Abrégé

A device (1, 10) for microscopically precise positioning and guidance of a measurement or manipulation element in at least two spatial axes (3, 4), comprising an outer base (5) having side walls (6), which define a base interior space (7), and an xy-step (8), which is arranged within the base interior space (7), can be displaced relative to the outer base (5) in an XY plane (34), has side walls (9) and has an assembly apparatus (11) for at least one measurement or manipulation element. The xy-stage (8) is coupled to the outer base (5) by means of bending elements (12), and comprising actuators (13) which are designed to displace the xy-step (8) relative to the outer base (5). According to the invention, the outer base (5) has at least one reinforcement element (17), which is rigidly connected to the side walls (6) of the outer base (5), and/or the xy-step (8) has at least one reinforcement element (17), which is rigidly connected to the side walls (9) of the xy-step (8).

Classes IPC  ?

• G01Q 10/04 - Balayage ou positionnement fin
• B23Q 1/36 - Ressorts
• G01Q 70/02 - Supports de sondes