A line laser measuring device that can be easily positioned at the appropriate height is provided. The line laser measuring device comprises: a probe light source that irradiates a target object with a probe light, which is a line laser light; a guide light source that irradiates the target object with a guide light at an angle different from that of the probe light; an imaging optical system that converges a reflected light, which is the probe light reflected by the target object, and forms an image; a two-dimensional imager that receives the reflected light converged by the imaging optical system; and a profile calculation unit that calculates, based on the imaging position of the reflected light on the receiving surface of the two-dimensional imager, a profile along the line where the probe light is irradiated on the target object based on a triangulation technique, wherein the irradiation range of the probe light and the irradiation range of the guide light overlap at a reference height within the profile detection range of the two-dimensional imager.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
G01B 11/02 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur
09 - Appareils et instruments scientifiques et électriques
Produits et services
Precision measuring machines and instruments; measuring
apparatus and instruments; computer software; electronic
publications; coordinate measuring machines for use in
measuring dimensions of various machine parts and assemblies
in three dimensions.
3.
METHOD OF SCANNING A MEASUREMENT SPACE OF A SHAPE MEASUREMENT SYSTEM, COMPUTER-READABLE PROGRAM AND SHAPE MEASUREMENT SYSTEM
A method for generating a shape measurement program for measuring the shape of a workpiece includes scanning a measurement space of a shape measurement system with a scanning device including an imaging device to obtain scanning data; recognizing at least one workpiece in the measurement space by analyzing the scanning data; detecting a position of the at least one workpiece in the measurement space; and generating a shape measurement program including a collision free movement path for a measuring probe of the shape measurement system for measuring the shape of the at least one workpiece. Also provided is a method for conditioning a shape measurement of a workpiece, a method for defining dimensional measurement equipment, configuration of a shape measurement system, and a method generating a shape measurement program for measuring the shape of a workpiece, to a corresponding computer program product and to a corresponding shape measurement system.
The present invention provides an automatic measurement system that detects a hazardous condition before a measurement sensor tool comes into contact with an object during execution of automatic measurement, and reliably avoids unintended collision of the measurement sensor tool with the object. The automatic measurement system comprises a measurement sensor tool for measuring dimensions or shape of an object to be measured, and a moving mechanism that moves the measurement sensor tool with respect to the object to be measured. Furthermore, the automatic measurement system comprises: a safety monitoring sensor provided so as to detect a space including the measurement sensor tool itself and an area in a vicinity of the measurement sensor tool; and a safety monitoring determination unit that monitors whether or not an object is present within a preset safe distance d from an outer surface of the measurement sensor tool in a space in a vicinity of the measurement sensor tool.
G01B 21/00 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative
G01B 5/12 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer des diamètres des diamètres intérieurs
G01B 21/14 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer des diamètres des diamètres intérieurs
A metrology system is provided including a chromatic range sensor optical pen, a measuring machine and an optical pen motion configuration. The optical pen focuses different wavelengths at different distances proximate to a workpiece to be measured. The measuring machine adjusts a relative position between the optical pen and the workpiece (e.g., for utilizing the optical pen for measuring the workpiece). The optical pen motion configuration includes a top portion that is attached to the optical pen and which is configured to move in a positive axial direction (e.g., relative to a holding portion that is attached to the measuring machine), thus enabling the optical pen to move from a rest position (e.g., thus minimizing any potential damage) when a corresponding force in the positive axial direction is applied by a contact (e.g., as corresponding to a collision) of the optical pen with the workpiece or other object.
A system and method provide distance calibration data for a chromatic range sensor system with a chromatic range sensor optical pen configured to focus different wavelengths at different distances along a distance measurement axis. A measuring machine rotates a calibration object (e.g., as positioned on a rotary stage) to achieve relative movement of a calibration surface of the calibration object in relation to the chromatic range sensor optical pen which is coupled to the measuring machine. The chromatic range sensor optical pen is utilized to perform a scan of a portion of the calibration surface as the calibration object is rotated. Distance indicating data is determined as corresponding to the distances between the chromatic range sensor optical pen and surface points on the calibration surface as the scan is performed. Distance calibration data for the chromatic range sensor system is determined based on the distance indicating data.
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
8.
METROLOGY SYSTEM WITH LIGHT PORTION AND SPECTROMETER PORTION
A metrology system includes a light portion configured to output light; a branching portion configured to branch a part of the light as output from the light portion as reference light that is directed along a reference optical path, and branch at least a part of the remaining light as measurement light that is directed along a measurement optical path to be reflected by a workpiece that is to be measured; and a detector and processing portion comprising a spectrometer portion. The detector and processing portion is configured to: receive combined light comprising reference light from the reference optical path and measurement light from the measurement optical path that is reflected by the workpiece; and convert the combined light into a distance indicating electrical signal. The light that is output from the light portion and that is received at the branching portion comprises a series of spectral peaks.
A metrology system includes a light portion that outputs light and a branching portion. A part of the light output from the light portion is branched as reference light directed along a reference optical path, and part of the light is branched as measurement light directed along a measurement optical path to be reflected by a workpiece that is to be measured. The metrology system is configured to: receive combined light comprising reference light from the reference optical path and measurement light from the measurement optical path; and convert the combined light into a distance indicating electrical signal. At least one of the reference optical path or the measurement optical path comprises a dispersion portion, for which an imbalanced dispersion between the reference optical path and the measurement optical path results (e.g., which enables disambiguation between signal peaks and a corresponding determination of a distance to the workpiece).
