A method for optical characterization of a target optical objective to be manufactured by stacking several optical elements, the method including a characterization phase of the following steps:
determining an assembly including, for each element at least one characteristic parameter of the optical element; and
providing, as a function of the assembly set, an estimated geometric set, including data relating to at least one geometric parameter of at least one optical interface of the stack, by a geometric characterization model trained beforehand with a database, called training database, of training sets constituted based on optical objectives with architecture identical to that of the target objective, and further relates to
a device for geometric characterization of optical objectives implementing such a geometric characterization method and to a method and a system for the manufacture of optical objectives implementing such a characterization method or device.
A method and related device for functional characterization, during manufacture or after manufacture, of a target optical objective including the following steps and performed after stacking the optical elements of the target objective: measuring, by optical interferometry, at least one measured optical set, including data relating to at least one geometric parameter of at least one optical interface; and providing, based on the at least one measured optical set, an estimated performance set including data relating to the performance of the target objective, by a characterization model previously trained. Also provided are a method and a system for manufacturing optical objectives implementing such a characterization method or device.
A method for measuring an item of geometric information of an interface of an optical element including interfaces, with a device configured to direct a measurement beam towards the optical element so as to pass through at least one of the interfaces and be reflected by the interface and generate a reflected beam, to selectively detect an interference signal between the reflected beam and a reference beam, the method including positioning a coherence area at an interface; measuring the interface so as to produce interference signals; and processing the signals including constructing a mathematical interface based on a sub-set of interference signals, determining, based on the mathematical interface and an expected shape of the interface, an item of geometric information of the interface.
G01B 9/02055 - Réduction ou prévention d’erreursTestÉtalonnage
G01B 9/02091 - Interféromètres tomographiques, p. ex. à cohérence optique
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
The invention relates to a method for recording a digital image in a computer format, the image, or at least a portion of the image, being coded and recorded in the form of a matrix of pixels in which each subject pixel (2), from among at least one or more pixels of the matrix, comprises: - at least one dividing line (3) within the subject pixel (2), dividing the subject pixel (2) at least into two domains (31, 32) and/or being able to make this line visible and/or - at least one spatial colour and/or shade and/or brightness gradient (4) within the subject pixel (2) or within at least one of the domains (31, 32) of the subject pixel (2).
A device for measuring interface shape of an optical element, including
at least one low-coherence light source,
at least one optical sensor,
an interferometric device illuminated by the light source or and configured for
shaping at least one measurement beam and at least two reference beams,
directing one measurement beam to the element to pass through the interfaces, and
directing the light from at least two interfaces to the sensor or sensors,
each sensor globally configured for detecting at least two interference signals resulting respectively from interferences between the measurement beam reflected by one of the at least two interfaces and one of the reference beams;
the measurement device also including
a positioner for positioning a coherence area at the level of each interface; and
a digital processor for producing, from the interference signals, an item of information of the shape of each interface according to a field of view.
The invention relates to a method (400) for acquiring an image with an apparatus comprising a camera module comprising an optical lens associated with an image sensor, said method comprising at least one iteration of an image acquisition phase by said apparatus comprising the following steps: - capturing (404) an image with the camera module; and - correcting (412) the captured image according to at least one correction matrix calculated, directly or indirectly, from at least one matrix, referred to as aberration matrix, determined for the optical lens, and representative of optical aberrations introduced by the optical lens in an image. The invention also relates to a characterization system and an imaging apparatus implementing such a method.
The invention relates to a method (400) for characterizing an optical lens that comprises a stack of several optical elements and is intended to be associated with an image sensor for acquiring images, the method comprising: - determining (402), by optical measurement on the stack of optical elements, at least one data set (JG), referred to as geometric set, comprising data relating to at least one geometric parameter of at least one buried optical interface of the lens, - digitally modeling (404) the optical lens according to the geometric set, and - determining (406), by an optical wave propagation digital simulator applied to the digital model, at least one matrix, referred to as aberration matrix, representative of optical aberrations introduced by the optical lens (200) in an image. The invention also relates to a characterization device, to an image acquisition method and an image acquisition device, and to an imaging apparatus implementing such a method.
The invention relates to a method (10) for determining information relating to an interface (103) of an optical element comprising a plurality of interfaces, the method being implemented by a device comprising at least one optical sensor (602) and at least one light source (612) in order to make a beam (606) pass through at least one of the interfaces and be reflected by the interface to be measured, and to detect an interference signal between the reflected beam and a reference beam; the method comprising: - positioning (12) a coherence zone at an interface; - at least two measurements (14, 16) of the interface in order to produce an interference image by measurement on the basis of respective interference signals; - rotating (15) the optical element about a reference axis of the device between the measurements; and - processing (17) the at least two images in order to obtain information relating to the interface.
G02B 27/62 - Appareils optiques spécialement adaptés pour régler des éléments optiques pendant l'assemblage de systèmes optiques
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01B 11/27 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour tester l'alignement des axes pour tester l'alignement des axes
ii) comprising data relating to at least one geometric parameter of at least one optical interface of the training optical lens; and - a phase (420) of training a geometric characterisation model (440) with said training base (BA). The invention also relates to a device for obtaining a geometric characterisation tool, and a device and a method for geometric characterisation of optical lenses using such a geometric characterisation method.
The invention relates to a method (400) for the optical characterisation of a target optical lens to be manufactured by stacking a plurality of optical elements, said method (400) comprising a characterisation phase (402) comprising the following steps: - determining (404) an assembly play (JA), comprising, for each element, at least one characteristic parameter of said optical element; and - providing (406), depending on said assembly play, an estimated geometric play (JGE), comprising data relating to at least one geometric parameter of at least one optical interface of said stack, by means of a geometric characterisation model, previously trained using a database, referred to as training database, of training plays formed on the basis of optical lenses of identical architecture to that of said target lens. The invention also relates to a device for the geometric characterisation of optical lenses implementing such a geometric characterisation method. It further relates to a method and system for manufacturing optical lenses implementing such a characterisation method or device.
ii) comprising data relative to at least one geometric parameter of at least one optical interface of said training optical objective (404); - at least one performance set comprising data relative to a functional performance of said training optical objective; and - a phase (320) of training a functional characterization model with said training base (BA). It also relates to a device for obtaining a tool for functional characterization of a target optical objective, and to a method and system for characterization of optical objectives implementing such a characterization method or device.
The invention relates to a method (300) for the functional characterisation of a target optical lens during or after manufacture, said method being performed after the optical elements of the target lens have been stacked and comprising the following steps: at least one measured optical data set is measured (304) by means of optical interferometry, said measured optical data set containing data relating to at least one geometric parameter of at least one optical interface; and, based on said at least one measured optical data set, an estimated performance data set is provided (310) by a pretrained characterisation model, said estimated performance data set containing data relating to the performance of the target lens (100). The invention also relates to a device for characterising optical lenses implementing such a characterisation method. It further relates to a method and a system for manufacturing optical lenses using such a characterisation method or device.
The invention relates to a method (10) for measuring geometric information about an interface (103) of an optical element (1000) comprising interfaces, with a device configured to direct a measuring beam (106, 606) to the optical element so as to pass through at least one of the interfaces and be reflected by the interface and generate a reflected beam, so as to selectively detect an interference signal between the reflected beam and a reference beam (616), said method (10) comprising: - positioning (12) a coherence region at an interface; - measuring (14) the interface so as to produce interference signals; and - processing (16) the signals comprising: • constructing (17) a mathematical interface from a subset of interference signals, • determining (18), from the mathematical interface and from an expected form (104a, 104b) of the interface, geometric information about the interface.
