A sensor assembly and a method of manufacturing a sensor assembly. The sensor comprising a gas sensor comprising a gas sensing area, and a package comprising one or more walls, where the walls define a volume accommodating the gas sensor and where one of the walls comprises an aperture defining an inlet for the package. The package comprises a deflecting surface within the volume wherein, in use, the deflecting surface is configured to convey gas molecules towards the gas sensing area.
Described herein is a sensor comprising a heating element and a control circuit. The control circuit is configured to: set a bias applied to the heating element to a calibration bias; obtain a measurement of a calibration parameter while the heating element is at the calibration bias, the calibration bias corresponding to a heating element temperature at which the calibration parameter is substantially independent of a stimulus applied to the sensor; set the bias applied to the heating element to a sensing bias; obtain a measurement of a sensing parameter while the heating element is at the sensing bias, the sensing parameter corresponding to an interaction between the sensor and the stimulus; and obtain a sensor reading using the sensing parameter and the calibration parameter. A method of operating a sensor is also described.
G01N 27/04 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance
G01F 1/696 - Circuits à cet effet, p. ex. débitmètres à courant constant
G01N 27/18 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance d'un corps chauffé électriquement dépendant de variations de température produite par des variations de la conductivité thermique d'un matériau de l'espace environnant à tester
G01N 33/00 - Recherche ou analyse des matériaux par des méthodes spécifiques non couvertes par les groupes
An environmental sensor assembly comprising: a package; and an environmental sensor disposed in the package, the environmental sensor comprising a sensing region and a reference region; wherein the package comprises one or more inlets arranged symmetrically with respect to the sensing region and the reference region; and wherein the sensing region is in fluid communication with an external environment through the one or more inlets. A method of manufacturing an environmental sensor assembly is also described.
A thermal sensor comprising: a supply voltage input configured to receive a supply voltage; a differential circuit, the differential circuit comprising a first element configured to provide a first sensing signal, and a first reference element configured to provide a first reference signal; and a controller configured to: obtain a measured supply voltage value, the measured supply voltage value corresponding to a measurement of the supply voltage received by the supply voltage input; obtain a differential measurement between the first sensing signal and the first reference signal; and determine a sensor output value based on the measured supply voltage value and the differential measurement. A method for operating a thermal sensor is also described.
G01K 7/16 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments résistifs
A thermal conductivity fluid sensor for detecting a first component of a mixture, the thermal conductivity fluid sensor comprising: a first heating element; and a controller, the controller configured to: control a temperature of the first heating element such that the temperature of the first heating element changes from a first temperature to a second temperature over a first transient time period; obtain a first reading indicative of a first thermal transport property of the mixture during the first transient time period; obtain a second reading indicative of second thermal transport property of the mixture when the first heating element is at the second temperature; and determine, based on the first reading and the second reading, a concentration of the first component of the mixture. A method for determining a concentration of a component of a mixture is also described.
A flow sensor assembly comprising a first substrate, a flow sensor located over the first substrate, a lid located over the first substrate and the flow sensor, a flow inlet channel, a flow outlet channel, and an overmold laterally encircling the flow sensor. The overmold is in contact with the side walls of the flow sensor, and extends between the flow sensor and the lid such that the overmold, the flow sensor, and the lid define a flow sensing channel between the flow inlet channel and the flow outlet channel. the lid and the encapsulation cooperate to define the flow inlet channel and the flow outlet channel.
A thermal conductivity sensor for measuring a concentration of a gas, the sensor comprising: a substrate portion; an intermediate layer disposed on the substrate portion; a semiconductor layer disposed on the intermediate layer, and a dielectric layer comprising a dielectric membrane, the dielectric membrane provided with a heater; wherein the dielectric membrane is located over a gap, the gap being located in the semiconductor layer. Methods for manufacturing a thermal conductivity sensor are also described.
A thermal conductivity sensor for measuring a concentration of a gas, the sensor comprising: a substrate portion; a dielectric layer comprising a dielectric membrane, wherein the dielectric membrane is provided with a heater; a first gap between the substrate portion and the dielectric membrane wherein the primary dielectric membrane is located above the first primary gap; and a micro-machined cap layer; a second gap located between the cap layer and the dielectric membrane. A method of manufacturing a thermal conductivity sensor is also described.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific, weighing, measuring, signalling and supervision (checking) apparatus and instruments; apparatus for recording, transmission or reproduction of signals and data; data processing equipment and computers; measuring, analysis and regulating apparatus, in particular electric and electronic, for logging and regulating process parameters in industrial process-measuring technology and process automation engineering; sensors, electric sensors; gas sensors; mass flow and fluid and thermal flow sensors; gas velocity sensors; air quality sensors; electronic measurement apparatus; flow sensors for air and compressed air; software for planning, commissioning, monitoring, controlling, maintaining and operating measuring, analysis and regulating apparatus, installations and systems for use in industrial process-measuring technology and process automation engineering; firmware; application specific integrated circuits (ASIC).