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
A metrology system includes: a light portion that outputs light; a branching portion; and a detector and processing portion. The branching portion branches the light as reference light along a reference optical path and as measurement light along a measurement optical path to be reflected by a workpiece that is to be measured. The detector and processing portion is configured to: receive combined light comprising the reference light and the measurement light; and convert the combined light into a combined light electrical signal. The detector and processing portion includes: an analog to digital converter; and a sample and hold portion. The sample and hold portion includes at least a first sample and hold circuit and a second sample and hold circuit, and is coupled to sample the combined light electrical signal (e.g., at respective first and second sample rates) and to provide outputs to the analog to digital converter.
A metrology system includes a light portion configured to output light; a branching portion configured to branch the light as reference light along a reference optical path and as measurement light along a measurement optical path to be reflected by a workpiece that is to be measured; a detector and processing portion comprising a spectrometer portion; and an optical filter portion. The detector and processing portion is configured to: receive combined light comprising reference light from the reference optical path and measurement light from the measurement optical path that is reflected by the workpiece; and convert the combined light into a distance indicating electrical signal. The optical filter portion is located along an optical path between the branching portion and the spectrometer portion, and comprises one or more optical filters, wherein each optical filter is configured to filter incoming light and produce light comprising a series of spectral peaks.
There is provided a shape measuring apparatus capable of automatically measuring a shape of a complex-shaped object to be measured quickly and accurately. A translation movement mechanism and a rotary drive mechanism relatively move a probe and a workpiece in such a manner that the probe performs a scanning measurement on the workpiece along a preset scanning path. At this time, the rotary drive mechanism is driven and controlled in such a manner that an angle formed between the probe and a surface of the workpiece is a desired angle in synchronization with the translation movement mechanism relatively moving the probe and the workpiece.
G01B 5/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques
G01B 5/012 - Têtes de contact de palpeurs pour de telles machines
G01B 5/28 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer la rugosité ou l'irrégularité des surfaces
13.
METHOD FOR DETERMINING A HEIGHT MAP AND INTERFEROMETRIC SYSTEM FOR THE SAME
The invention relates to a method for determining a height map of a sample surface including an edge. The invention further relates to an interferometric system for determining a height map of a sample surface including an edge. The invention further relates to a computer readable data carrier including a computer program that, when run on a processor of an interferometric system according to the invention, causes the interferometric system to perform the method according to the invention.
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
14.
HOLE MEASURING DEVICE AND METHOD FOR MEASURING HOLE
Provided is an automatic hole measuring device and a method for automatically measuring a hole which are low-cost and simple yet realizes accuracy and stability comparable to human labor. This hole measurement device is provided with: a hole contact unit for driving a plurality of probes forward and backward so as to bring the plurality of probes into contact with an inner surface of a hole to be measured; a posture detection means for detecting an angle of the hole contact unit with respect to a given reference; and a displacement detection part for detecting displacement or position of the probe. When the probe is brought into close contact with the inner surface of the hole to be measured, the angle of the hole contact unit is detected and the measured value of the inner diameter of the hole is obtained.
A supplementary metrology position determination system is provided for use with a robot. The robot includes a movable arm configuration and a motion control system configured to control an end tool position with a robot accuracy (i.e., based on sensors included in the robot). The supplementary system includes cameras and scales, each of which is attached to the movable arm configuration. Cameras are coupled to arm portions (e.g., at or near distal ends of the arm portions) such that the cameras rotate around scales (e.g., as the arm portions rotate around rotary axes). The scales may be at least partially cylindrical. The cameras are operated to acquire images of the scales for determining angular positions and/or bending and/or twisting of the arm portions of the robot. Such information may be utilized to achieve higher accuracy (e.g., for measurement operations and/or control of the robot, etc.).
09 - Appareils et instruments scientifiques et électriques
Produits et services
Precision measuring machines and instruments; measuring apparatus and instruments; computer software; electronic publications; coordinate measuring machines for use in measuring dimensions of various machine parts and assemblies in three dimensions.
17.
METHOD FOR AUTOMATICALLY GENERATING A REFERENCE POSITIONING SYSTEM, RPS, ALIGNMENT PROGRAM FOR SHAPE MEASUREMENT OF A WORKPIECE
The application relates to a method for automatically generating a reference positioning system, RPS, alignment program for shape measurement of a workpiece, the method comprising the steps of: acquiring datum targets of the workpiece from CAD, computer aided design, model information of the workpiece; generating a coordinate system based on the datum targets; determining alignment of the workpiece; and generating, using the coordinate system, a collision free workpiece program and/or a collision free movement path for a measuring probe of a shape measurement system.
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
G06F 30/27 - Optimisation, vérification ou simulation de l’objet conçu utilisant l’apprentissage automatique, p. ex. l’intelligence artificielle, les réseaux neuronaux, les machines à support de vecteur [MSV] ou l’apprentissage d’un modèle
A measuring instrument includes a main body, a probe movable with relative to the main body, a movable member provided to move with the probe, a scale member fixed to a part of the movable member, and a detection member that electrically detects a displacement of the scale member, wherein the movable member and the scale member are fixed to each other by bonding with an adhesive in the bonding region, and in the bonding region, at least one of the movable member or the scale member includes a through hole into which the adhesive enters.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
A displacement measuring instrument includes: a light source; a first interferometer to split a broadband source light into reference light and measurement light, to cause the reference light to be incident on a reference surface and the measurement light to be incident on a measurement surface, and to superimpose the reference light and the measurement light to generate interference light; a second interferometer to split the interference light, to cause the split interference light to be incident on a first reflection surface and a second reflection surface, and to superimpose a first reflected light and a second reflected light to generate expanded light that expands in a predetermined expansion direction; an image sensor to detect the expanded light; and a processing device to measure displacement on the measurement surface based on displacement of a peak position of an interference signal in an image detected by the image sensor.
