Abrégé

The present description concerns an electron beam device (100) comprising: a treatment chamber (130) having a longitudinal direction (Z); at least one electron beam source (110), each source being adapted to emitting an electron beam in a beam plane (PF) substantially transverse to the longitudinal direction so as to induce a plasma or an evaporation point in the treatment chamber for the treatment of a surface of a part (106); at least one first port (122) for the passage of the electron beam into said treatment chamber, the diameter of the minimum circle in which said first port is inscribed being smaller than or equal to one eighth, for example smaller than or equal to one tenth, of the smallest dimension (D3) of a transverse cross-section of the treatment chamber taken in the beam plane.

Classes IPC  ?

• H01J 37/06 - Sources d'électronsCanons à électrons
• C23C 14/46 - Pulvérisation cathodique par un faisceau d'ions produit par une source d'ions externe
• H01J 37/141 - Lentilles électromagnétiques
• H01J 37/34 - Tubes à décharge en atmosphère gazeuse fonctionnant par pulvérisation cathodique

Abrégé

The present description relates to an ion source device (100) with charge separation, which comprises: - an electron cyclotron resonance source (110); - an electron impact source (130).

Classes IPC  ?

• H01J 27/20 - Sources d'ionsCanons à ions utilisant un bombardement de particules, p. ex. ioniseurs
• H01J 37/08 - Sources d'ionsCanons à ions

Produits et services

Scientific apparatus and instruments; nautical apparatus and instruments; surveying apparatus and instruments; photographic apparatus and instruments; cinematographic cameras; optical apparatus and instruments; weighing apparatus and instruments; measuring apparatus and instruments; signaling apparatus and instruments; checking (monitoring) apparatus and instruments; teaching apparatus and instruments; sound recording apparatus; apparatus for sound transmission; apparatus for sound reproduction; image recording equipment; image transmission apparatus; image reproduction apparatus; digital recording media; mechanisms for coin-operated apparatus; cash registers; calculating machines; downloadable e-wallets; data processing equipment; computers; tablet computers; smartphones; electronic book readers; game software; software (recorded programs); computer peripherals; detectors; electric wires; electric relays; diving suits; diving gloves; diving masks; clothing for protection against accidents, irradiation and fire; protection devices for personal use against accidents; fire extinguishers; spectacles (optics); 3D spectacles; virtual reality headsets; eyewear; spectacle cases; integrated circuit cards [smart cards]; bags adapted for laptops; smart watches; electric batteries; batteries for electronic cigarettes; charging stations for electric vehicles; diagnostic apparatus, not for medical use. Sawing of materials; dressmaking; printing house services; providing information with respect to treatment of materials; soldering; burnishing by abrasion; planing of materials; refining services; grinding; galvanization; gilding services; tin plating; dyeing services; clothing alteration; cloth treating; air purification; vulcanization (treatment of materials); decontamination of hazardous materials; production of energy; photographic printing; photographic film development; silkscreen printing; glass blowing; taxidermy; waste treatment (transformation); sorting of waste and recyclable raw material (transformation); recycling of trash and waste. Technical evaluations concerning design (engineers' services); scientific research; technological research; design of computers for third parties; computer development; software design; software development; research and development of new products for third parties; conducting of technical project studies; architecture; design of interior decor; software development (design); software installation; software maintenance; updating of software; software rental; programming for computers; computer system analysis; computer system design; consultant services with respect to computer hardware design and development; digitization of documents; Software as a Service (SaaS); cloud computing; advice regarding information technology; server hosting; motor vehicle roadworthiness testing; graphic arts design services; styling (industrial design); authentication of works of art; energy auditing; electronic data storage.

