Provided are: an electrostatic chuck which has excellent durability and excellent suction force while having a dielectric layer that is formed of a resin; and a method for manufacturing the electrostatic chuck. Specifically provided is an electrostatic chuck which has an electrode layer 2 between a dielectric layer 1 and an insulating layer 3, wherein: at least the dielectric layer is formed of a dielectric layer resin material that contains a thermoplastic resin; the electrode layer is formed of an electrode layer resin material that contains a thermoplastic resin and a conductive filler; the dielectric layer and the electrode layer are directly joined to each other without using an adhesive; and the dielectric layer 1 has a thickness of 300 µm or more and a volume resistivity at room temperature of not less than 1 × 109Ω∙cm but less than 1 × 1013 Ω∙cm. The electrostatic chuck is achieved by sequentially depositing and solidifying, by a fused deposition method of a 3D printer, an insulating layer resin material that contains a thermoplastic resin and forms an insulating layer, an electrode layer resin material that contains a thermoplastic resin and a conductive filler and forms an electrode layer, and a dielectric layer resin material that contains a thermoplastic resin and forms a dielectric layer.
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
[Problem] To provide an incubator capable of supplying clean air into a housing space for accommodating an infant while suppressing leakage of foreign matter from the housing space. [Solution] An incubator 1 includes: a bed 33 on which a lying infant is placed; a container 30 that partitions a housing space accommodating the bed 33 from the outside of the incubator 1; a dust collector having an ionizer IN for charging dust particles contained in air drawn from the inside of the container, and a dust collection part 12 for capturing the charged particles by potential difference to purify the air; and a fan 17 that is disposed downstream of the airflow path of the dust collector, keeps the internal pressure of the container 30 positive relative to the outside, draws in the air purified by the dust collector, and delivers the air along a wall surface of the container 30.
The present invention provides a wafer transfer device including a transfer hand using adhesive pads, the wafer transfer device being capable of preventing an excessive load from being applied when a wafer is delivered and being capable of surely preventing positional deviation at the time of wafer transfer. Provided is a wafer transfer device including a transfer hand for mounting and transferring a wafer. The wafer transfer device is characterized in that: the transfer hand 10 is provided with a plurality of adhesive pads 2 having adhesive force and a hand body 1; these adhesive pads are arranged so as to be positioned on the circumference of a virtual circle 3 on the hand body; and a wafer mounting surface 2a of each of the adhesive pads 2 is inclined so as to be lowered toward the center O of the virtual circle 3 with respect to a wafer w to be mounted.
H01L 21/677 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le transport, p. ex. entre différents postes de travail
4.
ELECTRIC DUST COLLECTION APPARATUS AND DUST PARTICLE COLLECTION METHOD USING SAME
Provided are: an electric dust collection apparatus capable of more reliably recovering captured and collected dust particles while operating; and a dust particle collection method using the same. This electric dust collection apparatus has a structure in which an ionizer 1, a dust collector 2, and a recovery device 3 are built into a housing 6, wherein: the dust collector 2 has a first roller 7 and a second roller 8 and has an endless belt 9 wound around these rollers; the endless belt 9 includes electrodes 10a and 10b on the inside surface thereof; and by rotating the endless belt 9, one of the electrodes 10a and 10b is brought into contact with the second roller to which a voltage having a reverse polarity to a polarity of ions generated by the ionizer is applied, to adsorb dust particles, and the adsorbed dust particles are recovered at a position corresponding to the other electrode.
B03C 3/10 - Installations alimentées en électricité de l'extérieur du type par voie sèche caractérisées par la présence d'électrodes se déplaçant pendant l'opération de séparation
This electrostatic cleaner comprises a dust adsorption means and a dust gathering means. The dust adsorption means includes: a dust collection part 2 having electrification; and a static electricity generation part 3 for electrifying the outer surface of the dust collection part 2. An electrostatic adsorption sheet 30 of the static electricity generation part 3 is stuck to the lower surface 28 of the dust collection part 2. The dust gathering means includes: a dust wiping part 4 for moving an adsorption target that is on the electrostatic adsorption sheet 30; and a dust storage part 5 for storing the adsorption target moved by the dust wiping part 4.
Provided is a workpiece holding device capable of reliably holding even a heavy-weight workpiece and separating the workpiece without applying a load to the held workpiece. This workpiece holding device includes: a belt-shaped base material 1 to which an adhesive holding material 2 is attached and which can be elastically deformed; a pedestal block 4 having a base surface; and a load receiving plate 5 having an opening at a position avoiding interference with the adhesive holding material 2 of the belt-shaped base material and supporting the belt-shaped base material 1 from below. To hold the workpiece, the belt-shaped base material 1 is sandwiched between the load receiving plate 5 and the pedestal block 4, and the adhesive holding material 2 is projected from the opening of the load receiving plate 5. Meanwhile, to remove the workpiece, the sandwiching of the belt-shaped base material 1 is released.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
A workpiece attraction device is provided that can dechuck (separate) the attracted workpiece in a short time and reliably even when transporting thin workpieces such as paper, cloth, or resin films. A workpiece attraction device includes: an electrostatic attraction body (1) capable of attracting a workpiece (W) to a workpiece attraction surface (1a) by applying a voltage to an attraction electrode (4a, 4b); and a workpiece separation body (5) that is interposed between an attracted workpiece and the electrostatic attraction body, and assists in separating the workpiece from the workpiece attraction surface after application of voltage to the attraction electrode is stopped. In the workpiece attraction device, the workpiece separation body has a plurality of opening portions (6) for applying a workpiece attraction force, generated on the workpiece attraction surface, toward a workpiece, the workpiece separation body is partitioned into the opening portions by a lattice portion (7) so that the opening portions are substantially uniformly present within a plane of the workpiece separation body, and in a plan view from a workpiece side with a workpiece attracted, the attraction electrode of the electrostatic attraction body does not face the lattice portion of the workpiece separation body.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
An electrostatic precipitator has a structure in which an ionization unit and a dust collection unit are assembled to a cover. The dust collection unit is formed by a high-voltage electrode and a dust collection board. An ionizer of the ionization unit is a direct current ionizer, and the high-voltage electrode is covered with an insulator. The dust collection board is formed by a base material and a carbon material covering the base material. Further, direct current voltages having the same polarity are applied from a power source to the ionizer and the high-voltage electrode, and a direct current voltage or a ground voltage having polarity opposite to that of the voltages applied to the ionizer and the high-voltage electrode is applied to the dust collection board.
B03C 3/04 - Installations alimentées en électricité de l'extérieur du type par voie sèche
B01D 53/32 - Séparation de gaz ou de vapeursRécupération de vapeurs de solvants volatils dans les gazÉpuration chimique ou biologique des gaz résiduaires, p. ex. gaz d'échappement des moteurs à combustion, fumées, vapeurs, gaz de combustion ou aérosols par effets électriques autres que ceux prévus au groupe
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01L 21/31 - Traitement des corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour former des couches isolantes en surface, p. ex. pour masquer ou en utilisant des techniques photolithographiquesPost-traitement de ces couchesEmploi de matériaux spécifiés pour ces couches
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
Provided is a workpiece gripping device that realizes highly reliable workpiece gripping and efficient workpiece gripping even in a case where a workpiece having a three-dimensional shape is included. This workpiece gripping device for gripping a workpiece is characterized by having: a frame-like support part; a flexible and airtight hollow bag-like body which is attached to one surface of the frame-like support part and in which a substance that undergoes a change of state due to a jamming transition is accommodated; an electrostatic clamping means which is provided on a workpiece contacting surface of the hollow bag-like body, and which electrostatically clamps the workpiece; and a shape-retaining means which deforms and retains the shape of the hollow bag-like body in accordance with the shape of the workpiece. The workpiece gripping device is characterized in that: the frame-like support part and the hollow bag-like body respectively have at least a non-contact region in which the frame-like support part and the hollow bag-like body do not contact each other, and the hollow bag-like body is attached to one surface of the frame-like support part; and, when in use, the workpiece is pushed against the workpiece contacting surface of the hollow bag-like body and is gripped and clamped, by utilizing the shape retention by the jamming transition, and the electrostatic clamping.
To provide an electric precipitator which can collect more reliably dusty foreign matter emitted during material processing such as stamping process utilizing an electrostatic force, has excellent installability, and can be used safely. Provided is an electric precipitator that collects dusty foreign matter by an electrostatic force, including: a laminated sheet at least including a dust collection layer that holds the dusty foreign matter in contact, a first electrode layer, a second electrode layer, and an insulation layer, the dust collection layer, the first electrode layer, the second electrode layer, and the insulation layer being laminated; and a power supply device that applies voltages across the first and second electrode layers. The insulation layer at least has a first insulation layer that insulates the dust collection layer and the first electrode layer, a second insulation layer that insulates the first electrode layer and the second electrode layer, and a third insulation layer that insulates the second electrode layer and a portion under the second electrode layer. Films having a surface resistivity of 104 to 108Ω are used for the first and second electrode layers.
To provide an electric precipitator for a press mold, which can collect more reliably dusty foreign matter emitted during stamping process utilizing an electrostatic force, has excellent installability, and can be used safely. Provided is an electric precipitator for a press mold, the electric precipitator being used together with the press mold to collect dusty foreign matter emitted during stamping process by an electrostatic force and including: a laminated sheet in which a dust collection layer that holds the dusty foreign matter in contact, a first electrode layer, a second electrode layer, an insulation layer, and a close-contact fixation layer for installation on and fixation to a mold to be used are laminated; and a power supply device that applies voltages across the first and second electrode layers. The insulation layer at least has a first insulation layer that insulates the dust collection layer and the first electrode layer, a second insulation layer that insulates the first electrode layer and the second electrode layer, and a third insulation layer that insulates the second electrode layer and the close-contact fixation layer. The first and second electrode layers are films obtained by coating a polyethylene terephthalate (PET) base material with a conductive polymer and having a surface resistivity of 104 to 105 Ω. A polyimide film having a base material thickness of 75 μm is used for the second insulation layer. A press mold including the same is also provided.
B21D 55/00 - Dispositifs de sécurité protégeant la machine ou l'opérateur, spécialement adaptés aux appareils ou machines couverts par la présente sous-classe
Provided is a workpiece holding device capable of reliably holding even a heavy workpiece and removing the held workpiece without applying a load. In the workpiece holding device, an adhesive holding material 2 having self-adhesiveness is attached to one surface of a belt-like sheet 1 capable of elastic deformation, the belt-like sheet 1 is locked to a pedestal block 5 having a locking part 4 while the adhesive holding material 2 is directed outward, and an integrating means is provided which integrates a base surface 5a of the pedestal block 5 and another surface 1a of the belt-like sheet 1 by bringing these into close contact with each other. When holding the workpiece, the pedestal block 5 and the belt-like sheet 1 are integrated by the integrating means, and a workpiece holding surface is formed to adhere and hold the workpiece. When removing the workpiece, the integrating of the pedestal block 5 and the belt-like sheet 1 is released, the base surface of the pedestal block and the other surface of the belt-like sheet are separated from each other, and the workpiece can be detached from the workpiece holding surface.
