ring holder for heat treatment, with which it is possible to reduce variation in heat treatment quality and to heat-treat many ring members at once when heat-treating metal ring members. A plurality of workpieces (100) are arrayed such that opening parts (100c) and end faces (100d) of the workpieces (100) are stood so as to be sideways, and such that the opening parts (100c) face a predetermined first array direction (E1) side. The positions of two workpieces (100) adjacent in the first array direction (E1) are mutually shifted in a second array direction (E2) orthogonal to the first array direction (E1).
C21D 9/40 - Traitement thermique, p.ex. recuit, durcissement, trempe ou revenu, adapté à des objets particuliers; Fours à cet effet pour roulements de paliers
C21D 1/00 - Procédés ou dispositifs généraux pour le traitement thermique, p.ex. recuit, durcissement, trempe ou revenu
Provided is a heat treatment apparatus capable of, with a simple configuration, conveying an object to be treated along an intended conveying path in a reliable manner. This heat treatment apparatus 1 is equipped with: a heating chamber 7; a cooling chamber 8 disposed adjacent to the heating chamber 7; a conveyance tray 2 for supporting an object to be treated 100; and a first conveying mechanism 3 for conveying the conveyance tray 2 along a conveying path B1 that runs through the heating chamber 7 and the cooling chamber 8 from the outside of the heating chamber 7 to the outside of the cooling chamber 8.
F27B 9/02 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité à plusieurs chambres; Combinaisons de fours
C21D 1/00 - Procédés ou dispositifs généraux pour le traitement thermique, p.ex. recuit, durcissement, trempe ou revenu
F27B 9/12 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité avec dispositions particulières pour le préchauffage ou le refroidissement de la charge
F27B 9/26 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité caractérisés par le procédé de déplacement de la charge pendant le traitement la charge se déplaçant sur un trajet sensiblement rectiligne sur ou dans des wagonnets, des traîneaux ou des réceptacles
F27D 3/12 - Supports ou réceptacles pour charges, mobiles ou à translation
Provided is a heat treatment apparatus that is capable of attaining a compact configuration. This heat treatment apparatus 1 has a refrigerant channel-forming body 42 for forming a refrigerant channel 48 through which a refrigerant is supplied to a to-be-treated object 100. The refrigerant channel-forming body 42 includes, as a plurality of refrigerant channel-forming members, an upper member 50 and a lower member 49, and is configured such that, when these members 49, 50 are displaced closer to each other in a vertical direction Z1 intersecting a conveying direction, the refrigerant channel 48 is formed while the to-be-treated object 100 is being held therein. The refrigerant channel-forming body 42 is also configured to allow movement of the to-be-treated object 100 along the conveying direction A1 in and out of the refrigerant channel 48 when the members 49, 50 are displaced away from to each other in the vertical direction Z1.
F27B 9/12 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité avec dispositions particulières pour le préchauffage ou le refroidissement de la charge
C21D 1/00 - Procédés ou dispositifs généraux pour le traitement thermique, p.ex. recuit, durcissement, trempe ou revenu
F27B 9/02 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité à plusieurs chambres; Combinaisons de fours
F27B 9/26 - Fours dans lesquels la charge est déplacée mécaniquement, p.ex. du type tunnel; Fours similaires dans lesquels la charge se déplace par gravité caractérisés par le procédé de déplacement de la charge pendant le traitement la charge se déplaçant sur un trajet sensiblement rectiligne sur ou dans des wagonnets, des traîneaux ou des réceptacles
F27D 3/12 - Supports ou réceptacles pour charges, mobiles ou à translation
Provided is a tank cooling device that can cool a tank with greater quickness. A tank cooling device 4 has a nozzle 40. The nozzle 40 is configured so as to supply a cooling gas for cooling a tank 100 to an outer surface of the tank 100, using a compressed gas. The tank 100 has a tank body 101 made of a synthetic resin, and an end member 102 made of a metal. The nozzle 40 supplies a gas flow to the tank body 101 and the end member 102.