10.
Method and controller for controlling a fluid-flow sensor
A method for controlling a fluid-flow sensor in the presence of a flowing fluid, the method comprising: determining an initial estimate of a parameter corresponding to a flow rate of the flowing fluid, comparing the initial estimate to a threshold parameter, and based on the comparison, determining the parameter corresponding to the flow rate of the flowing fluid based on: a signal from a temperature sensor of the fluid-flow sensor; a signal from a heater of the fluid-flow sensor; or a combination of the signal from the temperature sensor and the heater of the fluid-flow sensor. A controller for a fluid-flow sensor is also described.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific, weighing, measuring, signalling and supervision
(checking) apparatus and instruments; apparatus for
recording, transmission or reproduction of signals and data;
data processing equipment and computers; measuring, analysis
and regulating apparatus, in particular electric and
electronic, for logging and regulating process parameters in
industrial process-measuring technology and process
automation engineering; sensors, electric sensors; gas
sensors; mass flow and fluid and thermal flow sensors; gas
velocity sensors; air quality sensors; electronic
measurement apparatus; flow sensors for air and compressed
air; software for planning, commissioning, monitoring,
controlling, maintaining and operating measuring, analysis
and regulating apparatus, installations and systems for use
in industrial process-measuring technology and process
automation engineering; firmware; application specific
integrated circuits (ASIC).
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific, weighing, measuring, signalling and supervision
(checking) apparatus and instruments; apparatus for
recording, transmission or reproduction of signals and data;
data processing equipment and computers; measuring, analysis
and regulating apparatus, in particular electric and
electronic, for logging and regulating process parameters in
industrial process-measuring technology and process
automation engineering; sensors, electric sensors; gas
sensors; mass flow and fluid and thermal flow sensors; gas
velocity sensors; air quality sensors; electronic
measurement apparatus; flow sensors for air and compressed
air; software for planning, commissioning, monitoring,
controlling, maintaining and operating measuring, analysis
and regulating apparatus, installations and systems for use
in industrial process-measuring technology and process
automation engineering; firmware; application specific
integrated circuits (ASIC).
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific, weighing, measuring, signalling and supervision
(checking) apparatus and instruments; apparatus for
recording, transmission or reproduction of signals and data;
data processing equipment and computers; measuring, analysis
and regulating apparatus, in particular electric and
electronic, for logging and regulating process parameters in
industrial process-measuring technology and process
automation engineering; sensors, electric sensors; gas
sensors; mass flow and fluid and thermal flow sensors; gas
velocity sensors; air quality sensors; electronic
measurement apparatus; flow sensors for air and compressed
air; software for planning, commissioning, monitoring,
controlling, maintaining and operating measuring, analysis
and regulating apparatus, installations and systems for use
in industrial process-measuring technology and process
automation engineering; firmware; application specific
integrated circuits (ASIC).
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific, weighing, measuring, signalling and supervision
(checking) apparatus and instruments; apparatus for
recording, transmission or reproduction of signals and data;
data processing equipment and computers; measuring, analysis
and regulating apparatus, in particular electric and
electronic, for logging and regulating process parameters in
industrial process-measuring technology and process
automation engineering; sensors, electric sensors; gas
sensors; mass flow and fluid and thermal flow sensors; gas
velocity sensors; air quality sensors; electronic
measurement apparatus; flow sensors for air and compressed
air; software for planning, commissioning, monitoring,
controlling, maintaining and operating measuring, analysis
and regulating apparatus, installations and systems for use
in industrial process-measuring technology and process
automation engineering; firmware; application specific
integrated circuits (ASIC).
15.
METHOD AND CONTROLLER FOR CONTROLLING A FLUID-FLOW SENSOR
A method for controlling a fluid-flow sensor in the presence of a flowing fluid, the method comprising: applying an electrical bias to the heater element of the fluid-flow sensor, determining a phase of the flowing fluid, and modifying the electrical bias according to the phase of the flowing fluid. A controller for a fluid-flow sensor is also described.
A61M 5/168 - Moyens pour commander l'écoulement des agents vers le corps ou pour doser les agents à introduire dans le corps, p. ex. compteurs de goutte-à-goutte
A sensor for sensing direction of fluid-flow, the sensor comprising: a heating element; a first active temperature sensing element; and a processor; wherein the processor is configured to: receive a first signal corresponding to a first sensed temperature from the first active temperature sensing element; and determine a direction of fluid-flow based on a difference between the first sensed temperature and a threshold value. A method for sensing direction of fluid-flow and a method for manufacturing a sensor are also described.
