The present invention relates to a picker hand for an electronic component handler. The picker hand for an electronic component handler, according to the present invention, comprises: a plurality of pickers which can grip or release electronic components; a rotating mechanism which rotates the plurality of pickers along with each other; and a support frame which supports the plurality of pickers and the rotating mechanism, and when the rotating mechanism operates, the plurality of pickers rotate together relative to the support frame. According to the present invention, the position of the electronic component can be set more precisely, and production costs can be reduced.
The present invention relates to a picker cleaning device for an electronic component handler and an electronic component handler. According to the present invention, proposed is a picker device comprising: a support roller supporting a cleaning roll on which an adhesive tape for adhering to and cleaning foreign substances stuck to a picker is wound; a recovery roller disposed to be spaced apart from the support roller and winding and recovering the adhesive tape unwound from the support roller; a rotator rotating the recovery roller; and a support plate disposed between the support roller and the recovery roller and supporting the bottom surface of the adhesive tape to prevent the adhesive tape from sagging downward when the picker descends and presses the adhesive tape downward. Accordingly, contamination of electronic components by the picker is prevented, thereby improving reliability of a process of processing the electronic components.
The present invention relates to a test table of a handler for testing electronic components, and a handler to which the corresponding test table is applied. A seating chuck of the test table according to the present invention has a cooling flow path through which a cooling fluid can move, an inlet and an outlet of the cooling flow path are disposed adjacent to each other, the cooling flow path can be divided, on the basis of a middle section located in the middle on the cooling flow path leading to the inlet and the outlet, into a first section extending from an inlet to the middle section and a second section extending from the middle section to an outlet, the first section and the second section are disposed adjacent and parallel to each other, and the direction in which the cooling fluid moves in the first section is opposite to the direction in which the cooling fluid moves in the second section. According to the present invention, electronic components seated on the seating chuck can be evenly cooled, thereby improving test reliability.
The present invention relates to a handler for testing electronic components and a test support unit applied to the handler for testing electronic components. According to the present invention, a test support unit for expanding the processing capacity of a handler for testing electronic components can be applied, and the test support unit includes an extension rail for guiding the movement of a transport table for transporting the electronic components. The present invention has the effect that processing capacity can be optimized by considering the distribution time of electronic components and the testing time of the electronic components.
The present invention relates to a test table for testing electronic components. The test table for testing electronic components according to the present invention comprises a table body supporting electronic components loaded on the top surface thereof, wherein the table body includes vacuum flow paths and cooling flow paths formed therein, and each of the vacuum flow paths has a pneumatic tank with an expanded inner diameter. According to the present invention, the temperature of the electronic components can be controlled relatively quickly, thereby increasing throughput and improving the reliability of the test.
The present invention relates to a handler for testing an electronic component. The handler for testing an electronic component, according to the present invention, has a supply/retrieval apparatus for supplying or retrieving a shield cover that shields the electronic component from foreign substances generated during an operation process, or has a cleaning apparatus for cleaning the upper surface of a test table before the test table loads the electronic component. When the present invention is applied, test errors due to foreign substances are reduced, thereby ensuring test reliability.
B24B 27/033 - Autres machines ou dispositifs à meuler pour le meulage d'une surface à des fins de nettoyage, p. ex. pour décalaminer ou corriger par meulage des défauts de la surface
B08B 1/14 - LingettesÉléments absorbants, p. ex. écouvillons ou éponges
The present invention relates to a handler for testing electronic components. The handler for testing electronic components, according to the present invention, has a supply/retrieval mechanism, which supplying, to a test table, a support tray that supports a repair pad for repairing test pins of a test board, or retrieves the support tray from the test table. When the present invention is applied, the test pins can be repaired even during operation, and thus reliability of a test can be ensured and the time required for repairing the test pins can be minimized.
G01R 35/00 - Test ou étalonnage des appareils couverts par les autres groupes de la présente sous-classe
G01R 31/28 - Test de circuits électroniques, p. ex. à l'aide d'un traceur de signaux
B08B 1/14 - LingettesÉléments absorbants, p. ex. écouvillons ou éponges
B08B 5/04 - Nettoyage par aspiration, avec ou sans action auxiliaire
B24B 27/033 - Autres machines ou dispositifs à meuler pour le meulage d'une surface à des fins de nettoyage, p. ex. pour décalaminer ou corriger par meulage des défauts de la surface
B24B 41/06 - Supports de pièces, p. ex. lunettes réglables
The present invention relates to an electronic component test handler. The electronic component test handler, according to the present invention, has a repair device, for repairing a test pin of a test board, loaded on a test table so as to repair the test pin. When the present invention is applied, test reliability may be guaranteed, and the time required for test pin repair may be minimized.
