[Problem] To provide a valve device in which valve opening time and valve closing time are adjustable to be close to each other.
[Problem] To provide a valve device in which valve opening time and valve closing time are adjustable to be close to each other.
[Solution] The valve device comprises: a valve body defining a flow path; a diaphragm 4 as a valve element for opening and closing the flow path; a stem 7 for making the diaphragm 4 separate and seat on a valve seat 3; a coil spring 15 as a spring member for constantly biasing the stem 7 in a valve-closing direction; a piston 30,36 connected to the stem 7; and an actuator body 20 for slidably accommodating the piston 30,36, wherein the inside of the actuator body 20 is partitioned by the piston 30,36 into a pressure chamber 31,37 to which a driving gas DG is supplied and an atmospheric chamber 32,38 communicating with the atmosphere via vent holes 21a, 21b formed in the actuator body 20, and the actuator body 20 includes an adjustment mechanism 50 capable of restricting the ventilation amounts of the vent holes 21a, 21b so as to adjust a valve closing time required for valve closing and a valve opening time required for valve opening to be equal to each other.
F16K 31/122 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide le fluide agissant sur un piston
F16K 31/42 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide et au moyen d'organes actionnés électriquement dans les canalisations d'entrée ou de refoulement du moteur à fluide
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
[Problem] To provide a diaphragm valve that can avoid an excessive decrease in Cv value when the diaphragm valve is used in a high-temperature environment. [Solution] A diaphragm valve 1 comprises an annular valve seat 20 and a support member 3 provided with an annular seat installation groove 8 for installing the valve seat 20, the support member 3 having an inner-circumferential-side crimping section 7A and an outer-circumferential-side crimping section 7B that face each other to form the seat installation groove 8, wherein the valve seat 20 has a tapered surface 20e, which is inclined according to an inclined portion 7Bb occurring to the outer circumferential side crimping section 7B due to plastic deformation and engages with the inclined portion 7Bb.
F16K 7/12 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol
A flow rate control device includes a piezo valve having a metal diaphragm valve element that is opened and closed by a piezo actuator, a strain sensor for detecting a displacement amount of the piezo actuator, and a control circuit for receiving a detection signal of the strain sensor and controlling a drive voltage of the piezo actuator, wherein the control circuit is configured so as, by applying a positive drive voltage one or more times and then applying a negative drive voltage a plurality of times to the piezo actuator at a desired timing, to bring an amount of strain detected by the strain sensor close to zero when no drive voltage is applied to the piezo actuator.
F16K 37/00 - Moyens particuliers portés par ou sur les soupapes ou autres dispositifs d'obturation pour repérer ou enregistrer leur fonctionnement ou pour permettre de donner l'alarme
F16K 7/14 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat
F16K 31/00 - Moyens de fonctionnementDispositifs de retour à la position de repos
A pressure sensor that can prevent application of excessive stress on a port and detect fluid differential pressure accurately. A base includes a sensor that detects a pressure difference between a first fluid and a second fluid. A first port is attached to the base and has a first flow path through which the first fluid is introduced. A second port is attached to the base and has a second flow path through which the second fluid is introduced. The outer diameter of the first port is equal to the outer diameter of the second port, and the diameter of the first flow path is smaller than the diameter of the second flow path.
G01L 13/02 - Dispositifs ou appareils pour la mesure des différences entre plusieurs valeurs de la pression des fluides en utilisant des organes ou des pistons élastiquement déformables comme éléments sensibles
G01L 19/00 - Détails ou accessoires des appareils pour la mesure de la pression permanente ou quasi permanente d'un milieu fluent dans la mesure où ces détails ou accessoires ne sont pas particuliers à des types particuliers de manomètres
G01L 19/06 - Moyens pour empêcher la surcharge ou l'influence délétère du milieu à mesurer sur le dispositif de mesure ou vice versa
A solenoid valve 1 comprises: an electromagnetic coil 11; a plunger 17 that is operated by a magnetic field which is generated when a current is supplied to the electromagnetic coil 11; a valve part 20 that is connected to the plunger 17 and of which the valve opening/closing degree to a flow passage is adjusted according to the operation of the plunger 17; and an electrical adjustment unit 30 that has a plurality of resistance elements, and switch units for resistance switching that are provided so as to correspond respectively to the resistance elements and that switch between combinations of the resistance element, the electrical adjustment unit adjusting a current supplied to the electromagnetic coil 11.
F16K 31/06 - Moyens de fonctionnementDispositifs de retour à la position de repos électriquesMoyens de fonctionnementDispositifs de retour à la position de repos magnétiques utilisant un aimant
Provided are a valve and a leak detection method, with which a leak can be easily detected. A valve 1 comprises: a body 11 in which an inflow passage 11b and an outflow passage 11c are formed and which is provided with a seat 11E; a diaphragm 12 that is brought into contact with a sheath pipe 22 and separated from a valve seat to communicate the inflow passage 11b and the outflow passage 11c and shutoff the communication thereof; the sheath pipe 22, which has a leading end part 22C positioned in the outflow passage 11c; and a temperature sensor 24 that is inserted into the sheath pipe 22 and has a leading end 24A abutting the leading end part 22C of the sheath pipe 22. The leading end part 22C of the sheath pipe 22 and the leading end 24A of the temperature sensor 24 are positioned near the seat 11E.
F16K 37/00 - Moyens particuliers portés par ou sur les soupapes ou autres dispositifs d'obturation pour repérer ou enregistrer leur fonctionnement ou pour permettre de donner l'alarme
An actuator includes: a casing including a first pressing portion; a drive member including a second pressing portion, the drive member being driven by an operating fluid flowing from outside; and a sealing member disposed to be sandwiched between the casing and the drive member in a direction perpendicular to a moving direction of the drive member, the sealing member sealing a pressure chamber. The first pressing portion and the second pressing portion face each other in the moving direction of the drive member. The sealing member is positioned between the first pressing portion and the second pressing portion. The second pressing portion moves toward and away from the first pressing portion as the drive member moves, and when the second pressing portion is positioned close to the first pressing portion, the sealing member is configured to be sandwiched between the first pressing portion and the second pressing portion.
Provided is a joint structure and a fluid control device with which pipes can be easily connected to a flow path block in which a plurality of fluid passages are formed. A joint structure 10 for connecting pipes 2A-2D to a flow path block 3, in which a plurality of fluid passages opened on the same surface are formed, comprises: a flange 11 in which a first bolt screwing hole 11c, a second bolt screwing hole 11d, a first sleeve insertion hole 11e, and a second sleeve insertion hole 11f are formed; a first sleeve 13 and a second sleeve 14 that are fluid passages of which the interiors communicate with the fluid passages in the flow path block 3, the pipes 2A-2D being connected to the first sleeve 13 and the second sleeve 14, and the first sleeve 13 and the second sleeve 14 being inserted into the first sleeve insertion hole 11e and the second sleeve insertion hole 11f in the flange 11; and a first bolt 17 and a second bolt 18 that are screwed into the first bolt screwing hole 11c and the second bolt screwing hole 11d in the flange 11, the first bolt 17 and the second bolt 18 fixing the flange 11 to the same surface of the flow path block 3.
An object of the invention is to provide a valve device and the like including an inner disk that can be easily assembled, in which a Cv value is guaranteed and the inner disk is provided under a lower risk of being damaged. The valve device includes a valve body including first flow path, and a valve chamber; an inner disk including an inner side annular portion that is disposed in a periphery of a first opening, an outer side annular portion, and a connection portion; a diaphragm coming into contact with and separated from an annular upper side seat provided at an upper end portion of the inner side annular portion to cause interruption and communication between the flow paths; and an annular lower side seat that is provided at a lower end portion of the inner side annular portion.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
Provided is a safety valve capable of minimizing creep of a fusible alloy and promoting smooth flow of the fusible alloy when molten, even in a safety valve in which a member for closing off a flow path presses the fusible alloy directly. In the present invention: a fusible alloy 6 is arranged between a pressing cap 4 and an occlusion member 3 which blocks the flow of a fluid flowing from a discharge passage 91 of a fluid device 9; a reservoir part 8 where the molten fusible alloy 6 is to be stored is formed in at least one of the occlusion member 3 and the pressing cap 4; two plate members 5A, 5B, which are formed with holes of which the perforation positions do not overlap, are disposed between the reservoir part 8 and the fusible alloy 6; and a cutout part 51, which communicates between the holes 50 of the different plate members 5A, 5B, is formed in at least one surface of the abutting surfaces of the plate members 5A, 5B.
F16K 17/38 - Soupapes ou clapets de sûretéSoupapes ou clapets d'équilibrage fonctionnant sous l'action de circonstances extérieures, p. ex. un choc, un changement de position d'une température excessive
11.
DIAPHRAGM, VALVE COMPRISING SAME, AND MANUFACTURING METHOD FOR DIAPHRAGM
This flat plate-shaped diaphragm comprises: an annular peripheral edge part that has a uniform thickness; a pressed part that is positioned on the inner peripheral side of the peripheral edge part so as to be pressed; and an elastic deformation part that is positioned between the peripheral edge part and the pressed part so as to elastically deform when the pressed part is pressed. The elastic deformation part is formed such that the thickness thereof is less than the thicknesses of the peripheral edge part and the pressed part.
F16K 31/02 - Moyens de fonctionnementDispositifs de retour à la position de repos électriquesMoyens de fonctionnementDispositifs de retour à la position de repos magnétiques
The present invention has a purpose of providing a joint with a built-in filter capable of replacing the filter without requiring removal of the joint from piping, thereby facilitating the replacement of the filter. The joint with the built-in filter includes: first and second inlet/outlet sections; a communication space formed to communicate with the first and second inlet/outlet sections; and a maintenance opening sealed in an airtight manner during non-maintenance. A filter element has: a cylindrical filter body; a base end section attached to an opening at one end of the filter body in an airtight manner and including a seal ring disposed between an outer circumferential surface thereof and an inner surface of the communication space; and a tip section disposed to seal an opening at the other end of the filter body in the airtight manner.
A fixing structure 10 is used for fixing wiring 20 or piping led out from a gas box 30 and comprises a fixing member constituted by a holding member 14 which holds a part of the wiring 20 or the piping from the outside and a plate-like member 16 on which at least a part of the bottom surface of the holding member 14 is placed.
H02G 3/22 - Installations de câbles ou de lignes à travers les murs, les sols ou les plafonds, p. ex. dans les immeubles
F16L 3/10 - Supports pour tuyaux, pour câbles ou pour conduits de protection, p. ex. potences, pattes de fixation, attaches, brides, colliers entourant pratiquement le tuyau, le câble ou le conduit de protection fractionnés, c.-à-d. à deux éléments en prise avec le tuyau, le câble ou le conduit de protection
H02G 3/06 - Joints pour connecter des longueurs de tubes de protection les unes aux autres ou à l'enveloppe, p. ex. à la boîte de distributionInstallations de câbles ou de lignes électriques ou de leurs tubes de protection dans ou sur des immeubles, des structures équivalentes ou des véhicules Détails assurant la continuité électrique dans le joint
H02G 15/013 - Moyens d'étanchéité pour entrées de câble
The present invention provides a heater-equipped clip that is attached to a plurality of fluid supply lines installed side-by-side in a fluid supply device, each fluid supply line being formed of a plurality of base blocks, the clip comprising: a plate portion having a fixed heater and formed to allow surface abutment against one side wall of the base block; a pinching claw portion formed to allow abutment against the other side wall opposite to said one side wall of the base block; and a coupling mechanism that couples the plate portion and the pinching claw portion to each other.