G01K 13/02 - Thermomètres spécialement adaptés à des fins spécifiques pour mesurer la température de fluides en mouvement ou de matériaux granulaires capables de s'écouler
G01K 7/02 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments thermo-électriques, p. ex. des thermocouples
G01K 7/16 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments résistifs
G01P 5/10 - Mesure de la vitesse des fluides, p. ex. d'un courant atmosphériqueMesure de la vitesse de corps, p. ex. navires, aéronefs, par rapport à des fluides en mesurant des variables thermiques
G01P 13/02 - Indication de la direction uniquement, p. ex. par une girouette
A fluid sensor for sensing a concentration or composition of a fluid, the sensor comprising a first temperature sensing element located on or within a first dielectric membrane and a second temperature sensing element located on or within a second dielectric membrane. An output circuit is configured to measure a differential signal between the first temperature sensing element and the second temperature sensing element. The fluid sensor comprises a first region configured to be exposed to the fluid, and a second region configured to be isolated from the fluid, where the first dielectric membrane is located in the first region, such that in use, the first dielectric membrane is exposed to the fluid, and wherein the second dielectric membrane is located in the second region such that in use, the second dielectric membrane is isolated from the fluid.
G01N 33/00 - Recherche ou analyse des matériaux par des méthodes spécifiques non couvertes par les groupes
G01M 3/04 - Examen de l'étanchéité des structures ou ouvrages vis-à-vis d'un fluide par utilisation d'un fluide ou en faisant le vide par détection de la présence du fluide à l'emplacement de la fuite
G01N 1/44 - Traitement d'échantillons mettant en œuvre un rayonnement, p. ex. de la chaleur
G01N 27/04 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance
G01N 27/22 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la capacité
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific, weighing, measuring, signaling and checking apparatus and instruments, namely, fluid and gas thermal conductivity, flow, concentration, composition, and temperature measuring apparatus, fluid and gas thermal conductivity, flow, concentration, composition, and temperature detecting apparatus, gas detectors for detecting the presence of gas, gas detectors for measuring the concentration of gas, gas sensors for measuring gas concentration, hazardous gas sensors for measuring gas concentration, explosive gas sensors for measuring gas concentration, pollutants sensors, pressure sensors, optical sensors, temperature sensors, heat sensors, hygrometers, humidity sensors, carbon dioxide sensors, hydrogen sensors, mass air flow sensors, gas flow sensors, fluid flow sensors, anemometers, differential pressure sensors, flow meters, particulate matter sensors, oxygen sensors for vehicular exhaust systems, nitrogen oxide sensors for vehicular exhaust systems, electric, electronic, and electrochemical oxygen monitors and sensors for environmental use, sensors and detector units for use in controlling the actuation and operation of automotive safety apparatus and equipment, nitrogen concentration detectors, combustible gas concentration detectors, and leak detectors for automotive vehicles, ventilation systems, fuel cells, industrial machinery; apparatus for recording, transmission or reproduction of signals and data, namely, sensor elements in the nature of electric resistors, capacitors, transistors, diodes, thermocouples, thermopiles, micro-electromechanical sensor systems for the measurement of thermal properties comprised of thermal membranes, thermal micro-bridges, thermal cantilevers and complementary metal-oxide semiconductors, temperature sensors, humidity sensors and data recording, data handling and evaluating electronics, namely, calculating machines, data processing equipment and computers, semiconductor and discrete circuits, application specific integrated circuits to make measured parameters available in useful format; data processing equipment and computers; measuring, analysis and regulating apparatus, namely, electric and electronic circuitry in the nature of calculating machines, data processing equipment and computers, semiconductor and discrete circuits, application specific integrated circuits for logging and regulating process parameters in industrial process-measuring technology and process automation engineering; pressure sensors, electric sensors; gas sensors for measuring gas concentration; mass flow and fluid and thermal flow electric sensors; gas velocity sensors; air quality electric sensors; electronic measurement apparatus, namely, thermal conductivity sensors, calorimetric thermal flow sensors, anemometers; flow rate sensors for air and compressed air; downloadable computer software for planning, commissioning, monitoring, controlling, maintaining and operating measuring, analysis and regulating apparatus in the nature of wireless transmitters and receivers, and systems comprised of heating elements, temperature sensing elements, sensor packages, sensor housings, flow paths, sensor micro-electromechanical system dies, sensor chips for scientific use, sensor driving electronics, sensor output electronics for use in industrial process-measuring technology and process automation engineering; environmental monitoring system comprised of meters and sensors that measure pressure, humidity, temperature and includes alarm and reporting functions for use in industrial process-measuring technology and process automation engineering; downloadable computer firmware for calibrating sensors, activating sensors, outputting sensor readout signals for electric resistance, voltage, current, temperature, alarm, flow rate, fluid composition and concentration, air quality reading and data analysis and data transmission for communication between sensors and external circuits and processing systems; application specific integrated circuits.