F17C 1/06 - Enveloppes protectrices constituées par un enroulement de bandes ou de matériaux filiformes p.ex. fils métalliques
B29C 70/16 - Façonnage de matières composites, c. à d. de matières plastiques comprenant des renforcements, des matières de remplissage ou des parties préformées, p.ex. des inserts comprenant uniquement des renforcements, p.ex. matières plastiques auto-renforçantes des renforcements fibreux uniquement caractérisées par la structure des renforcements fibreux utilisant des fibres de grande longueur, ou des fibres continues
A shaft of a stirring fan for a heat treatment apparatus includes a blade fixing portion for fixing a plurality of blades. The blade fixing portion has a cylindrical portion extending in a shaft direction of the shaft. A hole inside the cylindrical portion is open to one end face of the shaft. The stirring fan has a discharge portion for discharging gas inside the cylindrical portion to the outside of the blade fixing portion. The discharge portion is open to the outside of the blade fixing portion, at a position away from the one end face of the shaft.
A heat-treatment apparatus includes a casing, a loader which loads a workpiece to an inner part of the casing in order to apply a heat-treatment to the workpiece, and a canopy surface provided in the casing to cover the workpiece. The canopy surface includes a slope way with a sectional configuration where the canopy surface is cut on a plane vertical to a conveying direction of the workpiece inside the casing. The slope way includes a highest point and a downward inclined surface extending from the highest point to an outside of a zone between a perpendicular line extending from a left end of the workpiece and a perpendicular line extending from a right end of the workpiece.
Disclosed is a heat treatment apparatus provided with a treatment chamber, a heating source provided within the treatment chamber to emit infrared rays, and support members provided within the treatment chamber to support an object to be treated, so that the object is opposite to the heating source. The object is heat-treated by radiant heat of the infrared rays emitted from the heating source. Furthermore, the support members are formed so as to extend in parallel with one another, and the distance between the axes of the adjacent support members is defined so as to be 225-330 mm.
F27D 5/00 - Supports, grilles ou appareillage analogue pour la charge à l'intérieur du four
F27B 5/04 - Fours à moufles; Fours à cornues; Autres fours où la charge est complètement isolée adaptés pour le traitement de la charge sous vide ou sous atmosphère contrôlée
F27B 5/06 - Fours à moufles; Fours à cornues; Autres fours où la charge est complètement isolée - Parties constitutives, accessoires ou équipement particuliers à ces fours
Disclosed is a thermal treatment device comprising: a treatment chamber; a heating source which is arranged in the treatment chamber and can emit an infrared ray; and a support member which is arranged in the treatment chamber and can support a material of interest so that the material faces the heating source. The material is thermally treated by a radiant heat generated by the action of the infrared ray emitted from the heating source. The support member is so arranged as to be overlaid only on a part of the material, and the material-side surface of the support member has multiple protrusions on which the material is to be supported.
Disclosed is an induction heating coil (7) configured to induction heating a pulley shaft (1) having a disk-like pulley portion (3) and a shaft portion (2) over a wide range for carburizing, wherein the configuration can be simplified. The induction heating coil (7) is equipped with a first coil portion (10) for induction heating at least the shaft portion (2), and a second coil portion (20) provided around the pulley portion (3) from the front surface (4) across the back surface (5) thereof and induction heating the pulley portion (3). The first coil portion (10) and the second coil portion (20) are integrated in series.
A heat-insulating material (10) for heat treatment ovens and an electrical heating unit (20) for heat treatment ovens which each comprises a base material (1) made of ceramic fibers comprising alumina and silica and a coating layer (2) formed by applying a coating material comprising a base ingredient comprising water and a water-soluble aluminum phosphate and a pigment comprising silicon carbide to that surface of the base material (1) which serves as an oven-wall inner side and thenmatériau drying the coating material. Since the aluminum phosphate contained in the coating layer (2) has a high affinity for the alumina as a component of the base material (1), the coating layer (2) formed on the surface of the base material (1) is adherent thereto at high bond strength. The surface of the base material (1) is hence prevented from generating dust in the oven over long.
An electrical heating unit (10) for heat treatment ovens which comprises: a base material (1) which is a ceramic fiber molding comprising alumina and silica; and a coating layer (2) formed by applying a coating material comprising a base ingredient comprising water and a water-soluble aluminum phosphate and a pigment comprising silicon carbide to that surface of the base material (1) which serves as an oven-wall inner side and then drying the coating material. Since the aluminum phosphate contained in the coating layer (2) has a high affinity for the alumina as a component of the base material (1), the coating layer (2) formed on the surface of the base material (1) is adherent thereto at high bond strength. The surface of the base material (1) is hence prevented from generating dust in the oven over long.
