A vacuum pump which can prevent wasting of materials and can be manufactured easily is provided.
A vacuum pump which can prevent wasting of materials and can be manufactured easily is provided.
Main-body casings and a rotating body installed rotatably in the main-body casings are provided, and the rotating body has a structure that a second component is caused to cover a periphery of a first component disposed on an inner side. The second component is formed by solidifying a powder. The first component is formed of at least any one of an extruded material, a cast material, and a forged material. The second component is formed of a green pellet.
A vacuum pump that is small in height (length) is configured to bring a rotating body and a protective net as close to each other as possible by causing the rotating body to actively support the protective net. The vacuum pump is provided with a mechanism that causes a rotating body (a shaft or a rotor) to actively support a protective net when the protective net becomes deformed (bent) toward the vacuum pump side due to a change in pressure or temperature of the vacuum pump. Specifically, instead of preventing the protective net from being caught in the rotating body by increasing the distance therebetween, the entanglement of the protective net is prevented by actively supporting the protective net by bringing the protective net and the rotating body closer to each other. Accordingly, the height (length) of the vacuum pump can be reduced more.
F04C 29/12 - Dispositions pour l'admission ou l'échappement du fluide de travail, p. ex. caractéristiques de structure de l'admission ou de l'échappement
F04D 1/00 - Pompes à flux radial, p. ex. pompes centrifugesPompes hélicocentrifuges
F04D 13/06 - Ensembles comprenant les pompes et leurs moyens d'entraînement la pompe étant entraînée par l'électricité
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F04D 29/70 - Grilles d'aspirationFiltresSéparateurs de poussièreNettoyage
A vacuum pump including: a current measuring means that measures a current flowing through a motor, in which a first region defined such that a current measured value flowing through the motor is equal to or larger than a current specified value and a rotational speed measured value of a rotor blade is equal to or larger than a rotational speed specified value, a second region defined such that the current measured value flowing through the motor is less than the current specified value or the rotational speed measured value of the rotor blade is less than the rotational speed specified value, a region determining means that determines which region a rotational speed measured value and the current measured value belong, and a calculating means that calculates a risk degree of a failure of the vacuum pump with elapse of time based on the determination by the region determining means.
Provided is a vacuum exhaust system (10) for exhausting process gas from a plurality of chambers (10-1 to 10-n), the vacuum exhaust system (10) comprising a plurality of turbo molecular pumps (100-1 to 100-n), a collecting pipe (14) for connecting the exhaust ports of the plurality of turbo molecular pumps in parallel, one or more dry pumps (16) connected to the collecting pipe (14), and chamber introduction valve devices (30-1 to 30-n) that control the flow rate of the gas introduced into the plurality of chambers (10-1 to 10-n). A threshold value (T) for the process gas exhaust flow rate is set on the basis of the exhaust flow rates that the plurality of turbo molecular pumps (100-1 to 100-n) can achieve, and the gas introduction timing and/or flow rate are/is controlled by the chamber introduction valve devices (30-1 to 30-n) so as not to exceed the exhaust flow rate threshold value (T).
[Problem] To provide a vacuum evacuation device that can favorably perform plasma cleaning without the provision of a pressure adjustment valve. [Solution] A vacuum evacuation device 10 that comprises a turbo molecular pump 100 and a plasma generation device 210 comprises a throttle part 244 that can raise the internal pressure of the plasma generation device 210 to satisfy P≥0.3/D. P is the pressure [Pa], and D is the inter-electrode distance [m] inside the plasma generation device. The throttle part can also raise the internal pressure of the plasma generation device 210 to satisfy P≤1.5/D.
[Problem] To achieve a hermetic connector with a small size and high performance while suppressing manufacturing cost thereof. [Solution] Provided is a vacuum pump (100) provided with a hermetic connector (10), the vacuum pump (100) being characterized in that: the hermetic connector (10) has pins (11, 12) that are electrically connected, a connector base part (13) that surrounds the pins (11, 12), and a sealing part (14) that seals between the pins (11, 12) and the connector base part (13); and the sealing part (14) is formed of an insulating resin material.
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F04B 39/00 - Parties constitutives, détails ou accessoires de pompes ou de systèmes de pompage spécialement adaptés aux fluides compressibles, non prévus dans les groupes ou présentant un intérêt autre que celui visé par ces groupes
H01R 9/16 - Fixation des pièces de connexion sur le socle ou sur le coffretIsolement des pièces de connexion par rapport au socle ou au coffret
A vacuum pump that allows for the identification of the noise immunities or the like of a master circuit and one or more slave circuits for controlling an operation of at least one portion included in the vacuum pump, and a controller used for such a vacuum pump are proposed. The present disclosure includes a control means 200 configured to control an operation of at least one portion included in a vacuum pump 100. The control means 200 includes a slave circuit 201, 202 connected to the at least one portion to control the operation of the at least one portion and a master circuit 204 connected to the slave circuit 201, 202 to control the slave circuit 201, 202. The master circuit 204 is configured to perform periodical communications with the slave circuit 201, 202 and obtain a history of communication states in the communications.
A vacuum pump includes a rotating body including a rotor blade; a rotor shaft disposed in a center of the rotating body; a magnetic bearing configured to levitate and support the rotor shaft; a touchdown bearing that is separated, by a gap, from the rotor shaft and configured to support the rotor shaft when the magnetic bearing is uncontrollable; and a bearing protection structure configured to protect the touchdown bearing. The bearing protection structure includes a protrusion disposed on at least one of the rotating body and a component around the rotating body. Upon a touchdown of the rotor shaft on the touchdown bearing, the rotating body comes into contact with the component around the rotating body through the protrusion so that kinetic energy of the rotating body acting on the touchdown bearing is reduced.
[Problem] To provide a vacuum pump capable of keeping a temperature around a heater constant even if a flow rate of gas changes. [Solution] A vacuum pump (100) for discharging gas sucked by rotation of a rotor (103) is characterized by comprising: a cooling component (128) having a flow path (110) through which a cooling medium flows; a heating component (153) disposed farther toward a gas discharge side than the cooling component and having a heater (190); and a control device (200) for performing temperature control of the cooling component and the heating component, and is also characterized in that the control device changes, on the basis of a history of the temperature control of one of the heating component and the cooling component, the temperature control of the other.
A detoxifying device of a structure wherein the deposits can be removed cleanly, without leaving residue, even for a nozzle that is provided with a narrow diameter portion and a wide diameter portion that is further to the downstream side than the narrow diameter portion, and to provide a nozzle scraper used in said detoxifying device.
B08B 9/043 - Nettoyage des surfaces intérieuresÉlimination des bouchons utilisant des dispositifs de nettoyage introduits dans et déplacés le long des tubes déplacés par liaison mécanique actionnée de l'extérieur, p. ex. poussés ou tirés dans les tubes
B08B 1/16 - Lames rigides, p. ex. grattoirsLames flexibles, p. ex. raclettes
B08B 1/30 - Nettoyage par des procédés impliquant l'utilisation d'outils par le mouvement d’éléments de nettoyage sur une surface
B08B 1/54 - Nettoyage par des procédés impliquant l'utilisation d'outils impliquant le nettoyage des éléments de nettoyage utilisant des outils mécaniques
B08B 13/00 - Accessoires ou parties constitutives, d'utilisation générale, des machines ou appareils de nettoyage
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
A vacuum pump, which prevents adhesion of products even when a rotating body is stopped, by heating the rotating body using an alternating current (AC) magnetic field. Two heating electromagnets are disposed facing each other across a rotating body. The heating electromagnets receive a supply of AC electric current from a heating electric power source. Excitation of the heating from this AC electric current generates an AC magnetic field. The generated AC magnetic field intersects with the rotating body. Eddy current is generated around the intersecting AC magnetic field. The rotating body is heated by this eddy current. This heating enables deposition of products to be prevented even further, and realize improved pump operation efficiency.
[Problem] To provide a vacuum pump and a fixed disk with which movement of heat between a plurality of fixed disks can be suppressed. [Solution] A turbo molecular pump (vacuum pump) 100 includes: an outer cylinder (casing) 127; a rotor shaft (rotary shaft) 113 rotatably supported inside the outer cylinder 127; a plurality of rotary disks 200 that rotate together with the rotor shaft 113; and a plurality of fixed disks 201 alternately arranged between the plurality of rotary disks 200. The turbo molecular pump (vacuum pump) 100 exhausts gas via the interaction between the plurality of rotary disks 200 and the plurality of fixed disks 201. The plurality of fixed disks 201 include a first fixed disk 201a and a second fixed disk 201b adjacent to the first fixed disk 201a in the axial direction. The first fixed disk 201a has an outer peripheral protrusion (first contact part) 210 abutting on the second fixed disk 201b to position the first fixed disk in the axial direction, and the outer peripheral protrusion 210 has a space part 216 provided between the outer peripheral protrusion 210 and the second fixed disk 201b.
In order to efficiently remove deposited material adhering to the interior of an abatement device, an abatement device is equipped with a deposited material removing means for removing deposited material produced during abatement of exhaust gas. The deposited material removing means includes: a storage unit that stores a liquid; a gas supply unit that supplies pressurized gas to the storage unit; and a valve that sprays a mixed fluid of the liquid stored in the storage unit and the gas supplied by the gas supply unit.