G01R 31/28 - Test de circuits électroniques, p. ex. à l'aide d'un traceur de signaux
B24B 27/033 - Autres machines ou dispositifs à meuler pour le meulage d'une surface à des fins de nettoyage, p. ex. pour décalaminer ou corriger par meulage des défauts de la surface
B24B 41/06 - Supports de pièces, p. ex. lunettes réglables
B08B 1/14 - LingettesÉléments absorbants, p. ex. écouvillons ou éponges
B08B 5/04 - Nettoyage par aspiration, avec ou sans action auxiliaire
The present invention relates to a handler for testing electronic components. According to the present invention, the handler for testing electronic components loads, on a test table, a repair plate for repairing a test pin of a test board, so as to repair the test pin. When the present invention is applied, reliability of a test can be guaranteed, and the time required for repairing a test pin can be minimized.
G01R 31/28 - Test de circuits électroniques, p. ex. à l'aide d'un traceur de signaux
B24B 27/033 - Autres machines ou dispositifs à meuler pour le meulage d'une surface à des fins de nettoyage, p. ex. pour décalaminer ou corriger par meulage des défauts de la surface
B24B 41/06 - Supports de pièces, p. ex. lunettes réglables
B08B 1/14 - LingettesÉléments absorbants, p. ex. écouvillons ou éponges
B08B 5/04 - Nettoyage par aspiration, avec ou sans action auxiliaire
The present invention relates to a handler for handling dies and wafers The handler according to the present invention can support a test for singulated electronic components or a test for wafer-state electronic components, using one test table. According to the present invention, the cost of establishing a system for testing electronic components can be reduced.
The present invention relates to a handler for electronic component testing. A handler for electronic component testing, according to the present invention, comprises: a test table that moves between a placement space and a test space; an indicator that is disposed so as to be fixed to the upper side of the placement space; a moving camera that photographs the indicator while moving together with the test table; and a controller that identifies the position of the test table from an image photographed by the moving camera. According to the present invention, the test table and a test board are precisely matched as a result of the accurately tracking of the position of the test table, thus ensuring test reliability.
H01L 23/00 - Détails de dispositifs à semi-conducteurs ou d'autres dispositifs à l'état solide
G03B 30/00 - Modules photographiques comprenant des objectifs et des unités d'imagerie intégrés, spécialement adaptés pour être intégrés dans d'autres dispositifs, p. ex. des téléphones mobiles ou des véhicules
H10B 80/00 - Ensembles de plusieurs dispositifs comprenant au moins un dispositif de mémoire couvert par la présente sous-classe
The present invention relates to a handler for electronic component testing. The handler for electronic component testing according to the present invention comprises a cold air control heater which controls the temperature of a cooling fluid inputted to a cooling flow path of a test table. The present invention can ensure test reliability, since the electronic component being tested can be quickly and appropriately cooled.
The present invention relates to a picker control system of a handler for testing electronic components, and a picker hand. According to the present invention, when lowering a picker, the picker is controlled to descend at a preset speed when in a first descent section, and descend while maintaining a preset pressure when in a second descent section lower than the first descent section. In the event of a power outage, a return mechanism automatically disconnects the picker from the electronic components. Applying the present invention has the effect of preventing damage to the electronic components by means of the picker.
The present invention relates to a handler for testing electronic components. The handler for testing electronic components according to the present invention is provided with: a sealed chamber inside which a rearrangement section, a connection section, and a movement section that are not an unloading section are accommodated; and an opening/closing device that can automatically open and close an opening hole in the sealed chamber only when necessary. According to the present invention, the air quality in a test space can be strictly managed, and thus damage to semiconductor devices or test errors caused by foreign substances can be prevented.
The present invention relates to a handler for processing electronic components. According to the present invention, the handler comprises: a first handling unit for handling a first loading element on which electronic components are held in place by adhesion; a second handling unit for handling a second loading element where the electronic components are seated in loading recesses to be held in place; and a moving hand for moving the electronic components on the first loading element to the second loading element. The present invention allows for a reduction in the costs required to construct a full system for testing electronic components.