F16B 2/20 - Clips, c.-à-d. dispositifs de fixation à serrage effectué uniquement par la résistance à la déformation inhérente au matériau dont est fait le dispositif
Provided is a concentration measurement device that can be miniaturized without using an optical fiber. The concentration measurement device including a measurement cell having a gas flow path and an optical path intersecting the gas flow path; a light source for emitting light inside the optical path, the light source 14 being installed at one end of the optical path; a first photodetector for detecting a light emitted from the light source as a reference light, the first photodetector being installed at a side of the light source and rearward from a distal end of the light source in a light emitting direction along an optical axis of the light source; a second photodetector for detecting a light emitted from the light source for measuring light absorption, the second photodetector being installed at another end of the optical path.
G01N 21/31 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p. ex. spectrométrie d'absorption atomique
G01N 21/25 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes
G01N 21/85 - Analyse des fluides ou solides granulés en mouvement
To provide a pipe in which the pipe having been fixed is prevented from being loosened by co-rotation. A pipe includes at least a first pipe and a second pipe and connects blocks each having an internal flow path and an open end of the flow path on a surface thereof. The other end portion of the first pipe is provided with an outward flange, and an annular gasket is interposed between butt end faces of the first and second pipes, and a male thread member that is inserted onto the first pipe, has male threads on a peripheral surface thereof, and abuts against the outward flange. The other end portion of the second pipe is provided with a cap nut member that is inserted onto the second pipe, has an outward flange, has female threads, and has an inward flange to be engaged with the outward flange.
F16L 19/02 - Extrémités de tuyaux pourvues de colliers ou de brides formant corps ou non avec les tuyaux, maintenues en contact par un organe vissé
F16L 19/025 - Extrémités de tuyaux pourvues de colliers ou de brides formant corps ou non avec les tuyaux, maintenues en contact par un organe vissé les colliers ou les brides formant partie intégrante des extrémités du tuyau
17.
SAFETY VALVE AND DISCHARGE DIRECTION REGULATION MEMBER
To provide a safety valve capable of suppressing creep of a fusible alloy to the minimum even if a member that blocks a flow path directly presses the fusible alloy. A fusible alloy is disposed between a blocking member that blocks the flow of fluid flowing from a discharge path of a fluid apparatus and a pressing cap, a reservoir part 8 that reserves the fused fusible alloy is formed at least in one of the blocking member 3 and the pressing cap, and two porous plates punched positions of which do not overlap with each other are arranged between the reservoir part and the fusible alloy.
F16K 17/38 - Soupapes ou clapets de sûretéSoupapes ou clapets d'équilibrage fonctionnant sous l'action de circonstances extérieures, p. ex. un choc, un changement de position d'une température excessive
A valve device includes: a flow path block in which a fluid inflow path and a fluid outflow path are formed; a diaphragm configured to open and close between the fluid inflow path and the fluid outflow path; and an actuator including a case, a piston accommodated in the case and having an air flow path formed therein, a stem configured to move the diaphragm to an open position or a closed position by moving integrally with the piston in an axial direction, an air introduction chamber surrounded by the case and the piston, and a one-touch joint configured to supply an air fluid to the air introduction chamber via the air flow path. The one-touch joint is coupled to the piston.
F16K 7/17 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné par pression d'un fluide
F16K 31/122 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide le fluide agissant sur un piston
19.
GAS SUPPLY DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS
A gas supply device capable of saving space and supplying a mixed gas having components with stable concentration to a processing chamber in a short time includes: a plurality of fluid control units each including a flow path through which gas flows, and fluid control devices provided in the middle of the flow path; a merging flow path including a plurality of connecting portions fluidly connected to the plurality of fluid control units and a single gas outlet portion which derives the gas introduced through the plurality of connecting portions; wherein a plurality of connecting portions is arranged symmetrically with respect to the gas outlet portion in the flow path direction of the merging flow path, and two or more fluid control units are fluidly connected to each of the plurality of connecting portions.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
The invention provides a valve capable of suppressing unintended valve opening/closing by providing a play state during a manual operation and also enabling smooth transition from the play state to a rotation state. In the valve, a tip of another end portion of the stem and the engagement hole of an operation handle form a corresponding circumferential surface and a planar section continuous to the circumferential surface. Either one of the tip of the other end portion of the stem and the planar section of the engagement hole of the operation handle is formed to have two flat surfaces defining a predetermined angle, and thereby generates predetermined play when the operation handle is rotated in one direction after being rotated in another direction.
F16K 7/16 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné mécaniquement, p. ex. par une tige filetée ou par came
F16K 7/17 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné par pression d'un fluide
F16K 31/143 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide montés sur soupapes à fonctionnement manuel ou conjugués avec celles-ci le fluide agissant sur un piston
A diaphragm valve, which is miniaturized while ensuring a required flow rate and has improved assemble workability and maintainability, includes a body defining a flow path; a diaphragm provided on a bottom surface of an accommodation recess; a fixing ring screwed with a screw portion formed on an inner peripheral surface of the accommodation recess to fix the diaphragm to the body; a stacked piezoelectric actuator; a support plate supporting the stacked piezoelectric actuator; a cylindrical actuator cover holding a diaphragm presser and configured to transmit the piezoelectric displacement of the stacked piezoelectric actuator while accommodating the stacked piezoelectric actuator inside; and a fixing member screwed with the common screw portion and cooperating with the fixing ring to fix the position of the support plate in the accommodation recess.
F16K 7/16 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné mécaniquement, p. ex. par une tige filetée ou par came
F16K 27/02 - Structures des logementsMatériaux utilisés à cet effet des soupapes de levage
An object is to provide a joint in which a tapered portion of a body to which surface treatment has been applied is not seized when a pipe is attached. The joint includes a body having a tapered portion on an inner peripheral surface of at least one end portion, a threaded portion on an outer peripheral surface of the at least one end portion, and a flow path therein; a ring having a tapered outer peripheral surface in sliding contact with the tapered portion of the body; and a nut pushing the tapered outer peripheral surface of the ring against the tapered surface of the body by being screwed with a parallel threaded portion of the threaded portion of the body to which a pipe is connected and, in which surface treatment for preventing adsorption of liquid is applied to a surface of the body.
F16L 19/065 - Raccords dans lesquels les surfaces d'étanchéité sont maintenues en contact par un organe, p. ex. un écrou à oreilles vissé dans, ou vissé sur une des parties du raccord dans lesquels le serrage radial est obtenu par une action de coincement entre les extrémités non déformées du tuyau le coincement étant obtenu au moyen d'un segment
F16L 19/025 - Extrémités de tuyaux pourvues de colliers ou de brides formant corps ou non avec les tuyaux, maintenues en contact par un organe vissé les colliers ou les brides formant partie intégrante des extrémités du tuyau
The purpose of the present invention is to provide a valve that hardly causes leakage between a seat member and a valve body when a high-temperature, high-pressure fluid flows. Provided is a valve comprising: a valve body 10 including a valve chamber 13 communicating with a fluid inlet path 11 and an outlet path 12; a cylindrical seat member 30 including an inlet-side communication path 32 communicating with the inlet path, an outlet-side communication path 33 communicating with the outlet path, and a valve seat 31 formed on a peripheral edge of an opening of the outlet-side communication path, the seat member being disposed in the valve chamber; and a valve disc 4 capable of coming into contact with and separating from the valve seat. A male taper 35 is formed in a valve seat-side end portion of the seat member. The male taper presses a female taper 16 formed in the valve chamber, thereby forming a seal.
A concentration measurement device 100 comprises: a measurement cell 10 that has a flow path for a measurement fluid; a light source 2 that emits measurement light L1 that enters the measurement cell through a window 4A; a reference light detector 8 that is disposed laterally of the light source 2 and that part of light from the light source directly enters; a measurement light detector 6 that detects light transmitted through the measurement cell; and a light limiting member 20 that is disposed between the light source 2 and reference light detector 8 and the window 4A, the light limiting member 20 having a light transmitting portion 20b that transmits the measurement light, and a light blocking portion 20a that is disposed around the light transmitting portion.
G01N 21/33 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p. ex. spectrométrie d'absorption atomique en utilisant la lumière ultraviolette
[Problem] To monitor any change in action time caused by, inter alia, changes over time in a valve actuator in a valve unit. [Solution] A valve V comprising an operating-pressure chamber 52 into which is introduced operating pressure for opening or closing the valve V, an operating-pressure sensor D that detects any change in the operating pressure within the operating-pressure chamber 52, and a magnetic sensor M that detects an internal action of the valve V that corresponds to the change in the operating pressure, wherein, on the basis of data detected from the magnetic sensor M and the operating-pressure sensor D, a time lasting from a prescribed time point when the operating pressure changes to a prescribed time point when a corresponding action was detected by the magnetic sensor M is monitored as an action time of the valve V.
F16K 37/00 - Moyens particuliers portés par ou sur les soupapes ou autres dispositifs d'obturation pour repérer ou enregistrer leur fonctionnement ou pour permettre de donner l'alarme
F16K 31/122 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide le fluide agissant sur un piston
The purpose of the present invention is to provide a valve that allows a flow at a prescribed flow rate regardless of the orientation of a seat member. This valve comprises: a valve body (10) that comprises a valve chamber that interconnects an inlet passage (11) and an outlet passage (12); a cylindrical seat member (30) that comprises an inlet-side interconnection passage (32) interconnecting with the inlet passage, an outlet-side interconnection passage (33) interconnecting with the outlet passage, and a valve seat (31) formed at an outlet-side end section of the outlet-side interconnection passage, the seat member (30) being disposed in the valve chamber; and a valve body (4) that can come into contact with and separate from the valve seat. The inlet-side interconnection passage opens on the outer peripheral surface of the seat member, and the inlet passage and the inlet-side interconnection passage interconnect via an annular space (15) between the outer peripheral surface of the seat member and the inner peripheral surface of the valve chamber.
[Problem] To provide a fluid control device which is capable of independently performing temperature control for an integrated gas line and temperature control for supply pipes, and with which pipe configuration is easily switched. [Solution] This fluid control device 1 comprises: an integrated gas line 10 including a plurality of flow passage blocks 11 which are arranged in series and form a flow passage, and a plurality of fluid control apparatuses 12 disposed on the flow passage blocks; a supply pipe 20 which is disposed below the flow passage blocks 11 and causes a fluid to flow; and a branch pipe 30 which branches from the supply pipe 20 and supplies the fluid to the integrated gas line, the fluid control device including first heaters 40 disposed on both side surfaces of the flow passage block 11, a heat transfer block 50 which transfers heat to the supply pipe 20, second heaters 60 which are disposed on both side surfaces of the heat transfer block and heat the heat transfer block 50, and a heat insulating plate 70 which is disposed between the flow passage block 11 and the heat transfer block 50 and hinders heat transfer.