H01L 21/677 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le transport, p. ex. entre différents postes de travail
B25J 15/06 - Têtes de préhension avec moyens de retenue magnétiques ou fonctionnant par succion
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
Provided is a flying-type air purifier that collects dust in the air while floating and moving in the air. The flying-type air purifier facilitates removal of a dust collection electrode, and exhibits excellent performance in maintenance such as removal of dust particles attached to the dust collection electrode and replacement work of the dust collection electrode itself. The flying-type air purifier comprises a drone main body having a plurality of propellers circumferentially arranged around a control unit, a frame body that protects the propellers of the drone main body, and a band-like dust collection electrode which is attached to the frame body and collects dust particles in the air. The frame body forms a propeller surrounding structure that surrounds the propellers from the lateral direction. The band-like dust collection electrode has a removable unit which can be removably attached to both ends thereof without a tool, is attached to the propeller surrounding structure of the frame body, and is extended.
F24F 8/192 - Traitement, p. ex. purification, de l'air fourni aux locaux de résidence ou de travail des êtres humains autrement que par chauffage, refroidissement, humidification ou séchage par séparation, p. ex. par filtrage par des moyens électriques, p. ex. en appliquant des champs électrostatiques ou de la haute tension
B64U 101/29 - Véhicules aériens sans pilote spécialement adaptés à des utilisations ou à des applications spécifiques à la fabrication ou à l’entretien au nettoyage
15.
PROTECTIVE SEAL DETACHMENT METHOD AND PROTECTIVE SEAL DETACHMENT DEVICE
Provided are: a protective seal detachment method that makes it possible to easily detach a protective seal that has strong adhesive force by using a simple device; and a detachment device to be used therefor. The present invention is a method for detaching a protective seal from a protected workpiece, in which a surface of a workpiece body is protected by the protective seal, the method comprising: a first step in which an adhesive tape piece that has an adhesive surface is pressed using a rotating roller to cause the adhesive tape piece to be retained on a roll surface of the rotating roller with the adhesive surface on the outer side; and a second step in which the rotating roller, with the adhesive tape piece retained thereon, is pressed onto one end of the protective seal on the protected workpiece, causing the adhesive surface of the adhesive tape piece to stick thereto, and the rotating roller is rotated in reverse toward the other end of the protective seal so that the protective seal is reeled in from the surface of the workpiece body. The present invention is also a detachment device that comprises a freely rotatable rotating roller that has a roll surface with adhesive force and a rotation regulating unit that regulates the rotation of this rotating roller.
[Problem] To provide an electrostatic chuck, a robot device, and an article gripping device that can be manufactured at low cost and can be used regardless of the type of material that forms an object to be carried. [Solution] An electrostatic chuck 1 according to the present invention comprises: a dielectric layer 11 that is formed of a dielectric resin and is provided at a lowest layer in advance, a bottom surface of said dielectric layer constituting a chucking surface 11A that chucks an object to be chucked; an electrode layer 12 that is formed of an electrically conductive resin, said electrode layer being layered on an upper surface of the dielectric layer 11 without the use of an adhesive; and an insulating layer 13 that insulates the electrode layer 12, said insulating layer being formed of an insulating resin and being layered on the upper surface of the dielectric layer 11 without the use of an adhesive.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
B25J 15/06 - Têtes de préhension avec moyens de retenue magnétiques ou fonctionnant par succion
H01L 21/677 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le transport, p. ex. entre différents postes de travail
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
Provided is an electrostatic chuck 101 having a single-electrode structure, said electrostatic chuck comprising a dielectric 2 which includes an electrode 23 and a dielectric layer 25 that covers the electrode 23 and that has a volume resistivity of 109-1013 Ω･cm, and a dechuck mechanism which includes a dechuck member 1 that is a conductor, wherein the dechuck member 1 is connected to earth, and is the counter electrode of the electrode 23.
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
B25J 15/06 - Têtes de préhension avec moyens de retenue magnétiques ou fonctionnant par succion
H01L 21/677 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le transport, p. ex. entre différents postes de travail
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
18.
DUST COLLECTOR AND APPARATUS FOR PRODUCING SEMICONDUCTORS
[Problem] To provide a dust collector that can be installed in a desired location without the use of a power generator or a fixing member. [Solution] A dust collector 1A comprises: a first electrode layer 12 formed of a conductor-containing material; a second electrode layer 14 formed of a conductor-containing material and disposed facing the first electrode layer 12; a first insulating layer 11 that is formed of a dielectric, is disposed between the first electrode layer 12 and an object to be fixed S, and insulates the first electrode layer 12 from the object to be fixed S; a second insulating layer 13 that is formed of a dielectric, is disposed between the first electrode layer 12 and the second electrode layer 14, and insulates the first electrode layer 12 from the second electrode layer 14; and a third insulating layer 15 that is disposed on a surface of the second electrode layer 14 opposite from a surface that faces the object to be fixed S, and that insulates the second electrode layer 14.
B03C 3/47 - Électrodes collectrices planes, p. ex. en forme d'assiettes, de disques, de grilles
B03C 3/60 - Utilisation de substances spéciales autres que des liquides
B03C 3/66 - Utilisation de techniques d'alimentation en électricité
B08B 6/00 - Nettoyage par des moyens électrostatiques
B23Q 11/00 - Accessoires montés sur les machines-outils pour maintenir les outils ou les organes de la machine dans de bonnes conditions de travail ou pour refroidir les pièces travailléesDispositifs de sécurité spécialement combinés aux machines-outils, disposés dans ces machines ou spécialement conçus pour être utilisés en relation avec ces machines
19.
ROBOT HAND, ROBOT TRANSFER DEVICE USING SAME, ROBOT TRANSFER SYSTEM, AND WORKPIECE TRANSFER METHOD
Provided are: a robot hand capable of more efficiently and more quickly performing actions, such as continuous gripping and transferring of workpieces including a mixture of articles having different sizes, shapes, and weights; a robot transfer device using the robot hand; a robot transfer system; and a workpiece transfer method. The robot hand comprises workpiece gripping parts for gripping workpieces by adhering the workpieces thereto, the robot hand being characterized in that the workpiece gripping parts each comprise at least a workpiece contact part that contacts a workpiece and a heating/cooling device that heats or cools the workpiece contact part, and two or more of the workpiece gripping parts are each arranged at different positions in the robot hand. The robot transfer device using the robot hand, the robot transfer system, and the workpiece transfer method are also provided.
The present invention provides a workpiece holding device capable of holding a workpiece with a sufficient adhesive strength and capable of separating the workpiece without applying a load to the held workpiece. Provided is a workpiece holding device that uses an adhesive holding material that is self-adhesive, the workpiece holding device including: a flexible strip-like base material that has an adhesive holding part to which the adhesive holding material is attached; a movement roller that has a roll surface; and a load receiving plate that supports, from the bottom, at least a section of the strip-like base material, which holds a workpiece with the adhesive holding part. The strip-like base material is wound around the roll surface of the movement roller with the adhesive holding part being located outside. (I) The workpiece can be held with the adhesive holding part of the strip-like base material serving as a flat adhesive holding surface. (II) The adhesive holding part of the strip-like base material is bent along the roll surface of the movement roller, thereby making it possible to peel off the workpiece. When the workpiece is held by the adhesive holding surface, deflection of the strip-like base material due to the weight of the workpiece can be prevented by the load receiving plate.
H01L 21/677 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le transport, p. ex. entre différents postes de travail
Provides a dust collector capable of being installed even in small spaces and capable of collecting dust efficiently. A dust collector 1 includes a first electrode layer 12 formed of a conductor, a second electrode layer 14 formed of a conductor, having sufficient size to cover the first electrode layer 12 in planar view, having lacking parts (through holes 14H, slits 14S) piercing therethrough in a thickness direction, having sufficient size to cover the first electrode layer 12 in planar view, and placed interfacing the first electrode layer 12, and an insulating layer (a first insulating layer 13, a second insulating layer 15) formed of an insulative material, insulating the first electrode layer 12 and the second electrode layer 14, and forming a single merged layer structure with the first electrode layer 12 and the second electrode layer 14.
B01D 53/22 - Séparation de gaz ou de vapeursRécupération de vapeurs de solvants volatils dans les gazÉpuration chimique ou biologique des gaz résiduaires, p. ex. gaz d'échappement des moteurs à combustion, fumées, vapeurs, gaz de combustion ou aérosols par diffusion
B03C 3/47 - Électrodes collectrices planes, p. ex. en forme d'assiettes, de disques, de grilles
B03C 3/64 - Utilisation de substances spéciales autres que des liquides résines synthétiques
B03C 3/70 - Isolement dans les séparateurs électriques
Provided is a workpiece attraction device that can, even when conveying a thin workpiece such as paper, cloth, or a resin film, reliably dechuck (separate) an attracted workpiece in a short period of time. This workpiece attraction device comprises: an electrostatic attracting body (1) which is capable of attracting a workpiece (W) onto a workpiece attracting surface (1a) by applying voltage to attraction electrodes (4a, 4b); and a workpiece separator (5) which is to be interposed between the attracted workpiece and the electrostatic attracting body and which assists in separating the workpiece from the workpiece attracting surface after the voltage application to the attraction electrodes is stopped. The workpiece separator has formed therein multiple openings (6) that are for causing a workpiece attracting force generated in the workpiece attracting surface to act on the workpiece side, and is also partitioned by a grid part (7) so as to have the respective openings arranged in a substantially uniform configuration in the surface of the workpiece separator. The attraction electrodes of the electrostatic attracting body and the grid part of the workpiece separator do not face opposite each other in a plan view from the workpiece side when the workpiece is attracted.
B23Q 7/04 - Agencements pour la manipulation des pièces, spécialement combinés aux machines-outils ou disposés dans ces machines ou spécialement conçus pour être utilisés en relation avec ces machines, p. ex. pour le transport, le chargement, le positionnement, le déchargement, le triage au moyen de pinces
B65H 5/00 - Transfert des articles retirés des pilesAlimentation des machines en articles
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
B23Q 3/15 - Dispositifs pour tenir les pièces magnétiquement ou électriquement
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
An electrostatic precipitator 1 has a structure in which an ionization unit 3 and a dust-collecting unit 4 are assembled to a cover 2. The dust-collecting unit 4 is configured from a high-voltage electrode 5 and dust-collecting plate 6. An ionizer 30 of the ionization unit 3 is a direct-current ionizer. The high-voltage electrode 5 is covered by an insulator 51. The dust-collecting plate 6 is formed from a substrate 60 and a carbon material 61 covering the substrate 60. Direct-current voltages of the same polarity are applied from a power source 10 to the ionizer 30 and the high-voltage electrode 5, and a ground voltage or a direct-current voltage of the reverse polarity from that of the voltages applied to the ionizer 30 and the high-voltage electrode 5 is applied to the dust-collecting plate 6.