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific, weighing, measuring, signaling and checking apparatus and instruments, namely, fluid and gas thermal conductivity, flow, concentration, composition, and temperature measuring apparatus, fluid and gas thermal conductivity, flow, concentration, composition, and temperature detecting apparatus, gas detectors for detecting the presence of gas, gas detectors for measuring the concentration of gas, gas sensors for measuring gas concentration, hazardous gas sensors for measuring gas concentration, explosive gas sensors for measuring gas concentration, pollutants sensors, pressure sensors, optical sensors, temperature sensors, heat sensors, hygrometers, humidity sensors, carbon dioxide sensors, hydrogen sensors, mass air flow sensors, gas flow sensors, fluid flow sensors, anemometers, differential pressure sensors, flow meters, particulate matter sensors, oxygen sensors for vehicular exhaust systems, nitrogen oxide sensors for vehicular exhaust systems, electric, electronic, and electrochemical oxygen monitors and sensors for environmental use, sensors and detector units for use in controlling the actuation and operation of automotive safety apparatus and equipment, nitrogen concentration detectors, combustible gas concentration detectors, and leak detectors for automotive vehicles, ventilation systems, fuel cells, industrial machinery; apparatus for recording, transmission or reproduction of signals and data, namely, sensor elements in the nature of electric resistors, capacitors, transistors, diodes, thermocouples, thermopiles, micro-electromechanical sensor systems for the measurement of thermal properties comprised of thermal membranes, thermal micro-bridges, thermal cantilevers and complementary metal-oxide semiconductors, temperature sensors, humidity sensors and data recording, data handling and evaluating electronics, namely, calculating machines, data processing equipment and computers, semiconductor and discrete circuits, application specific integrated circuits to make measured parameters available in useful format; data processing equipment and computers; measuring, analysis and regulating apparatus, namely, electric and electronic circuitry in the nature of calculating machines, data processing equipment and computers, semiconductor and discrete circuits, application specific integrated circuits for logging and regulating process parameters in industrial process-measuring technology and process automation engineering; pressure sensors, electric sensors; gas sensors for measuring gas concentration; mass flow and fluid and thermal flow electric sensors; gas velocity sensors; air quality electric sensors; electronic measurement apparatus, namely, thermal conductivity sensors, calorimetric thermal flow sensors, anemometers; flow rate sensors for air and compressed air; downloadable computer software for planning, commissioning, monitoring, controlling, maintaining and operating measuring, analysis and regulating apparatus in the nature of wireless transmitters and receivers, and systems comprised of heating elements, temperature sensing elements, sensor packages, sensor housings, flow paths, sensor micro-electromechanical system dies, sensor chips for scientific use, sensor driving electronics, sensor output electronics for use in industrial process-measuring technology and process automation engineering; environmental monitoring system comprised of meters and sensors that measure pressure, humidity, temperature and includes alarm and reporting functions for use in industrial process-measuring technology and process automation engineering; downloadable computer firmware for calibrating sensors, activating sensors, outputting sensor readout signals for electric resistance, voltage, current, temperature, alarm, flow rate, fluid composition and concentration, air quality reading and data analysis and data transmission for communication between sensors and external circuits and processing systems; application specific integrated circuits.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific, weighing, measuring, signaling and checking apparatus and instruments, namely, fluid and gas thermal conductivity, flow, concentration, composition, and temperature measuring apparatus, fluid and gas thermal conductivity, flow, concentration, composition, and temperature detecting apparatus, gas detectors for detecting the presence of gas, gas detectors for measuring the concentration of gas, gas sensors for measuring gas concentration, hazardous gas sensors for measuring gas concentration, explosive gas sensors for measuring gas concentration, pollutants sensors, pressure sensors, optical sensors, temperature sensors, heat sensors, hygrometers, humidity sensors, carbon dioxide sensors, hydrogen sensors, mass air flow sensors, gas flow sensors, fluid flow sensors, anemometers, differential pressure sensors, flow meters, particulate matter sensors, oxygen sensors for vehicular exhaust systems, nitrogen oxide sensors for vehicular exhaust systems, electric, electronic, and electrochemical oxygen monitors and sensors for environmental use, sensors and detector units for use in controlling the actuation and operation of automotive safety apparatus and equipment, nitrogen concentration detectors, combustible gas concentration detectors, and leak detectors for automotive vehicles, ventilation systems, fuel cells, industrial machinery; apparatus for recording, transmission or reproduction of signals and data, namely, sensor elements in the nature of electric resistors, capacitors, transistors, diodes, thermocouples, thermopiles, micro-electromechanical sensor systems for the measurement of thermal properties comprised of thermal membranes, thermal micro-bridges, thermal cantilevers and complementary metal-oxide semiconductors, temperature sensors, humidity sensors and data recording, data handling and evaluating electronics, namely, calculating machines, data processing equipment and computers, semiconductor and discrete circuits, application specific integrated circuits to make measured parameters available in useful format; data processing equipment and computers; measuring, analysis and regulating apparatus, namely, electric and electronic circuitry in the nature of calculating machines, data processing equipment and computers, semiconductor and discrete circuits, application specific integrated circuits for logging and regulating process parameters in industrial process-measuring technology and process automation engineering; pressure sensors, electric sensors; gas sensors for measuring gas concentration; mass flow and fluid and thermal flow electric sensors; gas velocity sensors; air quality electric sensors; electronic measurement apparatus, namely, thermal conductivity sensors, calorimetric thermal flow sensors, anemometers; flow rate sensors for air and compressed air; downloadable computer software for planning, commissioning, monitoring, controlling, maintaining and operating measuring, analysis and regulating apparatus in the nature of wireless transmitters and receivers, and systems comprised of heating elements, temperature sensing elements, sensor packages, sensor housings, flow paths, sensor micro-electromechanical system dies, sensor chips for scientific use, sensor driving electronics, sensor output electronics for use in industrial process-measuring technology and process automation engineering; environmental monitoring system comprised of meters and sensors that measure pressure, humidity, temperature and includes alarm and reporting functions for use in industrial process-measuring technology and process automation engineering; downloadable computer firmware for calibrating sensors, activating sensors, outputting sensor readout signals for electric resistance, voltage, current, temperature, alarm, flow rate, fluid composition and concentration, air quality reading and data analysis and data transmission for communication between sensors and external circuits and processing systems; application specific integrated circuits.