[Problem] An electrostatic capacitive pressure sensor capable of detecting a pressure of a fluid with high accuracy, capable of miniaturization, and having a wider pressure detection range, and a pressure detection method using the same.
[Problem] An electrostatic capacitive pressure sensor capable of detecting a pressure of a fluid with high accuracy, capable of miniaturization, and having a wider pressure detection range, and a pressure detection method using the same.
[Solution] The electrostatic capacitive pressure sensor comprises: a reference chamber provided between a fixed electrode and a movable electrode that deflects in accordance with fluid pressure; a measurement chamber filled with a fluid for causing deflection of the movable electrode; a means for sequentially applying a first potential and a second potential to the fixed electrode and generating a first output signal corresponding to the first potential and a second output signal corresponding to the second potential; and a means for generating a difference signal between the first output signal and the second output signal.
G01L 9/00 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pressionTransmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent
29.
VALVE CONTROL APPARATUS, VALVE CONTROL SYSTEM, VALVE CONTROL METHOD, AND VALVE CONTROL PROGRAM
A valve control apparatus including: an operating time measurement unit that measures an operating time of a valve based on an operation pressure of the valve and whether the valve is open or closed; and a command control unit that receives an opening command directed to the valve and transmitted from a control apparatus, and transmits the opening command to the valve in a delayed manner based on the operating time and a predetermined reference time.
F16K 31/02 - Moyens de fonctionnementDispositifs de retour à la position de repos électriquesMoyens de fonctionnementDispositifs de retour à la position de repos magnétiques
F16K 27/02 - Structures des logementsMatériaux utilisés à cet effet des soupapes de levage
Provided is a coupling structure in which an upper block provided with a sleeve can be easily assembled to a lower block. The coupling structure comprises an upper block 20 disposed on a lower block 10, a sleeve 30 inserted into the upper block 20, an auxiliary member 70 provided on an upper surface 24 of the upper block 20, a pin 50 having a first shaft portion 52 that is inserted into a first pin insertion slit 21 and a second pin insertion slit 71 and a first male screw portion 53 that is screwed into the lower block 10, and a bolt 60. The first pin insertion slit 21 of the upper block 20 is open to one longitudinal side surface 26 of the upper block 20, the second pin insertion slit 71 of the auxiliary member 70 is open to one longitudinal side surface 76 of the auxiliary member 70, and a lower surface 75 of the auxiliary member 70 is formed from a pair of inclined surfaces 77 that gradually move away from an upper surface 74 of the auxiliary member 70, from both longitudinal ends thereof toward the center.
F16L 23/036 - Raccords à brides les brides étant raccordées par des organes tendus axialement caractérisés par les moyens de mise en tension, p. ex. colliers de serrage en forme de C ou boulons spécialement adaptés
A controller capable of improving the disappearance resistance of a synthetic resin coating of a diaphragm, and a vaporization supply device comprising the controller. The controller includes a body having an inflow passage and an outflow passage, a valve seat provided between the inflow passage and the outflow passage, a diaphragm capable of being seated on or separated from the valve seat, and an actuator for causing the diaphragm to be seated on and separated from the valve seat. The material of the valve seat is nickel-based, and the diaphragm is provided with a synthetic resin coating on a surface of a side to be brought into contact with the valve seat.
F16K 25/00 - Détails constitutifs relatifs au contact entre corps de soupapes ou de clapets et leurs sièges
F16K 7/17 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné par pression d'un fluide
G05D 7/06 - Commande de débits caractérisée par l'utilisation de moyens électriques
The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.
G05D 7/06 - Commande de débits caractérisée par l'utilisation de moyens électriques
G01F 1/36 - Mesure du débit volumétrique ou du débit massique d'un fluide ou d'un matériau solide fluent, dans laquelle le fluide passe à travers un compteur par un écoulement continu en utilisant des effets mécaniques en mesurant la pression ou la différence de pression la pression ou la différence de pression étant produite par une contraction de la veine fluide
G01F 15/00 - Détails des appareils des groupes ou accessoires pour ces derniers, dans la mesure où de tels accessoires ou détails ne sont pas adaptés à ces types particuliers d'appareils, p. ex. pour l'indication à distance
G01L 13/06 - Dispositifs ou appareils pour la mesure des différences entre plusieurs valeurs de la pression des fluides en utilisant des éléments électriques ou magnétiques sensibles à la pression
G01L 19/08 - Moyens pour l'indication ou l'enregistrement, p. ex. pour l'indication à distance
33.
Fluid control device, fluid supply system, and fluid supply method
A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.
F16K 31/02 - Moyens de fonctionnementDispositifs de retour à la position de repos électriquesMoyens de fonctionnementDispositifs de retour à la position de repos magnétiques
F16K 37/00 - Moyens particuliers portés par ou sur les soupapes ou autres dispositifs d'obturation pour repérer ou enregistrer leur fonctionnement ou pour permettre de donner l'alarme
G05D 7/06 - Commande de débits caractérisée par l'utilisation de moyens électriques
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
A vaporizer 10 comprises: a vaporization chamber 12 for storing a liquid; a bottom heater 14B provided in the vaporization chamber 12 which includes a winding portion 141, acting as a heat source, to contact with the liquid stored in the vaporization chamber and an upright portion 142 erected from the winding portion and having an end portion with a heater terminal 143; and a relief valve 16 connected to the vaporization chamber 12. The vaporizer 10 is configured to be able to appropriately vaporize and supply ultrapure water.
C02F 1/04 - Traitement de l'eau, des eaux résiduaires ou des eaux d'égout par chauffage par distillation ou évaporation
F22B 1/28 - Méthodes de production de vapeur caractérisées par le genre de chauffage dans des chaudières chauffées électriquement
F22B 37/44 - Utilisation, agencement ou disposition des dispositifs d'alarme ou des dispositifs automatiques de sécurité des vannes de sécurité
F22D 1/00 - Appareils de chauffage d'eau d'alimentation, p. ex. préchauffeurs
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
The pressure sensor 10 comprises: a bottomed cylindrical sensor module 11 having inside a pressure receiving chamber C1 communicating with a flow path and including a diaphragm 11a in contact with the pressure receiving chamber; a pressure detecting element 12 for outputting a strain of the diaphragm 11a as a pressure; a base ring 14 fixed at an outer edge of an open-side end part 11c of the sensor module and disposed on an outer peripheral side of the sensor module 11; a hermetic member 13 fixed to the base ring 14 for forming a sealed vacuum chamber C2 opposite to the pressure receiving chamber C1 across the diaphragm 11a; a gasket 18 sandwiched between the base ring 14 and a body 5; and a pressing flange 19 for pressing the base ring 14 to the body 5 through the gasket 18.
G01L 9/00 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pressionTransmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent
G01L 19/00 - Détails ou accessoires des appareils pour la mesure de la pression permanente ou quasi permanente d'un milieu fluent dans la mesure où ces détails ou accessoires ne sont pas particuliers à des types particuliers de manomètres
36.
STURGEON BREEDING METHOD, STURGEON PRODUCTION METHOD, AND SOLID FEED FOR STURGEON
NATIONAL UNIVERSITY CORPORATION HOKKAIDO UNIVERSITY (Japon)
AICHI PREFECTURE (Japon)
KYORITSU SEIYAKU CORPORATION (Japon)
FUJIKIN INCORPORATED (Japon)
Inventeur(s)
Ijiri Shigeho
Inaba Hiroyuki
Uchiyama Ai
Takano Ryoko
Yamashita Katsumasa
Abrégé
[Problem] To provide a means for mass-producing female sturgeons in a simple, inexpensive, and efficient manner. [Solution] Provided is a sturgeon breeding method comprising causing a solid feed, in which a soybean isoflavone-containing substance containing genistein is almost uniformly mixed, to be ingested. Almost all individuals among cultured individuals that are genetically approximately half males and half females can be bred as individuals that are female or induced to become female, by causing the solid feed to be ingested over the period of 2-10 months from the 14th-120th day after hatching, and thus female sturgeons (genetically female individuals and individuals in which genetic males are induced to become female) with high utility value for caviar production can be efficiently produced.
A01K 61/10 - Élevage des animaux aquatiques des poissons
A23K 10/30 - Produits alimentaires pour animaux à base de matières d’origine végétale, p. ex. de racines, de graines ou de foinProduits alimentaires pour animaux à base de matières d’origine fongique, p. ex. de champignons
A23K 20/121 - Composés hétérocycliques contenant de l’oxygène ou du soufre comme hétéroatome
A23K 50/80 - Produits alimentaires spécialement conçus pour des animaux spécifiques pour les animaux aquatiques, p. ex. pour les poissons, les crustacés ou les mollusques
37.
CONCENTRATION MEASUREMENT DEVICE AND METHOD FOR DETECTING ABNORMALITY IN SAME
This concentration measurement device 100 comprises: an electrical unit 20 that has a light source 22 including a plurality of light-emitting elements LED1, LED2 for emitting lights of mutually different wavelengths, the electrical unit also having a photodetector 241; a fluid unit 10 that has a measurement cell 1; a transmission member 15 that connects the electrical unit and the fluid unit; and a control circuit 28 that is connected to the light source and the photodetector. The concentration measurement device is configured to detect the presence of an abnormality in an optical system including the light source, the transmission member, and the photodetector on the basis of the intensity of the lights emitted from the plurality of light-emitting elements and the output of the photodetector.
G01N 21/33 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p. ex. spectrométrie d'absorption atomique en utilisant la lumière ultraviolette
To provide a valve that is easily assembled and has a low possibility of breakage of a coupled section even when the valve has to be downsized or subjected to a large load. A valve has a valve unit and a drive unit, is configured to include: a first recess that is a recess formed in either one of a second stem or a first stem and is formed with a groove at a predetermined position on an inner circumferential surface of the recess; a second recess formed in another one thereof; a stem pin accommodated in both of the recesses; an urging member that is accommodated in the first recess and urges the stem pin to the other side; a sidewall through-hole that penetrates a sidewall of the second recess horizontally; and a ball that enters the sidewall through-hole.
F16K 41/10 - Joints d'étanchéité pour tiges avec un diaphragme, p. ex. en forme de soufflet ou de tube
F16K 1/04 - Soupapes ou clapets, c.-à-d. dispositifs obturateurs dont l'élément de fermeture possède au moins une composante du mouvement d'ouverture ou de fermeture perpendiculaire à la surface d'obturation à tige filetée et dont l'élément de fermeture fait corps avec la tige, p. ex. soupapes principales
F16K 1/44 - Détails du siège ou du corps de soupape pour les soupapes à double siège
F16K 31/122 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide le fluide agissant sur un piston
F16K 35/06 - Dispositions empêchant la mise en action accidentelle ou non autorisée utilisant un organe de commande ou de verrouillage démontable, p. ex. une clé
39.
VAPORIZER, GAS SUPPLY APPARATUS, AND METHOD OF CONTROLLING GAS SUPPLY APPARATUS
Provided are a vaporizer and a gas supply apparatus both of which are compact and capable of supplying gas at a high flow rate, and a method of controlling the gas supply apparatus. The vaporizer includes: a heat-exchanging section that is configured to heat a liquid raw material; and a vaporizing section that is configured to vaporize the heated liquid raw material to form a raw material gas. The heat-exchanging section includes: a branched section to which the liquid raw material is supplied and in which the liquid raw material is branched; and thin tubes each connected to the branched section.