The present invention relates to a handler for electronic component testing. According to the present invention, the handler for electronic component testing controls that a controller identifies specific test pins corresponding to specific terminals of electronic components from among test pins captured by a confirmation camera so as to use a rearrangement device and a moving device in correspondence to the positions of the specific test pins, thereby rearranging the electronic components loaded on a test table. According to the present invention, the electrical connection between electronic components and a tester can be more precisely performed, thereby ensuring test reliability.
The present invention relates to a handler for testing electronic components. The handler for testing electronic components according to the present invention comprises: a test table on which electronic components to be tested are loaded; and a relocation mechanism for relocating the electronic components in a temporary zone of the test table to a designated position zone. The test table has a first unit region and a second unit region on which the electronic components are loaded. The first unit region corresponds to a first test region of a tester, the second unit region corresponds to a second test region of the tester, and the distance between the first unit region and the second unit region is greater than the distance between the electronic components loaded on the first unit region or the second unit region. When the present invention is applied, electrical connections between the electronic components and the test can be made accurately even when thermal expansion occurs.
The present invention relates to a handler for testing an electronic component. According to the present invention, the handler for testing an electronic component comprises: a supply and recovery device which supplies an electronic component that requires testing or retrieves an electronic component that has completed testing; a connection device which electrically connects the electronic component requiring a test and supplied from the supply and recovery device to a tester so that the electronic component can be tested, and sends the tested electronic component to the supply and recovery device; and a relay device for relaying the electronic component between the supply and recovery device and the connection device, wherein the connection device has a re-seating mechanism for re-seating a semiconductor element, loaded in a temporary position on a test chuck, into a correct position. According to the present invention, it is possible to provide a new type of handler capable of improving the reliability of a test by precisely arranging an electronic component and electrically connecting the electronic component and a tester more precisely.
G01R 31/28 - Test de circuits électroniques, p. ex. à l'aide d'un traceur de signaux
H01L 21/677 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le transport, p. ex. entre différents postes de travail
The present invention relates to an electronic component test handler. According to the present invention, the electronic component test handler comprises: a test table on which electronic components are loaded; and a rearrangement mechanism for rearranging the electronic components, loaded on temporary sections of the test table, to the correct sections. The rearrangement mechanism includes: a rearrangement picker that can grip electronic components; a rearrangement camera that is spaced apart from the rearrangement picker; and an elevator that raises and lowers the rearrangement picker to allow the rearrangement picker to grip electronic components that are on the test table or place electronic components onto the test table. When the present invention is implemented, the reliability of the connection between electronic components and a tester can be improved while precisely rearranging the electronic components during a process of rearranging the electronic components.
G06T 7/70 - Détermination de la position ou de l'orientation des objets ou des caméras
H04N 7/18 - Systèmes de télévision en circuit fermé [CCTV], c.-à-d. systèmes dans lesquels le signal vidéo n'est pas diffusé
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
20.
HANDLER FOR TESTING ELECTRONIC COMPONENT AND METHOD FOR REARRANGING ELECTRONIC COMPONENT OF HANDLER FOR TESTING ELECTRONIC COMPONENT
The present invention relates to a handler for testing an electronic component. According to the present invention, the handler comprises: a test table on which electronic components are loaded; and a rearrangement mechanism for rearranging the electronic components loaded in the temporary areas of the test table to fixed position areas, wherein the rearrangement mechanism includes a rearrangement picker capable of gripping the electronic components, a rearrangement camera disposed to be spaced apart from the rearrangement picker, and a rotator for rotating the rearrangement picker. When the present invention is applied, the processing capacity of the handler can be improved by reducing the time required for rearranging the electronic components.
G01R 31/28 - Test de circuits électroniques, p. ex. à l'aide d'un traceur de signaux
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H01L 21/677 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le transport, p. ex. entre différents postes de travail
H01L 21/68 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le positionnement, l'orientation ou l'alignement
The present invention relates to a technology for rearranging an electronic device. According to the present invention, an image obtained by capturing an identification mark of an electronic device loaded on a test table is analyzed to calculate a temporary area for the electronic device and then calculate a movement distance (including rotational movement or horizontal movement) for rearranging the electronic device. Therefore, precise rearrangement of an electronic device is possible, and thus, the reliability of an electrical connection between the electronic device and a tester is improved.