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
A device and method for measuring a surface of an object, including at least one light source, at least one optical sensor, and an interferometry device having a measurement arm and a reference arm, the former directing light from each light source towards the surface of the object and directing light from the surface towards each optical sensor; the measurement device, in an interferometry configuration, illuminating the reference arm and the measurement arm with each light source and directing the light from the measurement arm and the reference arm towards each optical sensor to form an interference signal; the measurement device, in an imaging configuration illuminating at least the measurement arm and directing the light from the measurement arm towards the optical sensor to form an image of the surface; the measurement device including a digital processor producing, from the interference signal and the image, information on the surface.
G01B 11/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la rugosité ou l'irrégularité des surfaces
G01B 9/02001 - Interféromètres caractérisés par la commande ou la génération des propriétés intrinsèques du rayonnement
G01B 9/02015 - Interféromètres caractérisés par la configuration du parcours du faisceau
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
G01H 9/00 - Mesure des vibrations mécaniques ou des ondes ultrasonores, sonores ou infrasonores en utilisant des moyens sensibles aux radiations, p. ex. des moyens optiques
G03H 1/00 - Procédés ou appareils holographiques utilisant la lumière, les infrarouges ou les ultraviolets pour obtenir des hologrammes ou pour en obtenir une imageLeurs détails spécifiques
G03H 1/04 - Procédés ou appareils pour produire des hologrammes
G03H 1/08 - Procédés ou appareils pour produire des hologrammes pour faire des hologrammes synthétiques
17.
Device and method for measuring interfaces of an optical element
A measurement device, for measuring the shape of an interface to be measured of an optical element having a plurality of interfaces, the device including a measurement apparatus with at least one interferometric sensor illuminated by a low-coherence source, for directing a measurement beam towards the optical element to pass through the plurality of interfaces, and to detect an interference signal resulting from interferences between the measured measurement beam reflected by the interface and a reference beam, a positioning apparatus configured for relative positioning of a coherence area of the interferometric sensor at the level of the interface to be measured, and a digital processor for producing, based on the interference signal, an item of shape information of the interface to be measured according to a field of view.
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
19.
DEVICE FOR DETECTING THE CAPACITIVE COUPLING BETWEEN AN OBJECT AND A DETECTION SURFACE
The invention relates to a device for measuring the shape of interfaces of an optical element, comprising: - at least one low-coherence light source; - at least one optical sensor; - an interferometer for: forming at least one measurement beam and at least two reference beams, directing the at least one measurement beam towards the optical element so as to pass through the interfaces, directing the light from at least two interfaces towards the at least one sensor, the at least one sensor being configured to selectively detect at least two signals of interferences between the at least one measurement beam reflected by an interface and one of the reference beams; - means for positioning a coherence region at each of the at least two interfaces; - means for producing, from the signals, shape information of each interface.
The invention relates to a capacitive detection device (902) intended for an apparatus (900) comprising a deployable member (204) which can be deployed between a retracted position and a deployed position, the capacitive detection device (902) comprising: - at least one measurement electrode (104; 504), and - one measuring electronic unit (110) configured to polarise at least one measurement electrode (104; 504) at an alternating working potential and provide a signal (Vs) relating to the electrode-object capacitance (Coe) seen by the at least one measurement electrode (104; 504); characterised in that it comprises at least one deployable electrode (104,106) for covering the deployable member (204) when the deployable member (204) is partially or fully deployed. The invention also relates to an apparatus (900) comprising a deployable member (204) which can be deployed between a retracted position and a deployed position and which is provided with such a detection device (902).
H03K 17/955 - Commutateurs de proximité utilisant un détecteur capacitif
A61B 6/10 - Moyens de sécurité spécialement adaptés à cet effet
F16P 3/14 - Dispositifs de sécurité agissant en conjonction avec la commande ou le fonctionnement d'une machineCommandes exigeant l'emploi simultané de plusieurs parties du corps humain avec dispositifs, p. ex. des éléments sensibles, qui agissent sur la commande ou le fonctionnement de la machine lorsqu'une partie du corps humain se trouve dans ou près de la zone de danger les dispositifs étant des cellules photo-électriques ou d'autres dispositifs sensibles sans contact mécanique
22.
CAPACITIVE DETECTION DEVICE COMPRISING A MODULE FOR BIASING BY INDUCTION
The invention relates to a device (300) for capacitive detection of an object (O), comprising: - at least one biasing module (306) configured to bias at least one measurement electrode (302) at an alternating electric potential (Vg), referred to as work potential, different from a ground potential (M); and - measurement electronics (312); characterised in that at least one biasing module (306) comprises at least one toroidal element, referred to as excitation element, with a central opening designed to induce, in at least one electrical conductor (11) which passes therethrough and which is in electrical connection with at least one measurement electrode (302), an alternating potential difference equal to the alternating electrical work potential (Vg), between an input and an output of the at least one toroidal element. The invention also relates to an apparatus using such a capacitive detection device (300).
soeieie) between said electrodes. It also relates to a detection layer comprising such a detection device and to an item of equipment equipped with such a detection layer.
The invention concerns a device (1000, 2000, 3000, 4000, 5000, 6000) for measuring a surface of an object (100), the device comprising: - at least one light source (112, 212, 320, 520); - at least one optical sensor (102, 202, 624); and - an interferometry device having a measurement arm and a reference arm, the measurement arm being configured to direct the light originating from the at least one light source (112, 212, 320, 520) towards the surface to be measured of the object via an optical focusing (107, 207) and to direct the light originating from the surface to be measured towards the at least one optical sensor (102, 202, 624); the measurement device being configured, according to a first configuration, referred to as interferometry configuration, in order to illuminate the reference arm and the measurement arm with the at least one light source (112, 212, 320, 520) and in order to direct the light originating from the measurement arm and the reference arm towards the at least one optical sensor (102, 202, 624) so as to form an interference signal; the measurement device being configured, according to a second configuration, referred to as imaging configuration, in order to illuminate at least the measurement arm and to direct the light originating from the measurement arm uniquely towards the at least one optical sensor (102, 202, 624) so as to form an image of the surface to be measured; the measurement device further comprising digital processing means configured to produce, from the interference signal and the image, a piece of information on the surface to be measured. The invention also concerns a method (10) for measuring a surface of an object (100).
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
G01H 9/00 - Mesure des vibrations mécaniques ou des ondes ultrasonores, sonores ou infrasonores en utilisant des moyens sensibles aux radiations, p. ex. des moyens optiques
G03H 1/04 - Procédés ou appareils pour produire des hologrammes
25.
Low-coherence reflectometry method and device employing time-frequency detection
A low-coherence interferometer apparatus for determining information on interfaces of an object including: a polychromatic light source; an optical system generating a measurement optical beam and a reference optical beam; a delay line introducing a variable optical delay between the optical beams; detection optics combining the beams, and producing a spectral signal representative of an optical-power spectral density of the resulting interference signal; a control and processing module acquiring a plurality of spectral signals for a plurality of optical delays, determining, for each spectral signal, optical retardation information between interfering beams within a spectral measurement range, analyse the variation in the retardations, and assign the optical retardation determined on the basis of the different spectral signals to interface curves, corresponding to straight lines with positive, negative, zero or almost-zero gradient, depending on the respective optical delay of the acquisition of the spectral signals, and to deduce information of the object.