C23C 16/448 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement caractérisé par le procédé utilisé pour produire des courants de gaz réactifs, p. ex. par évaporation ou par sublimation de matériaux précurseurs
C23C 16/455 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement caractérisé par le procédé utilisé pour introduire des gaz dans la chambre de réaction ou pour modifier les écoulements de gaz dans la chambre de réaction
C23C 16/52 - Commande ou régulation du processus de dépôt
This seat leak detection method includes: a step (a) for closing an upstream shut-off valve and a downstream shut-off valve and inputting, into a flow rate control device, a set flow rate of 0% or a control valve forced close signal; a step (b) for measuring the feed pressure, the upstream pressure, or the downstream pressure at a first time point; a step (c) for measuring the feed pressure, the upstream pressure, or the downstream pressure at a subsequent second time point; and a step (d) for detecting a control valve seat leak on the basis of a pressure variation in the feed pressure, the upstream pressure, or the downstream pressure. In step (d), if the pressure variation in the feed pressure, the upstream pressure, or the downstream pressure between the first time point and the second time point exceeds a threshold, monitoring is performed, up to a third time point that is after the second time point, to observe whether a set flow rate other than a set flow rate of 0% has been inputted or a signal input other than that of a control valve forced close signal has taken place; if such a signal input is taking place, the seat leak detection flow is ended; and if a flow rate of 0% is being maintained, the feed pressure, the upstream pressure, or the downstream pressure is measured again at the third time point and seat leak detection is carried out.
G01M 3/28 - Examen de l'étanchéité des structures ou ouvrages vis-à-vis d'un fluide par utilisation d'un fluide ou en faisant le vide par mesure du taux de perte ou de gain d'un fluide, p. ex. avec des dispositifs réagissant à la pression, avec des indicateurs de débit pour tuyaux, câbles ou tubesExamen de l'étanchéité des structures ou ouvrages vis-à-vis d'un fluide par utilisation d'un fluide ou en faisant le vide par mesure du taux de perte ou de gain d'un fluide, p. ex. avec des dispositifs réagissant à la pression, avec des indicateurs de débit pour raccords ou joints d'étanchéité de tuyauxExamen de l'étanchéité des structures ou ouvrages vis-à-vis d'un fluide par utilisation d'un fluide ou en faisant le vide par mesure du taux de perte ou de gain d'un fluide, p. ex. avec des dispositifs réagissant à la pression, avec des indicateurs de débit pour soupapes
F16K 51/00 - Autres détails non particuliers aux types de soupapes ou clapets ou autres appareils d'obturation
G01M 3/26 - Examen de l'étanchéité des structures ou ouvrages vis-à-vis d'un fluide par utilisation d'un fluide ou en faisant le vide par mesure du taux de perte ou de gain d'un fluide, p. ex. avec des dispositifs réagissant à la pression, avec des indicateurs de débit
G05D 7/06 - Commande de débits caractérisée par l'utilisation de moyens électriques
41.
ACTUATOR, OPEN/CLOSE VALVE MECHANISM, AND FLUID CONTROL DEVICE
The purpose of the present invention is to provide an actuator having excellent responsiveness compared to an actuator in which a plurality of assemblies to be disposed inside a casing are stacked alone in an axial direction, and an open/close valve mechanism. An actuator 10 of the present invention comprises: a casing 20, a shaft body 30 disposed inside the casing 20, and formed with a long hole LH and a plurality of exhaust holes EH; a plurality of assemblies 40 arranged to correspond to the plurality of exhaust holes EH, respectively, each assembly 40 having a partition body 42 and a piston body 44, and forming a closed space with each partition body 42, each partition body 42 abutting an inner circumferential surface of the casing 20 over the entire circumference while allowing penetration of the shaft body 30, each piston body 44 allowing the shaft body 30 to penetrate therethrough; a biasing body 50 for biasing a piston body 44H from an upper end side toward a lower end side; and a push rod 60 connected to an opposite side of the shaft body 30 with respect to an opening of the shaft body 30. An open/close valve mechanism 110 comprises the actuator 10, a valve body 70, and a body 80, and has a function of controlling communication and shut-off of fluid.
F15B 15/14 - Dispositifs actionnés par fluides pour déplacer un organe d'une position à une autreTransmission associée à ces dispositifs caractérisés par la structure de l'ensemble moteur le moteur étant du type à cylindre droit
F16K 31/122 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide le fluide agissant sur un piston
42.
Casing for fluid controller and fluid controller provided with same
[Problem] The main purpose of the present invention is to provide a casing for a fluid controller capable of enabling maintenance inside the casing even in a state where the lower part of the casing is fixed to a main body of a fluid controller, and improving maintainability.
i for fixing to the main body 101, a second part 4 attached to the first part 2, and a third part 5 attachably and detachably provided at an upper partition higher than a predetermined height position of the casing 1.
Provided is a closing plug capable of easily closing an open end of a flow passage without concern of scale. The closing plug includes: a gasket configured to come into contact with an annular projection formed in a step portion inside the open end of the flow passage of a flow passage block; a columnar pressing member formed by cutting out an inner side of a pressing surface so as to press a peripheral edge portion of the gasket; and a closing plug screw configured to be screwed into a female screw formed in an inner peripheral surface on an open end side from the step portion and press the pressing member toward the gasket by movement caused by screwing.
This fluid control device 100 comprises a valve control device 20 that can communicate with an external device 30, and a valve 10 connecting to the valve control device, wherein: the valve control device 20 includes a valve driving circuit 22 for driving the valve, a digital communication circuit 26 connected to the valve driving circuit, and an input/output terminal 24 connected to the valve driving circuit; the digital communication circuit provided to the external device and the digital communication circuit 26 of the valve control device are configured so as to be capable of digital communication; a power supply and an analog communication circuit provided to the external device have a connector AC and can connect to the input/output terminal 24 of the valve control device by means of an integrated cable C2 comprising at least four wires therein; and power and analog signals are supplied from the external device via the input/output terminal 24.
F16K 31/02 - Moyens de fonctionnementDispositifs de retour à la position de repos électriquesMoyens de fonctionnementDispositifs de retour à la position de repos magnétiques
F16K 51/00 - Autres détails non particuliers aux types de soupapes ou clapets ou autres appareils d'obturation
45.
Flow rate control device and flow rate control method
A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.
G05D 7/06 - Commande de débits caractérisée par l'utilisation de moyens électriques
F16K 31/00 - Moyens de fonctionnementDispositifs de retour à la position de repos
G01F 1/36 - Mesure du débit volumétrique ou du débit massique d'un fluide ou d'un matériau solide fluent, dans laquelle le fluide passe à travers un compteur par un écoulement continu en utilisant des effets mécaniques en mesurant la pression ou la différence de pression la pression ou la différence de pression étant produite par une contraction de la veine fluide
G05B 15/02 - Systèmes commandés par un calculateur électriques
Provided is a fluid control device that is compact and that enables data regarding an internal operation of the device to be acquired.
A fluid control device V is disposed in a flow path of a fluid and enables data regarding an internal operation to be acquired, the fluid control device including a sensor hood 44 to which one or more sensors M2 for detecting an operation in the fluid control device are attached; a valve body 1 connected to the sensor hood; a diaphragm 42 held below the sensor hood, inside the valve body; a cover portion 5 that covers the outer periphery of the sensor hood; and a circuit board 60 that is electrically connected to the sensor(s) and for which a thickness direction of the circuit board and a flow path direction are arranged in the same direction on the inside of the cover portion.
F16K 37/00 - Moyens particuliers portés par ou sur les soupapes ou autres dispositifs d'obturation pour repérer ou enregistrer leur fonctionnement ou pour permettre de donner l'alarme
F16K 11/04 - Soupapes ou clapets à voies multiples, p. ex. clapets mélangeursRaccords de tuyauteries comportant de tels clapets ou soupapesAménagement d'obturateurs et de voies d'écoulement spécialement conçu pour mélanger les fluides dont toutes les faces d'obturation se déplacent comme un tout comportant uniquement des soupapes ou des clapets
A gas supply system 100 comprises: a first vaporization supply device 10A including a first vaporization section 12A having a heater, a first valve 14A, and a first supply pressure sensor 16A for measuring a gas pressure between the first vaporization section and the first valve; a second vaporization supply device 10B including a second vaporization section 12B having a heater, a second valve 14B, and a second supply pressure sensor 16B for measuring a gas pressure between the second vaporization section and the second valve; and a control circuit 20. The system is configured to flow a gas from the first vaporization section 10A and a gas from the second vaporization section 10B sequentially into a common flow path, by shifting timings of an opening period of the first valve 14A and an opening period of the second valve 14B.
F17C 9/02 - Procédés ou appareils pour vider les gaz liquéfiés ou solidifiés contenus dans des récipients non sous pression avec changement d'état, p. ex. vaporisation
F17C 13/02 - Adaptations spéciales des dispositifs indicateurs, de mesure ou de contrôle
The present invention provides a valve device with which a valve-opening time and a valve-closing time can be adjusted so as to be closer to each other. This valve device has a valve body for defining a flow path, a diaphragm (4) serving as a valve element for opening and closing the flow path, a stem (7) for seating and unseating the diaphragm (4) onto and from the valve seat (3), a coil spring (15) serving as a spring member for constantly urging the stem (7) in a valve-closing direction, pistons (30, 36) linked to the stem (7), and an actuator body (20) in which the pistons (30, 36) are accommodated so as to be capable of sliding. The interior of the actuator body (20) is sectioned by the pistons (30, 36) into pressure chambers (31, 37) to which a drive gas (DG) is supplied, and atmosphere chambers (32, 38) that communicate with the atmosphere via aeration holes (21a, 21b) formed in the actuator body (20). The actuator body (20) is provided with an adjustment mechanism (50) for restricting the amount of aeration through the aeration holes (21a, 21b), thereby enabling adjustment such that the valve-closing time required to close the valve and the valve-opening time required to open the valve match.
F16K 31/122 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide le fluide agissant sur un piston
F16K 31/363 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide et dans lesquels il y a alimentation constante du moteur à fluide par le fluide provenant de la canalisation le fluide agissant sur un piston
[Problem] To provide a valve device that is able to control large flow volumes and respond quickly and is easy to manufacture. [Solution] This valve device comprises a valve body 2, a valve element 41, and a multistage cylinder actuator 60 that moves the valve element, wherein: the multistage cylinder actuator 60 has a casing 6 the inside of which is divided into an upper stage cylinder chamber 64 and a lower stage cylinder chamber 66, an upper stage piston 81 that is slidably disposed inside the upper stage cylinder chamber 64, and a lower stage piston 83 that is slidably disposed inside the lower stage cylinder chamber 66 and has an operating shaft 83d that operates the valve element 41 and an abutting shaft 83a that abuts the upper stage piston 81; the upper stage piston 81 has therein an upper stage operation air channel 81b that supplies operating air; the lower stage piston 83 has therein a lower stage operation air channel 83b that communicates with the upper stage operation air channel 81b at the abutting portion with the upper stage piston 81; and an O-ring 92 for preventing leakage of the operation air is provided in the abutting portion.