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
A method for determining a local height of a location on a sample surface. A structured light microscope for determining a local height of a location on a sample surface. A computer readable data carrier including a computer program that, when run on a processor of an structured light microscope according to the disclosure, causes the structured light microscope to perform the method according to the disclosure.
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
G01B 11/26 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour tester l'alignement des axes
G02B 27/00 - Systèmes ou appareils optiques non prévus dans aucun des groupes ,
21.
WHITE LIGHT INTERFEROMETER AND METHOD OF ADJUSTING INTERFERENCE OPTICAL SYSTEM
A white light interferometer includes: an interference optical system; an imaging section that acquires an image of a measurement object; a motion mechanism that moves the interference optical system relative to the measurement object in a height direction; an adjustment mechanism that adjusts an optical path length of a reference light in the interference optical system; a position detector that detects each of a first position and a second position based on images that are acquired by the imaging unit, the first position being a height position of the interference optical system where a luminance value of a target pixel reaches a peak, the second position being a height position of the interference optical system where a contrast value reaches a peak; and an adjustment amount calculator that calculates, based on a deviation amount between the first position and the second position, an adjustment amount of the adjustment mechanism.
A correction value calculation method that calculates correction values to correct the kth harmonic component in the 2-phase sinusoidal signals (X, Y) output by the encoder are calculated. The correction value calculation method includes: a polar coordinate calculation step for calculating, for N phase angles θi and Lissajous radii Ri corresponding to each phase angle θi in a Lissajous waveform drawn by the 2-phase sinusoidal signals, a squared radius Ri2, which is the square of the Lissajous radius Ri corresponding to each phase angle θi; and a correction value calculation step for obtaining the correction values from coefficients obtained in an approximate expression model representing the squared radius R2 of the 2-phase sinusoidal signals containing kth harmonic component. The coefficients of the approximate expression model are determined by the least-squares method, and the resulting correction values are cumulatively added.
A metrology system is provided including a lighting configuration, a camera, a scan lens, a mirror configuration and a variable focal length (VFL) lens. The mirror configuration is utilized to adjust to different imaged fields of view as corresponding to different view positions through the scan lens. For each imaged field of view, the camera is utilized to acquire a corresponding image set including images of the workpiece, wherein the VFL lens is controlled to rapidly vary the focus position of the metrology system for acquiring the images (e.g., wherein each image corresponds to different focus position data). For each corresponding image set, focus position data is determined that indicates three dimensional positions of a plurality of surface points on the workpiece that are within the corresponding field of view (e.g., enabling determinations of measurements of workpiece features that are within the corresponding field of view).
H04N 23/56 - Caméras ou modules de caméras comprenant des capteurs d'images électroniquesLeur commande munis de moyens d'éclairage
H04N 23/67 - Commande de la mise au point basée sur les signaux électroniques du capteur d'image
H04N 23/74 - Circuits de compensation de la variation de luminosité dans la scène en influençant la luminosité de la scène à l'aide de moyens d'éclairage
Provided is a non-contact-type surface property evaluation device that is easy to use and can be miniaturized. This surface property evaluation device comprises: a light irradiation unit that irradiates an object to be measured; a reflected light detection sensor that receives and detects reflected light from the object to be measured; an observation distance measurement means that measures an observation distance, which is the distance between the object to be measured and the reflected light detection sensor; and a corrected evaluation parameter calculation unit that obtains a corrected evaluation parameter, for evaluating the spread of reflected light at a predetermined reference observation distance, by correcting the spread of the reflected light, actually measured by the reflected light detection sensor, on the basis of the observation distance. The surface roughness of the object to be measured is evaluated on the basis of the corrected evaluation parameter.
G01B 11/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la rugosité ou l'irrégularité des surfaces
26.
METROLOGY SYSTEM WITH POSITION AND ORIENTATION TRACKING UTILIZING MEASUREMENT SPOTS PRODUCED BY LIGHT BEAMS
A metrology system is provided for use with a movement system that moves an end tool. The metrology system includes a sensor configuration, a light beam source configuration and a processing portion. The light beam source configuration directs light beams to light beam sensors to indicate a position and orientation of the light beam source configuration. The light beam source configuration is coupled to the end tool or to an end tool mounting configuration. Light beams that are directed toward the light beam sensors produce measurement spots in positions on the light beam sensors that cause the light beam sensors to produce corresponding measurement signals. A modulation portion is configured to modulate a current of one or more light sources of the light beam source configuration. The processing portion processes the measurement signals from the sensor configuration to determine a position and orientation of the light beam source configuration.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Measuring apparatus and instruments; telecommunication
machines and apparatus; remote control apparatus; data
carriers storing computer programs; computer programs
(including those sold by downloading through
telecommunication line); optical apparatus and instruments;
image processing apparatus; magnetic encoders.
28.
MEASUREMENT DEVICE, DRIVE UNIT, MEASUREMENT SYSTEM, AND MEASUREMENT METHOD
The present invention provides a measurement device, a drive unit, a measurement system, and a measurement method with which it is possible to stabilize measurement performance and improve operability, and with which cost reductions due to the repurposing of an existing element can be realized . A caliper (10) has a main scale (11), a slider (12), a detector (13), and a drive unit (40) that moves the slider (12). The main scale (11) has a rolling surface (112) and a pressing surface (113). The drive unit (40) has a connection pin (42) that is connected to the slider (12) and can transmit driving force in a measurement direction (D), a driving roller (44) that is driven by a motor (43) and can roll on the rolling surface (112), and a pressing mechanism (50) that is pressed against the pressing surface (113). The pressing mechanism (50) has: a pair of pressing rollers (51) that are pressed against the pressing surface (113) at a plurality of positions in the measurement direction (D) on both sides of the driving roller (44); and a coil spring (52) that biases the pressing rollers (51) toward the pressing surface (113).