A61B 5/00 - Mesure servant à établir un diagnostic Identification des individus
A61B 5/107 - Mesure de dimensions corporelles, p. ex. la taille du corps entier ou de parties de celui-ci
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
26.
DEVICE AND METHOD FOR MEASURING INTERFACES OF AN OPTICAL ELEMENT
The invention relates to a method and device (1) for measuring the shape of an interface (103) of an optical element (1000) comprising a plurality of interfaces, the device (1) comprising: measurement means (4000, 6000, 7000) with at least one interferometric sensor illuminated by a low-coherence source (402, 612, 712) configured to direct a measurement beam (106, 606) towards the optical element (1000) so as to pass through the plurality of interfaces, and in order to selectively detect an interference signal resulting from the interference between the measurement beam (106, 606) reflected by the interface (103) to be measured and a reference beam (616, 716); positioning means (608, 611, 708, 711) configured for relative positioning of a zone of coherence of the interferometric sensor at the interface to be measured; digital processing means configured to produce, from the interference signal, a piece of shape information of the interface (103) to be measured in a field of view (108).
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
G01B 11/27 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour tester l'alignement des axes pour tester l'alignement des axes
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
G06T 7/521 - Récupération de la profondeur ou de la forme à partir de la télémétrie laser, p. ex. par interférométrieRécupération de la profondeur ou de la forme à partir de la projection de lumière structurée
27.
METHOD AND DEVICE FOR MEASURING INTERFACES OF AN OPTICAL ELEMENT
Device and method (100) for measuring interfaces of an optical element (5) to be measured, this element forming part of a plurality of similar optical elements comprising at least one optical element called the "reference" optical element, the method (100) comprising the following steps: · positioning (102) the reference optical element and a measurement beam (11) relative to each other; · acquiring (104) a "reference" image; · positioning (106) the optical element (5) to be measured relative to a field of view so as to allow a "measurement" image to be acquired; · determining (107) a difference in position of the optical element (5) to be measured relative to the reference optical element; · adjusting (110) the position of the optical element (5) to be measured so as to decrease to zero said difference in position; and · measuring (112) interfaces of the optical element (5) to be measured by means of the measurement beam (11).
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
G01B 11/27 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour tester l'alignement des axes pour tester l'alignement des axes
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
The invention relates to a method (200) for monitoring the environment of a robot comprising at least one iteration of a detection phase (220) comprising the following steps: - acquisition (222), at a measurement instant, of an image of the depth of the environment, referred to as a measurement image, by the at least one 3D camera, - readjustment (228) of the reference and measurement images, and - detection (230) of a change relating to an object in the environment of the robot by comparing the reference and measurement images. The invention also relates to a device that implements such a method and a robot equipped with such a device.
112212122) at least one geometric relationship between at least two geometric shapes; - identifying (116, 118) geometric shapes common to the two images by collating the detected geometric relationships; - calculating (120), according to the common geometric shapes, a displacement matrix; and - registering (122) one of the images, with respect to the other image, according to the displacement matrix. It also relates to a method for monitoring an area of interest and a method for monitoring the environment of a robot implementing such a method for registering depth images.
The invention relates to a method for the capacitive detection of nearby objects (102, 104) possibly located in the surroundings of an apparatus provided with a capacitive detection device (100), comprising what is called a discriminatory detection step, comprising the following operations: - biasing a first nearby object (102) at a first alternating potential (V1), different from a ground potential (M) and from the potential of at least one second nearby object (104), at a first frequency (F1); and - determining a first discriminatory signal representative of a capacitance, called electrode-object capacitance, seen by said at least one measurement electrode, at said first frequency (F1).
F16P 3/14 - Dispositifs de sécurité agissant en conjonction avec la commande ou le fonctionnement d'une machineCommandes exigeant l'emploi simultané de plusieurs parties du corps humain avec dispositifs, p. ex. des éléments sensibles, qui agissent sur la commande ou le fonctionnement de la machine lorsqu'une partie du corps humain se trouve dans ou près de la zone de danger les dispositifs étant des cellules photo-électriques ou d'autres dispositifs sensibles sans contact mécanique
G01B 7/02 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer la longueur, la largeur ou l'épaisseur
31.
Multi-distance detection device for a robot, and robot equipped with such (a) device(s)
at least one sensor, called proximity sensor, implementing a second detection technology for detecting a neighbouring object, different from said the first technology, and having a range less than that of the at least one approach sensor. A robot equipped with such a device is also disclosed.
The invention concerns a method for assembling a metal part and a ceramic part, characterised in that it comprises the following steps: - providing an alumina ceramic solid part; - providing a metal solid part, the metal being chosen among platinum and tantalum or an alloy mostly comprising one of these metals; - depositing at least one layer, called the interface layer, on at least one of the solid parts, the interface layer containing magnesium oxide; - placing the metal solid part and the ceramic solid part in contact so that the interface layer is located between the solid parts; and - hot densifying, under pressure, of the solid parts placed in contact in order to create an intimate connection between the solid parts and to form a a spinel from the interface layer. The invention also concerns an electrical device, in particular a capacitive sensor, the sensitive portion of which is produced according to the method of the invention.
B22F 7/06 - Fabrication de couches composites, de pièces ou d'objets à base de poudres métalliques, par frittage avec ou sans compactage de pièces ou objets composés de parties différentes, p. ex. pour former des outils à embouts rapportés
H03K 17/00 - Commutation ou ouverture de porte électronique, c.-à-d. par d'autres moyens que la fermeture et l'ouverture de contacts
G01B 1/00 - Instruments de mesure caractérisés par l'usage d'un matériau spécifique
G01B 7/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
C04B 37/00 - Liaison des articles céramiques cuits avec d'autres articles céramiques cuits ou d'autres articles, par chauffage
C04B 37/02 - Liaison des articles céramiques cuits avec d'autres articles céramiques cuits ou d'autres articles, par chauffage avec des articles métalliques
The invention relates to a method (100) for controlling a robot, comprising the following steps: - detecting (102) at least one contact between an object and the robot by means of at least one sensor, referred to as the position sensor, fitted to said robot; - determining (104), for said at least one contact, a contact range according to a measurement of the at least one position sensor; and - executing (106) a robot control command taking into account information relating to said contact range. The invention also relates to a device and a robot implementing the method.
B25J 13/08 - Commandes pour manipulateurs au moyens de dispositifs sensibles, p. ex. à la vue ou au toucher
G01D 5/24 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier la capacité
34.
APPARATUS HAVING A CAPACITIVE SENSING SYSTEM AND ELECTRIC LINE(S)
minmaxmax) corresponding to the distance beyond which a predetermined reference object generates a coupling capacitance with the at least one measuring electrode (108) that is less than said threshold capacitance.
B25J 13/08 - Commandes pour manipulateurs au moyens de dispositifs sensibles, p. ex. à la vue ou au toucher
B25J 19/00 - Accessoires adaptés aux manipulateurs, p. ex. pour contrôler, pour observerDispositifs de sécurité combinés avec les manipulateurs ou spécialement conçus pour être utilisés en association avec ces manipulateurs
GG), called the guard potential, identical to the detection potential at said detection frequency. The apparatus according to the invention may be a robot, in particular a robotic arm, equipped with an electrical line supplying a member of said robot.
B25J 13/08 - Commandes pour manipulateurs au moyens de dispositifs sensibles, p. ex. à la vue ou au toucher
B25J 19/00 - Accessoires adaptés aux manipulateurs, p. ex. pour contrôler, pour observerDispositifs de sécurité combinés avec les manipulateurs ou spécialement conçus pour être utilisés en association avec ces manipulateurs
G01D 15/00 - Parties constitutives des enregistreurs dans les dispositions pour la mesure qui ne sont pas spécialement adaptées à une variable particulière
H03K 17/955 - Commutateurs de proximité utilisant un détecteur capacitif
36.