An embodiment of the present invention provides a pressure sensor that can prevent application of excessive stress on a port and detect fluid differential pressure accurately. A base 11 includes a first fluid F1 that receives deformation of a first diaphragm 17; a second fluid F2 that receives deformation of a second diaphragm 18; and a sensor 20 that detects a pressure difference between the first fluid and the second fluid. A first port 12 is attached to the base 11, and has a first flow path 12a which allows introduction to the first diaphragm of a third fluid F3 to be measured. A second port 13 is attached to the base 11, and has a second flow path 13a which allows introduction to the second diaphragm of a fourth fluid F4 which is to be measured and which is lower in pressure than the third fluid. The outer diameter D1 of the first port 12 is equal to the outer diameter D2 of the second port 13, and the diameter D12 of the first flow path 12a is smaller than the diameter D22 of the second flow path 13a.
G01L 19/00 - Détails ou accessoires des appareils pour la mesure de la pression permanente ou quasi permanente d'un milieu fluent dans la mesure où ces détails ou accessoires ne sont pas particuliers à des types particuliers de manomètres
G01L 19/06 - Moyens pour empêcher la surcharge ou l'influence délétère du milieu à mesurer sur le dispositif de mesure ou vice versa
51.
EXHAUST STRUCTURE AND EXHAUST METHOD FOR FLOW RATE CONTROL DEVICE, AND GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD COMPRISING SAME
An exhaust structure for a flow rate control device 10 is provided with: the flow rate control device 10, which comprises a main body 11 in which a main body flow path 13 connecting a fluid inlet 13i to a fluid outlet 13o is formed, a control valve 12 provided in the main body flow path, an orifice part 14 provided downstream of the control valve, and a pressure sensor 16 for measuring the pressure between the control valve and the orifice part; a gas source 2 that supplies gas to the flow rate control device; and an exhaust path 4 branching at a branch point A on the gas supply path between the gas source and the flow rate control device. A first valve V1 is disposed in a gas supply path 3 upstream of the branch point, and a second valve V2 is disposed in the exhaust path. When the flow rate control device switches from controlling a first flow rate to controlling a second flow rate, the first valve V1 is closed and the second valve V2 is opened with the control valve 12 being open, thereby discharging the gas retained between the control valve and the orifice part via the exhaust path 4.
[Problem] To provide a reaction furnace for moisture generation capable of achieving a higher moisture generation ratio while preventing the risk of ignition. [Solution] The present invention comprises: a reaction furnace main body 6 which has an inlet 2 and an outlet 4 for a gas; a first reflecting plate 7 which is disposed to face the outlet 4, and fixed to the inside of the reaction furnace main body 6 while maintaining a gap G2 with an inner wall surface of the reaction furnace main body 6, and which has a tapered portion 10 at a peripheral edge portion facing the inner wall surface of the reaction furnace main body 6; a first platinum catalyst layer 9 which is coated on the inner wall surface of the reaction furnace main body 6; and a second platinum catalyst layer 11 which is coated on an outer surface of the first reflecting plate 7, which is a side opposing the reaction furnace main body 6 and disposed more inward than the tapered portion 10.
A cover component 3 is used for a pressure sensor 1 that is fixed to a mounting surface 5S of a body 5 with a flow path F1 formed therein, and that has protrudes protruding from the mounting surface 5S, the cover component comprising a hollow member 3a having an inner peripheral surface facing a side surface of the protruding portion of the pressure sensor 1, and a cover member 3b fixed to the hollow member 3a and covering the protruding portion of the pressure sensor 1.
G01L 19/00 - Détails ou accessoires des appareils pour la mesure de la pression permanente ou quasi permanente d'un milieu fluent dans la mesure où ces détails ou accessoires ne sont pas particuliers à des types particuliers de manomètres
G01L 7/08 - Mesure de la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments mécaniques ou hydrauliques sensibles à la pression sous forme de jauges, élastiquement déformables du type à diaphragme élastique
Provided are an actuator and a valve capable of suppressing reductions with respect to O-ring sealability even when used for an extended period of time and in a high-temperature environment. An actuator 3 includes: an actuator cap 6 and a bonnet 5 including a first pressing part (protruding part 5F, lower end part 6A1, inner step part 6F); a piston 9 and a stem 8 that include a second pressing part (upper end part 8C, outer edge part 9B3, outer step part 9D) and that is driven by a working fluid from the outside; and annular O rings 4A to 4C that seal a pressure chamber. The first pressing part and the second pressing part oppose each other in a movement direction of the piston 9. The O rings 4A to 4C are positioned between the first pressing part and the second pressing part. The second pressing part approaches and separates from the first pressing part due to the movement of the piston 9. In a state in which the second pressing part is near the first pressing part, the O rings 4A to 4C are configured to be sandwiched by the first pressing part and the second pressing part.
To enable accurate and simple diagnosis of an operation abnormality of a valve.
A valve V1 capable of detecting an operation abnormality has a magnet M1 that is attached in the vicinity of a pressing adapter 52 of a stem 53 that slides according to an opening/closing operation of the valve V1, and a magnetic sensor M2 that is attached to a surface acing the stem 53, inside the pressing adapter 52 that presses a peripheral edge of a diaphragm 51, and detects a change in a distance between the magnet M1 and the magnetic sensor M2. Further, an abnormality determination mechanism compares the change in the distance between the magnet M1 and the magnetic sensor M2 at the time of abnormality diagnosis detected by the magnetic sensor M2 and a previously measured change in the distance between the magnet M and the magnetic sensor M2 at the time of normality, and determines whether or not there is an abnormality.
F16K 37/00 - Moyens particuliers portés par ou sur les soupapes ou autres dispositifs d'obturation pour repérer ou enregistrer leur fonctionnement ou pour permettre de donner l'alarme
F16K 7/16 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné mécaniquement, p. ex. par une tige filetée ou par came
F16K 31/04 - Moyens de fonctionnementDispositifs de retour à la position de repos électriquesMoyens de fonctionnementDispositifs de retour à la position de repos magnétiques utilisant un moteur
F16K 31/50 - Moyens mécaniques d'actionnement à tige-guide filetée
F16K 31/528 - Moyens mécaniques d'actionnement à manivelle, excentrique ou came à ergot et encoche
A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.
F16K 31/02 - Moyens de fonctionnementDispositifs de retour à la position de repos électriquesMoyens de fonctionnementDispositifs de retour à la position de repos magnétiques
G05D 7/06 - Commande de débits caractérisée par l'utilisation de moyens électriques
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
F16K 37/00 - Moyens particuliers portés par ou sur les soupapes ou autres dispositifs d'obturation pour repérer ou enregistrer leur fonctionnement ou pour permettre de donner l'alarme
A valve device includes a body that includes flow paths, a recessed portion, and a valve chamber; an inner disk that includes an inner peripheral edge portion and an outer peripheral edge portion; a diaphragm; a first annular surface that is formed at the inner peripheral edge portion on a side facing the valve chamber; a second annular surface that is formed at the inner peripheral edge portion on a side opposite to the first annular surface and is supported by a bottom surface of the recessed portion; a first sealing portion, which is held by the first annular surface, on and from which the diaphragm is seated and separated; and a second sealing portion that is disposed between the second annular surface and the bottom surface of the recessed portion.
F16K 7/12 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol
Provided is a valve with which a seal member is not damaged when pressure accumulated near the seal member is released. This valve includes a valve box having a valve chamber, a valve seat provided in the valve chamber and having a seat surface, a stem including, at a tip end thereof, a valve element configured to abut against and move away from the seat surface due to an operation of an actuator, a seal space provided with a seal member configured to prevent a fluid from leaking, a seal opening space formed outside the seal space, and a seal pressing member configured to press and fix the seal member to a valve chamber side. The valve box is formed with a leak hole through which the seal space and the outside of the valve box communicate.
The driving device includes a piezoelectric element, a power supply unit, a first resistor, a second resistor, a measuring unit and a control unit, wherein resistance values of the first resistor and the second resistor are smaller than an insulating resistance value of the piezoelectric element, the measuring unit measures, a voltage across the first resistor (voltage between a first terminal and a second terminal), in a state of supplying a predetermined voltage from the power supply unit, and the control unit calculates a resistance value of the piezoelectric element from a voltage value obtained by the measurement of the measuring unit, and determines, whether or not degradation has occurred in the piezoelectric element based on the calculated resistance value.
B06B 1/06 - Procédés ou appareils pour produire des vibrations mécaniques de fréquence infrasonore, sonore ou ultrasonore utilisant l'énergie électrique fonctionnant par effet piézo-électrique ou par électrostriction
F16K 37/00 - Moyens particuliers portés par ou sur les soupapes ou autres dispositifs d'obturation pour repérer ou enregistrer leur fonctionnement ou pour permettre de donner l'alarme
G01N 27/02 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance
60.
Valve and fluid control device with a magnetic indicator
A valve which can accurately detect an operation of the valve is provided.
The valve includes a valve body defining a fluid flow passage, a valve disk operating to be able to open and close the fluid flow passage, an actuator driving the valve disk by supplying or interrupting a working fluid, a stem transmitting a driving force of the actuator to the valve disk, a detection means detecting an opening and closing operation of the valve disk, and an elastic member fixing a ring-shaped magnetic body inserted through an end of the stem to the stem. The detection means includes the magnetic body fixed by the elastic member, and a magnetic sensor detecting a change in a magnetic field of the magnetic body.
F16K 31/126 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide le fluide agissant sur un diaphragme, un soufflet ou un organe similaire
F16K 27/02 - Structures des logementsMatériaux utilisés à cet effet des soupapes de levage
61.
FLOW RATE CONTROL DEVICE AND FLOW RATE CONTROL METHOD
A flow rate control device (8) includes a control valve (6) having a valve element and a piezoelectric element for moving the valve element, and an arithmetic processing circuit (7) for controlling an operation of the control valve, wherein the arithmetic processing circuit is configured to receive an external command signal SE corresponding to a target flow rate when opening the control valve from a closed state so that a gas flows at the target flow rate, and to generate an internal command signal E1 output to a driving circuit for determining a voltage applied to the piezoelectric element based on the external command signal, the internal command signal is a signal that rises with time from zero and converges to a value of the external command signal, and is generated such that a slope at the time of initial rise and a slope immediately before convergence are smaller than a slope therebetween.
G05D 7/06 - Commande de débits caractérisée par l'utilisation de moyens électriques
G05B 19/414 - Structure du système de commande, p. ex. automate commun ou systèmes à multiprocesseur, interface vers le servo-contrôleur, contrôleur à interface programmable
62.