To make it possible to detect the presence or absence of contact between a fixed blade and a rotary blade of a vacuum pump, a control device (200) of a vacuum pump (100) sets a floating position of a rotor shaft (113) in the axial direction to a preset reference position, brings the rotor shaft (113) into a preset predetermined operating state, and then offsets the position of the rotor shaft (113) by a predetermined amount. The control device (200) detects the presence or absence of contact between a rotary blade (102) and a fixed blade (123) on the basis of a change in speed data of the rotor shaft (113).
[Problem] To provide a vacuum pump and a vacuum pump control device capable of accurately determining a timing of replacement of a rotary blade by creating an index which enables quantitative and easy determination of the fatigue degree of the rotary blade in accordance with an operation state of the pump. [Solution] This vacuum pump is capable of determining a timing of replacement of a rotary blade, and comprises: a rotary blade incorporated in a vacuum pump body; and a sensor that is disposed in the vacuum pump body and that measures a physical quantity related to the rotary blade. The physical quantity measured by the sensor is sampled and extracted at each prescribed time during the operation of the vacuum pump. At a time point when the extraction is performed for an arbitrarily-defined number of sampling times, a physical quantity range having the highest density of values of the physical quantity at the respective sampling times up to said time point is found. Thus, a physical-quantity upper limit value, which is the upper limit value of the physical quantity range, and a physical-quantity lower limit value, which is the lower limit value of the physical quantity range, are defined, and each interval between the physical-quantity upper limit value and the physical-quantity lower limit value is changed by a fixed quantity in accordance with the magnitude of the physical quantity.
The present invention provides a vacuum pump and method for changing the evacuation performance of a vacuum pump which make it possible to adjust evacuation performance to a desired level, without changing the rotation speed of a vacuum pump comprising a Siegbahn evacuation mechanism. To this end, provided is a vacuum pump comprising a Siegbahn evacuation mechanism, wherein adjusting a gap in the axial direction or radial direction between a first fixed disk and a first rotating disk positioned at an entrance of an evacuation flow path of the Siegbahn evacuation mechanism makes it possible to change evacuation performance during rated operation. The following are methods for adjusting the gap: (A) a method in which the floating position of the rotating disk is offset to adjust the gap between the fixed disk and the rotating disk; and (B) a method in which a spacer (additional sheet) is inserted at a prescribed position in the vacuum pump to adjust the gap between the fixed disk and the rotating disk.
A magnetic bearing device and a vacuum pump configured to measure with high sensitivity a natural vibration mode of a rotating body in a floating system using a magnetic bearing. The natural vibration to be measured is a bending mode of the rotating body, a natural vibration mode of the rotor blades, a vibration mode associated with the stator, and a rigid body mode of the rotating body. The natural vibration may be computed by a central processing unit (CPU) of a control device or may be computed externally. In this manner, the natural vibration mode can be detected with high sensitivity.
[Problem] To propose a vacuum pump and a magnetic bearing control device for which, in a case where information stored in a writable non-volatile memory is damaged, recovery is possible even without a specialized engineer or the like. [Solution] A vacuum pump 100 is characterized by comprising, in a control unit 100B, a determination/overwriting means that: determines whether a first storage means 204 is normal, and if the first storage means 204 is abnormal, recognizes individual identification information stored in a third storage means 203 as accurate and overwrites individual identification information stored in the first storage means 204; or determines whether a second storage means 202 is normal, and if the second storage means 202 is abnormal, recognizes the individual identification information stored in the third storage means 203 as accurate and overwrites individual identification information stored in the second storage means 202.
A vacuum pump and a heat insulating member for the vacuum pump are provided that improve the rigidity and heat insulating effect of a heat insulating portion and facilitate the control of intended temperatures of components within the pump. A turbomolecular pump having at least a cooling function includes a heat insulator that is disposed on a threaded spacer and has a hollow structure including cavities extending in the axial direction.
A magnetic bearing device and a vacuum pump configured to recover from an abnormal state, such as oscillation in a magnetic bearing levitation system with low false detection of abnormalities. The magnetic bearing device includes a magnetic bearing controller that controls the magnetic bearing, and detects an abnormality of control by the magnetic bearing controller and configured to correct control parameters while continuing an operation of the magnetic bearing device. The device also detects abnormality of the control by the magnetic bearing controller based on an abnormality condition having a larger degree of abnormality than the first abnormality condition, and a stopping means for stopping the operation of the magnetic bearing device.
[PROBLEM] To perform magnetic bearing control using control setting data with a small amount of data. [SOLUTION] A control circuit 211 controls a magnetic bearing device that supports a rotor shaft in at least two directions. A memory unit 212a stores control setting data for a plurality of models of magnetic bearing devices. A data setting unit 212b selects, from the control setting data for the plurality of models of magnetic bearing devices, the control setting data for a magnetic bearing device to be controlled, and sets the control setting data in the control circuit 211. The control setting data includes control setting values of a plurality of items, and, when the control setting data for a certain model has an item of which control setting values for the two directions are the same, the control setting data includes only the control setting value of one of the two directions for that item. Moreover, for the item of which the control setting values for the two directions are the same, the data setting unit 212b identifies, from one of the control setting values, the other control setting value, and sets the control setting values for the two directions in the control circuit 211.
[Problem] To provide a vacuum pump, a control device, and a temperature rising time control method with which the temperature rising time of a pump can be reduced while a substrate is protected from high temperatures accompanying heating. [Solution] Temperature information is detected from a temperature sensor 3 located near a heater 1 and inputted to a control device 200. In a temperature rising state determination unit of the control device 200, determination of a temperature rising state is started in step 1. In step 3, the inputted temperature information is compared with a rated temperature. The rated temperature will differ depending on the model and specifications of the pump, but is defined as a target temperature necessary for preventing products from accumulating. As shown in step 5, when all the inputted temperature information exceeds the rated temperature, a post-temperature rise mode is determined to be in effect, and this process is completed in step 9. By contrast, when, as shown in step 7, the state of the temperature information is lower than the rated temperature, a temperature rising mode is determined to be in effect, and this process is completed in step 9. Thereafter, the operations of step 1 to step 9 are periodically repeated.
There are proposed a vacuum pump capable of suppressing a temperature increase of a stator blade by heat from a heating source without increasing the number of components, and a spacer used in such a vacuum pump. The present invention is a vacuum pump including a plurality of rotor blades which rotate together with rotating shafts, a plurality of stator blades which are disposed in multiple tiers between the rotor blades, and a plurality of spacers which are provided in multiple tiers inside casings and hold respectively the stator blades at predetermined positions, and, in the vacuum pump, at least one spacer of the plurality of spacers holding the stator blade has a concave surface in a contact surface which comes into contact with the stator blade.
There are provided a vacuum pump which can effectively prevent stress corrosion cracking of a rotating body and has excellent corrosion resistance, and a rotating body of the vacuum pump. In a vacuum pump (e.g., a turbo-molecular pump 100) exhausting gas by rotation of a rotating body 103, the rotating body 103 has, on a surface thereof, a first area 1 covered with a first surface treatment layer 1A and a second area 2 covered with a second surface treatment layer 2A, and a boundary portion 3 between the first area 1 and the second area 2 has an area in which the surface treatment layers 1A and 1B of the first and second areas 1 and 2 overlap each other.
A vacuum pump which prevents dust generation from a shaft by avoiding contact between a top portion of the shaft and corrosive gas and includes a balance correction function for a rotating body. A vacuum pump includes a rotating body including a rotating shaft and a rotor blade which has a through hole, through which a top portion of the rotating shaft is caused to pass, and is fixed with the top portion, and a cover portion fixed to the rotating to cover the top portion and the through hole. The cover portion includes a balance correction function for the rotating body and corrosion resistance to exhaust gas. The cover portion, prevents contact between the top portion and corrosive gas and prevents dust generation from the shaft.
A vacuum pump includes a contact portion that contacts a jig used to adjust the height of a seal member in an axial direction. At the time of assembling the vacuum pump in which a pump fixing component is arranged opposed to the outer periphery of a rotating body, the jig is positioned by the contact portion with the pump fixing component arranged on a base, and the pump fixing component is pressed in the direction of the base by the pressing portion of the positioned jig to adjust the height of the seal member in the axial direction. The pump fixing component is entirely lowered in the direction of the base by the adjustment.
[Problem] To provide a vacuum pump capable of providing further improved safety. [Solution] A turbomolecular pump 100 comprises: a casing 215 that is provided with at least an exhaust outlet 133 from among an air intake inlet 101 and the exhaust outlet 133; and a heater 148 that sets the temperature high at at least a portion of the casing 215 from among the exhaust outlet 133 and the casing 215. The turbomolecular pump 100 has an annular and thin-plate-like side-surface cover 224 that covers a side surface of the casing 215, and a thin-plate-like exhaust outlet cover 222 that covers the circumference of the exhaust outlet 133. The exhaust outlet cover 222 and the side-surface cover 224 are separate components. The exhaust outlet cover 222 can be detached even in a state of having the side-surface cover 224 attached.
A turbomolecular pump is obtained in which a gas absorbing substance is placed without increasing the axial length of an inlet port due to the gas absorbing substance. The turbomolecular pump includes a rotor portion and a stator portion in a casing (outer cylinder 127). The turbomolecular pump includes a getter pump portion, which is placed in the stator portion or the casing, and a heater portion 402, which performs at least one of activation and regeneration of a gas absorbing substance 401 of the getter pump portion.