APPARATUS WITH CAPACITIVE SENSING AND AT LEAST ONE CAPACITIVE EXTENSION PIECE
The invention relates to an apparatus comprising measurement electrodes (108) and capacitive sensing electronics configured to: - bias the measurement electrodes (108) to an alternating electrical detection potential, which is different from a ground potential, at a detection frequency, and - detect a signal relating to capacitive coupling between said object and at least one measurement electrode (108); said apparatus further comprising at least one extension member (300) that is attached to said apparatus above at least one measurement electrode (108) and is electrically coupled to the at least one measurement electrode (108) so as to extend the capacitive detection provided by the at least one measurement electrode (108).
B25J 13/08 - Commandes pour manipulateurs au moyens de dispositifs sensibles, p. ex. à la vue ou au toucher
B25J 19/00 - Accessoires adaptés aux manipulateurs, p. ex. pour contrôler, pour observerDispositifs de sécurité combinés avec les manipulateurs ou spécialement conçus pour être utilisés en association avec ces manipulateurs
G01D 15/00 - Parties constitutives des enregistreurs dans les dispositions pour la mesure qui ne sont pas spécialement adaptées à une variable particulière
H03K 17/955 - Commutateurs de proximité utilisant un détecteur capacitif
37.
COVERING DEVICE WITH CAPACITIVE SENSING, AND APPARATUS PROVIDED WITH SUCH A DEVICE
The invention relates to a covering device (300) for an apparatus, comprising: - a support (102) that is to be fitted onto said apparatus and is provided with capacitive measurement electrodes (108); - a coating (104) which covers the support (102) and includes a multitude of flexible covering elements (106) projecting from the support (102); and - capacitive sensing electronics (110) configured to: bias at least one measurement electrode (108) to an alternating detection potential (V G), which is different from a ground potential, at a detection frequency, and - detect a capacitive detection signal from at least one measurement electrode (108) so as to detect that an object touches or sinks into said coating (104) before the object comes into contact with the support (102).
122), characterised in that it also comprises: at least one common-mode emitter (202), for injecting the same second so-called common-mode signal (210), in an alternating manner, into each of said at least two differential lines (102, 104), at a point of said communication bus; and at least one common-mode receiver (206) for receiving said second signal (210) at another point of said communication bus.
GG) different to a ground potential (118), and ・measuring a measurement signal relative to an electrode/object capacitance; characterised in that the electronic detection unit (106) further comprises, for said electronic measurement unit, at least two separate calculation modules (124, 126), functioning in parallel, and providing two separate detection signals for a same measurement signal originating from the electronic measurement unit (108).
G05B 9/03 - Dispositions de sécurité électriques avec une boucle à canal multiple, c.-à-d. systèmes de commande redondants
G01L 1/14 - Mesure des forces ou des contraintes, en général en mesurant les variations de la capacité ou de l'inductance des éléments électriques, p. ex. en mesurant les variations de fréquence des oscillateurs électriques
G01R 27/26 - Mesure de l'inductance ou de la capacitanceMesure du facteur de qualité, p. ex. en utilisant la méthode par résonanceMesure de facteur de pertesMesure des constantes diélectriques
G01L 1/14 - Mesure des forces ou des contraintes, en général en mesurant les variations de la capacité ou de l'inductance des éléments électriques, p. ex. en mesurant les variations de fréquence des oscillateurs électriques
G01R 27/26 - Mesure de l'inductance ou de la capacitanceMesure du facteur de qualité, p. ex. en utilisant la méthode par résonanceMesure de facteur de pertesMesure des constantes diélectriques
G05B 9/03 - Dispositions de sécurité électriques avec une boucle à canal multiple, c.-à-d. systèmes de commande redondants
G01R 17/10 - Ponts de mesure alternatifs ou continus
G01R 27/26 - Mesure de l'inductance ou de la capacitanceMesure du facteur de qualité, p. ex. en utilisant la méthode par résonanceMesure de facteur de pertesMesure des constantes diélectriques
G01B 7/02 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer la longueur, la largeur ou l'épaisseur
42.
MULTI-DISTANCE DETECTION DEVICE FOR A ROBOT, AND ROBOT FITTED WITH ONE OR MORE SUCH DEVICES
The invention relates to an object detection device (100) for a robot, intended to be fitted to said robot, comprising: - at least one sensor (102), termed an approach sensor, implementing a first detection technology for detecting a nearby object; - at least one sensor (104, 700), termed a contact sensor, implementing a second detection technology for detecting a nearby object, which second technology differs from said first technology and has a range that is shorter than the range of said at least one approach sensor (102). The invention also relates to a robot fitted with such a device (100).
The present invention relates to a robot (100) comprising a functional head (104) and capacitive detection means comprising: - at least one electrical insulator (106) for electrically insulating said functional head (104); - at least one means for electrically biasing said functional head (104) at an alternating electrical potential (V), called operating potential, different from a ground potential, such that said sensitive portion is used as a capacitive detection electrode; - at least one electrical guard (108); said robot (100) furthermore comprising at least one sensor (112), called approach sensor, which is not capacitive and has a detection range greater than said capacitive detection electrode formed by said sensitive portion of said functional head (104).
The invention relates to a casing element (100) for a robot, said casing element (100) comprising: - at least one capacitive electrode (102), termed a measurement electrode, intended to be biased to a first AC electric potential that is different from a ground potential, at a working frequency; - at least one electrode (104), termed a guard electrode, arranged beneath said at least one measurement electrode (102) and intended to be biased to an AC electric potential, termed the guard potential, that is identical or substantially identical to said first potential at said working frequency; and - at least one dielectric layer (106), termed a central dielectric layer, arranged between said at least one measurement electrode (102) and said at least one guard electrode (104). The invention also relates to a robot provided with at least such a casing element.
The present invention relates to a robot (300) comprising a body (104) on which there is mounted a functional head (106) furthermore comprising capacitive detection means comprising: -at least one electrical insulator (314) for electrically insulating said functional head (106); -at least one means (302) for electrically biasing said functional head (106) at a first AC electrical potential (Vg) different from a ground potential, -at least one guard (312) biased at a guard AC potential (VG) identical to the first AC electrical potential, and -at least one electronics system (304), called detection electronics system, for measuring a signal relating to a coupling capacitance, called electrode-object capacitance, between said sensitive portion and a nearby object.
G01R 27/26 - Mesure de l'inductance ou de la capacitanceMesure du facteur de qualité, p. ex. en utilisant la méthode par résonanceMesure de facteur de pertesMesure des constantes diélectriques
G01D 5/24 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier la capacité
48.
LOW-COHERENCE REFLECTOMETRY METHOD AND DEVICE EMPLOYING TIME-FREQUENCY DETECTION
The present invention relates to a low-coherence interferometer apparatus or device (100, 200) for determining information on the structure and/or the location of interfaces of an object (13) comprising: a polychromatic light source (11); an optical system for generating a measurement optical beam and a reference optical beam; a delay line (14) for introducing a variable optical delay between the measurement optical beam and the reference optical beam; a detection optic (15) for combining the measurement optical beam and the reference optical beam, and for producing a spectral signal representative of an optical-power spectral density of the resulting interference signal; a processing and controlling module (16) arranged to acquire a plurality of spectral signals for a plurality of optical delays, to determine, for each spectral signal, information on the optical lag between interfering beams in a measurement range called the spectral measurement range, to analyse the variation in said optical lags as a function of the optical delay and to assign the one or more optical lags determined on the basis of the various spectral signals to one or more what are called interface curves (521, 522, 523, 524), corresponding to straight lines of positive, negative, zero or almost-zero gradient, depending on the respective optical delay of the acquisition of said spectral signals, and to deduce therefrom information on the structure and/or the location of interfaces of the object (13). The invention also relates to a method implemented in this device or this apparatus.