Provided is an electric precipitator for a press mold which can collect dust generated during press machining more reliably by using electrostatic force, has good installability, and can be used safely. An electric precipitator for a press mold and a press mold using the same, the electric precipitator being used together with a press mold to collect dust generated during press machining with electrostatic force. The electric precipitator is characterized in that: the electric precipitator comprises a multi-layered sheet configured by layering a dust collection layer that holds dust by contact therewith, a first electrode layer, a second electrode layer, an insulating layer, and a tight-fixing layer for installation and fixation on a mold to be used, and a power supply device that applies a voltage between the first and second electrode layers; the insulating layer at least has a first insulating layer that insulates the dust collection layer and the first electrode layer, a second insulating layer that insulates the first electrode layer and the second electrode layer, and a third insulating layer that insulates the second electrode layer and the tight-fixing layer; the first and second electrode layers are films formed by applying a conductive polymer to a polyethylene terephthalate (PET) base and having a surface resistivity of 104to 105 Ω; and a polyimide film having a base thickness of 75 μm is used as the second insulating layer.
Provided is an electric dust collector that can more reliably collect dust and foreign matter generated during material working such as press-working by utilizing electrostatic force, that is easily installed, and that can be used safely. An electric dust collector that collects dust and foreign matter via electrostatic force, the electric dust collector being characterized by comprising: a laminated sheet provided with at least a dust collection layer that comes into contact with and holds dust and foreign matter, a first electrode layer, a second electrode layer, and an insulating layer, the laminated sheet being obtained by said layers being laminated together; and a power source device that applies a voltage between the first and second electrode layers, the insulating layer having at least a first insulating layer that insulates the dust collection layer and the first electrode layer, a second insulating layer that insulates the first electrode layer and the second electrode layer, and a third insulating layer that insulates the second electrode layer and the lower part of the second electrode layer, and the first and second electrode layers using a film having a surface resistivity of 104-108Ω.
An electrostatic precipitator is disclosed. The electrostatic precipitator includes an ionization unit configured to generate ions and a dust collection unit configured to electrically collect dust to which the ions are attached. The ionization unit is an ionizer that applies a predetermined voltage to an electrode needle to cause a corona discharge to generate the ions having the same polarity as a polarity of the applied voltage. The dust collection unit includes a high-voltage electrode disposed having a plurality of gaps for passing the dust to which the ions are attached, and a dust collection board disposed at a rear stage of the high-voltage electrode. A polarity of the voltage applied to the electrode needle of the ionization unit and the polarity of the voltage applied to the high-voltage electrode are set to the same polarity.
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
B23Q 3/15 - Dispositifs pour tenir les pièces magnétiquement ou électriquement
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
29.
ELECTROSTATIC ATTRACTOR AND ROBOT HAND COMPRISING SAME
Provided is an electrostatic attractor that has excellent durablity and can more surely attract and hold an object to be attracted by means of electrostatic force. An electrostatic attractor that has at least a layered sheet that is formed by layering, in order, a first soft high-molecular-weight organic substance, an electrode, and a second soft high-molecular-weight organic substance and a power supply device that applies voltage to the electrode, the electrostatic attractor using the electrostatic force generated by the application of voltage to the electrode to attract and hold an object to be attracted, the surface of contact being at one of the soft high-molecular-weight organic substances. The electrostatic attractor is characterized in that the first soft high-molecular-weight organic substance and/or the second soft high-molecular-weight organic substance has a tensile elasticity of at least 1 MPa but less than 100 MPa and a volume resistivity of 1×108–1013 Ω·cm and in that the electrode is a fibrous structure that has undergone a conduction treatment. A robot hand that comprises the electrostatic attractor.
[Problem] To provide a dust collector that can be installed in a tiny spot and is capable of collecting dust efficiently. [Solution] A dust collector 1 is provided with: a first electrode layer 12 which is formed of a conductor; a second electrode layer 14 that is formed of a conductor, that has gap parts (through-hole 14H, slit 14S) penetrating in the thickness direction, that has a size encompassing the first electrode layer 12 in a planar view, and that is disposed so as to face the first electrode layer 12; and insulating layers (first insulating layer 13, second insulating layer 15) that are formed of an insulating material, that insulate the first electrode layer 12 and the second electrode layer 14, and that respectively form single laminar structures together with the first electrode layer 12 and the second electrode layer 14.
13 Ω cm, the electrode layer is composed of a bipolar electrode including a positive electrode and a negative electrode, and an object to be adsorbed is adsorbed using the resin film as an adsorption surface due to an electrostatic adsorption force that is generated by applying a voltage to the electrode layer.
B65H 3/18 - Enlèvement des articles des piles en utilisant la force électrostatique
B25J 15/06 - Têtes de préhension avec moyens de retenue magnétiques ou fonctionnant par succion
B32B 15/082 - Produits stratifiés composés essentiellement de métal comprenant un métal comme seul composant ou comme composant principal d'une couche adjacente à une autre couche d'une substance spécifique de résine synthétique comprenant des résines vinyliquesProduits stratifiés composés essentiellement de métal comprenant un métal comme seul composant ou comme composant principal d'une couche adjacente à une autre couche d'une substance spécifique de résine synthétique comprenant des résines acryliques
B32B 15/20 - Produits stratifiés composés essentiellement de métal comportant de l'aluminium ou du cuivre
B32B 27/28 - Produits stratifiés composés essentiellement de résine synthétique comprenant des copolymères de résines synthétiques non complètement couverts par les sous-groupes suivants
B32B 27/30 - Produits stratifiés composés essentiellement de résine synthétique comprenant une résine vinyliqueProduits stratifiés composés essentiellement de résine synthétique comprenant une résine acrylique
B65H 3/08 - Enlèvement des articles des piles en utilisant la force pneumatique
Provided is an electrostatic precipitator which not only has a wide dust-collecting range and high dust-collecting performance but also can be made smaller and thinner. The electrostatic precipitator 1 is constructed by mounting an ionization unit 3 and a dust-collecting unit 4 onto a case 2. The dust-collecting unit 4 is configured with a high-voltage electrode 5 and a dust-collecting plate 6. An ionizer 30 of the ionization unit 3 is a direct-current ionizer, the high-voltage electrode 5 is covered with an insulator 51, and the dust-collecting plate 6 is covered with an insulator 61. Direct-current voltages of the same polarity are applied from a power source 10 to the ionizer 30 and the high-voltage electrode 5, and a direct-current voltage of a different polarity from that of the voltages applied to the ionizer 30 and the high-voltage electrode 5 is applied to the dust-collecting plate 6.
Provided is a cleaning device that can prevent reduction of an electrostatic clamping force in a vacuum state and can remove foreign matter in a vacuum processing chamber of a semiconductor manufacturing apparatus. The cleaning device includes: a foreign matter attraction unit 4 in which attraction electrodes 3 composed of a pair of electrodes are provided inside an insulator; and an attraction control unit 5 that turns on a control switch to charge the attraction electrodes and generate an electrostatic clamping force on a surface of the insulator to enable attraction of foreign matter, wherein the control switch of the attraction control unit 5 is a remotely-operable switch that is externally operable, and foreign matter in the vacuum processing chamber can be removed by an electrostatic clamping force generated in a vacuum state by turning on the control switch for the cleaning device in a vacuum closed space closed in the vacuum state.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H01L 21/02 - Fabrication ou traitement des dispositifs à semi-conducteurs ou de leurs parties constitutives
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
B08B 9/08 - Nettoyage de récipients, p. ex. de réservoirs
Provided is an air cleaner that can take a large amount of air in a large space into a dust collector with good efficiency while being lightweight and having easy maintenance. An air cleaner is provided with a drone and a dust collector. The drone has a main body unit and propellers attached to the tips of frames. The dust collector has electric discharge electrodes and a dust collection electrode. The electric discharge electrodes are connected to a booster unit within a central chamber. The booster unit is electrically connected to a control unit in the main body unit. Electric discharge is formed between the dust collection electrode and the electric discharge electrodes, and dust particles in the air are charged and collected by the dust collection electrode.
Provided is an attachment/detachment device which, while using an electrostatic chuck method, has excellent responsiveness to attachment/detachment of a workpiece even when the workpiece is thin. The attachment/detachment device, which can attach and detach the workpiece, is characterized by comprising: a machinable ceramic layer; an adhesive activation layer provided on the machinable ceramic layer; an electrode layer provided on the adhesive activation layer; and a dielectric layer provided on the electrode layer, wherein the electrode layer is covered with the adhesive activation layer and the dielectric layer, and the dielectric layer has a volume resistivity of 109Ω·cm to 1012 Ω·cm.
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
H01L 21/52 - Montage des corps semi-conducteurs dans les conteneurs
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
Provided is an attachment pad that can be attached to and held on an attachment target substance such as human skin by an electrical attachment force. An attachment pad, which is used in a state of being attached to an attachment target substance, includes: a laminate sheet in which a first resin film having a thickness of 20 to 200 μm, an electrode layer having a thickness of 1 to 20 μm, and a second resin film having a thickness of 20 to 200 μm are sequentially laminated; and a power supply device for applying a voltage to the electrode layer, wherein at least the second resin film has a tensile elastic modulus of 1 MPa or more and less than 100 MPa and a volume resistivity of 1×1010 to 1×1013 Ω·cm, and the attachment pad is attached to the attachment target substance onto one surface of the second resin film as an attachment surface by an electrical attachment force generated by voltage application to the electrode layer.
Provided are a headgear stand and a headgear cleaner that is small-sized and has low power consumption, and that is capable of sterilizing and deodorizing headgear made of any material. A headgear cleaner 1-1 is provided with an ozone generator 2 and a voltage supply part 5. The ozone generator 2 is constituted from an ozone generator body 3-1 and a connecting part 4. The ozone generator body 3-1 forms a shape in which twelve leaf parts extend radially. The voltage supply part 5 supplies a voltage necessary for generating ozone to the ozone generator 2.
A61L 2/20 - Procédés ou appareils de désinfection ou de stérilisation de matériaux ou d'objets autres que les denrées alimentaires ou les lentilles de contactAccessoires à cet effet utilisant des substances chimiques des substances gazeuses, p. ex. des vapeurs
A42C 3/04 - Champignons pour arrangement des chapeaux de dames
A61L 9/015 - Désinfection, stérilisation ou désodorisation de l'air utilisant des substances gazeuses ou à l'état de vapeur, p. ex. de l'ozone
An electrostatic workpiece-holding method includes an initialization step, a static elimination step, a workpiece setting step, a workpiece attracting step, and a workpiece release step. The initialization step is a step of applying a positive voltage to electrode of the electrostatic attracting part while applying a negative voltage to electrode. The static elimination step is a step of removing the static charge on the surface of the electrostatic attracting part. The workpiece setting step is a step of placing the workpiece in contact with the surface of the electrostatic attracting part. The workpiece attracting step is a step of interrupting the application of the positive voltage to electrode of the electrostatic attracting part and the application of the negative voltage to electrode. The workpiece release step is a step of applying the positive voltage to electrode of the electrostatic attracting part while applying the negative voltage to electrode.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
H01L 21/677 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le transport, p. ex. entre différents postes de travail
H01T 23/00 - Appareils pour la production d'ions destinés à être introduits dans des gaz à l'état libre, p. ex. dans l'atmosphère
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
Provided is a cleaning device which can prevent reduction of an electrostatic attraction force in vacuum and can remove foreign bodies in a vacuum processing chamber of a semiconductor manufacturing apparatus. This cleaning device includes: a foreign body attracting unit 4 that has an attracting electrode 3 comprising a pair of electrodes provided inside an insulator; and an attraction control unit 5 that turns on a control switch to charge the attracting electrode, and generates an electrostatic attraction force on the surface of the insulator to enable attraction of foreign bodies. The control switch of the attraction control unit 5 is an externally manipulable remotely controlled switch, and by turning on the control switch for the cleaning device inside a vacuum closed space which is in vacuum and is closed, the cleaning device is capable of removing foreign bodies inside the vacuum processing chamber by the electrostatic attraction force generated in vacuum.