We disclose herein a fluid sensor for sensing a concentration or composition of a fluid, the sensor comprising a semiconductor substrate comprising a first etched portion, a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises a first dielectric membrane located over the first etched portion of the semiconductor substrate, a heating element located within the first dielectric membrane, and a first temperature sensing element spatially separated from the heating element. The fluid sensor further comprises a second temperature sensing element within the dielectric membrane, or the heating element may be further configured to operate as a second temperature sensing element. The separation between the second temperature sensing element and the first temperature sensing element introduces a temperature difference between the second temperature sensing element and the first temperature sensing element, such that a differential signal between the first temperature sensing element and the second temperature sensing element is indicative of the concentration or composition of the fluid based on a thermal conductivity of the fluid.
A fluid sensor for sensing a concentration or composition of a fluid, the sensorcomprising: a semiconductor substrate comprising a first etched portion; a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises a first dielectric membrane located over the first etched portion of the semiconductor substrate; a first heating element located within the first dielectric membrane; and a second heating element; wherein the first heating element is arranged to thermally shield the second heating element from ambient temperature changes; wherein the first heating element or the second heating element is configured to operate as a temperature sensing element; wherein the first heating element is configured to operate in a constant temperature or constant resistance mode; wherein the second heating element is configured to operate in a constant current or constant voltage mode or constant power mode; and wherein the sensor is configured to determine a thermal conductivity of the fluid using the temperature sensing element to determine said concentration or composition of the fluid.
A fluid sensor for sensing a concentration or composition of a fluid, the sensor comprising: a semiconductor substrate comprising a first etched portion and a second etched portion; a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises a first dielectric membrane located over the first etched portion of the semiconductor substrate, and a second dielectric membrane located over the second etched portion of the semiconductor substrate; two temperature sensing elements on or within the first dielectric membrane and two temperature sensing elements on or within the second dielectric membrane; an output circuit configured to measure a differential signal between the two temperature sensing elements of the first dielectric membrane and the two temperature sensing elements of the second dielectric membrane; wherein the first dielectric membrane is exposed to the fluid and the second dielectric membrane is isolated from the fluid.
A fluid sensor for sensing a concentration or composition of a fluid, the sensor comprising: a semiconductor substrate comprising a first etched portion and a second etched portion; a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises a first dielectric membrane located over the first etched portion of the semiconductor substrate, and a second dielectric membrane located over the second etched portion of the semiconductor substrate; two temperature sensing elements on or within the first dielectric membrane and two temperature sensing elements on or within the second dielectric membrane; an output circuit configured to measure a differential signal between the two temperature sensing elements of the first dielectric membrane and the two temperature sensing elements of the second dielectric membrane; wherein the first dielectric membrane is exposed to the fluid and the second dielectric membrane is isolated from the fluid.
G01N 25/18 - Recherche ou analyse des matériaux par l'utilisation de moyens thermiques en recherchant la conductivité thermique
G01N 25/00 - Recherche ou analyse des matériaux par l'utilisation de moyens thermiques
G01N 25/48 - Recherche ou analyse des matériaux par l'utilisation de moyens thermiques en recherchant la production de quantités de chaleur, c.-à-d. la calorimétrie, p. ex. en mesurant la chaleur spécifique, en mesurant la conductivité thermique sur une solution, sorption ou réaction chimique n'impliquant pas une oxydation par combustion ou catalyse
G01N 33/00 - Recherche ou analyse des matériaux par des méthodes spécifiques non couvertes par les groupes
We disclose herein a flow and thermal conductivity sensor comprising a semiconductor substrate comprising an etched portion, a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises at least one dielectric membrane located over the etched portion of the semiconductor substrate and a heating element located within the dielectric membrane. The dielectric membrane comprises one or more discontinuities located between the heating element and an edge of the dielectric membrane.