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
A61B 5/00 - Mesure servant à établir un diagnostic Identification des individus
An optical delay line (LR) intended to be implemented in an interferometer, comprising a rotating polygon (29). This polygon (29) is arranged to modulate the respective optical paths of first and second light beams (Li1, Li2), which are issued from the same what is called measurement beam, and which are directed through the polygon (29) toward a first and a second reflector (21, 22), respectively, so as to generate an optical delay by way of the difference between the optical paths of these first and second beams (Li1, Li2). Implementation in an optical measuring device integrating a low-coherence interferometer.
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
50.
CAPACITIVE DEVICE FOR DETECTING AN ELECTRICALLY FLOATING OBJECT
The present invention relates to a device (100) for detecting an object (102) in relation to a detection surface (104), comprising: - a measuring electrode (106); and - at least one guard electrode (108), with the same alternating potential as the measuring electrode (106); and - at least one module (114) for measuring a first signal in relation to the capacitance (Ceo), referred to as the electrode-object capacitance, formed between said measuring electrode (106) and said object (102); characterised in that it further comprises at least one electrode (116), referred to as the polarisation electrode, arranged facing said object (104) and with its potential grounded (M) so as to polarise said object (102) through capacitive coupling.
The present invention relates to a compressible layer (300), such as a mattress or a seat cushion, comprising: at least one measurement electrode (106); at least one electrode field (108) arranged opposite said measurement electrode (106), said measurement electrodes (106) and electrode field (108) being brought to an identical or substantially identical alternating potential (VG), referred to as field potential, with a given so-called working frequency, different from a ground potential (M); and at least one measurement module (114) for measuring a signal relative to the capacitance (Ceo), referred to as electrode-object, formed between said measurement electrode (106) and a person (302) positioned on said layer. The invention also relates to a bed or seat integrating or provided with such a capacitive layer in the form of a mattress or a cushion.
A61B 5/11 - Mesure du mouvement du corps entier ou de parties de celui-ci, p. ex. tremblement de la tête ou des mains ou mobilité d'un membre
A61B 5/00 - Mesure servant à établir un diagnostic Identification des individus
A61B 5/024 - Mesure du pouls ou des pulsations cardiaques
A61B 5/113 - Mesure du mouvement du corps entier ou de parties de celui-ci, p. ex. tremblement de la tête ou des mains ou mobilité d'un membre se produisant au cours de la respiration
52.
DEVICE AND METHOD FOR DETECTING THE APPROACH AND/OR CONTACT, AND THE PRESSURE OF AN OBJECT IN RELATION TO A DETECTION SURFACE
The invention relates to a device (100) for detecting an object (102) in relation to a detection surface (104), comprising at least one measuring electrode (106) and at least one guard electrode (108) separated via a distance (D) which is elastically locally modifiable by a pressure exerted by said object (102) on said detection surface (104); and means for the electrical polarisation of the electrodes (V, E) arranged so as to (i) apply the same first alternating electrical voltage (Vg) to the measuring electrodes and guard electrodes (106, 108) in order to measure a first signal in relation to an object-electrode capacitance (Ceo); and to (ii) apply an alternating electrical voltage (V1) difference between the measuring electrodes and the guard electrodes (106, 108) in order to measure a second electrical signal in relation to a guard-electrode (Ceg) capacitance. The invention also relates to a detection method using such a detection device.
The invention relates to a detection device (300) comprising: a measuring electrode (106) and a second electrode (108) separated from each other by a distance (D) which is elastically locally modifiable by a pressure exerted by an object (102) on a detection surface (104); and control means (116) arranged so as to connect the electrodes (106, 108) to an alternating guard voltage (Vg) in order to measure a capacity representative of an approach and a contact, and to connect the second electrode (108) to a second voltage proportionate to the guard voltage (Vg) and having a different amplitude, or to the mass voltage (M), in order to measure a capacity representative of a pressure. The invention also relates to a detection method using such a detection device.
A method for configuring a virtual sensor in a real scene, the method comprising: obtaining at least one first three dimensional (3D) representation of the real scene, analyzing said at least one first 3D representation to detect a beacon in the real scene and computing from said at least one first 3D representation a position of the beacon in the real scene; generating virtual sensor configuration data for the virtual sensor on the basis at least of the position of the beacon, the virtual sensor configuration data representing a volume area having a predefined positioning with respect to the beacon, at least one virtual sensor trigger condition associated with the volume area, and at least one operation to be triggered when said at least one virtual sensor trigger condition is fulfilled.
The present invention relates to a capacitive detection device comprising: at least one capacitive measurement electrode (11); a current detector (16) that is electrically referenced to a general ground (12); at least one excitation AC voltage source (15) that is electrically linked or coupled to a measurement input of the current detector (16) and to the at least one capacitive measurement electrode (11); guard elements (14) that are electrically linked or coupled to the measurement input of the current detector (16); means for generating an electrical power supply that are capable of generating at least one secondary electrical power supply source (Vf) that is referenced to the electrical potential of the guard elements (13), which means for generating an electrical power supply additionally being arranged so as to have, in a band of frequencies extending from DC, an impedance between the general ground (12) and the guard elements (14) with a reactive component of capacitive, or primarily capacitive, nature, or akin to an open circuit.
G01R 27/26 - Mesure de l'inductance ou de la capacitanceMesure du facteur de qualité, p. ex. en utilisant la méthode par résonanceMesure de facteur de pertesMesure des constantes diélectriques
G06F 3/044 - Numériseurs, p. ex. pour des écrans ou des pavés tactiles, caractérisés par les moyens de transduction par des moyens capacitifs
56.
CAPACITIVE INTERFACE DEVICE WITH MIXED ELECTRODE STRUCTURE, AND APPARATUS COMPRISING THE DEVICE
The present invention relates to a capacitive interface device, comprising a detection surface (10) with one or more capacitive electrodes (21) extending in a first direction (X), second capacitive electrodes (22) extending in a second direction (Y), third capacitive electrodes (23) placed in a matrix arrangement between the second capacitive electrodes (22) and opposite the one or more first capacitive electrodes (21), and linking tracks (24) electrically connected in the detection surface (10) to a plurality of adjacent third capacitive electrodes (23).
The present invention concerns a confocal chromatic device for inspecting the surface of an object (10) such as a wafer, comprising a plurality of optical measurement channels with collection apertures (14) arranged for collecting the light reflected by the object (10) through a chromatic lens (13) at a plurality of measurement points (15), and a magnifying lens (31) arranged for introducing a variable or changeable scaling factor between the spatial repartition of the collection apertures (14) and the measurement points (15). The present invention concerns also a method for inspecting the surface of an object (10) such as a wafer comprising tridimensional structures (11).