F04B 37/06 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour l'évacuation par moyens thermiques
F04B 37/02 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour l'évacuation, par absorption ou adsorption
F04B 49/00 - Commande des "machines", pompes ou installations de pompage ou mesures de sécurité les concernant non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
To obtain a vacuum pump which appropriately performs temperature management of a gas flow path and reduces restrictions on a gas flow rate attributable to the temperature management. A cooling tube performs temperature adjustment of a gas flow path. A first temperature sensor is arranged at a position closer to the gas flow path than the cooling tube, a second temperature sensor is arranged at a position closer to the cooling tube than the gas flow path, and a control apparatus controls, based on a sensor signal of the first temperature sensor and a sensor signal of the second temperature sensor, (an on-off valve of) the cooling tube so that a temperature of the gas flow path approaches a predetermined gas flow path target temperature.
[Problem] To provide an evacuation device which can be easily reduced in size. [Solution] This evacuation device comprises a turbomolecular pump and a plasma generator 210 having a displaceable electrode 214, and when not in operation and no plasma is generated, same can block a plasma communication opening 228 through displacement of the electrode 214. A pipe for supplying a raw-material gas for generating a plasma is connected to the plasma generator 210, and the raw-material gas is utilized for displacement of the electrode 214. A piston 220 is disposed in the plasma generator 210, and the electrode 214 is displaced by a pressure difference acting on the piston 220.
[Problem] To provide a vacuum pump capable of stably controlling the temperature of gas without impairing the cooling effect of the gas. [Solution] A vacuum pump (100) is provided with: a casing (126, 127); a rotor shaft (113) that is rotatably supported inside the casing; a plurality of stages of rotary blades (102) that are fixed to the rotor shaft and rotatable with the rotor shaft; a plurality of stages of stationary blades (123) that are fixed to the casing and disposed between the plurality of stages of rotary blades; and a plurality of stages of stationary blade spacers (125) that support the plurality of stages of stationary blades. The vacuum pump (100) includes a temperature control means (110) that is provided in a specific spacer (128, 228) which is one stage among the plurality of stages of stationary blade spacers, and performs temperature control for the specific spacer, and a temperature sensor (185) that is provided in a position closer to the temperature control means than a gas flow path (F1) of a turbo pump unit, which is composed of the plurality of stages of rotary blades and the plurality of stages of stationary blades.
A gas treatment system includes: a main exhaust line for guiding exhaust gas to a detoxification apparatus; a bypass line for guiding the exhaust gas to an emergency detoxification apparatus; an upstream exhaust line; and a three-way valve capable of switching a flow of the exhaust gas from the upstream exhaust line to the main exhaust line or the bypass line, in which the bypass line includes: a gate valve; a gas introduction pipe through which a second gas is introduced; and a pressure gauge configured to detect pressure. When the three-way valve discharges gas to the main exhaust line, in a state where the second gas has been introduced into a closed flow path C between the gate valve and the three-way valve from the gas introduction pipe, internal leakage in the three-way valve is detectable using change in the pressure detected by the pressure gauge.
F17D 5/02 - Prévention, interception ou localisation des pertes
F17D 1/04 - Systèmes de canalisation pour gaz ou vapeurs pour la distribution du gaz
F17D 3/01 - Dispositions pour la surveillance ou la commande des opérations de fonctionnement pour commander, signaler ou surveiller le transfert d'un produit
[Problem] To provide a vacuum pump with which it is possible to accurately detect any change in capacitance. [Solution] The present invention has: an outer tube 127, etc., having an exhaust pathway through which exhaust gas flows; a threaded spacer 131 serving as a subject of heating performed by a heater 148; a base part 129 serving as a subject of cooling performed by a coolant pipe 149; and a foreign-matter sensor 210 that detects foreign matter. The foreign matter sensor 210 is provided with a pair of electrodes for which the capacitance can change due to deposition of foreign matter, and a capacitance measurement unit that measures the capacitance between the electrodes. The electrodes are installed on the threaded spacer 131, and the capacitance measurement unit is installed on the base part 129.
A vacuum pump, a vacuum pump controller, and a remote controller are provided that can reduce the workload of users and field service engineers. A vacuum pump 10 includes a turbomolecular pump 100 that exhausts gas inside a semiconductor manufacturing apparatus X, and a controller 200 that performs control on the turbomolecular pump 100. The controller 200 includes a remote signal receiving means that receives a command signal from a remote controller 300, which remotely controls the turbomolecular pump 100, and changes a setting relating to an operating specification of the turbomolecular pump 100 on the basis of the command signal received by the remote signal receiving means.
A vacuum pump capable of improving cleaning performance is provided. A heater, purge gas introduction ports, a purge gas valve, and an exhaust valve are provided. As an operation mode, a cleaning operation mode capable of sublimating deposits in a turbomolecular pump is provided. In the cleaning operation mode, at least one of the heater, the purge gas valve, and the exhaust valve is controlled, and a pressure in at least a part of an interior of the turbomolecular pump is increased to a pressure region with which a temperature is greater than or equal to a sublimation temperature of the deposits in the turbomolecular pump and that causes an intermediate flow or a viscous flow.
A vacuum pump is provided with which, even in the event of breakage of a rotor blade, broken pieces of the rotor blade are unlikely to scatter from an outlet port. A vacuum pump includes a rotor blade configured to rotate about a vertical axis and a casing housing the rotor blade, and is configured to exhaust sucked gas in a radial direction of the rotor blade by rotation of the rotor blade. An outlet port for the gas is provided at a position that is offset from a position of a gas exit portion of the rotor blade in a direction of the vertical axis.
A vacuum pump that limits accumulation of deposits while providing a satisfactory permissible flow rate is obtained. The vacuum pump includes a rotor, a plurality of stator portions that are disposed facing the rotor and have a gas compression function, and a reference member 301 that is one of members stacked toward an inlet port 101 from a base portion 129 and serves as a reference in an axial direction for the plurality of stator portions. The plurality of stator portions are disposed downstream of the reference member 301 (the side corresponding to the outlet port 133).
A vacuum pump which can reduce a stress generated in a connected part between a rotating body and a rotating shaft is provided. A rotating body is provided having rotor blades provided on an outer periphery of a rotor-blade forming portion, and fastened to the rotor shaft by a bolt, and rotatable with the rotor shaft. At least either one of a fitting hole portion fitted with the rotating shaft and a through hole portion, through which a bolt penetrates, in the rotating body is a stress-reduction target portion, and a groove portion that reduces stress generated in the stress-reduction target portion during rotation of the rotating body is provided.
[Problem] To provide a vacuum pump and a fixed component by which: it is possible to suppress the occurrence of casting cavities and sink marks in a thick part of a fixed component formed by casting; and by which it is possible promote heat transfer in the fixed component. [Solution] A vacuum pump 201 comprises: a casing 211; a rotor shaft 113 that is enclosed by an exterior body and is rotatably supported; a rotor 103 that is fixed to the rotor shaft 113 and rotates together with the rotor shaft 113; and an annular fixed component that, in conjunction with the rotor 103, exhausts taken-in gas. The fixed component is formed by casting, and has: a first part 246 and a second part 245 opposing each other so as to sandwich at least one reduction groove 255, which extends along the circumferential direction of the fixed component, for reducing volume; and a bottom part 258 that is disposed so as to include at least the bottom of the reduction groove 255 and connects the first part 246 and the second part 245. The fixed component includes a heat transfer improving structure 256 for improving heat transfer between the first part 246 and the second part 245.
A vacuum pump and a control device, on a pump side, performs heater control of a pipe to suppress precipitation of a deposit from a process gas and cooling control of a deposit trap to remove the deposit, and perform heater control and cooling control the process gas situation. A temperature sensor is disposed on an outer periphery or an inner periphery of an introduction pipe 3H, outputs temperature information a control device. Temperature information from the inside of a deposit trap is also sent to control device. The control device, performs ON/OFF control a heater such that a temperature of the introduction pipe 3H has a predetermined temperature value, based on the input temperature information 31. The control device, performs opening/closing control on a valve such that an internal temperature of the deposit trap has a predetermined cooling temperature value, based on the input temperature information.
There is obtained a vacuum pump which suppresses an influence on external piping caused by a contact failure of a rotor during rotation of the rotor. A temperature rise ring 301 is provided in the vacuum pump, an outlet port 133 to which the external piping is connected is connected to the temperature rise ring 301, and a rotational force is directly or indirectly applied to the temperature rise ring 301 due to the contact failure of the rotor during the rotation of the rotor. In addition, a rotation suppression means (a hole 301a and a bolt 305) for suppressing rotation of the temperature rise ring 301 by the above-described rotational force is provided separately from a connection portion between the temperature rise ring 301 and a casing (outer tube 127a).
A lower portion of a cylindrical portion provided in a vacuum pump on the outlet port side has an extension portion extending to a further downstream side than a stationary part of a thread groove exhaust element. In the extension portion, the smaller the outer diameter, the smaller the stress applied to the inner diameter side during rotation. As such, the configuration including a reduced diameter portion reduces the stress applied to the inner diameter side of the cylindrical portion without lowering the rotation speed of the rotating body. Additionally, providing a gradually decreasing diameter structure in the extension portion reduces stress concentration at the reduced diameter portion.