H01L 21/02 - Fabrication ou traitement des dispositifs à semi-conducteurs ou de leurs parties constitutives
H01L 21/677 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le transport, p. ex. entre différents postes de travail
Provided is an electrostatic adsorption body capable of exhibiting a higher adsorption force, especially with respect to a highly insulative sheet-like object to be adsorbed such as a cloth, while using an electrical adsorption force. This electrostatic adsorption body, which uses electrostatic force to adsorb an object to be adsorbed, is provided with: a laminate sheet in which a 20-200 μm-thick insulator, a 1-20 μm-thick electrode layer, and a 20-200 μm-thick resin film are sequentially laminated; and a power supply device that applies a voltage to the electrode layer, wherein the tensile modulus of at least the resin film is equal to or greater than 1MPa and smaller than 100 MPa, the volume resistivity of the resin film is 1x1010-1013 Ωcm, the electrode layer comprises a bipolar electrode having a positive electrode and a negative electrode, and an object to be adsorbed is adsorbed onto the resin film, serving as an adsorption surface, by means of the electrostatic adsorption force generated by applying a voltage to the electrode layer.
Provided is an attachment pad that can be attached to and held on a target, such as the skin of a human body, by means of electrical attachment force. This attachment pad is used while being attached to a target, and is characterized: by being provided with a layered sheet in which a first resin film having a thickness of 20-200 µm, an electrode layer having a thickness of 1-20 µm, and a second resin film having a thickness of 20-200 µm are sequentially laminated, and a power supply device for applying a voltage to the electrode layer; and in that at least the second resin film has a tensile modulus of 1 MPa (inclusive) to 100 MPa (exclusive) and a volume resistivity of 1 × 1010to 1013 Ώ·cm, and the pad can be attached to the target through the second resin film serving as an attachment surface due to electrical attachment force being generated as a result of the electrode layer receiving a voltage.
Provided is an air cleaner that can take a large amount of air in a large space into a dust collector with good efficiency while being lightweight and having easy maintenance. An air cleaner 1-1 is provided with a drone 2 and a dust collector 4. The drone 2 has a main body unit 20 and propellers 21 – 24 attached to the tips of frames 25 – 28. The dust collector 4 has electric discharge electrodes 41 – 44 and a dust collection electrode 45. The electric discharge electrodes 41 – 44 are connected to a step-up unit 33 within a central chamber 40. The step-up unit 33 is electrically connected to a control unit 30 in the main body unit 20. Electric discharge is formed between the dust collection electrode 45 and the electric discharge electrodes 41 – 44, and dust particles in the air are charged and collected by the dust collection electrode 45.
Provided are a headgear stand and a headgear cleaner that is small-sized and has low power consumption, and that is capable of sterilizing and deodorizing headgear made of any material. A headgear cleaner 1-1 is provided with an ozone generator 2 and a voltage supply part 5. The ozone generator 2 is constituted from an ozone generator body 3-1 and a connecting part 4. The ozone generator body 3-1 forms a shape in which twelve leaf parts extend radially. The voltage supply part 5 supplies a voltage necessary for generating ozone to the ozone generator 2.
A61L 2/20 - Procédés ou appareils de désinfection ou de stérilisation de matériaux ou d'objets autres que les denrées alimentaires ou les lentilles de contactAccessoires à cet effet utilisant des substances chimiques des substances gazeuses, p. ex. des vapeurs
An air cleaner includes a flying body having a main body unit in which a control unit controlling flying movement is stored, and a propeller disposed around the main body as propulsion for floating the flying body; and a dust collector connected to the flying body, and including an intake opening and an exhaust opening. The propeller is disposed inside or under the dust collector, the dust collector electrostatically attracts dust in air flowing from the intake opening, and the flying body is a drone structured so that the propeller takes in air from an upper side and exhausts the air to a lower side.
B03C 3/15 - Installations alimentées en électricité de l'extérieur du type par voie sèche caractérisées par l'utilisation additionnelle d'effets mécaniques, p. ex. de la pesanteur de forces centrifuges
F24F 3/16 - Systèmes de conditionnement d'air dans lesquels l'air conditionné primaire est fourni par une ou plusieurs stations centrales aux blocs de distribution situés dans les pièces ou enceintes, blocs dans lesquels il peut subir un traitement secondaireAppareillage spécialement conçu pour de tels systèmes caractérisés par le traitement de l'air autrement que par chauffage et refroidissement par purification, p. ex. par filtrageSystèmes de conditionnement d'air dans lesquels l'air conditionné primaire est fourni par une ou plusieurs stations centrales aux blocs de distribution situés dans les pièces ou enceintes, blocs dans lesquels il peut subir un traitement secondaireAppareillage spécialement conçu pour de tels systèmes caractérisés par le traitement de l'air autrement que par chauffage et refroidissement par stérilisationSystèmes de conditionnement d'air dans lesquels l'air conditionné primaire est fourni par une ou plusieurs stations centrales aux blocs de distribution situés dans les pièces ou enceintes, blocs dans lesquels il peut subir un traitement secondaireAppareillage spécialement conçu pour de tels systèmes caractérisés par le traitement de l'air autrement que par chauffage et refroidissement par ozonisation
45.
ELECTROSTATIC WORKPIECE-HOLDING METHOD AND ELECTROSTATIC WORKPIECE-HOLDING SYSTEM
Provided are an electrostatic workpiece-holding method and an electrostatic workpiece-holding system such that it is possible to hold a workpiece in a state wherein the application of a voltage to the electrodes of an electrostatic pick-up unit has been interrupted. This electrostatic workpiece-holding method comprises an initialization step S1, a static removal step S2, a workpiece setting step S3, a workpiece pick-up step S4, and a workpiece release step S5. The initialization step S1 is a step of applying a positive voltage to electrode 11 of the electrostatic pick-up unit 1 while applying a negative voltage to electrode 12, and the static removal step S2 is a step of removing the static charge on the surface 1a of the electrostatic pick-up unit 1. The workpiece setting step S3 is a step of placing the workpiece W in contact with the surface 1a of the electrostatic pick-up unit 1, and the workpiece pick-up step S4 is a step of interrupting the application of the positive voltage to electrode 11 of the electrostatic pick-up unit 1 and the application of the negative voltage to electrode 12. In addition, the workpiece release step S5 is a step of applying the positive voltage to electrode 11 of the electrostatic pick-up unit 1 while applying the negative voltage to electrode 12.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
Provided are a dust collection filter and an air cleaner which have simple structures, and further, in which an aromatic agent for use in an aroma section or a dust collection filter can be replaced easily. A dust collection filter 1 is provided with planar bodies 2-1, 2-2, a frame body 3, a power source 4, and an aroma section 5-1. The planar bodies 2-1, 2-2 are members for electrostatically adsorbing dust in the air. The frame body 3 is a member for holding the planar bodies 2-1, 2-2 and for forming a space S. The aroma section 5-1 is provided in the frame body 3. Specifically, an aromatic agent M is mixed in the frame body 3.
B03C 3/02 - Installations alimentées en électricité de l'extérieur
A61L 9/12 - Appareils, p. ex. supports, à cet effet
B01D 46/10 - Séparateurs de particules utilisant des plaques, des feuilles ou des tampons filtrants à surface plane, p. ex. appareils de précipitation de poussières
A sterilization case can be reduced, and it is possible to reliably sterilize not only the surface of a mobile communication device but hidden portions thereof as well. A sterilization case includes a case main body and a cover body. The case main body includes a voltage supplying part and a loading part having an electrode sheet. The voltage supplying part includes a boosting circuit, a direct-current conversion circuit, a switch circuit, and a sterilization meter. The boosting circuit supplies the voltage necessary to generate ozone to the electrode sheet. The direct-current conversion circuit performs conversion to a power source voltage of a smartphone as the mobile communication device and outputs to a male connector. The male connector can be connected to a female connector of the smartphone. The cover body is attached to the case main body so as to be able to open and close.
A61L 2/20 - Procédés ou appareils de désinfection ou de stérilisation de matériaux ou d'objets autres que les denrées alimentaires ou les lentilles de contactAccessoires à cet effet utilisant des substances chimiques des substances gazeuses, p. ex. des vapeurs
A sterilizing sheet is excellent in terms of saving space when a sterilizing operation is being performed, and sterilizing objects of various sizes. This sterilizing sheet is provided with a flexible sheet body, a sheet accommodating body and a handle. The sheet body is formed from a dielectric and a pair of electrodes accommodated inside the dielectric. The sheet accommodating body is a cylindrical body in which the sheet body is accommodated to be capable of being pulled out and rewound, and is provided with a case, a rotating body and a rewinding mechanism. The rewinding mechanism is a mechanism for automatically rewinding the sheet body, when pulled out from the sheet accommodating body, back into the sheet accommodating body. The handle is attached to a distal end portion of the sheet body, and includes, inside the handle, a battery, a switch mechanism, a booster circuit and a monitoring circuit.
A61L 2/20 - Procédés ou appareils de désinfection ou de stérilisation de matériaux ou d'objets autres que les denrées alimentaires ou les lentilles de contactAccessoires à cet effet utilisant des substances chimiques des substances gazeuses, p. ex. des vapeurs
C01B 13/11 - Préparation de l'ozone par décharge électrique
A61L 2/10 - Procédés ou appareils de désinfection ou de stérilisation de matériaux ou d'objets autres que les denrées alimentaires ou les lentilles de contactAccessoires à cet effet utilisant des phénomènes physiques des radiations des ultraviolets
A01N 59/00 - Biocides, produits repoussant ou attirant les animaux nuisibles, ou régulateurs de croissance des végétaux, contenant des éléments ou des composés inorganiques
Provided is a shoe cleaner which can be used by a user without exposing the user to high concentrations of ozone, and moreover is compact, is easy to use, and has low power consumption. The shoe cleaner 1 is equipped with a case body (3) and a sheet-like ozone generating body (2). The ozone generating body (2) is formed from a flexible substrate (4) and a flexible polymer resin electrode sheet (5). The electrode sheet (5) is formed from a dielectric (50) and electrodes (51), (52) covered by the dielectric (50). The case body (3) houses a boost circuit (6) for boosting the voltage of a battery (60) and supplying the voltage to the electrode sheet (5).