The present invention concerns a confocal chromatic device, comprising : at least one chromatic lens (13) with an extended axial chromatism; at least one broadband light source (19); at least one optical detection means (20, 21); and at least one measurement channel (24) with a planar Y-junction (18) made with a planar waveguide optics technology, and arranged for transferring light from said at least one light source (19) towards said at least one chromatic lens (13) and for transferring light reflected back through said at least one chromatic lens (13) towards said at least one optical detection means (20, 21).
The present invention concerns a confocal chromatic device for inspecting the surface of an object (10) such as a wafer, comprising a plurality of optical measurement channels (24) with collection apertures (14) arranged for collecting the light reflected by the object (10) through a chromatic lens (13) at a plurality of measurement points (15), said plurality of optical measurement channels (24) comprising optical measurement channels (24) with an intensity detector (20) for measuring a total intensity of the collected light. The present invention concerns also a method for inspecting the surface of an object (10) such as a wafer comprising tridimensional structures (11).
A device for positioning a mask relative to the surface of a wafer with a view to the exposure of the wafer, which includes (i) first positioning structure suitable for holding and moving the mask and the wafer in relation to each other; (ii) imaging structure suitable for producing at least one image of the mask and of the surface of the wafer according to at least one field of view, so as to image positioning marks of the mask and of the wafer simultaneously in the field of view; and (iii) at least one optical distance sensor suitable for producing a distance measurement between the surface of the wafer and the mask in the field(s) of view, with a measurement beam which passes at least partially through the imaging structure.
G03F 9/00 - Mise en registre ou positionnement d'originaux, de masques, de trames, de feuilles photographiques, de surfaces texturées, p. ex. automatique
61.
DEVICE AND METHOD FOR DETECTING DEFECTS IN BONDING ZONES BETWEEN SAMPLES SUCH AS WAFERS
The present invention relates to a measurement device for inspecting a bonding zone (18) between samples (16, 17), comprising (i) a low-coherence interferometer illuminated by a polychromatic light source having a measurement arm crossing said connection zone (18) and a reference arm, (ii) at least one optical detector (10) and optical and/or mechanical conditioning means (15) arranged to enable the acquisition of at least two interference measurements having different phase conditions between an measurement optical beam (21) coming from the measurement arm and a reference optical beam (20) coming from the reference arm; and (iii) calculation means (25) provided to calculate contrast information relating to said interference and to search, on the basis of said contrast information, for defects (19) in said bonding zone (18).
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
G01N 21/95 - Recherche de la présence de criques, de défauts ou de souillures caractérisée par le matériau ou la forme de l'objet à analyser
H01L 21/66 - Test ou mesure durant la fabrication ou le traitement
The present invention relates to a device or apparatus for carrying out shape measurements on a first surface (13) of a wafer (12) relative to the structures (14) present under said first surface (13), which comprises (i) profilometry means (10) arranged to carry out the shape measurements on said first surface (13) of the wafer (12) according to at least one measurement field; (ii) imaging means (11) facing said profilometry means (10) and arranged to acquire a reference image of said structures (14) on or through a second surface of the wafer (12) opposite to the first surface(13) according to at least one imaging field; said profilometry means (10) and said imaging means (11) being arranged such that the measurement and the imaging fields are position-referenced in a common frame of reference (15). The invention also relates to a method implemented in said device or apparatus.
The present invention relates to a method for extracting information of interest from a measurement signal including a periodical interference pattern, including the steps of: (i) generating a filtering function, representing the frequency components of the interference pattern, by implementing an analysis of an amplitude spectrum of the measurement signal based on morphological criteria; (ii) applying said filtering function to the measurement signal so as to generate an interference signal essentially consisting of the interference pattern; and (iii) calculating a filtered signal by determining a difference between the measurement signal and the interference signal. The invention also relates to a device implementing the method.
G06K 9/00 - Méthodes ou dispositions pour la lecture ou la reconnaissance de caractères imprimés ou écrits ou pour la reconnaissance de formes, p.ex. d'empreintes digitales
H01L 23/544 - Marques appliquées sur le dispositif semi-conducteur, p. ex. marques de repérage, schémas de test
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
64.
METHOD FOR REAL-TIME TRACKING OF THE OPERATIONAL STATUS OF A CAPACITIVE SENSOR
The invention relates to a method for real-time tracking of the operational status of a capacitive sensor mountable onto a rotatable machine and connected to an electronic measurement module via a high-frequency transmission line. Said method includes the steps of: generating, within the electronic module, a signal of conductance compensation for interference from the transmission line and the sensor; generating, within the electronic module, a signal of capacitance compensation for the transmission line and the sensor; sampling a signal representing the capacitance compensation and a signal representing the conductance compensation such as to determine an operation point of the sensor; and analyzing the operation point so as to verify if it is located in a predetermined area.
G01D 5/24 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier la capacité
65.
Methods and systems for controlling a virtual interactive surface and interactive display systems
Systems and methods for controlling a virtual interactive surface in a scene include a surface for displaying information and one or several virtual sensors positioned with respect to the surface. The virtual sensor includes data representing a geometric form, data representing a position in the scene, and data representing one or several trigger conditions. A data representation of the scene is captured and a determination whether a virtual sensor trigger condition is fulfilled is made, based on an analysis of the captured data representation in an area corresponding to the geometric form and position of the virtual sensor.
G06F 3/048 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI]
G06F 3/0488 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] utilisant des caractéristiques spécifiques fournies par le périphérique d’entrée, p. ex. des fonctions commandées par la rotation d’une souris à deux capteurs, ou par la nature du périphérique d’entrée, p. ex. des gestes en fonction de la pression exercée enregistrée par une tablette numérique utilisant un écran tactile ou une tablette numérique, p. ex. entrée de commandes par des tracés gestuels
G06F 3/0484 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] pour la commande de fonctions ou d’opérations spécifiques, p. ex. sélection ou transformation d’un objet, d’une image ou d’un élément de texte affiché, détermination d’une valeur de paramètre ou sélection d’une plage de valeurs
G06F 3/01 - Dispositions d'entrée ou dispositions d'entrée et de sortie combinées pour l'interaction entre l'utilisateur et le calculateur
G06F 3/03 - Dispositions pour convertir sous forme codée la position ou le déplacement d'un élément
G06F 3/042 - Numériseurs, p. ex. pour des écrans ou des pavés tactiles, caractérisés par les moyens de transduction par des moyens opto-électroniques
66.
DEVICE AND METHOD FOR POSITIONING A PHOTOLITHOGRAPHY MASK BY MEANS OF A CONTACTLESS OPTICAL METHOD
The present invention relates to a device for positioning a mask (10) in relation to the surface of a wafer (11), with a view to exposing said wafer to light (11). Said device includes: (i) first positioning means (20) capable of holding and moving said mask (10) and said wafer (11), relative to one another; (ii) imaging means (20, 22, 23, 30) capable of producing at least one image of the mask (10) and of the surface of the wafer (11) along at least one visual field (14), such as to simultaneously image, within said visual field (14), reference points (12, 13) for positioning said mask (10) and said wafer (11); and (iii) at least one optical distance sensor (26) capable of producing a distance measurement between the surface of the wafer (11) and the mask (10), within said visual field(s) (14), using a measurement beam (15, 28) that passes at least partially through the imaging means. The invention also relates to a method, implemented in said device, and to an apparatus.
G03F 9/00 - Mise en registre ou positionnement d'originaux, de masques, de trames, de feuilles photographiques, de surfaces texturées, p. ex. automatique
67.