A mounting includes rotating the rotor and acquiring an amount of eccentricity, an eccentric direction, an amount of tilt, and a direction of tilt of the rotor with respect to a device rotation axis, an amount of eccentricity, an eccentric direction, an amount of tilt, and a direction of tilt of the stator with respect to the device rotation axis, based on the detection value detected by the detection head provided on the stator, moving the stator with respect to the device rotation axis so that the amount of eccentric of the stator is within the allowable range, and moving the stator so that the distance between the stator and the rotor at a position where the rotor is attached to the device body, and the amount of tilt and the direction of tilt with respect to the device rotation axis are within the allowable range.
A rotary encoder includes a rotor, and a stator attached to a device body via a position adjustment mechanism. The position adjustment mechanism includes a hollow bolt having a hollow cylindrical portion as a shaft portion and an outer peripheral screw portion on an outer peripheral surface of the shaft portion that screws into an inner peripheral screw portion provided in a mounting hole of the stator, a nut that screws into the outer peripheral screw portion, and a fixing screw inserted into the hollow cylindrical portion and screwed into the device body. A diameter of the inner surface of the hollow cylindrical portion is set to a dimension that forms a gap between the inner surface and a screw portion of the fixing screw, allowing the stator, which is screwed into the hollow bolt, to move in a direction orthogonal to an axial direction of the fixing screw.
Provided is a light irradiation device 2 that can be mounted to a measuring instrument capable of measuring the surface shape of an object under measurement through a light cutting method, the light irradiation device 2 comprising: a light source LS2 for emitting marker light indicating a measurable range, which is the range in which the measuring instrument can measure the surface shape of the object under measurement; and a position changing unit 23 having a changing member for changing the direction of radiation of the marker light.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
The current invention relates to a method for determining a height map of a sample surface of a sample. The invention further relates to a method for determining a height map of a sample surface comprising a pre-scan step and a high-accuracy scan step. The invention further relates to an optical profilometry device configured for determining a height map of the sample surface. The invention further relates to a computer readable data carrier comprising a computer program.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
An image measuring apparatus and program that enable easy designation of measurement points and intuitive, easy-to-understand operation is provided. The image measuring apparatus according to the present invention captures an image of a measurement object, and measures dimensions of measurement points of the measurement object by analyzing the image. The image measuring apparatus comprises: a display unit that displays the image of the measurement object; a measurement support item applying unit that causes the display unit to display a measurement support item superimposed on the image of the measurement object displayed on the display unit; an input unit that accepts input operations by a user for moving the measurement support item.
G01B 11/02 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur
G01B 11/08 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des diamètres
G01B 11/255 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes pour mesurer le rayon de courbure
A measuring instrument includes a movable portion configured to rotate in an arc motion about a pivot portion, and an electronic position encoder configured to measure an absolute relative position between a detector portion and a scale portion, one of which forms part of the movable portion. A maximum movement range of the movable encoder portion is less than 360 degrees. In the scale portion, first and second scale element portions are arranged with central reference points at first and second radial distances RD1 and RD2, respectively, from the pivot portion, for which the ratio of RD1/RD2 is at least 1.4. In various implementations, a separation distance between first and second scale tracks (which include the respective scale element portions) is greater than the first scale track width and the second scale track width.
G01B 3/22 - Calibres à aiguille sensible, p. ex. calibres à cadrans
G01B 3/00 - Instruments de mesure caractérisés par l'utilisation de techniques mécaniques
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
35.
MEASURING INSTRUMENT WITH ARC MOTION AND CORRECTION PROCESS
A measuring instrument includes a movable portion configured to rotate in an arc motion about a pivot portion, and an electronic position encoder configured to measure an absolute relative position between a detector portion and a scale portion, one of which forms part of the movable portion. A maximum movement range of the movable encoder portion and a maximum absolute measurement range are each less than 360 degrees. Based at least in part on detector signals that are received from the detector portion, an offset value is determined that corresponds to a radial offset (e.g., of the scale portion or the detector portion). The determined offset value is utilized to correct one or more values that are utilized to determine a relative position between the detector portion and the scale portion (e.g., such as a value corresponding to a spatial step or other spatial value of the scale portion).
G01B 3/22 - Calibres à aiguille sensible, p. ex. calibres à cadrans
G01B 3/00 - Instruments de mesure caractérisés par l'utilisation de techniques mécaniques
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
36.
INDUCTIVE POSITION SENSOR WITH POSITION DETECTION CONFIGURATIONS
A measuring probe for a coordinate measuring machine is provided. The measuring probe includes a stylus position detection portion with a sensing coil configuration comprising a plurality of sensing coils. Different couplable coil portions (e.g., which each at least partially surround a central axis) are provided that may be connected (e.g., individually and/or in series as part of an axial, rotary or normalization sensing coil of the plurality of sensing coils) as part of different stylus position detection configurations. For example, a first couplable coil portion may be connected to provide signals as received by signal processing and control circuitry in a first stylus position detection configuration, and may not be connected to provide signals in a second stylus position detection configuration. A second couplable coil portion may be connected to provide signals received by the signal processing and control circuitry in at least a second stylus position detection configuration.
G01B 7/012 - Têtes de contact de palpeurs pour de telles machines
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
37.