A61L 9/015 - Désinfection, stérilisation ou désodorisation de l'air utilisant des substances gazeuses ou à l'état de vapeur, p. ex. de l'ozone
A47L 23/02 - Machines à nettoyer les chaussures, avec ou sans systèmes d'application du cirage
A47L 23/06 - Instruments à main pour le nettoyage des chaussures, avec ou sans systèmes d'application du cirage à commande électrique
A61L 2/20 - Procédés ou appareils de désinfection ou de stérilisation de matériaux ou d'objets autres que les denrées alimentaires ou les lentilles de contactAccessoires à cet effet utilisant des substances chimiques des substances gazeuses, p. ex. des vapeurs
A dust collection device can be fitted to windows in a room, thus not only cleaning air while ventilating air within a space targeted for cleaning but also cleaning air outside of the space. A dust collection device is constructed by laminating first insulation type electrodes and second insulation type electrodes alternately via spacers. The insulation type electrodes have a configuration in which both sides of first electrodes (second electrodes) are coated by first insulating layers (second insulating layers). Furthermore, a power supply is connected to the electrodes, and the electrodes are grounded. In addition, a plurality of first through holes (second through holes) is provided in rows in the insulation type electrodes. Furthermore, the positions of the through holes in the insulation type electrodes are arranged in a plane view so as to be a prescribed distance from the positions of the through holes in the insulation type electrodes.
B03C 3/47 - Électrodes collectrices planes, p. ex. en forme d'assiettes, de disques, de grilles
B03C 3/09 - Installations alimentées en électricité de l'extérieur du type par voie sèche caractérisées par la présence d'électrodes planes fixes, les surfaces planes étant perpendiculaires au courant de gaz
B03C 3/38 - Postes de chargement ou d'ionisation des particules, p. ex. utilisant des décharges électriques, des radiations radioactives ou des flammes
Provided is an air cleaner that can take air in a wider range into a dust collector and can have attached a small dust collector without dropout of dust from the dust collector. An air cleaner 1-1 is provided with a flying body 2 and dust collectors 4-1 - 4-4. The flying body 2 is a drone and has a main body unit 20 and propellers 21 - 24 attached to the tips of frames 25 - 28. Each of the dust collectors 4-1 (4-2 - 4-4) is constituted of a cylindrical adsorption unit 40A - 40C assembled to the propeller 21 (22 - 24), and a power supply unit 31 and a booster unit 33 within the main body unit 20. Each adsorption unit 40A (40B, 40C) is formed from a dielectric 41 and an electrode 42 within the dielectric 41. The electrodes 42, 42, 42 of the adsorption units 40A, 40B, 40C are connected to the booster unit 33 via respective wiring 33a, 33b, 33c, and the power supply unit 31 is connected to the booster unit 33.
The objective of the present invention is to provide a sterilizing sheet which is excellent in terms of saving space when a sterilizing operation is being performed, in terms of being capable of sterilizing objects of various sizes, and in terms of being capable of being stored when not in use, and which can moreover sterilize objects thoroughly. This sterilizing sheet 1 is provided with a flexible sheet body 2, a sheet accommodating body 3 and a handle 4. The sheet body 2 is formed from a dielectric 20 and a pair of electrodes 21 and 22 accommodated inside the dielectric 20. The sheet accommodating body 3 is a cylindrical body in which the sheet body 2 is accommodated in such a way as to be capable of being pulled out and rewound, and is provided with a case 30, a rotating body 31 and a rewinding mechanism 5. The rewinding mechanism 5 is a mechanism for automatically rewinding the sheet body 2, when pulled out from the sheet accommodating body 3, back into the sheet accommodating body 3. The handle 4 is attached to a distal end portion of the sheet body 2, and includes, inside the handle 4, a battery 41, a switch mechanism 42, a booster circuit 43 and a monitoring circuit 44.
A61L 2/20 - Procédés ou appareils de désinfection ou de stérilisation de matériaux ou d'objets autres que les denrées alimentaires ou les lentilles de contactAccessoires à cet effet utilisant des substances chimiques des substances gazeuses, p. ex. des vapeurs
C01B 13/11 - Préparation de l'ozone par décharge électrique
G06F 3/02 - Dispositions d'entrée utilisant des interrupteurs actionnés manuellement, p. ex. des claviers ou des cadrans
Provided is a sterilization case whereby the size of the case itself can be reduced, and it is possible to reliably sterilize not only the surface of a mobile communication device but hidden portions thereof as well, the amount of space used for sterilization of the mobile communication device can be reduced, and charging and sterilization can be performed simultaneously. A sterilization case 1-1 is provided with a case main body 2 and a cover body 3. The case main body 2 is provided with a voltage supplying part 6 and a loading part 4 having an electrode sheet 5. The voltage supplying part 6 is provided with a boosting circuit 61, a direct-current conversion circuit 62, a switch circuit 63, and a sterilization meter 64. The boosting circuit 61 supplies the voltage necessary to generate ozone to the electrode sheet 5. The direct-current conversion circuit 62 performs conversion to a power source voltage of a smartphone 100 as the mobile communication device and outputs to a male connector 7. The male connector 7 can be connected to a female connector 101 of the smartphone 100. The cover body 3 is attached to the case main body 2 so as to be able to open and close.
A61L 2/20 - Procédés ou appareils de désinfection ou de stérilisation de matériaux ou d'objets autres que les denrées alimentaires ou les lentilles de contactAccessoires à cet effet utilisant des substances chimiques des substances gazeuses, p. ex. des vapeurs
A45C 11/00 - Récipients pour articles non prévus dans les groupes
C01B 13/11 - Préparation de l'ozone par décharge électrique
Provided are a workpiece holding device and a laser cutting processing method by which it is possible to hold/release various types of thin workpieces reliably and gently without causing damage or deformation thereto even in various environments, and which enable processing costs to be reduced and high precision processing to be performed. A workpiece holding device 1-1 is provided with an adhesive plate 2 and a vacuum chuck 3-1. The adhesive plate 2 is a plate that adheres a Si wafer W to the surface thereof, and comprises an adhesive sheet 21-1 and a base sheet 22-1. The adhesive sheet 21-1 is made of silicone rubber that exhibits flexibility in the thickness direction, and has a thickness t1 of 1.0 mm. The base sheet 22-1 is a PET sheet for preventing deformation of the adhesive sheet 21-1, and has a thickness t2 of 0.1 mm. The vacuum chuck 3-1 is a device for holding and fixing the adhesive plate 2 to a surface 3a in a detachable manner, and has a chuck body 30 and a vacuum adsorption mechanism 31.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
B23K 26/10 - Dispositifs comportant un mouvement relatif entre le faisceau laser et la pièce avec un support fixe
B23K 26/38 - Enlèvement de matière par perçage ou découpage
H01L 21/301 - Traitement des corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour subdiviser un corps semi-conducteur en parties distinctes, p. ex. cloisonnement en zones séparées
55.
Particle collector system and dust collection method
A particle collector system includes a dust collection unit, a power source unit, and a capacitance measurement unit. The dust collection unit includes first and second electrodes, a second electrode, and a dielectric body covering the electrodes. The power source unit supplies power source voltage to the first and second electrodes. The capacitance measurement unit measures the capacitance between the first and second electrodes. With this particle collector system and dust collection method using it, particles can be almost completely removed without periodic performance of a particle removal operation.
Provided is a dust collection device that can be fitted to windows in a room and thus not only clean while ventilating air within a space targeted for cleaning but also clean air outside of the space. A dust collection device (1) is constructed by laminating first insulation type electrodes (2) and second insulation type electrodes (3) alternately via spacers (4). The insulation type electrodes (2) (insulation type electrodes (3)) have a configuration in which both sides of first electrodes (21) (second electrodes (31)) are coated by first insulating layers (22) (second insulating layers (32)). Furthermore, a direct current (or alternating current or pulse type) power supply (23) is connected to the electrodes (21), and the electrodes (31) are grounded. In addition, a plurality of first through holes (24) (second through holes (34)) is provided in rows in the insulation type electrodes (2) (insulation type electrodes (3)). Furthermore, the positions of the through holes (34) in the insulation type electrodes (3) are arranged in a plane view so as to be a prescribed distance from the positions of the through holes (24) in the insulation type electrodes (2).
A large-sized plasma generator is suited to various surface shapes and has a longer service life and improved energy conservation. An example of the plasma generator (1-1) has a dielectric layer (3), first and second electrodes (4, 5) that are formed within the dielectric layer, an alternating-current power supply (6), and a first metal layer (7). The dielectric layer (3) is composed of polymer resin layers (31, 32) that are formed of a polyimide resin. The electrodes are arranged side by side within the dielectric layer. The first metal layer is formed of a metal having a sterilization effect, and has a plurality of pores (71) in the surface. The first metal layer spans between supporting parts (33, 34) of the polymer resin layer (32), and faces the whole of the electrodes. A gap (S) is formed between the first metal layer and the polymer resin layer.
An electrostatic chuck that enables high speed and high quality processing of a plate to be processed, and in which the weight of a base member is reduced and the strength thereof increased so as to maintain the flatness of the base member and prevent the plate to be processed from falling; a glass substrate processing method; and said glass substrate. An electrostatic chuck (1) provided with a base member (2) and an electrostatic suction layer (3). The base member (2) is formed by a lower-surface plate (20), side-surface plates (21-24), and an upper-surface plate (25), and has a part (4) for a plurality of individual structures configured therein. The part (4) for a plurality of individual structures has a honeycomb structure that is caused by regular hexagonal tubes (40) and enables the weight of the base member (2) to be reduced and the strength thereof increased.
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
B65G 49/06 - Systèmes transporteurs caractérisés par leur utilisation à des fins particulières, non prévus ailleurs pour des matériaux ou objets fragiles ou dommageables pour des feuilles fragiles, p. ex. en verre
b) and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece (w), the capacitance measuring device (5) being configured to measure capacitance of the electrode pair; and a comparator circuit (6) configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece (w) in a planar direction of the support plate (1). Further, the method of detecting lateral displacement of a workpiece (w) includes comparing the capacitance input to the comparator circuit (6) with a predetermined reference value, to thereby detect the lateral displacement of the workpiece (w).
G01B 7/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
G01B 7/02 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer la longueur, la largeur ou l'épaisseur
G01D 5/24 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier la capacité
H01L 21/673 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants utilisant des supports spécialement adaptés
G01D 5/241 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier la capacité par mouvement relatif d'électrodes de condensateur
60.
CAPACITIVE SENSOR, DETECTION SYSTEM, AND ROBOT SYSTEM
[Problem] To provide a capacitive sensor, detection system, and robot system that have simple structures and can be made to be compact. [Solution] A detection system (1-1) is provided with a capacitive sensor (2), a rotation angle calculation unit (3), and a positional displacement amount calculation unit (4). The capacitive sensor (2) has a substrate (20), a guard electrode (21), an adsorption electrode (22), four first electrodes (23), and two pairs of second electrodes (24, 25). The rotation angle calculation unit (3) calculates the angle (θ) of rotation from the initial position of a workpiece (W) on the basis of the sum of the capacitances of the portions where the first electrodes (23) and the workpiece (W) overlap. The positional displacement amount calculation unit (4) determines the positional displacement amounts (δx, δy) from the initial position of the workpiece (W) in the x-axis direction and y-axis direction on the basis of the change in the capacitances of the portions where the second electrode pairs (24, 25) and the workpiece (W) overlap and the rotation angle (θ) from the rotation angle calculation unit (3).
G01B 7/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour tester l'alignement des axes
61.