Produits et services

Scientific apparatus and instruments, namely, particle source modules, systems and instruments; surveying apparatus and instruments; photographic apparatus and instruments, namely, charged particle microscopes; cinematographic cameras; optical apparatus and instruments, namely, charged particle microscopes and microanalyzers; weighing apparatus and instruments; measuring apparatus and instruments, namely, instruments for controlling, characterizing and verifying the ion/electron beam, environmental or compatibility performance and the characteristics of materials, devices and components in particular electronic components, optical components, metals, ceramics, thin films, geological and space-science samples, biological and organic materials, environmental and cultural-heritage materials; checking and monitoring apparatus and instruments, namely, instruments for controlling, characterizing and verifying the ion/electron beam, environmental or compatibility performance and the characteristics of materials, devices and components, in particular electronic components, optical components, metals, ceramics, thin films, geological and space-science samples, biological and organic materials, environmental and cultural-heritage materials; sound recording apparatus; apparatus for sound transmission; apparatus for sound reproduction; image recording equipment; image transmission apparatus; image reproduction apparatus; mechanisms for coin-operated apparatus; cash registers; calculating machines; data processing equipment; smartphones; electronic book readers; computer software, recorded, for use in design and production of particle source modules, material and device property modifications, material and device analysis, surface treatment and characterization; computer peripherals; detectors, namely, particle detectors such as electron or ion detectors; electric wires; electric relays; diving suits; diving gloves; diving masks; clothing for protection against accidents, irradiation and fire; fire extinguishers; 3D spectacles; virtual reality headsets; eyewear; spectacle cases; bags adapted for laptops; smart watches; electric batteries; batteries for electronic cigarettes; charging stations for electric vehicles; diagnostic apparatus, not for medical use, for testing material and device performance and characteristics Dressmaking; providing information with respect to treatment of materials; soldering; burnishing by abrasion; grinding; galvanization; gilding services; tin plating; clothing alteration; cloth treating; air purification; decontamination of hazardous materials; production of energy; photographic printing; photographic film development; silkscreen printing; glass blowing; taxidermy; recycling of trash and waste Engineering services being design of particle source modules, namely, electrons, ions, atoms and plasma sources for surface engineering; scientific research; technological research in the field of particle source modules, namely, electrons, ions, atoms and plasma sources for material and device property modifications, material and device analysis, surface treatment and characterization for electronic and optical components; software design for design and production of particle source modules, material and device property modifications, material and device analysis, surface treatment and characterization for electronic and optical components; software development for design and production of particle source modules, material and device property modifications, material and device analysis, surface treatment and characterization for electronic and optical components; research and development of new products for third parties; conducting of technical project studies, namely, conducting studies in the field of particle source modules, namely, electrons, ions, atoms and plasma sources for material and device property modifications, material and device analysis, surface treatment and characterization for electronic and optical components; design of interior decor; software development for design and production of particle source modules, material and device property modifications, material and device analysis, surface treatment and characterization for electronic and optical components; software installation for design and production of particle source modules, material and device property modifications, material and device analysis, surface treatment and characterization for electronic and optical components; software maintenance for design and production of particle source modules, material and device property modifications, material and device analysis, surface treatment and characterization for electronic and optical components; updating of software for design and production of particle source modules, material and device property modifications, material and device analysis, surface treatment and characterization for electronic and optical components; rental of computer software, for design and production of particle source modules, material and device property modifications, material and device analysis, surface treatment and characterization for electronic and optical components; programming for computers, namely, for design and production of particle source modules, material and device property modifications, material and device analysis, surface treatment and characterization for electronic and optical components; Software as a Service (SaaS) services featuring software for design and production of particle source modules, material and device property modifications, material and device analysis, surface treatment and characterization for electronic and optical components; server hosting; motor vehicle roadworthiness testing; graphic arts design services; industrial design styling being industrial design of particle beam-based surface treatment machines; authentication of works of art; energy auditing; electronic data storage

Abrégé

An achromatic magnetic mass spectrometer, for example of the SIMS type with double focusing, comprises means for canceling the four aberrations of the second order, and means for canceling the off-axis achromatism and for modulating the dispersion in mass.

Classes IPC  ?

• H01J 49/32 - Spectromètres statiques utilisant une focalisation double
• H01J 49/26 - Spectromètres de masse ou tubes séparateurs de masse

Abrégé

A mass analysis device with wide angular acceptance, notably of the mass spectrometer or atom probe microscope type, includes means for receiving a sample, means for extracting ions from the surface of the sample, and a reflectron producing a torroidal electrostatic field whose equipotential lines are defined by a first curvature in a first direction and a first center of curvature, and a second curvature in a second direction perpendicular to the first direction and a second center of curvature, the sample being positioned close to the first center of curvature.

Classes IPC  ?

• H01J 49/40 - Spectromètres à temps de vol
• H01J 49/26 - Spectromètres de masse ou tubes séparateurs de masse
• B01D 59/44 - Séparation par spectrographie de masse

Abrégé

0.

Classes IPC  ?