MEASURING INSTRUMENT, WIRELESS POWER TRANSFER APPARATUS, AND WIRELESS POWER TRANSFER SYSTEM
A portable measuring instrument is a portable measuring instrument that is supplied with power from a wireless power transfer apparatus that supplies power wirelessly, the instrument includes a sensor that is capable of detecting a person using the measuring instrument, a signal transmission part that transmits a beacon signal indicating a state of the measuring instrument detected by the sensor to the wireless power transfer apparatus, and a power receiving antenna that receives power transmitted from the wireless power transfer apparatus.
H02J 50/60 - Circuits ou systèmes pour l'alimentation ou la distribution sans fil d'énergie électrique sensibles à la présence d’objets étrangers, p. ex. détection d'êtres vivants
H02J 50/20 - Circuits ou systèmes pour l'alimentation ou la distribution sans fil d'énergie électrique utilisant des micro-ondes ou des ondes radio fréquence
H02J 50/40 - Circuits ou systèmes pour l'alimentation ou la distribution sans fil d'énergie électrique utilisant plusieurs dispositifs de transmission ou de réception
H02J 50/90 - Circuits ou systèmes pour l'alimentation ou la distribution sans fil d'énergie électrique mettant en œuvre la détection ou l'optimisation de la position, p. ex. de l'alignement
38.
Measuring instrument, wireless power transfer apparatus, and wireless power transfer system
A portable measuring instrument is a portable measuring instrument that receives power transferred from a wireless power transfer apparatus for transferring power wirelessly, the measuring instrument includes a plurality of power receiving antennas that receive power transmitted from the wireless power transfer apparatus, a posture detection part that detects a posture of the measuring instrument, and a signal transmission part that transmits a beacon signal including information indicating the posture detected by the posture detection part, wherein after the signal transmission part transmits the beacon signal, any of the plurality of power receiving antennas receives power from the wireless power transfer apparatus.
H02J 50/27 - Circuits ou systèmes pour l'alimentation ou la distribution sans fil d'énergie électrique utilisant des micro-ondes ou des ondes radio fréquence caractérisés par le type d'antennes de réception, p. ex. les antennes redresseuses
H02J 50/00 - Circuits ou systèmes pour l'alimentation ou la distribution sans fil d'énergie électrique
H02J 50/40 - Circuits ou systèmes pour l'alimentation ou la distribution sans fil d'énergie électrique utilisant plusieurs dispositifs de transmission ou de réception
H02J 50/80 - Circuits ou systèmes pour l'alimentation ou la distribution sans fil d'énergie électrique mettant en œuvre l’échange de données, concernant l’alimentation ou la distribution d’énergie électrique, entre les dispositifs de transmission et les dispositifs de réception
H02J 50/90 - Circuits ou systèmes pour l'alimentation ou la distribution sans fil d'énergie électrique mettant en œuvre la détection ou l'optimisation de la position, p. ex. de l'alignement
A power receiving module is a power receiving module housed in a portable measuring instrument, wherein the measuring instrument includes a housing portion that is capable of housing a standard battery having a standardized size, and a lid portion that covers the standard battery while the standard battery is housed in the housing portion, and the power receiving module has a first portion having the same shape as the standard battery and a second portion having the same shape as the lid portion, and includes a power receiving antenna that receives power transferred from a wireless power transfer apparatus that transfers power wirelessly.
H02J 50/20 - Circuits ou systèmes pour l'alimentation ou la distribution sans fil d'énergie électrique utilisant des micro-ondes ou des ondes radio fréquence
H02J 7/00 - Circuits pour la charge ou la dépolarisation des batteries ou pour alimenter des charges par des batteries
H02J 50/00 - Circuits ou systèmes pour l'alimentation ou la distribution sans fil d'énergie électrique
H02J 50/40 - Circuits ou systèmes pour l'alimentation ou la distribution sans fil d'énergie électrique utilisant plusieurs dispositifs de transmission ou de réception
09 - Appareils et instruments scientifiques et électriques
Produits et services
Measuring apparatus and instruments; telecommunication machines and apparatus; remote control apparatus; data carriers storing computer programs; computer programs (including those sold by downloading through telecommunication line); optical apparatus and instruments; image processing apparatus; magnetic encoders.
There is provided a measuring device capable of improving measurement accuracy by eliminating influences of user operations in setting a base point and in finalizing measurement data. An operation reception unit of a measuring device receives a measurement data finalization command to finalize measurement data. A central control unit sequentially stores measurement values in a memory as tentatively finalized measurement data when a proximity sensor detects that a finger has approached the operation reception unit. The central control unit determines one or two or more pieces in the tentatively finalized measurement data stored in the memory as finalized measurement data when the operation reception unit receives the measurement data finalization command.
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
A binarized image generation method that generates a binarized image of a target object, wherein for each pixel in an image of the target object: a reference value calculation step calculates a reference value based on the brightness values of the pixels around the subject pixel; a defect candidate region extraction threshold calculation step calculates a defect candidate region extraction threshold by multiplying a certain constant by the reference value; an over-detection reduction threshold setting step sets a threshold; and a threshold comparison step determines whether the brightness value of the subject pixel is above both the defect candidate region extraction threshold and the over-detection reduction threshold, and then generates a binarized image of the target object, where the image is binarized into two regions: one region consisting of pixels whose brightness values are greater than or equal to both thresholds, and the other region.