[Problem] To provide a vacuum exhaust system capable of reducing the amount of consumption of a ClF-based gas used for cleaning, and reducing the time for cleaning. [Solution] An exhaust pipe 18 from a dry pump 100 to an abatement device 19 is provided with a heater 400, and the exhaust pipe 18 is heated to a temperature exceeding 180℃. The exhaust pipe 18 and a gasket that is a seal member are both metallic. A ClF3 gas for cleaning is introduced. The ClF3 gas is activated at a temperature exceeding 180℃, where the cleaning efficiency increases significantly. Meanwhile, due to the use of a metallic gasket, seal performance degradation is less likely to occur even when the ClF3 gas is activated. Thus, there is no need to wait until the exhaust pipe 18 becomes less than or equal to 180℃, and so the cleaning time can be reduced.
H01L 21/31 - Traitement des corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour former des couches isolantes en surface, p. ex. pour masquer ou en utilisant des techniques photolithographiquesPost-traitement de ces couchesEmploi de matériaux spécifiés pour ces couches
C23C 16/44 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
A vacuum pump includes a casing having an inlet port, and enclosing a rotating body, a thread groove stator which is substantially cylindrical and is disposed on an outer periphery of the rotating body, and a thread groove which is formed in at least one of an outer peripheral surface of the rotating body and an inner peripheral surface of the thread groove stator, the vacuum pump exhausting gas sacked from a side of the inlet port to outside of the casing by rotating the rotating body, wherein a binding means, which is formed of a material having a linear expansion coefficient lower than a linear expansion coefficient of a material of the thread groove stator and reduces radial deformation at a time of thermal expansion of the thread groove stator, is disposed on an outer periphery of the thread groove stator.
A vacuum pump that includes: an outer cylinder having an inlet port and an outlet port; a rotor shaft rotationally supported inside the outer cylinder; rotor blades in multiple stages, the rotor blades being rotatable together with the rotor shaft; stator blades in multiple stages, the stator blades being fixed to the outer cylinder and located respectively between the rotor blades in multiple stages; and a cooling-side stator and a heating-side stator that hold the stator blades in multiple stages at predetermined intervals. An opening of a gap of a predetermined width configured to provide thermal insulation between the cooling-side stator and the heating-side stator is located at a position where the opening does not face outer circumference surfaces of the rotor blades in an axial direction of the rotating body.
Proposed is a vacuum pump capable of more reliably preventing the problem of an exhaust gas leakage between a partition wall and a part on which the partition wall is mounted. A vacuum pump (100) is characterized by comprising: an exterior body having an exhaust port (133); a rotating shaft (113) that is rotatably supported inside the exterior body and rotated by an electrical part; a rotor (103) that is disposed outside a housing part (122) and secured to the rotating shaft (113); a stator that is disposed on an outer circumferential side of the rotor (103); a pump flow path that is provided between an outer circumferential surface of the rotor (103) and an inner circumferential surface of the stator, and through which gas flows; a partition wall (135) that is mounted on the stator and defines a gas flow path from an outlet of the pump flow path to the exhaust port (133); a heating means (138) that heats the stator and the partition wall (135); and a seal member (136) that is attached to the mounting surfaces of the stator and the partition wall (135) to prevent intrusion of the gas.
A vacuum pump having excellent exhaust performance is provided. The vacuum pump includes a Siegbahn type exhaust mechanism portion 201 in which a Siegbahn spiral groove portion 262 is provided in at least either rotating discs 220a to 220c or stator discs 219a and 219b, and a Holweck type exhaust mechanism portion 301 in which a thread groove 131a is provided in at least either a cylindrical portion 102d of a rotating body 103 or a threaded spacer 131, and the Holweck type exhaust mechanism portion 301 is located on the downstream side of the Siegbahn type exhaust mechanism portion 201. The Holweck type exhaust mechanism portion 301 has a flow passage depth that is continuously constant at a predetermined depth H2, and the Siegbahn type exhaust mechanism portion 201 includes a region that is continuously constant at the predetermined depth H2 from a predetermined position.
Provided is a vacuum pump capable of removing deposits through a large amount of high-temperature fluid. A turbomolecular pump (100) comprises a hot air generator (210) that causes the temperature of a heating fluid to rise, a heating fluid inflow port (216), and a valve device (212) that controls the flow of the heating fluid. The valve device (212) controls the flow of the heating fluid such that the heating fluid is supplied to the inside of the turbomolecular pump (100) during stop or low-speed operation of the turbomolecular pump (100). The turbomolecular pump (100) comprises a fluid transfer means. The fluid transfer means can supply the heating fluid at a flow rate of at least 10 times the maximum flow rate that can be exhausted during rated operation of the turbomolecular pump (100).
A vacuum exhaust system is provided which can reduce a size of a pump or a valve, and can thin the pipe diameter, and can perform highly efficient exhaust making the best use of exhaust characteristics of the pump from high vacuum to the large flow region. The process gas used in a vacuum chamber passes through a regulating valve, and reaches a first branch pipe. The passage on the side indicated with A in the drawing of the first branch pipe is connected with an inlet port of a second pump. On the other hand, the passage indicated with B in the drawing of the first branch pipe is provided with a bypass valve. Then, the downstream of an outlet port of the second pump and the downstream of the bypass valve are connected with a first pump via a second branch pipe. In the low and medium vacuum regions (at the time of large flow rate exhaust), the bypass valve is opened. At this time, the gas is exhausted through both the passage A including the second pump therethrough and a passage B. Then, when exhaust under medium and high vacuum conditions lower than that is performed, the bypass valve is closed, thereby performing exhaust through the passage A. As a result of this, the pipe of the passage B can be thinned.
A vacuum pump that is suitable to achieve uniformity of pressure in the chamber and improve the compression ratio, and a vacuum exhaust system using the vacuum pump. A vacuum pump includes: a cylindrical inner housing; a cylindrical stator placed outside the inner housing; a cylindrical shaft rotationally disposed between the inner housing and the stator; a motor configured to drive and rotate the shaft about an axis thereof; rotor blades in multiple stages disposed on an outer circumference surface of the shaft; and a cylindrical outer housing that is disposed outside the rotor blades in multiple stages and has an inlet port and an outlet port. A seal mechanism is provided in a gap between an outer circumference surface of the inner housing and an inner circumference surface of the shaft to inhibit an inflow of gas into the gap.
[Problem] Provided are a vacuum pump and a vacuum evacuation system that are capable of, by increasing cleaning efficiency of radical generation devices, effectively washing out a reaction product deposited in a vacuum pump using less number of radical generation devices, and reducing operation cost. [Solution] The present invention is provided with: a radical supply opening 134A that penetrates a housing 110 and that is provided in the vicinity of a gas-discharging-side exit of a gas-discharging mechanism 133; and a radial supply means 135 that supplies radicals 136 into the housing 110A through the radical supply opening 134A, and causes the supplied radicals 136 to flow to a portion where a reaction product is deposited in a gas-discharging mechanism 132.
Provided is a circuit that eliminates harmonics generated in a synchronous detection circuit to achieve low vibration and low noise, along with a position detection device, a magnetic bearing device, and a vacuum pump. An odd-order harmonic of a sensor carrier frequency can be eliminated from a displacement signal by setting a duty of a switch of the synchronous detection circuit to a specified value. Conditions for a pulse generation method are adjusted to generate a pulse at a phase angle of 180 degrees + 360 degrees x n. A duty of a pulse for a synchronous detection switch is set such that a positive-side area and a negative-side area of a harmonic waveform are equal to each other. Moreover, the pulse duty is adjusted to center the phase angle at which a sensor signal has a highest sensitivity.
F04D 29/66 - Lutte contre la cavitation, les tourbillons, le bruit, les vibrations ou phénomènes analoguesÉquilibrage
F16C 32/04 - Paliers non prévus ailleurs faisant usage de moyens de support magnétiques ou électriques
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
H03B 1/04 - Réduction des oscillations indésirables, p. ex. harmoniques
G01D 5/244 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant les caractéristiques d'impulsionsMoyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques produisant des impulsions ou des trains d'impulsions
[Problem] To provide a vacuum pump that can sufficiently prevent the inflow of gas to an accommodation part for an electrical component allowing for the rotation of a rotary shaft. [Solution] This vacuum pump 100 comprises: an exterior body; a rotary shaft 113 that is enclosed in the exterior body and rotatably supported; an accommodation part 122 that accommodates an electrical component allowing for the rotation of the rotary shaft 113; a rotor 103 that is disposed outside the accommodation part 122 and is formed integrally with the rotary shaft 113; a partition wall part 141 that forms a portion of a stator disposed on the outer peripheral side of the rotor 103; and a rotating disk 107c that extends in the radial direction from the outer peripheral surface of the rotor 103. The rotation of the rotor 103 causes gas to be exhausted to flow outside of the rotor 103. At least a portion of the surface of the rotating disk 107c and the surface of the partition wall part 141 facing each other in the axial direction forms a non-contact sealing structure that prevents the inflow of gas to the accommodation part 122.