PARTICLE COLLECTOR SYSTEM AND DUST COLLECTION METHOD
Provided are a particle collector system and a dust collection method whereby particles can be almost completely removed without periodic performance of a particle removal operation. A particle collector system (1-1) is provided with a dust collection unit (2), a power source unit (3), and a capacitance measurement unit (4). The dust collection unit (2) comprises first and second electrodes (21, 22), a second electrode (22), and a dielectric body (20) covering the electrodes. The power source unit (3) is a component for supplying power source voltage to the first and second electrodes (21, 22). The capacitance measurement unit (4), which is a component for measuring the capacitance of the dust collection unit (2), measures the capacitance between the first and second electrodes (21, 22).
[Problem] To provide a chuck apparatus, which is capable of chucking a workpiece with an optimum holding force, irrespective of the weight and shape of the workpiece, and which is capable of dechucking the workpiece without damaging the workpiece. [solution] This chuck apparatus is provided with a base (1) and a chuck layer (2). The base (1) is configured from four concentrically disposed movable members (11-14), and the base can be vertically driven by means of four actuators (31-34). The chuck layer (2) is configured from an electrostatic attraction layer (21), and adhesive pads (22, 24). The electrostatic attraction layer (21) is adhered to the movable member (11), and the ring-like adhesive pads (22, 24) are adhered to the movable members (12, 14), respectively. A non-adhesive pad (23) is adhered to the movable member (13). The electrostatic attraction layer (21) is configured from an attraction electrode (25) and a dielectric body (26), and is capable of applying a voltage of a power supply (27) to the attraction electrode (25).
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
B23Q 3/15 - Dispositifs pour tenir les pièces magnétiquement ou électriquement
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
Provided is a large-sized plasma generator which is suited to various surface shapes and has a longer service life and improved energy conservation. This plasma generator (1-1) is provided with a dielectric layer (3), first and second electrodes (4, 5) that are formed within the dielectric layer (3), an alternating-current power supply (6), and a first metal layer (7). The dielectric layer (3) is composed of polymer resin layers (31, 32) that are formed of a polyimide resin. The electrodes (4, 5) are arranged side by side within the dielectric layer (3). The first metal layer (7) is formed of a metal having a sterilization effect, and has a plurality of pores (71) in the surface. The first metal layer (7) spans between supporting parts (33, 34) of the polymer resin layer (32), and faces the whole of the electrodes (4, 5). A gap (S) is formed between the first metal layer (7) and the polymer resin layer (32).
[Problem] To provide: an electrostatic chuck that enables high speed and high quality processing of a plate to be processed, and in which the weight of a base member is reduced and the strength thereof increased so as to maintain the flatness of the base member and prevent the plate to be processed from falling; a glass substrate processing method; and said glass substrate. [Solution] An electrostatic chuck (1) provided with a base member (2) and an electrostatic suction layer (3). The base member (2) is formed by a lower-surface plate (20), side-surface plates (21-24), and an upper-surface plate (25), and has a part (4) for a plurality of individual structures configured therein. The part (4) for a plurality of individual structures has a honeycomb structure that is caused by regular hexagonal tubes (40) and enables the weight of the base member (2) to be reduced and the strength thereof increased. The electrostatic suction layer (3) is configured from a dielectric body (31) and suction electrodes (32), and adhered to the upper surface of the base member (2) by an adhesive member (30). The dielectric body (31) internally contains the suction electrodes (32), and has a surface that acts as the suction surface for a glass substrate (W).
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
C03C 17/00 - Traitement de surface du verre, p. ex. du verre dévitrifié, autre que sous forme de fibres ou de filaments, par revêtement
[Problem] To provide an electrostatic chuck and a power supply system, wherein high-voltage drive is performed without generating electrical discharge even in a vacuum atmosphere, and a structure of the power supply system for the electrostatic chuck is simplified. [Solution] This power supply system is provided with: an electrostatic chuck (2) having a booster circuit (3); and an electric contact mechanism (4). Merely terminals (31a, 32a) of the booster circuit (3) are exposed to the outside. The terminals (31b, 32b) are connected to an attraction electrode (23). The electric contact mechanism (4) is configured from rails (41, 42), and flexible contacts (43, 44) in contact with the rails. The rails (41, 42) are connected to an external power supply (40), and the flexible contacts (43, 44) are provided on conductive plates (45, 46) of the electrostatic chuck (2). The conductive plates (45, 46) are connected to the terminals (31a, 32a) of the booster circuit (3).
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
B23Q 3/15 - Dispositifs pour tenir les pièces magnétiquement ou électriquement
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
66.
WORKPIECE HOLDER AND METHOD USING SAME FOR DETECTING LATERAL DISPLACEMENT OF WORKPIECE
The present invention provides a workpiece holder enabling the detection of lateral displacement in the planar direction of a workpiece (W), and a method using said workpiece holder for detecting lateral displacement of a workpiece (W). A workpiece holder for holding a workpiece (W), a pressure-sensitive adhesive pad (2) being provided on a support plate, wherein the workpiece holder is provided with an electrostatic capacitance measuring device (5) and a comparator circuit (6). The electrostatic capacitance measuring device (5) has a pair of electrodes comprising first and second electrodes (3a, 3b) provided in at least some positions corresponding to peripheral parts of the workpiece (W) and measures the electrostatic capacitance of the pair of electrodes. The comparator circuit (6) compares the measured electrostatic capacitance with a prescribed reference value to detect lateral displacement of the workpiece (W) with respect to the planar direction of a support plate (1). A method for detecting lateral displacement of a workpiece (W) in which the electrostatic capacitance inputted into the comparative circuit (6) is compared with a predetermine reference value to detect the lateral displacement of the workpiece (W).
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
Provided is a detachable generator device which can change the installation location with ease and which can effectively use a solar cell to generate electric power. The detachable generator device includes: a film-like solar cell; and attaching/detaching means for allowing the film-like solar cell to be attached to and detached from an attachment object at an installation location. The attaching/detaching means includes an adhesive film having an attaching/detaching surface which develops Van der Waals force to enable repeated affixation, or an electrostatic chuck for forming an attaching/detaching surface by turning on/off a voltage source connected to an attraction electrode sandwiched between two insulating layers to freely develop electrostatic attraction on a surface of at least one of the insulating layers.
Provided are a work heating device which is capable of heating a work piece with high soaking properties as well as fine temperature control and which remains highly reliable over a long-term use by preventing the deformation or the like of a chuck member, and a work treating device that uses the work heating device. The work heating device is a work heating device in which the chuck member including a work attraction electrode for work attraction and a heater member including a heating element for work heating are layered, and which is capable of heating with the heater member the work piece stuck by attraction on the chuck member side, in which the heater member includes a chuck attraction electrode for causing the chuck member to stick by attraction, between a surface of the heater member that is opposed to the chuck member and the heating element, so that the chuck member and the heater member are layered detachably. The work treating device is obtained by putting the work heating device on a base platform.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01L 21/687 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension en utilisant des moyens mécaniques, p. ex. mandrins, pièces de serrage, pinces
69.
ELECTROSTATIC CHUCK DEVICE AND METHOD FOR PRODUCING SAME
Provided is an electrostatic chuck device that has superior dechucking characteristics and is able to resolve problems stemming from residual charge during workpiece separation from the electrostatic chuck and furthermore, problems stemming from turning the power source on or off. The electrostatic chuck device is provided with: an electrostatic chuck; a DC power source for the electrostatic chuck; and a variable capacitance means connected in series between the electrostatic chuck and the DC power source. The electrostatic chuck device has superior dechucking characteristics of, in the state of imposing voltage on the electrostatic chuck, by means of changing the capacitance of the variable capacitance means, changing the amount of charge of the electrostatic charge between a high value when chucking the workpiece and a low value when dechucking the workpiece.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
Provided is a workpiece holding device, whereby: the issue of attachment precision of adhesive pins is eliminated; the number of adhesive pins is reduced as much as possible, and a workpiece is held and suspended; and even a workpiece having surface unevenness or an easily bent workpiece can be securely adhered to and held suspended. The workpiece holding device (X) can suspend and hold the workpiece (W), and comprises an adhesive pin plate (1) that moves up and down relative to the workpiece (W) and has a plurality of adhesive pins (2) provided therein. The workpiece holding device (X) is characterized by: the adhesive pins (2) having an adhesive pad (5) that adheres to and holds the workpiece (W), and a pin main body (3); the adhesive pad (5) being attached to the tip of the pin main body (3) via a rubber member (4); and the rubber hardness of the rubber member (4) being less than the rubber hardness of the adhesive pad (5).
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
G02F 1/13 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur des cristaux liquides, p. ex. cellules d'affichage individuelles à cristaux liquides
G02F 1/1333 - Dispositions relatives à la structure
71.
ELECTROSTATIC ADSORPTION BODY AND ELECTROSTATIC ADSORPTION DEVICE USING SAME
Provided are an electrostatic adsorption body, which can reliably attach display materials such as posters, advertisements, and printing paper without using pins or adhesive tape, and an electrostatic adsorption device using the same. The electrostatic adsorption body has an electrode layer provided with a first electrode and a second electrode that are electrically separated from each other, also has a dielectric layer on the electrode layer, and can be used by adsorbing the display material with the dielectric layer surface as the adsorption surface when a voltage is applied to the first electrode and the second electrode. In the electrostatic adsorption body, the electrodes in the electrode layer each have a plurality of horizontal branch electrode parts extending in the horizontal direction and vertical branch electrode parts extending in the vertical direction of the adsorption surface. The horizontal branch electrode parts are combined so as to face each other for the first and second electrodes, and the vertical branch electrode parts are similarly combined. In addition, the electrostatic adsorption device is formed such that an electric power supply device is provided for this electrostatic adsorption body.
Provided is a detachable generator device, the installation location of which can be easily changed, and which can make effective use of a solar cell to generate electricity. The generator device comprises a film-like solar cell, and an attaching/detaching means by which the film-like solar cell can be attached to and detached from a mounting object at the installation location. The detachable generator device is characterized in that the attaching/detaching means comprises either an adhesive film with a detachable surface that can repeatedly be made adhesive by generating Van der Waals forces, or an electrostatic chuck that creates a detachable surface by turning on/off a power supply connected to an adsorption electrode interposed between two insulating layers so that an electrostatic adsorption force can be generated in the surface of at least one of the insulating layers.
Provided is a work heating device that can heat a work-piece by high uniform heating, is capable of precise temperature control, protects against changing of chuck members and the like, and can be used with good reliability over a long period of time. Also provided is a work treatment device using the same. In the work heating device, a chuck member provided with work holding electrodes for holding the work-piece and a heater member provided with heating units for heating the work-piece are laminated, and the work-piece held on the chuck member side can be heated by the heater member. In the work heating device, the heater member is provided with a chuck holding electrode that holds the chuck member between a surface facing the chuck member and the heating units, and the chuck member and heater member are laminated attachably and detachably. In the work treatment device, this work heating device is mounted on a base.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
74.