G01F 1/688 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide utilisant un élément de chauffage, de refroidissement ou de détection d'un type particulier
G01F 1/684 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide
G01F 1/69 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide utilisant un élément de chauffage, de refroidissement ou de détection d'un type particulier du type à résistance
G01F 1/7084 - Mesure du temps de parcours d'une distance déterminée utilisant des dispositions de détection thermique
G01F 15/02 - Compensation ou correction des variations de pression, de poids spécifique ou de température
G01N 25/18 - Recherche ou analyse des matériaux par l'utilisation de moyens thermiques en recherchant la conductivité thermique
G01N 27/04 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance
G01N 27/14 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance d'un corps chauffé électriquement dépendant de variations de température
G01N 27/18 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance d'un corps chauffé électriquement dépendant de variations de température produite par des variations de la conductivité thermique d'un matériau de l'espace environnant à tester
G01N 33/00 - Recherche ou analyse des matériaux par des méthodes spécifiques non couvertes par les groupes
G01F 1/698 - Circuits de réaction ou de rééquilibrage, p. ex. débitmètres auto-chauffés à température constante
We disclose herein a sensing device comprising a semiconductor substrate having a first etched portion, a dielectric layer located on or over the semiconductor substrate, wherein the dielectric layer comprises a first dielectric membrane located adjacent to the first etched portion of the semiconductor substrate, a pressure sensing element and/or a flow sensing element within the first dielectric membrane, and a first structure configured to reinforce the dielectric membrane. A first portion of the first structure is located within the first dielectric membrane, the first structure has a higher stiffness than the first dielectric membrane, and the first portion of the first structure is located between a perimeter of the dielectric membrane and the pressure sensing element or flow sensing element.
G01F 1/684 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide
G01L 9/00 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pressionTransmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent
G01L 19/00 - Détails ou accessoires des appareils pour la mesure de la pression permanente ou quasi permanente d'un milieu fluent dans la mesure où ces détails ou accessoires ne sont pas particuliers à des types particuliers de manomètres
A flow sensor assembly comprising a first substrate, a flow sensor located over the first substrate, a lid located over the first substrate and the flow sensor, a flow inlet channel, a flow outlet channel, and an overmold laterally encircling the flow sensor. The overmold is in contact with the side walls of the flow sensor, and extends between the flow sensor and the lid such that the overmold, the flow sensor, and the lid define a flow sensing channel between the flow inlet channel and the flow outlet channel. the lid and the encapsulation cooperate to define the flow inlet channel and the flow outlet channel.
A fluid sensor for sensing a concentration or composition of a fluid, the sensor comprising: a semiconductor substrate comprising a first etched portion; a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises a first dielectric membrane located over the first etched portion of the semiconductor substrate; a first heating element located within the first dielectric membrane; and a second heating element; wherein the first heating element is arranged to thermally shield the second heating element from ambient temperature changes; wherein the first heating element or the second heating element is configured to operate as a temperature sensing element; wherein the first heating element is configured to operate in a constant temperature or constant resistance mode; wherein the second heating element is configured to operate in a constant current or constant voltage mode or constant power mode; and wherein the sensor is configured to determine a thermal conductivity of the fluid using the temperature sensing element to determine said concentration or composition of the fluid.
G01N 25/18 - Recherche ou analyse des matériaux par l'utilisation de moyens thermiques en recherchant la conductivité thermique
G01F 1/688 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide utilisant un élément de chauffage, de refroidissement ou de détection d'un type particulier
G01F 1/69 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide utilisant un élément de chauffage, de refroidissement ou de détection d'un type particulier du type à résistance
G01F 1/7084 - Mesure du temps de parcours d'une distance déterminée utilisant des dispositions de détection thermique
G01N 27/04 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance
G01N 27/14 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance d'un corps chauffé électriquement dépendant de variations de température
G01N 27/18 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance d'un corps chauffé électriquement dépendant de variations de température produite par des variations de la conductivité thermique d'un matériau de l'espace environnant à tester
G01N 33/00 - Recherche ou analyse des matériaux par des méthodes spécifiques non couvertes par les groupes
G01F 1/698 - Circuits de réaction ou de rééquilibrage, p. ex. débitmètres auto-chauffés à température constante
G01F 15/02 - Compensation ou correction des variations de pression, de poids spécifique ou de température
We disclose herein a fluid sensor for sensing a concentration or composition of a fluid, the sensor comprising a semiconductor substrate comprising a first etched portion, a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises a first dielectric membrane located over the first etched portion of the semiconductor substrate, a heating element located within the first dielectric membrane, and a first temperature sensing element spatially separated from the heating element. The fluid sensor further comprises a second temperature sensing element within the dielectric membrane, or the heating element may be further configured to operate as a second temperature sensing element. The separation between the second temperature sensing element and the first temperature sensing element introduces a temperature difference between the second temperature sensing element and the first temperature sensing element, such that a differential signal between the first temperature sensing element and the second temperature sensing element is indicative of the concentration or composition of the fluid based on a thermal conductivity of the fluid.