In a vacuum pump in which the rotor blade in one stage has an outer diameter that is smaller at an outlet port side, or the rotor blade in one stage has an inner diameter that is larger at an outlet port side, at least one of an outer circumference portion or an inner circumference portion of the stator blade that is located immediately above the rotor blade having a smaller outer diameter or immediately above the rotor blade having a larger inner diameter has a tapered surface sloping down to an outlet port side. By providing the tapered surface, entering molecules are reflected at a right angle, sent toward an inner circumference side, and hit by the rotor blade in the upper stage. The molecules are thus sent to a next exhaustion stage.
[Problem] To provide a vacuum pump with which a balance correcting member can be made smaller, and with which fitting of the balance correcting member is straightforward. [Solution] This vacuum pump comprises a main body casing, a rotating body 103, and a motor 121, wherein: the rotating body 103 and the motor 121 are provided inside the main body casing; a groove portion 212 is formed in an inner peripheral surface 211 of the rotating body 103; and a plate-shaped weight 220 is installed in the groove portion 212. The weight 220 has elastically displaceable portions 226a, 226b and is fixed by being sandwiched in the groove portion 212. The elastically displaceable portions 226a, 226b are formed by opening displacement-permitting holes 222a, 222b having one end open, in the weight 220.
[Problem] To provide an evacuation system, a vacuum pump, and a method for cleaning a vacuum pump that enable easy recovery from a stopped state in which a dry pump has stopped and deposits have blocked off a gas flow path of the vacuum pump, making restart impossible. [Solution] The invention is provided with: a vacuum pump for exhausting a process gas that contains condensable gas or oxidized dust; a first inert gas introduction unit for introducing high-temperature inert gas, which is for raising the temperature to substantially the same temperature as when the vacuum pump is running normally, to a gas flow path of the vacuum pump in a stopped state where deposits of the process gas have accumulated, and causing the gas flow path to expand so that the vacuum pump can be started up; and a cleaning material introduction unit for introducing a cleaning material to the gas flow path to remove the deposits.
F04B 37/16 - Moyens pour éliminer les espaces morts
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
H01L 21/205 - Dépôt de matériaux semi-conducteurs sur un substrat, p. ex. croissance épitaxiale en utilisant la réduction ou la décomposition d'un composé gazeux donnant un condensat solide, c.-à-d. un dépôt chimique
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
[Problem] To provide a vacuum pump in which it is possible to prevent deformation of outer-peripheral components fastened to an outer cylinder even if the number of bolts increases. [Solution] A vacuum pump according to the present invention has a rotational solid (103), an outer cylinder (127) for accommodating the rotational solid, outer-peripheral components (126, 128) arranged coaxially with the outer cylinder and the outer-peripheral side of the rotational solid, a plurality of bolts (115, 116) that fasten the outer cylinder and the outer-peripheral components together, and an axial-force-reducing means (117) that reduces bolt axial force acting on the outer cylinder, the axial-force-reducing means being provided to at least one of the plurality of bolts.
A vacuum pump is provided, which is capable of preventing a water cooling spacer, which is one component of a casing, from being damaged by destruction of an interior component. The vacuum pump includes a casing having an inlet port, a stator column provided upright inside the casing, and a rotating body shaped to surround an outer periphery of the stator column, with gas being sucked in from the inlet port by rotation of the rotating body, wherein the casing is composed of a plurality of components including a water cooling spacer having a water cooling pipe disposed therein, and the water cooling spacer is made of an aluminum alloy casting material having an elongation of 5% or more as a mechanical material property.
[Problem] To propose a vacuum discharge system which causes a product derived from process gas to be less likely deposited in a turbo molecular pump and which is capable of effectively using a space required for equipment installation. [Solution] A vacuum discharge system 200 is characterized by comprising: a plurality of turbo molecular pumps 100 each of which includes a turbo molecular pump mechanism which discharges gas molecules from a discharge port 133 by an interaction between a plurality of stages of rotor blades 102 and a plurality of stages of stator blades 123 and which does not include a thread groove pump mechanism; a discharge pipe 204 including a unified pipe portion 206 to which each of the discharge ports 133 is connected; and a back pump 203 which is connected to the discharge pipe 204 and discharges the gas molecules via the unified pipe portion 206.
A cleaning apparatus for a vacuum exhaust system capable of preventing redeposition of deposits on a downstream side of a vacuum pump is provided. A cold trap capable of causing deposits to be formed by cooling gas containing a sublimation component, at least one first vacuum pump disposed upstream of the cold trap, at least one first piping connecting the first vacuum pump to the cold trap, at least one second vacuum pump disposed downstream of the cold trap, and at least one second piping connecting the second vacuum pump to the cold trap are provided. At least a part of the first vacuum pump or the first piping is configured to be heated to higher than or equal to a sublimation temperature of the sublimation component. The cold trap is configured to be cooled to less than or equal to the sublimation temperature of the sublimation component.
B08B 9/027 - Nettoyage des surfaces intérieuresÉlimination des bouchons
B08B 7/00 - Nettoyage par des procédés non prévus dans une seule autre sous-classe ou un seul groupe de la présente sous-classe
B08B 7/04 - Nettoyage par des procédés non prévus dans une seule autre sous-classe ou un seul groupe de la présente sous-classe par une combinaison d'opérations
B08B 1/00 - Nettoyage par des procédés impliquant l'utilisation d'outils
B08B 1/04 - Nettoyage par des procédés impliquant l'utilisation d'outils, de brosses ou d'éléments analogues utilisant des éléments actifs rotatifs
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
A vacuum pump and a vacuum pump rotor blade that can effectively limit deposition of reaction products are provided. The vacuum pump includes a rotating shaft held rotationally, a drive mechanism for the rotating shaft, a first rotor blade made of a first material, a second rotor blade made of a second material having higher heat resistance than the first material, and disposed further toward a downstream side than the first rotor blade, and a casing enclosing the rotating shaft, the first rotor blade, and the second rotor blade. The second rotor blade is disposed, via a heat insulating portion, on the first rotor blade.
An object is to prevent backflow of particles during discharging. The vacuum pump includes: a casing having an inlet port and an outlet port; a stator column provided upright inside the casing; a rotating body having a shape surrounding an outer circumference of the stator column; and a magnetic bearing configured to magnetically levitate and support a rotating shaft of the rotating body, with the vacuum pump being configured to suck gas from the inlet port and exhaust the gas from the outlet port by rotation of the rotating body, wherein a projection portion for discharging an electric charge carried on the rotating body is provided at at least one of a first position formed on a back surface side of the rotating body, a second position formed on a bottom surface side of the rotating body, and a third position formed in an intermediate point of a flow passage of the gas of the rotating body.
[Problem] To provide a vacuum pump that is capable of preventing a material from being wasted, and is easily manufactured. [Solution] This vacuum pump is provided with: body casings 127 and 129; and a rotating body 103 installed in the body casings 127 and 129 to be freely rotatable. The rotating body 103 has a structure in which a second component is covered on the periphery of a first component arranged inside. The second component is formed by solidifying powder. The first component is formed of at least one of an extruded material, a casting material, and a forging material. The second component is formed of a green compact.
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
B22F 7/08 - Fabrication de couches composites, de pièces ou d'objets à base de poudres métalliques, par frittage avec ou sans compactage de pièces ou objets composés de parties différentes, p. ex. pour former des outils à embouts rapportés avec une ou plusieurs parties non faites à partir de poudre
B22F 10/14 - Formation d’un corps vert par projection de liant sur un lit de poudre
B22F 10/18 - Formation d’un corps vert par mélange de liant avec du métal sous forme de filaments, p. ex. par fabrication à filaments fondus
B22F 10/25 - Dépôt direct de particules métalliques, p. ex. dépôt direct de métal [DMD] ou mise en forme par laser [LENS]
B22F 10/28 - Fusion sur lit de poudre, p. ex. fusion sélective par laser [FSL] ou fusion par faisceau d’électrons [EBM]
A vacuum pump is provided that can decompose by-products into particles using radicals and effectively discharge the particles to outside. The vacuum pump includes: an outer cylinder having an inlet port and an outlet port; a rotor shaft rotationally supported inside the outer cylinder; a rotating body including a plurality of rotor blades fixed to the rotor shaft and is rotatable together with the rotor shaft, the vacuum pump further including at least one radical supply port capable of supplying a plurality of types of radicals into the outer cylinder; and a radical supply means for supplying radicals to the radical supply port.
A vacuum pump is provided that can remove deposits without overhauling and also detect completion of removal of deposits. A cleaning function portion for a cleaning function that performs cleaning of a deposit in a vacuum pump and a deposition sensor for a deposition detection function that detects the deposit are provided. A reading circuit portion and a cleaning completion determination circuit portion for a cleaning completion determination function that determines completion of cleaning are provided. The cleaning completion determination circuit portion outputs a cleaning completion signal indicating completion of the cleaning, based on a detection result of the deposition sensor.
[Problem] To provide a vacuum pump and a control device having a protective function that allows for prevention of rotor breakage due to heating, without measuring the temperature of a rotary blade. [Solution] This vacuum pump comprises a rotary blade that sends gas to an outlet, a motor that rotationally drives the rotary blade, a rotational speed measuring means that measures the rotational speed of the rotary blade, and a current measuring means that measures the current flowing through the motor. The vacuum pump also comprises: a first region defined as a region in which the measurement value of the current flowing through the motor is greater than or equal to a current specified value, and the measurement value of the rotational speed of the rotary blade is greater than or equal to a rotational speed specified value; a second region defined as a region in which the measurement value of the current flowing through the motor is smaller than the current specified value, or the measurement value of the rotational speed of the rotary blade is smaller than the rotational speed specified value; a region determination means that determines whether the measurement value of the rotational speed measured by the rotational speed measuring means and the measurement value of the current measured by the current measuring means belong to the first region or the second region; and a calculation means that calculates the degree of risk of failure of the vacuum pump over time on the basis of the result of the determination by the region determination means.