GUARD ACCESSORY DEVICE FOR AN ELECTRONIC AND/OR COMPUTER APPLIANCE, AND APPLIANCE FITTED WITH SUCH AN ACCESSORY DEVICE
The invention relates to an accessory device (100) for a so-called user electronic and/or computer appliance (102), said user appliance (102) comprising: at least one means for the capacitive detection (104), without contact, of at least one control object in relation to a control surface (106); and at least one so-called appliance guard means (108), set to a so-called guard alternative voltage (VG), different from a so-called earth voltage, of said at least one control object, and substantially identical to the potential of said at least one capacitive detection means (104); said accessory device (100) comprising at least one so-called accessory guard means (110) arranged so as to be set to a potential which is similar or identical as said guard alternative potential (VG) by coupling to said user appliance (102). The invention also relates to an appliance (102) provided with such an accessory device.
G06F 3/039 - Leurs accessoires, p. ex. tapis de souris
G06F 3/044 - Numériseurs, p. ex. pour des écrans ou des pavés tactiles, caractérisés par les moyens de transduction par des moyens capacitifs
H02J 7/02 - Circuits pour la charge ou la dépolarisation des batteries ou pour alimenter des charges par des batteries pour la charge des batteries par réseaux à courant alternatif au moyen de convertisseurs
68.
METHOD FOR CHARACTERIZING AN OBJECT OF INTEREST BY INTERACTING WITH A MEASURING INTERFACE, AND DEVICE IMPLEMENTING THE METHOD
The present invention relates to a method for characterizing an object of interest (1) by interacting with a measuring interface (2), comprising steps for (i) acquiring a spatial distribution of measurements representative of the distance (3) between the object of interest (1) and a plurality of measuring points of the measuring interface (2), (ii) determining an estimated position of the object of interest (1) relative to the measuring interface (2), and (iii) determining at least one additional characteristic of the object of interest from among a dimensional characteristic and an angular positioning characteristic (8, 23) relative to the measuring interface (2). The invention also relates to an interface device and an apparatus implementing the method.
G06F 3/041 - Numériseurs, p. ex. pour des écrans ou des pavés tactiles, caractérisés par les moyens de transduction
G06F 3/044 - Numériseurs, p. ex. pour des écrans ou des pavés tactiles, caractérisés par les moyens de transduction par des moyens capacitifs
G06F 3/0354 - Dispositifs de pointage déplacés ou positionnés par l'utilisateurLeurs accessoires avec détection des mouvements relatifs en deux dimensions [2D] entre le dispositif de pointage ou une partie agissante dudit dispositif, et un plan ou une surface, p. ex. souris 2D, boules traçantes, crayons ou palets
69.
CAPACITIVE CONTROL INTERFACE DEVICE AND METHOD ADAPTED FOR THE IMPLEMENTATION OF HIGHLY RESISTIVE MEASUREMENT ELECTRODES
The present invention relates to an interface device for controlling actions of at least one object of interest, comprising (i) a detection surface (4) provided with a plurality of capacitive‑measurement electrodes (5), (ii) electronic and processing means comprising excitation means able to polarize said measurement electrodes (5) to an alternating electrical excitation potential, and measurement means able to measure a capacitive coupling between at least one measurement electrode (5) and at least one object of interest, (iii) guard elements (6) made of an electrically conducting material which are polarized to an alternating electrical guard potential substantially identical to said electrical excitation potential, (iv) electrical linking tracks (7) disposed at least in part on said detection surface (4), in which device the excitation means are arranged in such a way as to generate an electrical excitation potential with an excitation frequency low enough for the measurement electrodes (5) coupled capacitively to at least one object of interest and their linking track (7) to have an electrical impedance at said excitation frequency whose resistive part is much lower than the modulus of the reactive part. The invention also relates to an apparatus and a method implemented in this device or this apparatus.
The present invention concerns a method of capacitive sensing, implementing a plurality of electrodes (5, 7) capable of enabling the detection of objects (1) in the vicinity of same by capacitive coupling, and comprising a step of simultaneously polarising at least one portion of said electrodes (5, 7) with different excitation potentials, said excitation potentials being generated relative to a reference potential such that the scalar product over a predefined period of at least two of these excitation potentials is zero or much lower than the scalar product of one and/or the other of these excitation potentials with same over said predefined period. The invention also concerns a device and an apparatus implementing the method.
G06F 3/03 - Dispositions pour convertir sous forme codée la position ou le déplacement d'un élément
G01B 7/02 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer la longueur, la largeur ou l'épaisseur
G01R 17/10 - Ponts de mesure alternatifs ou continus
G06F 3/041 - Numériseurs, p. ex. pour des écrans ou des pavés tactiles, caractérisés par les moyens de transduction
G06F 3/044 - Numériseurs, p. ex. pour des écrans ou des pavés tactiles, caractérisés par les moyens de transduction par des moyens capacitifs
71.
DEVICE FOR CONTACTLESS INTERACTION WITH AN ELECTRONIC AND/OR COMPUTER APPARATUS, AND APPARATUS EQUIPPED WITH SUCH A DEVICE
The present invention concerns a device (110) for contactless interaction, via at least one control object (116), with an electronic and/or computer apparatus (100), called user apparatus, comprising at least first and second portions (102, 104) which, during use, together form a non-zero angle (108), called user angle, said device (110) comprising: -at least one first detection means (112) for detection, by contactless capacitive technology, of said at least one control object (116) relative to a first control surface (118) defined relative to said first portion (102) of said user apparatus (100), said first detection means (112) comprising a plurality of capacitive electrodes, called measurement electrodes; at least one, and preferably each, of said measurement electrodes being maintained, by a first means (130), called maintaining means, at an AC potential, called guard potential, different from a potential, called ground potential, of said at least one control object (116), and substantially identical to the potential of said measurement electrode. -at least one second means (132), called maintaining means, for maintaining said second portion (104) of said user apparatus (100) at least partially at said guard potential. It also concerns an apparatus (100) comprising such a device (110).
The present invention relates to a method for navigating in a display screen (102) by way of a control surface (106), comprising a step of measuring: - a data item, termed position, relating to a position (112) targeted, on said control surface (106), by a remote control object (104) positioned opposite said control surface (106), and - a data item, termed vertical distance, relating to the distance (110) between the at least one remote control object (104) and said control surface (106); characterized in that it further comprises a step, so-called drive step, carrying out, as a function of said vertical distance (110) measured: - a displacement, and/or - an adjustment of a parameter relating to a displacement; of at least one part of a zone and/or of a symbol displayed on said display screen (102) and chosen as a function of said targeted position (112).
G06F 3/041 - Numériseurs, p. ex. pour des écrans ou des pavés tactiles, caractérisés par les moyens de transduction
G06F 3/042 - Numériseurs, p. ex. pour des écrans ou des pavés tactiles, caractérisés par les moyens de transduction par des moyens opto-électroniques
G06F 3/044 - Numériseurs, p. ex. pour des écrans ou des pavés tactiles, caractérisés par les moyens de transduction par des moyens capacitifs
G06F 3/0488 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] utilisant des caractéristiques spécifiques fournies par le périphérique d’entrée, p. ex. des fonctions commandées par la rotation d’une souris à deux capteurs, ou par la nature du périphérique d’entrée, p. ex. des gestes en fonction de la pression exercée enregistrée par une tablette numérique utilisant un écran tactile ou une tablette numérique, p. ex. entrée de commandes par des tracés gestuels
Methods and systems for detecting activation of a virtual sensor in a scene are proposed, wherein the virtual sensor comprises data representing a geometric form, data representing a position in the scene and data representing one or several trigger conditions. A data representation of the scene is captured, and a determination of whether a virtual sensor trigger condition is fulfilled is made, based on an analysis of the captured data representation in an area corresponding to the geometric form and position of the virtual sensor.