• G01Q 60/00 - Types particuliers de microscopie à sonde à balayage SPM [Scanning-Probe Microscopy] ou appareils à cet effetComposants essentiels de ceux-ci

Abrégé

A wide spectral band laser pulse generating device capable of covering a spectrum formed of given wavelengths is provided, including: a monochromatic laser light source whose intensity is adjustable; non-linear optical means, a photonic crystal or a microstructured optical fiber for example, for carrying out spectral widening of the wave emitted by the light source; the light source and the non-linear optical means are configured and arranged so as to create a white supercontinuum whose continuous spectrum contains the wavelengths considered. The invention relates to the general field of the analysis of the composition of material specimens, and in particular to laser tomographic atom probes.

Classes IPC  ?

• H01J 49/00 - Spectromètres pour particules ou tubes séparateurs de particules

Abrégé

The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a detector which are separated from one another by a distance L and enclosed in a chamber, an “Einzel” type electrostatic lens consisting of three electrodes arranged inside the chamber between the sample and the detector, to which electrical potentials are applied so as to form an electrical field that strongly focuses the beam of ions emitted by the sample under test when the probe is operating. According to the invention, the geometry of the electrodes is defined precisely so as to greatly limit the effects of the spherical aberration that affects the “Einzel” lens on the beam of ions, said spherical aberration being clearly sensitive when the lens is greatly polarized. The invention applies more particularly to the atom probes known as 3D atom probes.

Classes IPC  ?

• G01Q 60/00 - Types particuliers de microscopie à sonde à balayage SPM [Scanning-Probe Microscopy] ou appareils à cet effetComposants essentiels de ceux-ci

Abrégé

The invention relates to a mass analysis device (100) with wide angular acceptance, in particular such as a mass spectrometer or an atom probe microscope, including a means for receiving a sample (101), a means for extracting ions from the surface of the sample (101), and a reflectron (103) producing a toroidal electrostatic field in which the equipotential lines are defined by a first curvature in a first direction and a first centre of curvature (105), and a second curvature in a second direction perpendicular to the first direction and a second centre of curvature, characterised in that the sample (101) is placed adjacent to the first centre of curvature (105).

Classes IPC  ?

• H01J 49/40 - Spectromètres à temps de vol

Abrégé

The invention relates to an achromatic magnetic mass spectrometer (200), for example of the SIMS type with double focusing, characterised in comprising means (202, 212, 215, 221 ) for cancelling the four second order aberrations and means (201, 222) for cancelling off-axis achromatic and for modulating mass dispersion.

Classes IPC  ?

• H01J 49/32 - Spectromètres statiques utilisant une focalisation double
• H01J 49/06 - Dispositifs électronoptiques ou ionoptiques

Abrégé

The invention relates to a tomographic atom probe (100) with a flight-time spectrometer, that includes an electrostatic device (201) for focusing the ion beam, characterised in that the electrostatic device (201) includes a plurality of electrodes (202, 203, 204) with electric potentials (V1, V2,..., VN) that are proportional to the potential (V) imposed on the sample defining the tip (101).

Classes IPC  ?

• H01J 49/06 - Dispositifs électronoptiques ou ionoptiques
• H01J 49/40 - Spectromètres à temps de vol
• H01J 37/285 - Microscopes à émission, p. ex. microscopes à émission de champ

Abrégé

The invention pertains to the general field of tomography atomic probes, and more particularly to tomography atomic probes that use electric pulses applied to an electrode for vaporising the analysed sample. In order to generate the electric pulse, the tomography atomic probe of the invention includes a high-voltage generator including a path of a semi-conducting material. The probe also includes a light source that can be controlled for generating light pulses applied to the semi-conducting patch. During the entire duration of illumination, the patch is made conductive, thereby electrically contacting the high voltage generator and the electrode so that a potential step is applied on the latter. Le probe further includes means for applying at the end of a time interval Δt0 a voltage step having an amplitude opposite to that of the previous step so that electrode finally receives a voltage pulse having a duration Δt0.

Classes IPC  ?

• H03K 3/42 - Générateurs caractérisés par le type de circuit ou par les moyens utilisés pour produire des impulsions par l'utilisation, comme éléments actifs, de dispositifs opto-électroniques, c.-à-d. de dispositifs émetteurs de lumière et de dispositifs photo-électriques couplés électriquement ou optiquement
• H03K 3/537 - Générateurs caractérisés par le type de circuit ou par les moyens utilisés pour produire des impulsions par l'utilisation d'un élément accumulant de l'énergie déchargé dans une charge par un dispositif interrupteur commandé par un signal extérieur et ne comportant pas de réaction positive le dispositif de commutation étant un éclateur
• H01J 49/06 - Dispositifs électronoptiques ou ionoptiques

Abrégé

The invention pertains to the general field of the analysis of the composition of material samples. The invention particularly relates to laser tomographic atom probes. The invention relates to a wide spectral band laser pulse generating device capable of covering a spectrum formed of given wavelengths, which comprises: a monochromatic laser light source having an adjustable intensity; a non-linear optical means, such as a photonic crystal or a microstructured optical fibre, for the spectral widening of the wave emitted by the light source; wherein the light source and the non-linear optical means are configured and arranged so as to generate a white supercontinuum having a continuous spectrum that contains the wavelengths in question.