Concentration measuring method, and concentration measuring device
A concentration measurement method performed in a concentration measurement device including an electric unit having a light source and a photodetector, a fluid unit having a measurement cell through which a gas flows, and a processing circuit for calculating a concentration of the gas based on an intensity of a light passing through the measurement cell. The concentration measurement method includes a step of determining an absorption coefficient of the measurement gas using a reference absorption coefficient determined in association with the reference gas and a correction factor associated with the measurement gas, and a step of obtaining a concentration of the measurement gas flowing in the measurement cell using the absorption coefficient of the measurement gas. When the absorption peak wavelength of the measurement gas is longer than the peak wavelength of the light source, a reference gas having a longer absorption peak wavelength than the peak wavelength of the light source is used, and when the absorption peak wavelength of the measurement gas is shorter than the peak wavelength of the light source, a reference gas having a shorter absorption peak wavelength than the peak wavelength of the light source is used.
G01N 21/3504 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p. ex. spectrométrie d'absorption atomique en utilisant la lumière infrarouge pour l'analyse des gaz, p. ex. analyse de mélanges de gaz
G01N 21/27 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en utilisant la détection photo-électrique
G01N 21/31 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p. ex. spectrométrie d'absorption atomique
63.
GAS SUPPLY AMOUNT MEASUREMENT METHOD AND GAS SUPPLY AMOUNT CONTROL METHOD
A gas supply amount measurement method is performed in a gas supply system including a vaporization section, a control valve provided downstream of the vaporization section, and a supply pressure sensor for measuring the supply pressure between the vaporization section and the control valve. The method comprises: a step of measuring an initial supply pressure by the supply pressure sensor in a state where the control valve is closed; a step of opening the control valve for only a predetermined time; a step of measuring for a plurality of times of the supply pressure in a period of time between a time at which the pressure starts to fall from the initial supply pressure and a time at which a predetermined time has elapsed when the control valve is open for only a predetermined time, and a step of determining the gas supply amount when the control valve is open for only a predetermined time by calculation based on the measured values of the plurality of supply pressures.
G01F 22/02 - Procédés ou appareils pour la mesure du volume des fluides ou des matériaux solides fluents, non prévus ailleurs comportant un mesurage de pression
G05D 7/06 - Commande de débits caractérisée par l'utilisation de moyens électriques
G05B 19/416 - Commande numérique [CN], c.-à-d. machines fonctionnant automatiquement, en particulier machines-outils, p. ex. dans un milieu de fabrication industriel, afin d'effectuer un positionnement, un mouvement ou des actions coordonnées au moyen de données d'un programme sous forme numérique caractérisée par la commande de vitesse, d'accélération ou de décélération
[Problem] To provide a valve with an orifice that is miniaturized while ensuring a required flow rate, that has improved maintainability and sealing performance, and that is reduced in cost. [Solution] A valve with an orifice including a diaphragm 70 for opening and closing a flow path, an orifice plate 40 in which an orifice 40h is formed, a first orifice base 20 that supports the orifice plate 40 and has a through-hole 20a, a second orifice base 30 that has a valve seat 30b provided around a through-hole 30a and that together with the first orifice base 20 holds the orifice plate 40 therebetween, and an inner member 50 having a plurality of through-holes 50d into which flows a fluid that has passed between the valve seat 30b and the diaphragm 70, the second orifice base 30 and the inner member 50 having, in contact parts that come into contact with each other, a plurality of flow paths CH1 that guide the fluid from the plurality of through-holes 50d to a secondary flow path 15.
F16K 7/16 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné mécaniquement, p. ex. par une tige filetée ou par came
F16K 47/08 - Moyens incorporés aux soupapes pour absorber l'énergie d'un fluide pour diminuer la pression, l'organe régulateur étant distinct de l'élément de fermeture
65.
VALVE DEVICE, FLUID CONTROL DEVICE, FLUID CONTROL METHOD, SEMICONDUCTOR MANUFACTURING DEVICE, AND SEMICONDUCTOR MANUFACTURING METHOD
The present invention addresses the problem of providing a valve device, and the like, comprising an inner disc that can be easily assembled, thus ensuring an adequate Cv value and reducing the risk of damage. The present invention comprises: a valve body 10 that includes fluid passages 11, 12 and a valve chamber 13; an inner disc 20 that has an inner annular part 22 disposed around a first opening 15, an outer annular part 21, and a connection part 23; a diaphragm 33 that blocks and connects the flow path by coming into contact with and separating from an annular upper sheet 26 disposed on the upper end of the inner annular part 22, the lower surface of the diaphragm 33 being in contact with the upper surface of the outer annular part 21, and that is disposed while being pressed by a pressing adapter 30 which presses an upper surface peripheral section of the diaphragm 33 downward from above; and an annular lower sheet that is disposed on the lower end of the inner annular part 22 and is in close contact with a valve chamber bottom surface that is the bottom surface of the valve chamber 13. An annular valve chamber bottom surface protruding section 14a that protrudes upward is in close contact with a portion of a lower sheet lower end face 25a that is the lower end face of the lower sheet 25.
The present invention addresses the problem of providing a joint with a built-in filter which allows replacement of the filter without requiring removal of the joint from piping, thereby facilitating the replacement of the filter. This joint with the built-in filter comprises first and second inflow/outflow port portions (21, 22), a communicating space (24) formed so as to communicate with the first and second inflow/outflow port portions, and an opening portion for maintenance (23) which is air-tightly sealed during non-maintenance. A filter element (50) has a tubular filter main body (51), a base end portion 52 which is air-tightly attached to an opening portion at one end of the filter main body and which is provided with a sealing ring (55) disposed between an outer peripheral surface thereof and an inner surface of the communicating space, and a distal end portion (56) which is disposed so as to air-tightly seals an opening portion at the other end of the filter main body. The opening portion for maintenance has a predetermined opening size and is disposed at a predetermined position in a joint main body. A surface of the distal end portion on the maintenance opening portion side is provided with a locking means (57) for inserting and removing the filter element.
Provided is a diaphragm valve which is miniaturized while ensuring a necessary flowrate and which has improved assemblability and maintainability. This diaphragm valve comprises: a body (10) that defines a flow channel; a diaphragm (40) provided in the bottom surface (15c) of a storage recess (15); a fixing ring (42) screwed with a thread portion (15a) formed in the inner circumferential surface of the storage recess (15) to fix the diaphragm (40) to the body (10); a laminated piezoelectric actuator (22); a support plate (24) that supports the laminated piezoelectric actuator (22); a cylindrical actuator cover (26) which holds a diaphragm presser (27) and which stores thereinside the laminated piezoelectric actuator (22) and has transmitted thereto displacement caused by a piezoelectric effect of the laminated piezoelectric actuator (22); and a fixing member (28) that is screwed with a thread portion (15a) shared with the thread portion (15a) and fixes the position of the support plate (24) in the storage recess (15) cooperatively with the fixing ring (42).
F16K 7/14 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat
F16K 31/02 - Moyens de fonctionnementDispositifs de retour à la position de repos électriquesMoyens de fonctionnementDispositifs de retour à la position de repos magnétiques
68.
FLOW RATE CONTROL DEVICE, FLOW RATE CONTROL DEVICE CONTROL METHOD, AND FLOW RATE CONTROL DEVICE CONTROL PROGRAM
A flow rate control device for rapidly adjusting a flow rate to a set flow rate is provided. A flow rate control device for controlling a flow rate of a fluid supplied to a controlled object to hold a flow rate set value in the controlled object includes a measured value acquisition unit acquiring a measured value by a flow rate sensor measuring a flow rate of the fluid, a setting value acquisition unit acquiring the flow rate set value of the fluid, an adjustment value determination unit determining a flow rate adjustment value different from the flow rate set value, and a drive control unit controlling the flow rate of the fluid by adjusting an opening position of a valve supplying the fluid to the controlled object to make a difference between the measured value and the flow rate adjustment value small.
G05D 7/06 - Commande de débits caractérisée par l'utilisation de moyens électriques
G05B 19/416 - Commande numérique [CN], c.-à-d. machines fonctionnant automatiquement, en particulier machines-outils, p. ex. dans un milieu de fabrication industriel, afin d'effectuer un positionnement, un mouvement ou des actions coordonnées au moyen de données d'un programme sous forme numérique caractérisée par la commande de vitesse, d'accélération ou de décélération
[Problem] To provide a density measurement device that can be reduced in size without using an optical fiber. [Solution] The present invention comprises: a measurement cell 13 having a gas flow path 11 and an optical path 12 that intersects the gas flow path 11; a light source 14 for irradiating the interior of the optical path 12 with light, the light source 14 being installed at one end of the optical path 12; a first optical detector 15 installed at a location to the side of the light source and rearward from the distal end of the light source 14 in a light irradiation direction following the optical axis X of the light source 14, the first optical detector 15 detecting the light emitted from the light source 14 as reference light; and a second detector 16 installed at the other end of the optical path 12, the second detector 14 detecting the light emitted from the light source 14 for use in measuring light absorption.
G01N 21/33 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p. ex. spectrométrie d'absorption atomique en utilisant la lumière ultraviolette
This valve device comprises: a flow path block in which a fluid inflow path and a fluid outflow path are formed, a diaphragm that opens and closes between a fluid inflow path and a fluid outflow path, a case, a piston which is housed in the case and in which an air flow path is formed, a stem that moves axially with the piston to move the diaphragm to an open positioned or a closed position, and an actuator having an air introduction chamber surrounded by the case and the piston and a one-touch joint that supplies air fluid to the air introduction chamber via the air flow path. The one-touch joint is connected to the piston.
A pipe joint includes first and second sleeves having fluid flow paths communicating with each other; an annular gasket interposed between abutting end surfaces of the sleeves; a male screw member having a through hole into which the first sleeve is inserted; and a female screw member having a through hole into which the second sleeve is inserted, the sleeves being joined by screwing the male screw member with the female screw member, wherein the pipe joint has a leak port opened at a portion of the outer peripheral surface of the male screw member not covered by the female screw member and communicates with a gap between the male screw member and the first sleeve to detect a leak fluid leaked from gaps between the sleeves and the gasket.
F16L 19/02 - Extrémités de tuyaux pourvues de colliers ou de brides formant corps ou non avec les tuyaux, maintenues en contact par un organe vissé
F16J 15/08 - Joints d'étanchéité entre surfaces immobiles entre elles avec garniture solide comprimée entre les surfaces à joindre exclusivement par garniture métallique
F16L 23/16 - Raccords à brides caractérisés par les moyens d'étanchéité
F16L 19/025 - Extrémités de tuyaux pourvues de colliers ou de brides formant corps ou non avec les tuyaux, maintenues en contact par un organe vissé les colliers ou les brides formant partie intégrante des extrémités du tuyau
72.
FLOW RATE CONTROL DEVICE, AND FLOW RATE CONTROL METHOD
A flow rate control device 100 includes a flow rate control valve 8 having a valve element 8a and a piezoelectric element 8b for moving the valve element, and a control circuit 9 for controlling an operation of the flow rate control valve 8, wherein, in order to perform a pulsed fluid supply, the control circuit 9 is configured so as to open-loop control an applied voltage to the piezoelectric element so that it approaches the target voltage after once applying a voltage V1 exceeding a target voltage V0 corresponding to a target displacement of the piezoelectric element, when a pulsed flow rate setting signal is given.