G01N 25/18 - Recherche ou analyse des matériaux par l'utilisation de moyens thermiques en recherchant la conductivité thermique
G01F 1/688 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide utilisant un élément de chauffage, de refroidissement ou de détection d'un type particulier
G01F 1/69 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide utilisant un élément de chauffage, de refroidissement ou de détection d'un type particulier du type à résistance
G01F 1/7084 - Mesure du temps de parcours d'une distance déterminée utilisant des dispositions de détection thermique
G01N 27/04 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance
G01N 27/14 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance d'un corps chauffé électriquement dépendant de variations de température
G01N 27/18 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance d'un corps chauffé électriquement dépendant de variations de température produite par des variations de la conductivité thermique d'un matériau de l'espace environnant à tester
G01N 33/00 - Recherche ou analyse des matériaux par des méthodes spécifiques non couvertes par les groupes
G01F 1/698 - Circuits de réaction ou de rééquilibrage, p. ex. débitmètres auto-chauffés à température constante
G01F 15/02 - Compensation ou correction des variations de pression, de poids spécifique ou de température
We disclose herein a flow sensor comprising: a first substrate comprising an etched portion, a dielectric region located on a first side of the first substrate, wherein the dielectric region comprises at least one dielectric membrane located over the etched portion of the first substrate, a sensing element located on or within the dielectric membrane, and a second substrate adjoining a second side of the first substrate. The first side of the first substrate and the second side of the first substrate are opposite sides. The first substrate and the second substrate cooperate to form a sensing channel through the flow sensor
We disclose herein a flow sensor assembly comprising a first substrate, a flow sensor located over the first substrate, a lid located over the flow sensor, a flow inlet channel, and a flow outlet channel. A surface of the flow sensor and a surface of the lid cooperate to form a flow sensing channel between the flow inlet channel and the flow outlet channel, and a surface of the flow sensing channel is substantially flat throughout the length of the flow sensing channel.
We disclose herein a flow and thermal conductivity sensor comprising a semiconductor substrate comprising an etched portion, a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises at least one dielectric membrane located over the etched portion of the semiconductor substrate and a heating element located within the dielectric membrane. The dielectric membrane comprises one or more discontinuities located between the heating element and an edge of the dielectric membrane.
There is disclosed herein a flow sensor comprising: a first substrate comprising an etched portion; a dielectric layer located on the first substrate, where the dielectric layer comprises at least one dielectric membrane located over the etched portion of the first substrate; a first heating element and a second heating element located on or within the dielectric membrane; and a controller coupled with the first heating element and the second heating element. The first heating element and the second heating element are arranged to intersect one another within or over an area of the dielectric membrane. The controller is configured to: take a measurement from the second heating element; determine a calibration parameter using the measurement from the second heating element; take a measurement from the first heating element; and determine a flow rate through the flow sensor using the determined calibration parameter and the measurement from the first heating element.
G01F 1/688 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide utilisant un élément de chauffage, de refroidissement ou de détection d'un type particulier
G01F 1/696 - Circuits à cet effet, p. ex. débitmètres à courant constant
34.
Thermal fluid flow sensor having a dielectric membrane comprising discontinuities between the heating element and an edge
We disclose herein a flow and thermal conductivity sensor comprising a semiconductor substrate comprising an etched portion, a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises at least one dielectric membrane located over the etched portion of the semiconductor substrate and a heating element located within the dielectric membrane. The dielectric membrane comprises one or more discontinuities located between the heating element and an edge of the dielectric membrane.
G01F 1/68 - Mesure du débit volumétrique ou du débit massique d'un fluide ou d'un matériau solide fluent, dans laquelle le fluide passe à travers un compteur par un écoulement continu en utilisant des effets thermiques
G01F 1/688 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide utilisant un élément de chauffage, de refroidissement ou de détection d'un type particulier
G01F 1/708 - Mesure du temps de parcours d'une distance déterminée
G01F 1/69 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide utilisant un élément de chauffage, de refroidissement ou de détection d'un type particulier du type à résistance
G01F 15/02 - Compensation ou correction des variations de pression, de poids spécifique ou de température
G01F 1/698 - Circuits de réaction ou de rééquilibrage, p. ex. débitmètres auto-chauffés à température constante
We disclose herein a flow sensor assembly comprising a first substrate, a flow sensor located over the first substrate, a lid located over the flow sensor, a flow inlet channel, and a flow outlet channel. A surface of the flow sensor and a surface of the lid cooperate to form a flow sensing channel between the flow inlet channel and the flow outlet channel, and a surface of the flow sensing channel is substantially flat throughout the length of the flow sensing channel.