ELECTROSTATIC CHUCK APPARATUS AND METHOD FOR MANUFACTURING SAME
The invention provides an electrostatic chuck apparatus that produces exceptional holding force on a tabular workpiece, allows the tabular workpiece to be easily detached after processing, and can minimize soiling of the tabular workpiece. The invention also provides a method for manufacturing this apparatus. The electrostatic chuck apparatus comprises: retaining members made of a resin material, the retaining members projecting up from a base and being able to hold and retain a tabular workpiece; and electrostatic chucks provided with internal holding electrodes, arranged at a lower height than the retaining members, and disposed in at least a portion of the space formed between the tabular workpiece and the base, the retaining members being disposed therebetween, and the electrostatic chucks exerting electrostatic attraction on the tabular workpiece without coming into contact with the workpiece. The method for manufacturing an electrostatic chuck apparatus comprises: providing through-holes that extend between the front and back faces of electrostatic chucks; bonding the chucks to the base; and extending retaining members made of a resin material up from the base in correspondence with the through-holes so that the retaining members protrude from the electrostatic chucks.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
B23Q 3/15 - Dispositifs pour tenir les pièces magnétiquement ou électriquement
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
75.
ELECTROSTATIC CHUCK DEVICE AND PRODUCTION METHOD FOR SAME
Disclosed is an electrostatic chuck device which can suppress, as much as possible, the attachment of particles to a work-piece, can achieve sufficient adsorptive force, and has eliminated concerns of electrical discharge. Also disclosed is a production method for the electrostatic chuck device. The disclosed electrostatic chuck device is provided with an electrostatic chuck which is provided on a base and which internally comprises a work-piece adsorption electrode. The base forms an embossed work-piece adsorption surface having a plurality of protruding sections passing through the electrostatic chuck and protruding from the surface of the electrostatic chuck, with an insulating member lying between the outer periphery surface of the protruding sections and the work-piece adsorption electrode of the electrostatic chuck. In contrast to electrostatic chucks wherein the work-piece electrode has opening sections in positions corresponding to protruding sections, through-holes are formed which are smaller in size than opening sections, and the protrusions of the base are inserted into the through holes, thus superimposing the electrostatic chuck to the base, and forming the electrostatic chuck device.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
76.
Method for inspecting electrostatic chuck, and electrostatic chuck apparatus
4) is calculated. The obtained transient currents are compared to respective predetermined reference values, to thereby determine a capacitance abnormality in the electrostatic chuck (4).
G01R 31/02 - Essai des appareils, des lignes ou des composants électriques pour y déceler la présence de courts-circuits, de discontinuités, de fuites ou de connexions incorrectes de lignes
77.
Two-sided attraction structure, exhibiting or indicating apparatus using same, dust collecting apparatus, and plant growing apparatus
A two-sided attraction structure including an electrostatic chuck portion (2) and a power supply portion (5), the electrostatic chuck portion (2) including a dielectric member (3) in a plate-like shape, which is made of an insulating material and has a front side and a back side, and an internal electrode (4) mounted into the dielectric member, the front side and the back side of the dielectric member each serving as an attraction surface when voltage is applied to the internal electrode (4), the power supply portion (5) applying the voltage to the internal electrode, of the electrostatic chuck portion (2), in which the power supply portion (5) includes a solar cell (6) and a voltage boost circuit (7) for boosting power generated by the solar cell (6).
Provided is an electrostatic chuck (8) of self power supply type, which is capable of supplying power while generating power to be used by an attraction electrode (3) during processing of a substrate. The electrostatic chuck (8) attracts and holds a substrate in a substrate processing apparatus (11) that processes the substrate while generating optical energy. The electrostatic chuck (8) includes: an electrode sheet (5) including an attraction electrode (3); a metal base (1) having the electrode sheet (5) laminated on an upper surface side thereof; an internal power supply for obtaining power to be supplied to the attraction electrode (3); and a voltage boost circuit (7) for boosting voltage of the power obtained by the internal power supply. The internal power supply includes a solar cell (6), and converts the optical energy into the power during the processing of the substrate, to thereby cause the electrode sheet (5) to attract and hold the substrate.
H01L 21/687 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension en utilisant des moyens mécaniques, p. ex. mandrins, pièces de serrage, pinces
Disclosed is a vacuum chuck which is provided with a fine embossed pattern and has reduced dust generation, low surface resistivity and high mechanical strength. Specifically disclosed is a vacuum chuck (1) which comprises an aluminum base (2) and a conductive suction part (3). The suction part (3) is formed from a conductive polyimide, and the polyimide is bonded to a surface (21a) of the base (2) with a conductive adhesive resin sheet (4) interposed therebetween. The surface and the outer peripheral portion of the suction part (3) are provided with a plurality of embossed portions (30) and an outer peripheral wall portion (33) for the purpose of mounting a wafer (W) thereon. The base (2), the adhesive resin sheet (4) and the suction part (3) are provided with an air channel (24) and holes (25, 26) for suction and release. A shaft part (22) of the base (2) is mechanically connected to a motor so that the base (2) is rotated by the motor.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
Provided is a bipolar electrostatic chuck, which has excellent substrate attracting/holding performance when a voltage is applied, and excellent residual charges reducing performance when voltage application is stopped. The bipolar electrostatic chuck includes at least an electrode layer including a first electrode and a second electrode, and an upper insulating layer which forms a substrate attracting surface for attracting a substrate. In a case where a surface of the electrode layer is regarded to be divided into a plurality of virtual cells having a predetermined width (L) in an x direction and a y direction, first electrode sections forming the first electrode and second electrode sections forming the second electrode are alternately arranged in the plurality of virtual cells in the x direction, and are alternately arranged in the plurality of virtual cells in the y direction.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01T 23/00 - Appareils pour la production d'ions destinés à être introduits dans des gaz à l'état libre, p. ex. dans l'atmosphère
81.
ELECTROSTATIC ATTRACTING STRUCTURE AND FABRICATING METHOD THEREFOR
Provided are an electrostatic attracting structure that electrically attracts an attracted subject for use in which a strong, integrated structure is maintained when used and the configuration of the structure can be changed freely after used, and a fabricating method therefor. The structure includes a plurality of sheet members having an electrode between two dielectrics and at least a single attraction power supply. The plurality of the sheet members are laminated and the attraction power supply applies voltage between the electrodes of the sheet members facing each other, whereby the sheet members facing each other are electrically attracted and fixed to each other and the attracted subject is attracted to the dielectric of any one or both of the outermost sheet members in the outermost front layer or the outermost back layer for use. After used, with the release of application of voltage, the laminated sheet members can be separated from each other, and the plurality of the sheet members can be laminated by a fixing means as positioned to each other, whereby this electrostatic attracting structure can be surely easily obtained.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
H01S 4/00 - Dispositifs utilisant l’émission stimulée de rayonnement électromagnétique dans des gammes d’ondes autres que celles couvertes par les groupes , ou , p. ex. masers à phonon, lasers à rayons X ou lasers gamma
83.
METHOD FOR INSPECTING ELECTROSTATIC CHUCK, AND ELECTROSTATIC CHUCK APPARATUS
Provided are a method and an apparatus which can determine which attracting electrode has a capacitance abnormality at the periphery thereof in a bipolar electrostatic chuck. In the inspection method, a positive auxiliary electrode (12) and a negative auxiliary electrode (14) are arranged in a dielectric body (6) of an electrostatic chuck (4), and the auxiliary electrodes are connected to a ground potential section. Then, transient currents of currents (I1-I4) flowing in the attracting electrodes (8, 10) and the auxiliary electrodes (12, 14) are measured when direct voltages (+V, -V) from a chuck power supply (26) to the electrostatic chuck (4) are applied or interrupted in a state where a subject to be attracted (2) is not mounted, and a transient current of a current (I5) (=I1-I2 or I3-I4) is calculated. Then, the obtained transient currents are compared with predetermined reference values, respectively, and a capacitance abnormality in the electrostatic chuck (4) is determined.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
B23Q 3/15 - Dispositifs pour tenir les pièces magnétiquement ou électriquement
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
84.
ELECTROSTATIC CHUCK, AND METHOD FOR MANUFACTURING THE CHUCK
Provided is an electrostatic chuck, which can reduce the adhesion of contaminants from a substrate adsorption face to a substrate, to thereby perform cooling via the electrostatic chuck while keeping the substrate contact area optimum. In the electrostatic chuck, an elastic adsorption layer having a plurality of raised portions of an elastic material is made into the substrate adsorption face so that the substrate is adsorbed and held via the elastic adsorption layer. The raised portions on the elastic adsorption layer have a height h(m); the number of the raised portions per unit area on the substrate adsorption face is n(pieces/m2); the top faces of the raised portions have an area A(m2); and the elastic material forming the raised portions has a modulus of elasticity E(Pa). When the substrate having an overall flatness Wh(m) is adsorbed and held by an adsorption force F(Pa), the quantity δ(m), in which the raised portions shrink in the acting direction of the adsorption force F, satisfies the following relation (1), and the ratio ξ of the total area of the raised portion top faces per the unit area of the substrate adsorption face is 10 % or more: 5Wh ≥ δ ≥ 0.5Wh, and δ = (h/nA)∙(F/E) - - - (1).
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
85.
TWO-SIDED FIXING STRUCTURE, EXHIBITING OR INDICATING APPARATUS USING SAME, DUST COLLECTING APPARATUS, AND PLANT GROWING APPARATUS
Provided is a two-sided fixing structure that can be repetitively used with extreme ease, has neither any problems of wasting materials nor any problems of energy and that can be applied to various usages, such as an exhibiting or indicating apparatus and a dust collecting apparatus. A two-sided fixing structure comprises an electrostatic chuck unit (2) and a power supply unit (5). The electrostatic chuck unit (2) has a dielectric member (3) that is made of an insulating material and shaped like a flat plate and that has two sides, i.e., front and back sides; and internal electrodes (4) that are embedded within the dielectric member. It is arranged that when the power supply unit (5) applies a voltage to the internal electrodes (4) of the electrostatic chuck unit (2), the two sides of the dielectric member serve as respective fixing surfaces. The power supply unit (5) has a solar cell (6) and a boosting circuit (7) that boosts a power generated by the solar cell (6). An Exhibiting or indicating apparatus has a display means that is formed by use of the two-sided fixing structure for an exhibition or indication purpose. A dust collecting apparatus has a dust collecting means that is formed by use of the two-sided fixing structure. A plant growing apparatus is formed by use of the two-sided fixing structure.
Provided is a self power feeding electrostatic chuck (8) which can feed power that an attracting electrode (3) uses, while generating power during a time when substrate is being processed. An electrostatic chuck (8) holds the substrate by attraction in a substrate processing apparatus (11) which processes the substrate by generating optical energy. The electrostatic chuck has an electrode sheet (5) provided with the attracting electrode (3), a metal base (1) having the electrode sheet (5) stacked on the upper surface side, an internal power supply which obtains power to be supplied to the attracting electrode (3), and a voltage increasing circuit (7) which increases the voltage of the power obtained by the internal power supply. The internal power supply is a solar cell (6), and the electrostatic chuck (8) converts optical energy into power while the substrate is being processed, and the substrate is held by attracting the substrate to the electrode sheet (5).
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
87.