A pressure control device 20 includes a pressure control valve 25, a flow resistance 23 provided downstream of the pressure control valve, for restricting a gas flow, a first pressure sensor 21 for measuring a gas pressure between the pressure control valve and the flow resistance, a second pressure sensor 22 for measuring a gas pressure downstream of the flow resistance, and an arithmetic control circuit 26 connected to the first pressure sensor and the second pressure sensor. The pressure control device is configured to control the gas pressure downstream of the flow resistance by adjusting an opening degree of the pressure control valve based on an output of the second pressure sensor regardless of an output of the first pressure sensor control, and calculate the flow rate of the gas downstream of the flow resistance based on the output of the first pressure sensor and the output of the second pressure sensor.
A vaporization supply device includes a vaporizer for heating and vaporizing a liquid raw material L, a flow rate controller for controlling a flow rate of the gas supplied from the vaporizer to a gas supply destination, and a controller for heating the inside of the vaporizer to obtain a necessary gas flow rate, and performing a feedback control so that a pressure becomes equal to or higher than a predetermined value. The controller is configured so as to stop the feedback control at the time point when the flow rate control by the flow rate controller starts, then heat the liquid raw material by an amount of heat provided to the vaporizer more than the heat that has already been provided immediately before the feedback control ends, and change to the feedback control after a predetermined time has elapsed from the time point when the flow rate control by the flow rate controller starts.
C23C 16/455 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement caractérisé par le procédé utilisé pour introduire des gaz dans la chambre de réaction ou pour modifier les écoulements de gaz dans la chambre de réaction
C23C 16/18 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le dépôt d'un matériau métallique à partir de composés organométalliques
A diaphragm valve including: a valve body having a flow path formed therein and a valve chamber recessed from an upper surface of the valve body; a diaphragm that is disposed in the valve chamber and elastically deformable to open and close the flow path and adjust an opening degree of the flow path; a stem for pressing the diaphragm to elastically deform the diaphragm; an actuator for driving the stem; a support mechanism that is fixed to the valve body and supports the stem and the actuator; wherein the stem includes a first stem member connected to the actuator via a displacement transmitting member, and a second stem member held by the support mechanism so as to be movable in the axial direction via a sleeve, the second stem member has an upper end portion which abuts against a lower end portion of the first stem member.
F16K 7/16 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné mécaniquement, p. ex. par une tige filetée ou par came
F16K 31/00 - Moyens de fonctionnementDispositifs de retour à la position de repos
C23C 16/455 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement caractérisé par le procédé utilisé pour introduire des gaz dans la chambre de réaction ou pour modifier les écoulements de gaz dans la chambre de réaction
A vaporization supply apparatus 1 includes a preheating section 2 for preheating a liquid raw material L, a vaporization section 3 provided on top of the preheating section 2 for heating and vaporizing the preheated liquid raw material L sent from the preheating section 2, a flow rate control device 4 provided on top of the vaporization section 3 for controlling the flow rate of a gas G sent from the vaporization section 3, and heaters 5 for heating the preheating section 2, the vaporization section 3 and the flow rate control device 4.
C23C 16/448 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement caractérisé par le procédé utilisé pour produire des courants de gaz réactifs, p. ex. par évaporation ou par sublimation de matériaux précurseurs
C23C 16/52 - Commande ou régulation du processus de dépôt
77.
OPERATION INFORMATION COLLECTION SYSTEM FOR FLUID CONTROL DEVICE, FLUID CONTROL DEVICE, OPERATION INFORMATION COLLECTION METHOD FOR FLUID CONTROL DEVICE, AND COMPUTER EXECUTABLE PROGRAM
An operation information collection system for a fluid control device configured as an operation information collection module includes a detected value acquisition unit acquiring a detected value of a state change or a device operation able to detect opening/closing operations from the fluid control device, a calculation processing unit calculating a rate of change of detected values separated by a predetermined time based on the detected value, and an operation information registration unit registering the rate of change of the detected values separated by the predetermined time to an operation information storage unit as an operation information of the fluid control device.
G05B 19/416 - Commande numérique [CN], c.-à-d. machines fonctionnant automatiquement, en particulier machines-outils, p. ex. dans un milieu de fabrication industriel, afin d'effectuer un positionnement, un mouvement ou des actions coordonnées au moyen de données d'un programme sous forme numérique caractérisée par la commande de vitesse, d'accélération ou de décélération
78.
Abnormality detection method for flow rate control device, and flow rate monitoring method
An abnormality detection method is performed in a gas supply system including a flow rate control device having a restriction part, a control valve, a flow rate control pressure sensor for measuring upstream pressure, and a control circuit. The inflow pressure sensor measures the supply pressure. An upstream on/off valve is provided upstream of the inflow pressure sensor. The method includes closing the upstream on/off valve when the gas flows at a controlled flow rate at the downstream of the restriction part by controlling an opening degree of the control valve based on the output of the flow rate control pressure sensor; measuring a drop in supply pressure on the upstream side of the control valve after closing the upstream on/off valve while keeping the control valve open; and detecting the presence or absence of abnormality in the flow rate control device based on the measured supply pressure drop.
G01F 25/10 - Test ou étalonnage des appareils pour la mesure du volume, du débit volumétrique ou du niveau des liquides, ou des appareils pour compter par volume des débitmètres
G01F 1/36 - Mesure du débit volumétrique ou du débit massique d'un fluide ou d'un matériau solide fluent, dans laquelle le fluide passe à travers un compteur par un écoulement continu en utilisant des effets mécaniques en mesurant la pression ou la différence de pression la pression ou la différence de pression étant produite par une contraction de la veine fluide
G05D 7/06 - Commande de débits caractérisée par l'utilisation de moyens électriques
[Problem] To provide a valve capable of, by setting a play state during manual operation, suppressing unexpected closing and opening of the valve and smoothly shifting from the play state to a rotation state. [Solution] In a valve 1, another end tip of a stem 6 and an engaging hole part 42 of an operation handle form corresponding circumferential surface parts and plane parts contiguous to the circumferential surface parts. Either one of the plane parts of the other end tip of the stem 6 and the engaging hole part 42 of the operation handle is formed from two planes having a predetermined angle, so that when rotation of the operation handle 4 in one direction is followed by rotation in another direction, a predetermined play is generated.
F16K 7/16 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné mécaniquement, p. ex. par une tige filetée ou par came
F16K 7/17 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné par pression d'un fluide
F16K 31/143 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide montés sur soupapes à fonctionnement manuel ou conjugués avec celles-ci le fluide agissant sur un piston
The present invention addresses the problem of providing a joint with which there is no occurrence of seizing of a tapered part of a surface-treated body during installation of piping. This joint comprises: a body 2 in which a tapered portion 20 is formed on at least one edge inner peripheral surface of the body, threaded portions 21 are formed on an outer peripheral surface of the body, and a flow path is formed in the body; a ring 4 having a tapered outer peripheral surface 40 which makes sliding contact with the tapered portion 20 of the body 2; and a nut 3 which, among the threaded portions 21 of the body 2, is screw-fitted to a parallel threaded portion 21a on a side where piping 6 is connected, the nut pressing the tapered outer peripheral surface 40 of the ring 4 against the tapered surface 20 of the body 2, wherein the body 2 is surface treated to prevent adsorption of liquid on the surface thereof, and the surface of the ring 4 is subjected to a gold plating treatment.
F16L 19/025 - Extrémités de tuyaux pourvues de colliers ou de brides formant corps ou non avec les tuyaux, maintenues en contact par un organe vissé les colliers ou les brides formant partie intégrante des extrémités du tuyau
F16L 19/08 - Raccords dans lesquels les surfaces d'étanchéité sont maintenues en contact par un organe, p. ex. un écrou à oreilles vissé dans, ou vissé sur une des parties du raccord avec segments métalliques qui mordent dans la paroi du tuyau
A fluid supply system includes: a support body having: a base plate; a side plate provided on one side of the base plate in the longitudinal direction so as to be orthogonal to the base plate; and a top plate provided on one end of the base plate in the height direction so as to be orthogonal to the base plate and the side plate; a process-gas supply unit provided on an outer surface of the top plate; a liquid supply unit provided on an inner surface of the side plate so as to communicate with the process-gas supply unit via a communication-flow-channel forming block; and a purge-gas supply unit provided on an inner surface of base plate so as to communicate with the process-gas supply unit via a communication pipe.
B05C 11/10 - Stockage, débit ou réglage du liquide ou d'un autre matériau fluideRécupération de l'excès de liquide ou d'un autre matériau fluide
B05C 9/02 - Appareillages ou installations pour appliquer des liquides ou d'autres matériaux fluides aux surfaces par des moyens non prévus dans l'un des groupes , ou dans lesquels le moyen pour déposer le liquide ou autre matériau fluide n'est pas important pour appliquer un liquide ou autre matériau fluide à des surfaces par des moyens individuellement non prévus dans les groupes , avec ou sans utilisation concomitante d'autres moyens
[Problem] To provide a controller for controlling fluid which can improve the loss resistance of a synthetic resin coating of a diaphragm and a vaporization supply device provided with the controller. [Solution] A controller (3) comprising: a body (8) provided with an inflow passage (6) and an outflow passage (7); a valve seat (9) provided between the inflow passage (6) and the outflow passage (7); a diaphragm (10) capable of being seated on or unseated from the valve seat (9); and an actuator (11) that causes the diaphragm (10) to be seated on or unseated from the valve seat (9), wherein the material of the valve seat (9) is nickel-based and the diaphragm (10) is provided with a synthetic resin coating (27) on a surface thereof to be brought into abutment with the valve seat (9).
F16K 7/12 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol
B01J 7/02 - Appareillage pour la production de gaz par voie humide
F16K 7/17 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné par pression d'un fluide
83.
ELECTROSTATIC CAPACITANCE PRESSURE SENSOR AND PRESSURE DETECTION METHOD USING SAME
[Problem] To provide: an electrostatic capacitance pressure sensor that enables detection of fluid pressure with high accuracy, that is able to be small in size, and that exhibits a wider range of pressure detection; and a pressure detection method using the same. [Solution] The present invention comprises: a reference chamber provided between a fixed electrode and a movable electrode that is bent in accordance with fluid pressure; a measurement chamber for causing the movable electrode to be bent by being filled with fluid; a means for generating a first output signal corresponding to a first potential and a second output signal corresponding to a second potential, by sequentially applying the first potential and the second potential to the fixed electrode; and a means for generating a differential signal between the first output signal and the second output signal.
G01L 9/12 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pressionTransmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent en faisant usage des variations de la capacité
84.
Flow rate control device, flow rate control method, control program for flow rate control device
A flow rate control device having a high response accuracy is provided.
A flow rate control device includes a flow sensor measuring a flow rate of a fluid, and a controller adjusting the flow rate where the flow rate of the fluid to be a flow rate set value. The controller includes a control valve changing the flow rate, a drive circuit driving the control valve, a sensor response adjustment circuit adjusting a frequency response of a measured value of the flow sensor, and a first filter attenuating a predetermined frequency band of an output of the sensor response adjustment circuit. The drive circuit, the flow sensor, the sensor response adjustment circuit, and the first filter, configure a feedback loop. A deviation between the flow rate set value and an output of the first filter becomes an input to the drive circuit.
G01N 21/33 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p. ex. spectrométrie d'absorption atomique en utilisant la lumière ultraviolette
86.