We disclose herein a flow sensor comprising: a first substrate comprising an etched portion, a dielectric region located on a first side of the first substrate, wherein the dielectric region comprises at least one dielectric membrane located over the etched portion of the first substrate, a sensing element located on or within the dielectric membrane, and a second substrate adjoining a second side of the first substrate. The first side of the first substrate and the second side of the first substrate are opposite sides. The first substrate and the second substrate cooperate to form a sensing channel through the flow sensor.
G01F 1/684 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide
G01F 1/696 - Circuits à cet effet, p. ex. débitmètres à courant constant
G01F 1/688 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide utilisant un élément de chauffage, de refroidissement ou de détection d'un type particulier
37.
CMOS thermal fluid flow sensing device employing a flow sensor and a pressure sensor on a single membrane
A CMOS-based sensing device includes a substrate including an etched portion and a first region located on the substrate. The first region includes a membrane region formed over an area of the etched portion of the substrate, a flow sensor formed within the membrane region and a pressure sensor formed within the membrane region.
G01F 1/68 - Mesure du débit volumétrique ou du débit massique d'un fluide ou d'un matériau solide fluent, dans laquelle le fluide passe à travers un compteur par un écoulement continu en utilisant des effets thermiques
G01F 1/688 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide utilisant un élément de chauffage, de refroidissement ou de détection d'un type particulier
B81C 1/00 - Fabrication ou traitement de dispositifs ou de systèmes dans ou sur un substrat
G01F 1/684 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide
G01F 1/69 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide utilisant un élément de chauffage, de refroidissement ou de détection d'un type particulier du type à résistance
G01F 1/698 - Circuits de réaction ou de rééquilibrage, p. ex. débitmètres auto-chauffés à température constante
G01K 7/02 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments thermo-électriques, p. ex. des thermocouples
G01L 9/06 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pressionTransmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent en faisant usage des variations de la résistance ohmique, p. ex. de potentiomètre de dispositifs piézo-résistants
H01L 21/306 - Traitement chimique ou électrique, p. ex. gravure électrolytique
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
H01L 23/34 - Dispositions pour le refroidissement, le chauffage, la ventilation ou la compensation de la température
H01L 23/48 - Dispositions pour conduire le courant électrique vers le ou hors du corps à l'état solide pendant son fonctionnement, p. ex. fils de connexion ou bornes
H01L 27/06 - Dispositifs consistant en une pluralité de composants semi-conducteurs ou d'autres composants à l'état solide formés dans ou sur un substrat commun comprenant des éléments de circuit passif intégrés avec au moins une barrière de potentiel ou une barrière de surface le substrat étant un corps semi-conducteur comprenant une pluralité de composants individuels dans une configuration non répétitive
H01L 27/16 - Dispositifs consistant en une pluralité de composants semi-conducteurs ou d'autres composants à l'état solide formés dans ou sur un substrat commun comprenant des composants thermomagnétiques
H01L 29/66 - Types de dispositifs semi-conducteurs
H01L 29/84 - Types de dispositifs semi-conducteurs commandés par la variation d'une force mécanique appliquée, p.ex. d'une pression
H01L 35/20 - Emploi d'un matériau spécifié pour les bras de la jonction utilisant des compositions inorganiques comprenant des métaux uniquement
H01L 35/32 - DISPOSITIFS À SEMI-CONDUCTEURS; DISPOSITIFS ÉLECTRIQUES À L'ÉTAT SOLIDE NON PRÉVUS AILLEURS - Détails fonctionnant exclusivement par effet Peltier ou effet Seebeck caractérisés par la structure ou la configuration de la cellule ou du thermocouple constituant le dispositif
H01L 35/34 - Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de ces dispositifs ou de leurs parties constitutives
This invention relates to hot film shear stress sensors and their fabrication. We describe a hot film shear stress sensor comprising a silicon substrate supporting a membrane having a cavity underneath, said membrane bearing a film of metal and having electrical contacts for heating said film, and wherein said membrane comprises a silicon oxide membrane, where in said metal comprises aluminium or tungsten, and wherein said membrane has a protective layer of a silicon-based material over said film of metal. In preferred embodiments the sensor is fabricated by a CMOS process and the metal comprises aluminium or tungsten.
G01F 1/68 - Mesure du débit volumétrique ou du débit massique d'un fluide ou d'un matériau solide fluent, dans laquelle le fluide passe à travers un compteur par un écoulement continu en utilisant des effets thermiques
G01F 1/684 - Dispositions de structureMontage des éléments, p. ex. relativement à l'écoulement de fluide
G01F 1/708 - Mesure du temps de parcours d'une distance déterminée
G01N 3/24 - Recherche des propriétés mécaniques des matériaux solides par application d'une contrainte mécanique en appliquant des efforts permanents de cisaillement