[Problem] To provide: a vacuum pump which can make a temperature distribution uniform in a circumferential direction of a stator that constitutes an exhaust part that cooperates with a rotor and exhausts a gas, and suppresses gas molecules from being accumulated in a pump flow passage; and a good thermal conductivity component. [Solution] A vacuum pump 100 comprises: a casing 210; a rotor shaft 113 which is rotatably supported in the casing 210; a rotor 103 which is fixed to the rotor shaft 113 and is rotatable together with the rotor shaft 113; a screw groove spacer 131 which constitutes the exhaust part which exhausts a gas in cooperation with the rotor 103; a heater spacer 260 which supports and heats the screw groove spacer 131; and at least one heating means 290 which is positioned in the heater spacer 260, wherein a good thermal conductivity component 280 is positioned on a heat path between the screw groove spacer 131 and the heating means 290, and has a higher thermal conductivity than the heater spacer 260.
[Problem] To provide a vacuum pump having high accuracy of reflecting gas molecules in each layer. [Solution] A vacuum pump provided with a blade exhaust mechanism in which gas is exhausted by fixed blades and rotary blades 102, wherein the rotary blades 102 and/or the fixed blades are three-dimensionally shaped by laminating shaping materials, and at least part of an inclined surface formed by the three-dimensional shaping is manufactured using a three-dimensional shaping 280, which is a means for improving accuracy of reflecting gas molecules. The reflection accuracy improvement means is dependent on the layering direction of the three-dimensional shaping, and the layering is performed in the radial direction of the blade exhaust mechanism.
[Problem] To provide a vacuum pump having high shaft support capability. [Solution] In the present invention, an axial-direction magnetic bearing 110 has a magnetic path separation structure. The axial-direction magnetic bearing 110 has: yokes 212A, 212B; coil parts 213A, 213B that generate magnetism in the yokes 212A, 212B; and a rotation-side non-magnetic body 201 that interrupts a magnetic path. In the magnetic path separation structure, axial attraction force-use magnetic path passage gaps 230A, 232A, 230B, 232B and the rotation-side non-magnetic body 201 separate axial attractive force-use magnetic paths 218A, 218B and a radial passive restoring force magnetic path 226.
[Problem] To propose: a vacuum pump with which it is possible to ascertain noise resistance etc., of a slave circuit and a master circuit performing control of the operation of each part included in the vacuum pump; and a control device used in such a vacuum pump. [Solution] The present invention comprises a control means 200 for controlling the operation of each part included in a vacuum pump 100, and is characterized in that: the control means 200 includes a slave circuit 201, 202 that is connected to each part and controls the operation of each part, and a master circuit 204 that is connected to the slave circuit 201, 202 and controls the slave circuit 201, 202; and the master circuit 204 periodically communicates with the slave circuit 201, 202 and acquires a history of communication states in the communication.
[Problem] To prevent the loosening of a bolt from thermal stress generated due to differences in the linear expansion coefficients of a plurality of components. [Solution] When components to be heated (components to be fastened) heated by internal heat are fastened with a bolt in a vacuum pump 100 according to an embodiment of the present invention, in order to absorb a thermal stress generated due to the difference in the linear expansion coefficients of both the components, a spacer 400 is installed in order to adjust the linear expansion coefficients. By installing this spacer 400, the thermal stress of a fastened portion of the bolt 300 can be suppressed by equalizing the linear expansion coefficient of the bolt 300 (the material of the bolt) with the linear expansion coefficient of the component to be heated plus the spacer 400.
[Problem] To provide a vacuum pump with which it is possible reduce the kinetic energy of a rotating body that acts on a touchdown bearing when a magnetic bearing is uncontrollable. [Solution] A vacuum pump (100) comprises a rotating body (103) on which a rotating blade (102) is provided, a rotor shaft (113) provided at the center of the rotating body, a magnetic bearing (114) for floatably supporting the rotor shaft, and touchdown bearings (155, 156) which are provided spaced apart from the rotor shaft to support the rotor shaft when the magnetic bearing is uncontrollable, wherein the vacuum pump includes a bearing protection structure for protecting the touchdown bearings, the bearing protection structure being configured using a projecting portion (160) provided on at least one of the rotating body and a component at the periphery of the rotating body, and when the rotor shaft touches down on the touchdown bearings, the rotating body and the component at the periphery of the rotating body come into contact by way of the projecting portion, thereby reducing the kinetic energy of the rotating body acting on the touchdown bearings.
[Problem] To provide a vacuum pump and an insulation member for use in the vacuum pump, that improve the rigidity and insulation effect of an insulation section and makes the temperature of the constituent components inside the pump easier to manage as intended. [Solution] A turbomolecular pump 100 comprising at least a cooling function comprises an insulation material 203 that is disposed in a threaded section 131 and has a hollow structure having a hollow 204A along the axial direction thereof.
A vacuum pump and a controller are provided with which state information of the vacuum pump is collected in a timely manner. In a controller, control portions control operating states of internal devices (such as a motor, a heater, and a cooling valve) located in a vacuum pump main body. An information collection portion collects the state information of the vacuum pump main body, and a recording processing portion records, in the non-volatile memory, the state information collected by the information collection portion. Also, the information collection portion collects the state information of the vacuum pump main body at a point in time at which a control portion switches the operating state of an internal device.
A vacuum pump and a vacuum pump component are provided that achieve the efficient heat dissipation of the rotor without changing the material or structure of stator blades or rotor blades. The vacuum pump includes a casing having a gas inlet port and a gas outlet port and a rotor configured to rotate in the casing. The vacuum pump is configured to exhaust gas from the gas inlet port to the gas outlet port by rotation of the rotor. The rotor substantially has the shape of a cylinder. A purge gas flows between the inner circumference surface of the rotor and the stator column that faces at least a part of the inner circumference surface of the rotor. A projection or a groove that disturbs the flow of the purge gas is provided in the flow passage of the purge gas.
A vacuum pump and a piping structural portion for a vacuum pump are provided that limit damage to a component connected to external piping and limit gas leakage even when the vacuum pump is displaced in a rotation direction due to damage to the vacuum pump. The vacuum pump draws in gas through an inlet port by rotation of a rotor and includes a casing, which rotatably houses the rotor, and a piping structural portion disposed in the casing. At least a part of the piping structural portion includes an elastic portion that is configured to elastically deform to absorb a displacement.
Provided are: a detoxification device with a structure that enables deposits to be cleanly removed without any left remaining from even a nozzle, etc. provided with a reduced diameter part and an expanded diameter part more toward a backflow side than the reduced diameter part; and a nozzle scraper to be used in the detoxification device. The present invention comprises: a nozzle (16) for a gas to be treated (PG) that comprises a reduced diameter part (16B) and an expanded diameter part (16C) provided more toward a backflow side than the reduced diameter part (16B), and that is connected to a top surface of a combustion chamber (11) so as to introduce the gas to be treated into the combustion chamber (11); a nozzle scraper (18A) that is provided so as to be capable of moving up and down in the expanded diameter part (16C), and that removes a deposit (17) which has adhered to the inside of the expanded diameter part (16C) and discharges the deposit to the combustion chamber (11); and a head scraper (18B) that removes a deposit (17) adhered to a bottom part of the nozzle scraper (18A) at a lowermost position of a movement range. The nozzle scraper (18A) is provided with a scraping part (18G) that removes the deposit (17) which has adhered to an inner wall of the expanded diameter part (16C), and a body part (protruding part) (18D) that is disposed at a bottom end of the reduced diameter part (16B) at an uppermost position of the movement range.
F23G 7/06 - Procédés ou appareils, p. ex. incinérateurs, spécialement adaptés à la combustion de déchets particuliers ou de combustibles pauvres, p. ex. des produits chimiques de gaz d'évacuation ou de gaz nocifs, p. ex. de gaz d'échappement
A vacuum pump which can decompose depositions by radicals and effectively exhaust them is provided. The vacuum pump including a casing, a stator disposed on an inner side of the casing, and a shaft rotatably supported with respect to the stator and also including a cylindrical rotor rotatably enclosed together with the shaft in the casing, in which an electrode portion, which is a part of a radical generating device that generates radicals, is disposed in the casing.
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04B 37/14 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour utilisation particulière pour obtenir un vide élevé
F04B 35/04 - Pompes à piston spécialement adaptées aux fluides compressibles et caractérisées par les moyens d'entraînement de leurs organes de travail ou par leur combinaison avec les machines motrices ou moteurs qui les entraînent ou bien par leurs adaptations à cet effet, non prévues ailleurs les moyens étant électriques
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F04D 29/70 - Grilles d'aspirationFiltresSéparateurs de poussièreNettoyage
F04C 29/00 - Parties constitutives, détails ou accessoires de pompes ou d'installations de pompage spécialement adaptées pour les fluides compressibles non couverts dans les groupes
79.