GAS SUPPLY APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
[Problem] To provide a gas supply apparatus capable of saving space and supplying, to a processing chamber, a mixed gas having a stable concentration component in a short time. [Solution] The present invention comprises: a plurality of fluid control units A1-D2 each including a flow path CH through which gas G flows and fluid control devices V1, FC, V2 provided in the middle of the flow path CH and controlling the flow of the gas G flowing through the flow path; and a merging flow path MCH1 including a plurality of connection portions LC1, LC2, RC1, RC2 which are fluidly connected to the plurality of fluid control units A1-D2, and a single gas outlet portion K1 through which the gas introduced through the plurality of connection portions LC1, LC2, RC1, RC2 is emitted, wherein the plurality of connection portions LC1, LC2, RC1 RC2 are arranged symmetrically with respect to the gas outlet portion K1 in the flow path direction of the merging flow path MCH1, and two or more fluid control units are fluidly connected to each of the plurality of connection portions LC1, LC2, RC1 RC2.
A valve device comprising: a flow passage block in which a flow passage is formed; a diaphragm configured to open and close the flow passage; an actuator configured to push down the diaphragm via a diaphragm holder; a tubular bonnet formed with an internal thread on an inner circumferential surface, the bonnet being configured to join the flow passage block and the actuator; a tubular adjusting screw threaded to the internal thread, the adjusting screw being configured to come into contact with the diaphragm holder to adjust a valve opening position of the diaphragm; and an annular lock nut configured to lock the adjusting screw by being screwed into the internal thread.
F16K 7/16 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné mécaniquement, p. ex. par une tige filetée ou par came
F16K 31/122 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide le fluide agissant sur un piston
A vaporizer 10 comprises: a vaporization chamber 12 for accumulating liquid; a bottom-portion heater 14B including a winding portion 141 provided in the vaporization chamber 12 in contact with the liquid accumulated in the vaporization chamber, the winding portion 141 acting as a heat source, and a rising portion 142 rising from the winding portion and having an end with a heater terminal 143; and a relief valve 16 connected to the vaporization chamber 12. The vaporizer 10 is configured to be able to vaporize and appropriately supply ultrapure water.
The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, a first light-transmission member 11 for transmitting light from the light source to the measurement cell, a second light transmission member 12 for transmitting light from the measurement cell to the photodetector, a lens 3A provided in the fluid unit, the lens 3A being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensor 5 for measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuit 28 for detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure sensor and the concentration of fluid in order to reduce the measurement error due to the refractive index of the fluid.
G01N 21/27 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en utilisant la détection photo-électrique
F16K 7/17 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné par pression d'un fluide
C09D 127/12 - Compositions de revêtement à base d'homopolymères ou de copolymères de composés possédant un ou plusieurs radicaux aliphatiques non saturés, chacun ne contenant qu'une seule liaison double carbone-carbone et l'un au moins étant terminé par un halogèneCompositions de revêtement à base de dérivés de tels polymères non modifiés par un post-traitement chimique contenant des atomes de fluor
F16K 7/14 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat
F16K 25/00 - Détails constitutifs relatifs au contact entre corps de soupapes ou de clapets et leurs sièges
91.
Flow-path forming block and fluid control device provided with flow-path forming block
A flow-path forming block includes: a first block; a second block attached to the first block, the second block having a first flow path and a second flow path; and a gasket provided between the first block and the second block, the gasket being configured to seal between the first block and the second block, wherein the second block has a communication portion formed on a surface facing the gasket, the communication portion being configured such that the first flow path and the second flow path are communicated, and the gasket has a recessed portion formed at a position facing the communication portion.
A valve device includes: a body formed with a valve chamber, a first inflow passage, a second inflow passage, an outflow passage, and an annular groove and provided with a valve seat; and a diaphragm configured to communicate with and interrupt the second inflow passage and the outflow passage. An end portion of the second inflow passage is open to the valve chamber. The valve seat is provided on a peripheral edge of a location where the valve chamber and the second inflow passage communicate with each other. The annular groove is open to the valve chamber and is formed around the second inflow passage. An end portion of the outflow passage is open to the annular groove. The first inflow passage has a plurality of flow passages including an inflow port and a plurality of outflow ports, and each outflow port is open to the annular groove.
F16K 7/17 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné par pression d'un fluide
F16K 7/16 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné mécaniquement, p. ex. par une tige filetée ou par came
F16K 27/02 - Structures des logementsMatériaux utilisés à cet effet des soupapes de levage
This pressure sensor 10 comprises: a sensor module 11 that has a bottomed cylinder shape, has a pressure receiving chamber C1 therein that is in communication with a flow path, and comprises a diaphragm 11a in contact with the pressure receiving chamber; a pressure detection element 12 that outputs the strain of the diaphragm 11a as pressure; a base ring 14 that is fixed at the outer edge of an open side end part 11c of the sensor module and is disposed on the outer peripheral side of the sensor module 11; a hermetic member 13 that is fixed to the base ring 14 and forms a sealed vacuum chamber C2 that faces the pressure receiving chamber C1 with the diaphragm 11a therebetween; a gasket 18 that is sandwiched between the base ring 14 and a body 5; and a pressing flange 19 that presses the base ring 14 into the body 5 via the gasket 18.
The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.
G05D 7/06 - Commande de débits caractérisée par l'utilisation de moyens électriques
G01L 13/06 - Dispositifs ou appareils pour la mesure des différences entre plusieurs valeurs de la pression des fluides en utilisant des éléments électriques ou magnétiques sensibles à la pression
G01F 15/00 - Détails des appareils des groupes ou accessoires pour ces derniers, dans la mesure où de tels accessoires ou détails ne sont pas adaptés à ces types particuliers d'appareils, p. ex. pour l'indication à distance
G01F 1/36 - Mesure du débit volumétrique ou du débit massique d'un fluide ou d'un matériau solide fluent, dans laquelle le fluide passe à travers un compteur par un écoulement continu en utilisant des effets mécaniques en mesurant la pression ou la différence de pression la pression ou la différence de pression étant produite par une contraction de la veine fluide
G01L 19/08 - Moyens pour l'indication ou l'enregistrement, p. ex. pour l'indication à distance
95.
Valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device
A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.
F16K 7/16 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné mécaniquement, p. ex. par une tige filetée ou par came
F16K 31/00 - Moyens de fonctionnementDispositifs de retour à la position de repos
F16K 31/122 - Moyens de fonctionnementDispositifs de retour à la position de repos actionnés par un fluide le fluide agissant sur un piston
F16K 37/00 - Moyens particuliers portés par ou sur les soupapes ou autres dispositifs d'obturation pour repérer ou enregistrer leur fonctionnement ou pour permettre de donner l'alarme
F16K 31/02 - Moyens de fonctionnementDispositifs de retour à la position de repos électriquesMoyens de fonctionnementDispositifs de retour à la position de repos magnétiques
F16K 7/17 - Dispositifs d'obturation à diaphragme, p. ex. dont un élément est déformé, sans être déplacé entièrement, pour fermer l'ouverture à diaphragme plat, en forme d'assiette ou en forme de bol disposé pour être déformé contre un siège plat le diaphragme étant actionné par pression d'un fluide
G05D 7/06 - Commande de débits caractérisée par l'utilisation de moyens électriques
The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, optical fibers 11 and 12 for connecting the electric unit 20 and the fluid unit 10 and is configured to measure the concentration of the fluid in the measurement cell by detecting the light incident from the light source 22 to the measurement cell and then emitted from the measurement cell by the photodetector 24, where optical connection parts 32 and 34 connected to the optical fibers 11, 12 and the light source 22 or the photodetector 24 are integrally provided in the electric unit 20.
G01N 21/33 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p. ex. spectrométrie d'absorption atomique en utilisant la lumière ultraviolette
G01N 21/27 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en utilisant la détection photo-électrique
[Problem] To provide a fluid control device which is compact and with which data pertaining to the internal operation of the device can be acquired. [Solution] A fluid control device V which is disposed in a flow path of a fluid and with which data pertaining to internal operation can be obtained, said fluid control device V comprising: a sensor bonnet 44 to which is installed one or more sensors M2 for detecting operation inside the fluid control device; a valve body 1 which is connected to the sensor bonnet; a diaphragm 42 which is held inside the valve body and below the sensor bonnet; a cover part 5 which covers the outer periphery of the sensor bonnet; and a circuit board 60 which is electrically connected to the one or more sensors and which is provided inside the cover part such that the thickness direction of the circuit board is identical to the flow path direction.
A concentration measurement device 20 for measuring the concentration of the a gas flowing through a junction block 14 connected to a plurality of gas supply lines includes a light source 40 for generating light incident to a flow path formed in the junction block, a photodetector 44 for receiving light emitting from the flow path, and an arithmetic control circuit 46 for determining the concentration of the gas flowing through the flow path based on the output of the photodetector, translucent incident windows 26 and 23 for making light from the light source incident to the flow path and, at least one of the translucent emitting windows 28 and 23 for emitting light passing through the flow path being sealed and fixed to the junction block 14.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
G01N 21/3504 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p. ex. spectrométrie d'absorption atomique en utilisant la lumière infrarouge pour l'analyse des gaz, p. ex. analyse de mélanges de gaz
G01N 21/33 - CouleurPropriétés spectrales, c.-à-d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes en recherchant l'effet relatif du matériau pour les longueurs d'ondes caractéristiques d'éléments ou de molécules spécifiques, p. ex. spectrométrie d'absorption atomique en utilisant la lumière ultraviolette
Provided is a valve in which a connecting portion is less likely to break even when the valve is reduced in size or is required to be subjected to a high load and which is also easy to assemble. This valve has a valve unit and a drive unit, and includes: a first recessed portion formed in any one of a second stem and a first stem and having a groove formed at a predetermined position on the inner peripheral surface of the recessed portion; a second recessed portion formed in any other one of the second stem and the first stem; a stem pin to be accommodated in both of the recessed portions; a biasing member which is accommodated in the first recessed portion and which biases the stem pin toward the other side; a side wall through hole penetrating a side wall of the second recessed portion horizontally; and a ball which enters the side wall through hole. When the second stem is pressed against the first stem up to a predetermined position, the ball is fitted into the groove, the stem pin is biased by the biasing member to be placed at a predetermined position, the ball is fixed by being sandwiched between a surface of the groove and a side surface of the stem pin, and the second stem and the first stem are fixedly connected to each other.
F16K 1/32 - Soupapes ou clapets, c.-à-d. dispositifs obturateurs dont l'élément de fermeture possède au moins une composante du mouvement d'ouverture ou de fermeture perpendiculaire à la surface d'obturation Détails
Provided is a temperature sensor attachment structure capable of reliably fixing a temperature sensor and being retrofitted to a standard component. Provided is an attachment structure of a temperature sensor to be attached to flow path blocks or a fluid control device of a fluid control apparatus including the plurality of flow path blocks each of which includes a fluid flow path therein and on at least one surface of which has an opening portion of the fluid flow path, and the fluid control device placed on the flow path blocks. The attachment structure includes a rectangular temperature sensor attachment piece, and a pair of clamping pieces extending from opposite sides of the attachment piece facing each other.