G06F 3/01 - Dispositions d'entrée ou dispositions d'entrée et de sortie combinées pour l'interaction entre l'utilisateur et le calculateur
G06F 3/03 - Dispositions pour convertir sous forme codée la position ou le déplacement d'un élément
G06F 3/0481 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] fondées sur des propriétés spécifiques de l’objet d’interaction affiché ou sur un environnement basé sur les métaphores, p. ex. interaction avec des éléments du bureau telles les fenêtres ou les icônes, ou avec l’aide d’un curseur changeant de comportement ou d’aspect
G06F 3/0484 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] pour la commande de fonctions ou d’opérations spécifiques, p. ex. sélection ou transformation d’un objet, d’une image ou d’un élément de texte affiché, détermination d’une valeur de paramètre ou sélection d’une plage de valeurs
74.
DEVICE AND METHOD FOR MAKING DIMENSIONAL MEASUREMENTS ON MULTILAYER OBJECTS SUCH AS WAFERS
The present invention relates to an imaging device for localising structures through the surface of an object (20) such as a wafer, with a view to positioning a measuring sensor (45, 46, 47) relative to said structures, comprising: (i) an imaging sensor (22); (ii) optical imaging means (34) able to produce, on said imaging sensor (22), an image of the object (20) in a field of view; and (iii) illuminating means (23, 27) for generating an illuminating beam (25, 30) and lighting said field of view in reflection, in which the illuminating means (23, 27) are able to generate an illuminating beam (25, 30) the spectral content of which is adapted to the nature of the object (20), such that the light of said beam (25, 30) is able to essentially penetrate into said object (20). The invention also relates to a system and a method for carrying out dimensional measurements on an object (20) such as a wafer.
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
B24B 49/12 - Appareillage de mesure ou de calibrage pour la commande du mouvement d'avance de l'outil de meulage ou de la pièce à meulerAgencements de l'appareillage d'indication ou de mesure, p. ex. pour indiquer le début de l'opération de meulage impliquant des dispositifs optiques
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01N 21/95 - Recherche de la présence de criques, de défauts ou de souillures caractérisée par le matériau ou la forme de l'objet à analyser
H01L 21/66 - Test ou mesure durant la fabrication ou le traitement
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
75.
METHOD AND DEVICE FOR CONTROLLABLY REVEALING STRUCTURES BURIED IN OBJECTS SUCH AS WAFERS
The present invention relates to an imaging method and device for inspecting for the presence, in an area of an object (20) such as a wafer, of structures (70a, 70b, 70c) enclosed in said object (20), such as vias, employing: an imaging sensor (22); optical imaging means (34) able to produce, on said imaging sensor (22), an image (73, 74) of the object (20) in a field of view; and illuminating means (23, 27) for generating an illuminating beam (25, 30) and lighting said field of view in reflection, characterised in that it comprises steps of: acquiring a first image (73) of the object (20) by illuminating said object (20) with a first illuminating beam (25, 30) the spectral content of which is adapted to the nature of the object (20), such that the light of said beam (25, 30) is able essentially to penetrate into said object (20); acquiring a second image (74) of the object (20) by illuminating said object (20) with a second illuminating beam (25, 30) the spectral content of which is adapted to the nature of the object (20), such that the light of said beam (25, 30) is essentially reflected by the surface of the object (20); and comparing said first and second images (73, 74) such as to identify structures (71a) that appear in the first image (73) but not in the second image (74).
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
B24B 49/12 - Appareillage de mesure ou de calibrage pour la commande du mouvement d'avance de l'outil de meulage ou de la pièce à meulerAgencements de l'appareillage d'indication ou de mesure, p. ex. pour indiquer le début de l'opération de meulage impliquant des dispositifs optiques
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01N 21/95 - Recherche de la présence de criques, de défauts ou de souillures caractérisée par le matériau ou la forme de l'objet à analyser
H01L 21/66 - Test ou mesure durant la fabrication ou le traitement
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
76.
Method for determining the movements of an object from a stream of images
According to one aspect, the invention relates to a system for determining the movements of an object from a stream of images of said object. The system includes, in particular, a computer having a memory and a central processing unit, said central processing unit including: a reading unit (12) for recording each image of the stream of images in an input buffer memory (22); a processing unit (13) making it possible to determine, for each image, a change in the position and/or in the deformation of said object relative to the image immediately preceding said image in the stream; the reading and processing units being synchronized such that the processing of each of said images of the stream of images is carried out either simultaneously at the time of the reading of an image following said image in the stream of images, and of the recording thereof in the input buffer memory (22).
The present invention relates to a method for interacting with an electronic and/or computing apparatus (300), termed the user apparatus, said user apparatus (300) comprising: - a control surface (102) furnished with a plurality of capacitive electrodes (104), and - at least one so-called neutral surface (302-308), arranged at the periphery of said control surface (102) so that none of said capacitive electrodes (104) of said control surface (102) is disposed in said neutral surface (302-308); said method being characterized in that it comprises the following steps: - detection of at least one control object disposed in contact with or opposite said neutral surface (302-308) of said apparatus (300), by utilization of the edge effect, and - triggering, as a function of said detection, at least one function in said user apparatus (300). The invention also relates to a man-machine interface for interacting with a user apparatus and a user apparatus, implementing this method.
The invention relates to a man-machine interface device exhibiting a transparent detection zone and an access zone, this device comprising: - a surface of electrodes made of a material which is transparent and conducting in the detection zone, - conducting connection tracks disposed in the access zone and connected to the surface of electrodes, - a first conducting surface made of a transparent material, present in the transparent zone, and used as guard for the electrodes surface. The conducting connection tracks are disposed sandwich-like between a second and a third conducting surface used as second and third guards for these conducting connection tracks. The device also comprises linking tracks made of a transparent conducting material for linking the conducting connection tracks to electrodes of the electrodes surface, these linking tracks being: - positioned between the electrodes when these linking tracks are situated on the detection surface, and - positioned between the second and third guards when these linking tracks are situated in the access zone.
The invention relates to a human-machine interface device (AP) having a transparent area (SD) for viewing a display screen (EC) and an access area (SND) in which there is at least one metal connector (CF) connected to at least two planes arranged above the display screen, said planes being: an electrode plane (E, PT) made of a transparent resistive conductive material, said plane being present in the transparent area, a conductor plane (G) made of a transparent resistive conductive material used as an active guard (G) for the electrode plane, said active guard being present in the transparent area and extending into the access area. The device according to the invention comprises at least one metal strip (PM), referred to as the guard strip (PM), for reducing the resistance of the guard, said guard strip being arranged within the access area (SND) and connected to the active guard (G) and to the metal connector (CF), the latter being connected to the electrode plane (E, PT) such that the conductor plane (G) and the electrode plane (E, PT) are at substantially the same potential.
A microscope device for inspecting structured objects, including: a camera; an optical imager capable of producing, on the camera, an image of the object according to a field of view, and including a distal lens arranged on the side of the object; and a low-coherence infrared interferometer including a measurement beam capable of producing measurements by means of interferences between retroreflections of the measurement beam and at least one separate optical reference. The device also includes coupler for injecting the measurement beam into the optical imaging means in such a way that the beam passes through the distal lens, and the low-coherence infrared interferometer is balanced in such a way that only the measurement beam retroreflections, taking place at optical distances close to the optical distance covered by the beam to the object, produce measurements.
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
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