DETOXIFICATION DEVICE, DEPOSIT REMOVAL MEANS, AND DEPOSIT REMOVAL METHOD
The present invention efficiently removes deposit attached to a detoxification device. A detoxification device (4) is provided with a deposit removal means (40) for removing deposit (17) generated while detoxifying exhaust gas. The deposit removal means includes: a storage unit (P3) for storing liquid; a gas supply unit (P1) for supplying pressurized gas to the storage unit; and a valve (41) for spraying a fluid mixture of the liquid stored in the storage unit and the gas supplied by the gas supply unit.
F23J 1/02 - Appareils pour enlever les cendres, mâchefers ou scories des cendriers, p. ex. à l'aide de wagonnets ou de convoyeurs, en employant des dispositifs à succion
F23G 7/06 - Procédés ou appareils, p. ex. incinérateurs, spécialement adaptés à la combustion de déchets particuliers ou de combustibles pauvres, p. ex. des produits chimiques de gaz d'évacuation ou de gaz nocifs, p. ex. de gaz d'échappement
80.
VACUUM PUMP, AND HEAT TRANSFER SUPPRESSING MEMBER FOR VACUUM PUMP
[Problem] To provide a vacuum pump with which a degree of design freedom of members around a stator is improved and versatility is high, and with which transfer of heat can be further suppressed. [Solution] This vacuum pump comprises a base (129), a stator column (122) provided upright in a central position of the base, a rotor (103) supported with freedom to rotate relative to the stator column, a stator unit (131) installed on an outer circumferential side of the rotor, a heating means (195) for heating the stator unit, and a separating wall portion (152) which is installed between the base and the stator unit, and which forms, together with the stator unit, a flow passage (160) through which exhaust gas flows, wherein: at least a portion of the separating wall portion has an opposing region which opposes a specific region (R) formed on at least one of the base, the stator column, and the rotor; and a heat transfer suppressing member (155) for suppressing the transfer of heat from the opposing region to the specific region is provided in the opposing region.
A system for treating moisture in exhaust gas uses a cooling trap to remove the moisture contained in the exhaust gas. The system includes a tank that stores, as liquid water, the moisture flown out of the cooling trap and a water level measurement means that measures a water level in the tank. A pipe is connected to a drainage port for draining the water stored in the tank to outside and a valve is disposed in the pipe. Aa valve control means opens the valve to start drainage when the water level in the tank measured by the water level measurement means exceeds a first water level and closes the valve to stop the drainage when a second water level set lower than the first water level is reached. The second water level is provided at a position higher than the drainage port.
[Problem] To provide: a magnetic bearing device that is capable of measuring, with high sensitivity, the normal mode of vibration of a rotor in a levitation system using a magnetic bearing; and a vacuum pump. [Solution] In step 1, an operation in a second operation mode is started. In step 3, the gain of a controller 7 is increased to be greater than that of a first operation mode. In step 5, the natural frequency is measured in this state. The natural vibration to be measured is of a bending mode of a rotor 103, a normal mode of vibration of a rotary wing 102, a vibration mode caused by a stator, and a rigid body mode of the rotor 103. A computation process is performed by a central processing unit (CPU) of a control device. Alternatively, the computation process may be performed externally. In step 7 after the measurement of the natural frequency in step 5, the gain of the controller 7 is restored to that of the first operation mode. In step 9, the operation in the second operation mode is ended. Therefore, it is possible to detect a normal mode of vibration with high sensitivity.
[Problem] To provide a magnetic bearing device and a vacuum pump which, in a levitation system using a magnetic bearing, can recover highly efficiently in operation and safely from an abnormal state of oscillation or the like, which less likely erroneously detect an abnormality, and which are highly reliable. [Solution] The present invention comprises: a magnetic bearing that magnetically levitates and supports a rotary body; and a magnetic bearing controller for controlling the magnetic bearing, and further comprises: a first abnormality detection means for detecting an abnormality of control by the magnetic bearing controller on the basis of a predetermined first abnormality condition; a control parameter correction means for correcting, when an abnormality of the control is detected by the first abnormality detection means, a control parameter of the magnetic bearing controller while continuing to operate the magnetic bearing device; a second abnormality detection means for detecting the abnormality of the control by the magnetic bearing controller on the basis of a predetermined second abnormality condition having a higher degree of abnormality than that of the first abnormality condition; and a stopping means for stopping the operation of the magnetic bearing device when an abnormality of the control is detected by the second abnormality detection means.
[Problem] To provide a vacuum pump and a fixation component capable of suppressing accumulation of gas molecules in a gas flow path of a thread groove pump part and capable of suppressing accumulation of gas molecules in a gas flow path near the lowermost stage of fixed blades. [Solution] Provided is a vacuum pump 100 comprising: a casing 210; a rotor shaft 113; a plurality of stages of rotating blades 102; a plurality of stages of fixed blades 123 fixed to the casing 210; a thread groove spacer 131 arranged on the downstream side of the plurality of stages of rotating blades 102 and the plurality of stages of fixed blades 123, and constituting a part of a thread groove pump part; and a heater spacer 260 supporting and heating the thread groove spacer 131. The thread groove spacer 13 is provided with a pump side fixation part 138 constituting a part of the thread groove pump part, a fixed blade supporting part 135 supporting a fixed blade 123f of the lowermost stage among the plurality of stages of fixed blades 123, and a heat resistance increasing structure 137 limiting the transfer of heat from the pump side fixation part 138 to the fixed blade supporting part 135.
A vacuum pump that allows for timely inspection and replacement of a temperature adjustment means, prevents unexpected stopping, and limits the maintenance cost, and a controller that controls the vacuum pump are proposed. The present disclosure relates to a vacuum pump for exhausting gas from an apparatus, such as manufacturing equipment, subjected to exhaustion. The vacuum pump includes: a temperature adjustment means for causing a predetermined area of the vacuum pump to have a predetermined temperature; an output control means configured to operate the temperature adjustment means; and an information output means configured to output information regarding ON/OFF of the temperature adjustment means obtained from the output control means.
Provided is a vacuum pump that can realize energy conservation when performing abatement of exhaust gas.
Provided is a vacuum pump that can realize energy conservation when performing abatement of exhaust gas.
A vacuum pump that sucks in and exhausts exhaust gas includes a motor serving as a drive source, and a first controller that controls driving of the motor. The first controller monitors a state of the motor, and in a case in which the state of the motor is a specific state excluding when starting up and when stopped, outputs a specific signal (process signal) to an external entity.
F23G 7/06 - Procédés ou appareils, p. ex. incinérateurs, spécialement adaptés à la combustion de déchets particuliers ou de combustibles pauvres, p. ex. des produits chimiques de gaz d'évacuation ou de gaz nocifs, p. ex. de gaz d'échappement
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
A vacuum pump and a stator column wherein partition walls from an outer peripheral surface of the stator column toward an inner periphery of a rotor blade are provided at two spots, and a groove-shaped channel in a circumferential direction is provided. A sectional area of the channel changes in the circumferential direction. As a result, the pressure difference between a front and a rear of the partition wall on a downstream side is made uniform regardless of a location, and a flowrate of the gas passing through a gap between the partition wall on the downstream side and the inner peripheral surface of the rotor blade is made uniform regardless of the location. The change in the sectional area is achieved either by changing a depth of the groove-shaped channel or by changing an interval between the partition walls at the two spots.
Provided is a vacuum pump regarding which compression can be improved at low costs.
Included is a plurality of Siegbahn exhaust mechanisms in which a helical groove is provided to a stator disc. The Siegbahn exhaust mechanisms are provided on both faces of an upstream side and a downstream side of the stator disc. An end portion of the helical groove provided on the upstream side and a start portion of the helical groove provided on the downstream side are situated at least partially overlapping in a circumferential direction. A width of a channel of a switchback portion of the upstream side and the downstream side is equivalent or less than a depth of a channel of the Siegbahn exhaust mechanisms.
[Problem] To provide a vacuum pump having a structure suitable for supporting work to assemble the vacuum pump, an assembly method for the same, and a jig used in the assembly. [Solution] A vacuum pump 1 is provided with an abutting portion R which abuts a jig Q used to adjust an axial-direction height of a seal member L. During vacuum pump assembly to dispose a pump fixed component J to face an outer circumference of a rotating body 103, the jig is positioned by means of the abutting portion with the pump fixed component disposed on a base 129, and the axial-direction height of the seal member L is adjusted by pressing the pump fixed component in the direction of the base using a pressing portion Q1 of the positioned jig. By lowering the pump fixed component as a whole in the direction of the base by means of this adjustment, interference between stationary blades 123 that are stacked on the pump fixed component as portions of the pump fixed component, and moving blades 102 that project from the outer circumference of the rotating body toward the pump fixed component is avoided.
[Problem] To provide a vacuum pump that can be easily assembled and disassembled and is capable of sufficiently cooling a rotating body. [Solution] The present invention comprises: a housing 126 having one end side communicating with an intake port 101, and the other end side communicating with an exhaust port 133; a cooling means 130 provided to the housing 126; a rotating body 103 provided inside the housing 126; a plurality of fixed blades 123 provided between rotor blades; and a plurality of fixed blade spacers 125 supporting the fixed blades 123. In a fitting structure of an outer peripheral surface 125O of the fixed blade spacers 125 and the fixed blades 123 to an inner peripheral surface 126I of the housing 126, a gap is formed between the outer peripheral surface on the fixed blades 123 side and the inner peripheral surface of the housing 126 at the temperature during assembly work or lower, and an outer peripheral surface 123O of the fixed blades 123 and the inner peripheral surface 126I of the housing 126 are fitted with an interference fit at a target temperature which is higher than the temperature during assembly work.