G01R 31/28 - Test de circuits électroniques, p. ex. à l'aide d'un traceur de signaux
G06T 7/70 - Détermination de la position ou de l'orientation des objets ou des caméras
H01L 21/677 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le transport, p. ex. entre différents postes de travail
22.
HANDLER FOR TESTING ELECTRONIC COMPONENTS, AND METHOD THEREOF FOR ALIGNING ELECTRONIC COMPONENTS
The present invention relates to a handler for testing electronic components and a method for aligning the electronic components. The present invention comprises: a transfer shuttle for transferring an electronic component; a test table on which the electronic component is loaded; a second hand for moving the electronic component between a transfer table of the transfer shuttle and the test table, wherein the second hand corrects the position of the electronic component on the transfer table so as to move the electronic component to a correct position area of the test table. Applying the present invention reduces the time required to position electronic components on the test table and thus can improve the processing capacity of the handler.
G01R 31/28 - Test de circuits électroniques, p. ex. à l'aide d'un traceur de signaux
G06T 7/70 - Détermination de la position ou de l'orientation des objets ou des caméras
H01L 21/677 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le transport, p. ex. entre différents postes de travail
G01N 21/95 - Recherche de la présence de criques, de défauts ou de souillures caractérisée par le matériau ou la forme de l'objet à analyser
G01N 21/88 - Recherche de la présence de criques, de défauts ou de souillures
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
Provided is a pushing device for a test handler, the device comprising: a pusher for pushing a semiconductor element so as to electrically connect the semiconductor element and a tester; a mounting plate on which the pusher is mounted; an elastic member for elastically supporting the pusher on the mounting plate; a cooling module for supplying cold air to a contact part of the pusher, the contact part being a part at which the pusher comes into contact with the semiconductor element positioned at the front; and a driving source for forwardly pushing or backwardly pulling the mounting plate so as to allow the pusher to push or release the semiconductor element, wherein the pusher has a cooling space therein in order to send, to the contact part, the cold air supplied by the cooling module, and the cooling space is opened rearwards such that the cold air of a refrigerant passes through a heat pipe or directly affects the contact part of the pusher, thereby quickly removing the heat generated from the semiconductor element, and improving the efficiency of heat removal since the cold air is not taken away by the other components.
The present invention relates to a handler for testing an electronic component. The handler for testing an electronic component, according to the present invention, is provided with a cooling pocket in a pushing head of a connection unit, which electrically connects the electronic component to a test socket of a tester, and has a fluid supplier for supplying cooling fluid to the inside of the cooling pocket. According to the present invention, since the temperature required for testing the electronic component can be maintained by the cooling fluid supplied to the inside of the cooling pocket, test reliability is improved.
G01R 31/28 - Test de circuits électroniques, p. ex. à l'aide d'un traceur de signaux
G01R 31/26 - Test de dispositifs individuels à semi-conducteurs
G01R 1/04 - BoîtiersOrganes de supportAgencements des bornes
H01L 35/30 - DISPOSITIFS À SEMI-CONDUCTEURS; DISPOSITIFS ÉLECTRIQUES À L'ÉTAT SOLIDE NON PRÉVUS AILLEURS - Détails fonctionnant exclusivement par effet Peltier ou effet Seebeck caractérisés par les moyens d'échange de chaleur à la jonction
25.
TEST TRAY FOR TEST HANDLER AND INTERFACE BOARD FOR TESTER
The present invention relates to a test tray for a test handler and an interface board for a tester. According to the present invention, a secondary calibration hole is additionally formed in an insert of a test tray, and a secondary calibration pin is provided in a socket guider of an interface board. In addition, an alignment hole is additionally formed in a test socket of an interface board, and an alignment pin is provided in the interface board. Accordingly, the position of an insert can be calibrated in divided steps. Furthermore, a wall surface forming a calibration hole of an insert body is cut, and an incision hole is formed around the calibration hole. According to the present invention, the position of an insert is calibrated sequentially in divided steps, thereby enabling very accurate calibration of the position of an insert. In addition, a calibration pin is prevented from being fitted into a calibration hole, thereby enabling formation of a smaller calibration hole and finer calibration of the position of an insert.
G01R 31/26 - Test de dispositifs individuels à semi-conducteurs
G01R 31/27 - Test de dispositifs sans les extraire physiquement du circuit dont ils font partie, p. ex. compensation des effets dus aux éléments environnants
G01R 1/04 - BoîtiersOrganes de supportAgencements des bornes
brevets