A coordinate measuring machine (measuring apparatus) includes: a probe (measurement performing unit) performing a measurement process on a measurement target; an electrical section disposed in a part of the probe; a temperature sensor provided for the electrical section and outputting a detection signal based on a temperature obtained by measurement; and a controller (measurement calculator) calculating a measurement result of the measurement target, in which the controller calculates the measurement result by compensating a measurement value obtained by the measurement process based on a processed signal obtained by applying a low-pass filter to the detection signal output from the temperature sensor.
An image measuring apparatus that can flexibly perform distortion correction in response to environmental changes is provided. The image measuring apparatus according to the present invention comprises: a stage on which a measurement target is placed; a reference pattern display unit on which a reference pattern is displayed; an image capturing unit that captures images of a subject; a distortion information generation unit that generates distortion information based on an image of the reference pattern captured by the image capturing unit and design information of the reference pattern; and a correction unit that corrects an image of the measurement target captured by the image capturing unit using the distortion information.
G06T 7/586 - Récupération de la profondeur ou de la forme à partir de plusieurs images à partir de plusieurs sources de lumière, p. ex. stéréophotométrie
G06T 7/80 - Analyse des images capturées pour déterminer les paramètres de caméra intrinsèques ou extrinsèques, c.-à-d. étalonnage de caméra
46.
APPEARANCE INSPECTION METHOD, INSPECTION AREA DESIGNATION METHOD AND PROGRAM
An appearance inspection method that can be used to inspect for solder defects using an image measuring apparatus is provided. An appearance inspection method inspects solder bumps formed on the pads of the inspection target based on an image of an inspection target. The appearance inspection method comprises: an inspection area designation step for designating the inspection area in the image of the inspection target; a pad area detection step for detecting a pad area included in the inspection area; a bump area detection step for detecting a bump area included in the inspection area; and a defect judgment step for judging the presence or absence of the defect based on the detected pad area and/or bump area.
A metrology system is provided including a lighting configuration and camera which are controlled to acquire image stacks of a workpiece, wherein each image stack is acquired utilizing different lighting (e.g., corresponding to different lighting positions). Sets of pixel intensity values from the image stacks are utilized to determine a composite stack which includes one pixel intensity value for each pixel position and focus position. At least some of the pixel intensity values of the composite stack are determined according to a glare reduction process which determines a corresponding pixel intensity value for the composite stack that is less than a maximum pixel intensity value of the corresponding set of pixel intensity values. Focus curve data is determined based at least in part on the pixel intensity values of the composite stack, wherein the focus curve data indicates three dimensional positions of a plurality of surface points on the workpiece.
A shape measurement unit S100 comprises: a cylindrical housing 31 that has an opening 31a; an emission part 33 that is arranged within the housing 31 and that emits measurement light irradiated from the opening 31a toward a measurement object; a light-receiving part 35 that is arranged within the housing 31 and that receives reflected light obtained by the measurement light being reflected by the measurement object; and an optical element that is arranged within the housing 31 and that reflects or refracts the reflected light to the light-receiving part 35 side.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
B23Q 17/20 - Agencements sur les machines-outils pour indiquer ou mesurer pour indiquer ou mesurer les caractéristiques de la pièce, p. ex. contour, dimensions, dureté
B23Q 17/24 - Agencements sur les machines-outils pour indiquer ou mesurer utilisant des moyens optiques
G01C 3/06 - Utilisation de moyens électriques pour obtenir une indication finale
A shape measurement unit S100 comprises a cylindrical housing 31 that is to be mounted on a tool holding part 13 of a machine tool 10, an emission part 33 that is provided inside the housing 31 and emits measurement light that is irradiated at a measurement target, a light reception part 35 that is provided inside the housing 31 and receives reflection light that is measurement light that has been reflected by the measurement target, and a shutter device 40 that has an opening/closing mechanism 41 that opens/closes an opening 31a in the housing 31 through which the measurement light and the reflection light pass.
B23Q 17/20 - Agencements sur les machines-outils pour indiquer ou mesurer pour indiquer ou mesurer les caractéristiques de la pièce, p. ex. contour, dimensions, dureté
B23Q 11/08 - Protecteurs pour des parties des machines-outilsCapots antiprojections
B23Q 17/24 - Agencements sur les machines-outils pour indiquer ou mesurer utilisant des moyens optiques
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
An image detection apparatus includes an image detector that detects an image of a detection target through a liquid resonant variable-focus lens system, a distance detector that detects a detection distance to the detection target, and a detection controller that controls the image detector and the distance detector. The detection controller controls a focal position of the image detector on a basis of the detection distance detected by the distance detector.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Laboratory apparatus and instruments; photographic apparatus
and instruments; cinematographic apparatus and instruments;
optical machines and apparatus; coordinate measuring
machines; parts and accessories for coordinate measuring
machines; measuring machines and instruments; profile
projectors; telecommunication machines and apparatus; image
processing apparatus; magnetic encoders; data processing
equipment; computer software for operating coordinate
measuring machines; magnetic discs recorded with computer
programs for management of measuring instruments.
53.
METHOD FOR DETERMINING A SURFACE MAP AND IMAGING SYSTEM FOR SAME
The invention relates to a method for determining a surface map, such as a height map, of a sample surface having a first region with a first reflectivity and a second region with a second reflectivity. The invention further relates to an imaging system for determining a surface map of a sample surface having a first region with a first reflectivity and a second region having a second reflectivity. The invention is further related to a digital data carrier including a computer program which, when run on a processor of an imaging system according to the invention, causes the imaging system to perform the method according to the invention.