A vacuum pump which suppresses occurrence of deposition caused by an exhaust gas is obtained. The vacuum pump includes: a pump portion including a shaft portion, a rotor disposed on an outer peripheral side of the shaft portion, and a stator disposed on the outer peripheral side of the rotor; a channel of the exhaust gas from the pump portion to an outlet port; and a shielding portion which suppresses contact of the exhaust gas with the shaft portion in the channel. Further, an end portion of the shielding portion has a surface opposed to the rotor.
[Problem] To provide a vacuum pump in which an alternating current magnetic field is employed to heat a rotating body, thereby preventing adhesion of product even when the rotating body is stopped, and enabling the efficiency of power consumption required for said heating to be improved. [Solution] A heating electromagnet 3A and a heating electromagnet 3B, each having two poles, are disposed facing one another across a rotating body 103, between a protective bearing 1 and an upper radial direction sensor 107. The heating electromagnet 3A and the heating electromagnet 3B correspond to a heating device 3, and an alternating current is supplied to the heating device 3 from a heating power source 21. The heating electromagnet 3A and the heating electromagnet 3B are energized by the alternating current, and an alternating current magnetic field is generated. With this configuration, the generated alternating current magnetic field intersects the rotating body 103. An eddy current is generated around the intersecting alternating current magnetic field. Furthermore, the rotating body 103 is heated by the eddy current. Deposition of product can be further prevented by means of this heating, and an increase in the operating efficiency of the pump can be achieved.
[Problem] To obtain a vacuum pump with which gas flow rate restrictions due to temperature control are alleviated by appropriately managing the temperature of a gas flow passage. [Solution] A cooling pipe 305 adjusts the temperature of the gas flow passage. A temperature sensor 401 is disposed in a position closer to the gas flow passage than the cooling pipe 305, a temperature sensor 402 is disposed in a position closer to the cooling pipe 305 than the gas flow passage, and a control device 200 controls (an open/closed valve of) the cooling pipe 305 on the basis of a sensor signal from the temperature sensor 401 and a sensor signal from the temperature sensor 402 such that the temperature of the gas flow passage approaches a prescribed gas flow passage target temperature.
[Problem] In order to prevent an excessive temperature increase in dry pump piping without providing a cooling apparatus or the like, an exhaust pipe that prevents product attachment, an exhaust apparatus, and a product attachment preventing method are provided. [Solution] An excessive temperature increase occurs in a portion indicated by "X" in a dry pump 100. It is believed that a product attached to this portion is the cause of the excessive temperature increase. Thus, in order to minimize the attachment of the product in this portion, an inactive gas is introduced whereupon a swirl flow is caused. The effect of the swirl flow (see FIG. 4) causes components contained in the gas to gather at a central portion, thereby making the components less likely to attach to the wall surface of an exhaust pipe 18. Most of the components pass through the exhaust pipe 18 and are sent to an abatement apparatus 19.
H01L 21/31 - Traitement des corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour former des couches isolantes en surface, p. ex. pour masquer ou en utilisant des techniques photolithographiquesPost-traitement de ces couchesEmploi de matériaux spécifiés pour ces couches
F27D 17/00 - Dispositions pour l'utilisation de la chaleur perdueDispositions pour l'utilisation ou pour l'élimination des gaz résiduaires
H01L 21/205 - Dépôt de matériaux semi-conducteurs sur un substrat, p. ex. croissance épitaxiale en utilisant la réduction ou la décomposition d'un composé gazeux donnant un condensat solide, c.-à-d. un dépôt chimique
95.
RARE GAS RECOVERY SYSTEM AND RARE GAS RECOVERY METHOD
[Problem] To provide a rare gas recovery system which can recover a rare gas at low cost and in a simple manner. [Solution] The rare gas recovery system is provided with: a turbo molecular pump 100 in which rotary wings 102 and fixed wings 123 are stacked alternately; a first vacuum chamber 11 provided on the upstream side of the turbo molecular pump 100; a second vacuum chamber 12 provided on the downstream side of the turbo molecular pump 100; a first gas discharge port 134 provided in the first vacuum chamber 11; a second gas discharge port 136 provided in the second vacuum chamber 12; and a gas inlet port 131 provided in either one of the first vacuum chamber 11 or the second vacuum chamber 12.
B01D 53/00 - Séparation de gaz ou de vapeursRécupération de vapeurs de solvants volatils dans les gazÉpuration chimique ou biologique des gaz résiduaires, p. ex. gaz d'échappement des moteurs à combustion, fumées, vapeurs, gaz de combustion ou aérosols
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
96.
VACUUM EXHAUST APPARATUS AND VACUUM PUMP USED THEREIN
A vacuum exhaust apparatus capable of accurately and rapidly adjusting the pressure in an exhaust chamber and a vacuum pump used therein are provided. A vacuum pump includes a rotor that rotates to exhaust an exhaust chamber and a casing having an inlet port. A valve is located between the inlet port of the vacuum pump and an outlet port of the exhaust chamber. A controller performs control such that the pressure in the exhaust chamber matches a target value. The controller adjusts the opening degree of the valve when the absolute value of the difference between the pressure in the exhaust chamber and the target value is greater than a predetermined value, and adjusts the rotational speed of the rotor of the vacuum pump when the absolute value of the difference between the pressure in the exhaust chamber and the target value is less than the predetermined value.
F04B 49/22 - Commande des "machines", pompes ou installations de pompage ou mesures de sécurité les concernant non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes par clapets
A vacuum pump includes a rotor provided with a plurality of rotor blades and a rotor cylinder portion, a driving portion, a bearing, stator blades, a thread groove stator that is disposed downstream of the stator blades and has an inner peripheral surface facing an outer peripheral surface of the rotor cylinder portion, and a heat insulating wall disposed downstream of the thread groove. The heat insulating wall includes a ring-shaped annular portion, and a substantially cylindrical wall portion extending from an inner portion of the annular portion in the radial direction to the upstream side and forming a flow path on the outer peripheral surface side. A first corner portion is formed between an upstream-side surface of the annular portion and the outer peripheral surface of the wall portion, the first corner portion being formed in an arc shape.
[Problem] Proposed are a vacuum pump, a spacer, and a casing which can suppress an influence of heat from a to-be-exhausted device on a rotary wing while suppressing man hours and costs required for attachment to the to-be-exhausted device. [Solution] A vacuum pump 100 according to the present invention is characterized by having a rotary wing 102 and a fixed wing 123 which are axially arranged alternately in multiple stages in a casing 127 having an air intake port 101, and comprising a heat transfer suppression means which suppresses the transfer of heat, on the intake port 101 side, from the casing 127 to the fixed wing 123.
An electromagnet unit in which influence of a noise on a displacement sensor is suppressed and which can be installed in a space-saving manner and a vacuum pump including the electromagnet unit are provided. An electromagnet unit includes a radial electromagnet which controls a shaft to a predetermined position, a radial sensor which detects a position of the shaft, and a printed board interposed between the radial electromagnet and the radial sensor and on which a wiring pattern for sensor connecting coils of the corresponding two radial sensors to each other and a wiring pattern connecting coils of the corresponding two radial electromagnets to each other are provided. The wiring pattern for sensor and the wiring pattern for electromagnet are disposed so as not to overlap when seen from the axial direction.
H02K 11/01 - Association structurelle de machines dynamo-électriques à des organes électriques ou à des dispositifs de blindage, de surveillance ou de protection pour le blindage contre les champs électromagnétiques
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F16C 32/04 - Paliers non prévus ailleurs faisant usage de moyens de support magnétiques ou électriques
H02K 11/21 - Dispositifs pour détecter la vitesse ou la position, ou actionnés par des valeurs de ces variables
[Problem] To provide a gas processing system that can accurately detect an internal leak in a three-way valve, and that can suppress leakage of exhaust gas to a bypass line. [Solution] A gas processing system 10 comprises a main exhaust line 22 that guides exhaust gas to a removal device 40, a bypass line 30 that guides the exhaust gas to an emergency removal device 50, an upstream exhaust line 21, and a three-way valve 23 that can switch the flow of exhaust gas from the upstream exhaust line 21 to the main exhaust line 22 or the bypass line 30. The bypass line 30 has a gate valve 33, a gas introduction tube 34 for introducing a second gas, and a pressure gauge 35 for detecting pressure, and when exhaust from the three-way valve 23 is to the main exhaust line 22, in a state with the second gas introduced from the gas introduction tube 34 to a closed channel C between the gate valve 33 and the three-way valve 23, an internal leak in the three-way valve 23 can be detected by a change in the pressure detected by the pressure gauge 35.
H01L 21/02 - Fabrication ou traitement des dispositifs à semi-conducteurs ou de leurs parties constitutives
F17D 5/00 - Protection ou surveillance des installations
G01M 3/26 - Examen de l'étanchéité des structures ou ouvrages vis-à-vis d'un fluide par utilisation d'un fluide ou en faisant le vide par mesure du taux de perte ou de gain d'un fluide, p. ex. avec des dispositifs réagissant à la pression, avec des indicateurs de débit