A furnace wall component is provided with a heat insulating block (11) having a furnace inner surface (21) and a furnace outer surface (22). A slit (31) is formed on the furnace outer surface (22). The heat insulating block (11) is provided with a high heat insulating core material (41) and a fireproof heat insulating coating material (42) covering the core material (41). The core material (42) is provided with an inner block (61) occupying the furnace inner surface (21), and a plurality of outer blocks (62) which face the inner block (61) and occupy the furnace outer surface (22). The outer blocks (62) are arranged in a direction along the furnace outer surface (22) with spaces which form the slits (31) between the blocks.
A carburization furnace has a vertical tubular furnace body (12) with closed upper end, a graphite tubular heat producing body (13) covering the inner surface of the furnace body (12), a movable bed (13) vertically movably placed so that it can open and close a lower end opening of the furnace body (12), a holding jig (14) supported by the movable bed (13) and holding pieces of work W in multiple stages, and an induction heating coil (16) placed so that it can heat the pieces of work W held by the movable bed (13) and the holding jig (14).
F27B 5/04 - Fours à moufles; Fours à cornues; Autres fours où la charge est complètement isolée adaptés pour le traitement de la charge sous vide ou sous atmosphère contrôlée
25.
SEMICONDUCTOR HEAT TREATMENT METHOD AND SEMICONDUCTOR HEAT TREATMENT APPARATUS
⏧PROBLEMS] A semiconductor heat treatment method and a semiconductor heat treatment apparatus by which heat treatment can be performed without affecting untreated semiconductor wafers while remarkably improving throughput of the entire heat treatment operation by storing heat-treated semiconductor wafers in a cooling tube (5) and having them retracted and cooled from a lower part of a furnace opening (1a) at the same time. ⏧MEANS FOR SOLVING PROBLEMS] The semiconductor heat treatment method is provided with a process of transferring the empty cooling tube (5) to the lower part of the furnace opening (1a) in a load lock chamber (2) communicated at the lower part of a heat treatment furnace (1) through the furnace opening (1a); a process of storing in the empty cooling tube (5) a boat (3) loaded with the heat-treated semiconductor wafers in the heat treatment furnace (1); a process of retracting the cooling tube (5) storing the boat (3) loaded with the heat-treated semiconductor wafers from the lower part of the furnace opening (1a) in the load lock chamber (2); a process of transferring another boat (3) loaded with the untreated semiconductor wafers to the lower part of the furnace opening (1a) in the load lock chamber (2); a process of performing heat treatment by transferring the boat (3) into the heat treatment furnace (1); a process of taking out the boat (3) to which cooling after heat treatment is completed from the retracted cooling tube (5); a process of carrying out the semiconductor wafers from the boat (3); and a process of carrying in the untreated semiconductor wafers to the boat (3).
H01L 21/22 - Diffusion des impuretés, p.ex. des matériaux de dopage, des matériaux pour électrodes, à l'intérieur ou hors du corps semi-conducteur, ou entre les régions semi-conductrices; Redistribution des impuretés, p.ex. sans introduction ou sans élimination de matériau dopant supplémentaire
H01L 21/31 - Traitement des corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour former des couches isolantes en surface, p.ex. pour masquer ou en utilisant des techniques photolithographiques; Post-traitement de ces couches; Emploi de matériaux spécifiés pour ces couches
H01L 21/324 - Traitement thermique pour modifier les propriétés des corps semi-conducteurs, p.ex. recuit, frittage
A die is heated to a high temperature at a high speed, and further, is cooled at a high speed. A die heating apparatus is provided for heating the die (100) which performs nano-imprinting of a superfine pattern on an object to be processed. The die heating apparatus is provided with a die holding section (2) which holds the die (100) and transfers heat to the die (100), and an IH heater (8) for heating the die holding section (2). At least a part of the die holding section (2) is formed of a material having a relative magnetic permeability of 0.99 or more and an electrical resistivity of 1쎽俑쮏cm or more.
In a first step of a method of gas carburizing, a steel treatment object is heated in a carburizing atmosphere comprising a carburizing gas until the surface carbon concentration of the treatment object reaches the final target value that is not higher than the solid solubility limit at a carburizing temperature that is not higher than the peritectic point, at which steel transforms from δ iron and liquid phase to γ iron, and is not less than the eutectic point, at which steel transforms from liquid phase to γ iron and cementite. In a second step the gas carburizing is advanced after the first step so that the carburizing depth of the treatment object increases while the surface carbon concentration of the treatment object is kept at the final target value by reducing the carbon potential of the carburizing gas with the lapse of time.
brevets