Classes IPC  ?

• G02F 1/35 - Optique non linéaire
• G01N 21/62 - Systèmes dans lesquels le matériau analysé est excité de façon à ce qu'il émette de la lumière ou qu'il produise un changement de la longueur d'onde de la lumière incidente
• G01N 33/00 - Recherche ou analyse des matériaux par des méthodes spécifiques non couvertes par les groupes

Abrégé

The present invention relates to the field of tomographic atom probes and more particularly to what are called 旜3D probes”. It provides an alternative solution to the existing devices for producing a probe that maximizes the acceptance angle while still maintaining a fairly high bulk resolution. This result is achieved by combining two electrostatic lenses - a first lens, called the objective lens, being placed close to the accelerating electrode configured to maximize the acceptance angle and a second electrostatic lens, called the correcting lens, configured to correct the aberration phenomenon that affects the paths of the ions passing through the objective lens - which aberration phenomenon particularly affects the ions that follow the paths furthest away from the optical axis of the lens. The various components making up the probe according to the invention are also arranged so as to maintain a minimum ratio between the distance separating the principal plane of the objective lens from that of the correcting lens and the distance separating the principal plane of the objective lens from the specimen.

Classes IPC  ?

• H01J 49/06 - Dispositifs électronoptiques ou ionoptiques
• H01J 49/40 - Spectromètres à temps de vol
• H01J 37/285 - Microscopes à émission, p. ex. microscopes à émission de champ

Abrégé

The invention pertains to improvements in the mass resolution of wide-angle tomographic atomic probes. The invention comprises an atomic probe including, in addition to a sample-holding device and to detectors remote from each other by a distance L and enclosed in a housing, an electrostatic lens of the Einzel type made of three electrodes arranged inside the housing between the sample and the detector and to which electric potentials are applied in order to generate an electric field that strongly focalises the ion beam emitted by the sample under test during the probe operation. According to the invention, the geometry of the electrodes is defined accurately in order to substantially limit the spherical aberration effects undergone by the Einzel lens on the ion beam, of which the spherical aberration is particularly important when the lens is strongly polarised. The invention can particularly be used for atomic probes referred to as 旜3D atom probes.”

Classes IPC  ?

• H01J 49/40 - Spectromètres à temps de vol

Produits et services

[ Particle accelerators; magnets; electromagnetic coils; ] testing apparatus not for medical purposes, namely, electron probes and ion probes; apparatus and instruments for astronomy, namely, analytical instruments in the nature of analyzers for measuring meteorites; [ regulating apparatus, namely, apparatus for regulating electric current; ] detectors, namely, [ charged particle detectors, ] atom detectors [ and photon detectors ] ; [ vacuum gauges; ] data-processing apparatus, namely, electronic hardware in the nature of data processors [ and programmable logic controllers dedicated to analytical instruments ] ; ionization apparatus, not for the treatment of air, namely, ion sources in the nature of duoplasmatrons field emitters [ and plasma radio-frequency sources ] dedicated to particle accelerators, electron and ion probes; computer software for analytical instruments for use in analytical techniques data processing; measuring instruments, namely, material analytical instruments in the nature of electron microscopes and mass spectrometers; precision measuring apparatus, namely, microanalysis apparatus in the nature of analyzers; microscopes; [ optical apparatus and instruments, namely, channel plate amplifier, light amplifier and laser; ] apparatus and instruments for physics, namely, electron beam and ion beam instruments in the nature of analyzers; X-rays producing apparatus and installations, not for medical purposes, namely, [ X-ray source for X-ray photoelectron spectroscopy, ] X-ray source for electron spectroscopy for chemical analysis and X-ray monochromatic applications; [ protection devices against X-rays, not for medical purposes, namely, flask, coffin and cask; ] spectrograph apparatus, namely, mass spectrometer [ and electron spectrometers; spectroscopes ]