G01N 21/45 - RéfringencePropriétés liées à la phase, p. ex. longueur du chemin optique en utilisant des méthodes interférométriquesRéfringencePropriétés liées à la phase, p. ex. longueur du chemin optique en utilisant les méthodes de Schlieren
G06V 10/60 - Extraction de caractéristiques d’images ou de vidéos relative aux propriétés luminescentes, p. ex. utilisant un modèle de réflectance ou d’éclairage
A surface shape measuring device measures the three-dimensional shape of a measurement surface in an object to be measured shaped as a rotating body or an approximate rotating body. The surface shape measuring device includes: a rotary table that rotates the object to be measured; an encoder that sequentially outputs signals according to the rotation angle of the rotary table; an optical sectioning sensor that irradiates light onto the measurement surface and acquires a plurality of optical section line image data by sequentially capturing optical section lines generated by the irradiated light, which move across the measurement surface as the rotary table rotates, triggered by a signal output from the encoder; and an image processing unit that generates an image showing the surface shape of the measurement surface by sequentially arranging the respective optical section line image data according to the corresponding rotation angle.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
G01B 11/08 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des diamètres
55.
METHOD FOR DETERMINING A HEIGHT MAP USING A WHITE LIGHT INTERFEROMETER AND WHITE LIGHT INTERFEROMETER FOR THE SAME
The invention relates to a method for determining a height map of a surface of a sample through white light interferometry wherein use is made of a white light interferometer with a broad band light source and an optical sensor including pixels. The invention further relates to a white light interferometer including a broad band light source, an optical sensor including pixels and a processor configured for performing the method of the invention. The invention further relates to a digital data carrier including a computer program which, when run on a processor of a white light interferometer according to the invention, causes the white light interferometer to perform the method according to the invention.
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01B 11/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la rugosité ou l'irrégularité des surfaces
A system is provided including a lens, a camera, a lighting configuration, one or more processors, and a memory. The lens is configured to input image light arising from a workpiece, and to transmit the image light along an imaging optical path. The camera is configured to receive image light transmitted along the imaging optical path and to provide images of the workpiece. The lighting configuration comprises lighting channels configured to illuminate the workpiece for producing the image light. In various implementations, representations of groups of lighting channels are provided in a display area. When it is determined that a group of lighting channels has been selected, current lighting settings may be displayed for the selected group of lighting channels. Adjustments to the lighting settings for a group of lighting channels may apply to all of the lighting channels in the group.
A system is provided including a lens, a camera, a lighting configuration, one or more processors, and a memory. The lens is configured to input image light arising from a workpiece and to transmit the image light along an imaging optical path. The camera is configured to receive the image light and to provide images of the workpiece. The lighting configuration comprises lighting channels configured to illuminate the workpiece for producing the image light. In various implementations, an option is provided for selecting a lighting optimization mode that that is at least one of an edge detection lighting optimization mode, a defect detection lighting optimization mode or a points from focus lighting optimization mode. A lighting optimization process may be performed based on the selected lighting optimization mode, and determines lighting for illuminating the workpiece for which the determined lighting comprises settings for the lighting channels of the lighting configuration.
Provided are: an observation optical system suitable for observation/measurement of the inner diameter of a pore even when the diameter thereof is narrow; and a measurement device suitable for using the optical system. This observation optical system according to the present invention comprises, in order from the object side, at least: a reducing lens system that has an angle of view of at least 120 degrees and that comprises a first lens group having a negative refractive power and a second lens group having a positive refractive power; and a magnifying lens system that magnifies an object image from the reducing lens system and forms an image on an imaging element, and that comprises a third lens group having a positive refractive power and a fourth lens group having a negative refractive power. The magnifying lens system is characterized by: generating pincushion distortion that cancels barrel distortion generated in the reducing lens system; and restricting the distortion generated by the entire observation optical system, in a range from 70% to 80% of the maximum image height, to within ± 5%.
A measuring instrument includes a movable portion configured to rotate in an arc motion about a pivot portion, and an electronic position encoder configured to measure an absolute relative position between a detector portion and a scale portion, one of which forms part of the movable portion. In the detector portion, first and second scale element portions of first and second track portions are linear and parallel to each other, with the second track portion closer to the pivot portion than the first track portion. In the scale portion, first signal modulating scale elements are disposed along a first scale element portion according to a first signal modulating element linear spatial step WSME1 and second signal modulating scale elements are disposed along a second scale element portion according to a second signal modulating element linear spatial step WSME2 different than the first signal modulating element linear spatial step WSME1.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
62.
Metrology system with high speed position and orientation tracking mode
A metrology system is provided for use with a movement system that moves an end tool. The metrology system includes a sensor configuration, a light beam source configuration and a processing portion. The light beam source configuration directs light beams to light beam sensors to indicate a position and orientation of the light beam source configuration. In a high speed operating mode (e.g., an alternative to a standard speed operating mode), the metrology system determines a region of interest (“ROI”) for each light beam sensor of a set of light beam sensors, wherein each ROI includes a measurement spot produced by a light beam. Measurement signals are processed resulting from the ROIs, and a position and orientation of the light beam source configuration is determined. In various implementations, the ROIs are determined (e.g., including position and/or size, etc.) based at least in part on position information from the movement system.
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
G01B 11/26 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour tester l'alignement des axes
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
63.
Metrology system with position and orientation tracking utilizing patterns of light beams
A metrology system is provided for use with a movement system that moves an end tool. The metrology system includes a sensor configuration, a light beam source configuration and a processing portion. The light beam source configuration directs a first pattern of light beams and a second pattern of light beams to light beam sensors to indicate a position and orientation of the light beam source configuration. The first pattern of light beams has a lower density of light beams as compared to the second pattern of light beams. Measurement signals from the light beam sensors are processed to determine a position and orientation of the light beam source configuration. The first pattern light beams and the second pattern light beams have at least one different characteristic (e.g., wavelength, polarity, timing, etc.) that enables the first pattern light beams to be distinguished from the second pattern light beams.