Feeding structure of electrostatic chuck, method for producing the same, and method for regenerating feeding structure of electrostatic chuck
Provided is a power feeding structure of an electrostatic chuck including a lower insulation layer, an electrode layer and a surface insulation dielectric layer formed on an upper surface side of a metal substrate in order from the metal substrate, in which the lower insulation layer, the electrode layer and the surface insulation dielectric layer are not cracked easily. The power feeding structure of an electrostatic chuck includes: a through hole formed through an upper surface and a lower surface of the metal substrate; a power feeding terminal disposed in the through hole for supplying a voltage supplied from a lower surface side of the metal substrate to the electrode layer formed on the upper surface side of the metal substrate; and an insulation holding member formed of an electric insulating material for insulating an inner wall of the through hole from the power feeding terminal and for holding the power feeding terminal, and the power feeding terminal includes a power feeding end portion that protrudes to the upper surface side of the metal substrate, and a tip of the power feeding end portion is positioned at the electrode layer side with respect to an interface between the electrode layer and the lower insulation layer, and on and under an interface between the electrode layer and the surface insulation dielectric layer.
H05K 3/14 - Appareils ou procédés pour la fabrication de circuits imprimés dans lesquels le matériau conducteur est appliqué au support isolant de manière à former le parcours conducteur recherché utilisant la technique de la vaporisation pour appliquer le matériau conducteur
88.
ELECTROSTATIC CHUCK DEVICE AND METHOD FOR DETERMINING ADSORBED STATE OF WAFER
Provided is an electrostatic chuck device comprising adsorption determining means capable of quickly and accurately grasping the adsorbed state of a wafer. Furthermore, provided is a method for determining the adsorbed state of the wafer, whereby it is possible to quickly and accurately grasp the adsorbed state of the wafer in the electrostatic chuck device. The electrostatic chuck device in which an electrostatic chuck for adsorbing the wafer is provided on the upper surface side of a metal substrate is characterized in that the electrostatic chuck device comprises the adsorption determining means for determining the adsorbed state of the wafer. Furthermore, the method for determining the adsorbed state of the wafer in the electrostatic chuck device in which the electrostatic chuck for adsorbing the wafer is provided on the upper surface side of the metal substrate is characterized in that the flow of the heat from the wafer transferred via the electrostatic chuck is obtained by heat flux sensors to determine the absorbed state of the wafer.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
B23Q 3/15 - Dispositifs pour tenir les pièces magnétiquement ou électriquement
Provided is a bipolar electrostatic chuck, which has excellent substrate attracting/holding performance when a voltage is applied, and excellent residual charge reducing performance when voltage application is stopped. The bipolar electrostatic chuck is provided with at least an electrode layer having first and second electrodes, and at least an upper insulating layer which forms a substrate attracting surface for attracting a substrate. When a surface of the electrode layer is separated into a plurality of virtual cells having a predetermined width (L) in x and y directions, a first electrode section forming a first electrode and a second electrode section forming a second electrode are alternately arranged with respect to the virtual cells in the x direction and also to the virtual cells in the y direction.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
90.
METHOD FOR MANUFACTURING GAS SUPPLY STRUCTURE IN ELECTROSTATIC CHUCK APPARATUS, GAS SUPPLY STRUCTURE IN ELECTROSTATIC CHUCK APPARATUS, AND ELECTROSTATIC CHUCK APPARATUS
Provided is a method for manufacturing a gas supply structure, which eliminates contamination due to nonuniform cooling gas jetting quantities and deposition of a thermally splaying material and the like, in an electrostatic chuck apparatus having an electrostatic chuck on the upper surface side of a metal base (1). The method for manufacturing the gas supply structure is provided for supplying a cooling gas supplied from the lower surface side of the metal base (1) to the rear surface of a substrate (W) attracted to the side of an upper insulating layer (6), through a gas supply path (3) provided on the metal base (1). Prior to a step of forming a lower insulating layer (4) by thermally spraying a ceramic powder on the upper surface side of the metal base (1), a step of forming an attracting electrode (5), and a step of forming the upper insulating layer (6), a gas supply path outlet (3a) on the upper surface side of the metal base (1) is covered with an adhesive (8), which contains a filling material composed of a material same as that of the ceramic powder used for forming the lower insulating layer (4), then, a hole is opened toward the gas supply path outlet (3a) of the metal base (1) after forming the upper insulating layer (6), and a through hole (9) reaching the gas supply path (3) is formed.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
91.
Electrode sheet for electrostatic chuck, and electrostatic chuck
An electrostatic chuck electrode sheet which allows the difference in capacitance between electrodes due to the presence or absence of a substrate to be increased to a level which can be accurately detected using a known substrate detection device, and allows an electrostatic chuck to exhibit an excellent attraction force, and an electrostatic chuck using the electrode sheet, are disclosed. The electrode sheet has a layered structure in which a first insulating layer, a first electrode layer, an inter-electrode insulating layer, a second electrode layer, and a second insulating layer are stacked and attracts a substrate on the first insulating layer, the first electrode layer having a plurality of openings in a specific planar area, and the second electrode layer having opening equivalent portions provided at positions at which the openings in the first electrode layer are projected onto the second electrode layer in a depth direction of the electrode sheet and having almost the same area as the projected openings, and connection portions that connect the opening equivalent portions. The electrostatic chuck is formed using the electrode sheet.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
B23B 31/28 - Mandrins de serrage caractérisés par le système de commande à distance des moyens de serrage utilisant des moyens électriques ou magnétiques dans le mandrin
92.
SUBSTRATE SUCTION APPARATUS AND METHOD FOR MANUFACTURING THE SAME
Provided is a substrate suction apparatus which has a vacuum suction mechanism and an electrostatic attraction mechanism, and improves planarity of a subject to be processed by improving uniformity in vacuum suction power. A method for manufacturing such substrate suction apparatus is also provided. A substrate suction apparatus (1) is provided with a base board (2), a dielectric body (3), an electrostatic attraction mechanism (4) and a vacuum suction mechanism (5). Specifically, the dielectric body (3) is composed of a downmost dielectric layer (31), an intermediate dielectric layer (32) and a topmost dielectric layer (33). The electrostatic attraction mechanism (4) is composed of attraction electrodes (41, 42) and a direct current power supply. The vacuum suction mechanism (5) is composed of a groove (51), a suction channel (52), a porous dielectric body (3) and the porous attraction electrodes (41, 42). The downmost dielectric layer (31), the intermediate dielectric layer (32) and the topmost dielectric layer (33) are formed by spraying ceramic particles, and the attraction electrodes (41, 42) are formed by spraying tungsten particles. The average pore diameter and porosity of the downmost dielectric layer (31) are set maximum, and those of the topmost dielectric layer (33) are set minimum.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
B65G 49/06 - Systèmes transporteurs caractérisés par leur utilisation à des fins particulières, non prévus ailleurs pour des matériaux ou objets fragiles ou dommageables pour des feuilles fragiles, p. ex. en verre
An electrostatic chuck that allows replacement of its attraction plane and uses a replaceable resin sheet of flexible material to thereby attain an enhancement of adherence to a substrate, such as wafer, held by attraction. Attracting electrode (6) of copper, aluminum or the like is laid within first insulating dielectric layers (3,4) of a resin, such as polyimide, or a silicone rubber, such as ferrosilicone. Second dielectric layer (5) consisting of a sheet of resin, such as polyimide, is attached onto the superior layer (4) of the first insulating dielectric layers to thereby realize replaceability.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
Provided is an electrostatic chuck which prevents abnormal discharge generated in a dielectric layer or substrate and has a structure suitable for reusing. An electrostatic chuck (1) is provided with a substrate (2), a suction electrode (3), and a dielectric layer (4). Ring-like gas channels (21, 22) are arranged on the substrate (2) as recesses. Supporting members (5-1, 5-2) which support an insulator (6) are fitted in the gas channels (21, 22). Inside a long groove (8) formed on the supporting members (5-1 (5-2)) is filled with the insulator (6). The insulator (6) is composed of a porous ceramic, forms a ring-like strip corresponding to the gas channel (21 (22)) as a whole, and the width of the upper surface is set larger than the diameter of a ventilation hole (41) of the dielectric layer (4). A lower opening of the ventilation hole (41) abuts to the upper surface of the insulator (6), and the ventilation hole (41) communicates with the gas channel (21 (22)) through the insulator (6). Preferably, a notch (51a) is arranged on the supporting member (5-1 (5-2)).
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H02N 13/00 - Embrayages ou dispositifs de maintien utilisant l'attraction électrostatique, p. ex. utilisant l'effet Johnson-Rahbek
The invention provides a process for the formation of embossed patterns by which an embossed pattern can be formed only on the face of a sheet with the back thereof kept flat and which enables mass production of sheets with finely embossed patterns at a low cost in a short time. The process comprises the first step (S1) of preparing a laminated sheet (1) constituted of an undermost layer resin (10), a bonding thermoplastic resin (11) and an uppermost layer thermoplastic resin (12) wherein the resin (11) is one which exhibits high fluidity under heating and can bond the upper and lower layers in curing, the second step (S2) of putting a die (2) with a specific embossed pattern to the sheet (1) and pressing the resulting laminated sheet under heating wherein no pressure is applied to the resin (10) since the resin (11) is fluidized under the heating to release the pressure applied to the resin (12) through the die (2); and the third step (S3) of cooling the resulting laminated sheet (1).
B29C 43/20 - Fabrication d'objets multicouches ou polychromes
B29C 59/02 - Façonnage de surface, p. ex. gaufrageAppareils à cet effet par des moyens mécaniques, p. ex. par pressage
B32B 27/00 - Produits stratifiés composés essentiellement de résine synthétique
B32B 27/34 - Produits stratifiés composés essentiellement de résine synthétique comprenant des polyamides
B29K 79/00 - Utilisation comme matière de moulage d'autres polymères contenant dans la chaîne principale uniquement de l'azote avec ou sans oxygène ou carbone
Provided is a sheet-like heater by which a processing object used in a semiconductor manufacturing apparatus or the like is heated at a low cost with a shorter temperature increase time and more uniformly. An electrically insulating layer is formed by stacking first and second adhesive layers (2, 4) and first and second resin layers (3, 6) on a substrate (1), and covering a heat generating body (5) with these layers. Unevenness on the surfaces of the insulating layers (2-6) is 1&mgr;m or less. The heat generating body (5) is formed of aluminum. The first and second resin layers (3, 6) configure a gas barrier layer. Furthermore, a thermal dispersion layer is formed for making heat uniform.
A feeding structure of an electrostatic chuck comprising a lower insulation layer, an electrode layer and a surface insulation dielectric layer formed sequentially on the upper surface side of a metal substrate with the lower insulation layer closest to the metal substrate, in which the lower insulation layer, the electrode layer and the surface insulation dielectric layer are not cracked easily. The feeding structure of an electrostatic chuck is constituted of a through hole penetrating between the upper and lower surfaces of the metal substrate, a feeding terminal arranged in the through hole and feeding a voltage supplied from the lower surface side of the metal substrate to the electrode layer formed on the upper surface side, and an insulation holding member formed of an electric insulating material in order to insulate the inner wall of the through hole from the feeding terminal and holding the feeding terminal, wherein the feeding terminal has a feeding side end projecting to the upper surface side of the metal substrate, and the tip of the feeding side end is located closer to the electrode layer side than the interface between the electrode layer and the lower insulation layer and below the interface between the electrode layer and the surface insulation dielectric layer.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
brevets