G01D 5/30 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette avec déviation des rayons lumineux, p. ex. pour une indication optique directe les rayons lumineux étant détectés par des cellules photo-électriques
09 - Appareils et instruments scientifiques et électriques
Produits et services
Optical inspection apparatus for industrial use; coordinate measuring machines; measuring apparatus and instruments, namely, micrometers, vernier calipers, dial indicators, form and contour analyzing instruments, roundness testers, laser length testing machines, height gauges, linear scales, tool maker's microscopes, gauge blocks, height measurement unit for determining the accuracy of height, depth, opening, positioning, gap, width, length and spatial determinations, checking unit for determining the accuracy of measuring apparatuses, angle meters and protractors, and electronic data processors for processing and displaying measurement data received from the foregoing instruments; profile projectors; telecommunications and data networking hardware, namely, devices for transporting and aggregating voice, data, and video communications across multiple network infrastructures and communications protocols; apparatus for recording, transmission, processing and reproduction of sound, images, or data; magnetic encoders; data processing equipment; downloadable computer software for operating coordinate measuring machines; pre-recorded magnetic discs featuring computer programs for management of measuring instruments, machine readable
67.
METHOD FOR COMBINING HEIGHT MAPS AND PROFILOMETER FOR THE SAME
The invention relates to a method for measuring a first height map and a second height map of a sample surface with a profilometer and combining the first and second height maps to a composite height map. The invention further relates to a profilometer configured for measuring a first height map and a second height map and combining the first and second height maps to a composite height map.
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
A contactless distance measurement machine (1) irradiates a stylus (20) from a distal end part to a side thereof with measurement light from an interferometer (30). The contactless distance measurement machine comprises: a cylindrical light generation unit (21) that converts measurement light from the interferometer (30) into cylindrical light; an optical element group that changes the cylindrical light from the cylindrical light generation unit (21) into light along an extension axis (E) of the stylus (20); a planar light generation unit (24) that converts the light along the extension axis (E) into light oriented outward around the extension axis (E), and that converts light which is reflected off the surface of a measurement object W and returns inward around the extension axis (E) into light along the extension axis (E); an azimuth detection unit (28) that detects an azimuth at which the light returning to the planar light generation unit (24) reaches a maximum intensity; and a spatial light modulation unit (25) that restricts the light which has returned to the planar light generation unit (24) to light of the azimuth detected by the azimuth detection unit (28).
Provided is a non-contact surface property evaluation device that is easy to use, compact, and relatively inexpensive. The surface property evaluation device comprises: a light detector (240) that receives and detects scattered light from a measurement target object; and a single optical aperture (250) or arrayed optical apertures (250) disposed so as to face a light receiving surface (242) of the light detector (240). The relative positions of the optical aperture (250) and the light detector (240) are fixed such that a gap between the optical aperture (250) and the light receiving surface (242) of the light detector (240) is constant. The surface properties of the measurement target object are evaluated on the basis of the intensity distribution of the light detected by the light detector (240).
G01B 11/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la rugosité ou l'irrégularité des surfaces
09 - Appareils et instruments scientifiques et électriques
Produits et services
Optical apparatus and instruments; image processing
apparatus; measuring apparatus and instruments; profile
projectors; computer software for processing digital images;
computer programs; electron microscopes; digital graphic
scanners.
72.
TEMPERATURE COMPENSATION APPARATUS, MEASUREMENT SYSTEM, AND TEMPERATURE COMPENSATION METHOD
A temperature compensation apparatus including: a measured temperature acquisition part that acquires temperatures of the three-dimensional measurement apparatus during measurement; a measurement result acquisition part that acquires a measurement result of an object to be measured output by the three-dimensional measurement apparatus; a correction value calculation part that calculates a correction value of the measurement result using a model formula of temperature compensation, including a polynomial composed of values obtained by multiplying each of a plurality of temperatures by coefficients corresponding to each of the plurality of temperature sensors; and a correction part that calculates a corrected measurement value, which is a corrected measurement result obtained by adding the correction value to the measurement result or multiplying the correction value by the measurement result.
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
73.
FLUCTUATION BASED METHOD FOR DETERMINING SUB-SURFACE DEFECTS OF A SAMPLE
The invention relates to a method for sub-surface defect detection of a sample having a sample surface wherein use is made of an imaging system. The invention further relates to an imaging system for sub-surface defect detection for use in the method of the invention. The imaging system comprises: - a sample holder for holding the sample therein; - an excitation source for exciting the sample in the sample holder; - an optical sensor for obtaining an image of the sample surface of the sample in the sample holder, wherein the optical sensor comprises multiple pixels; and - a processor operatively connected to the excitation source and the optical sensor.
G01N 29/00 - Recherche ou analyse des matériaux par l'emploi d'ondes ultrasonores, sonores ou infrasonoresVisualisation de l'intérieur d'objets par transmission d'ondes ultrasonores ou sonores à travers l'objet
G01N 29/06 - Visualisation de l'intérieur, p. ex. microscopie acoustique
A machine vision system includes a vision components portion and an inspection portion. The inspection portion includes a variable focal length (VFL) lens, a VFL lens controller, an inspection portion light source, an inspection portion objective lens, and an inspection portion camera. The vision components portion performs an autofocus process which indicates z-heights of a plurality of sampling points on a surface of a workpiece for determining coarse surface profile data. The inspection portion thereafter performs an inspection process, which comprises acquiring an extended depth of field (EDOF) image for each inspection point of a plurality of inspection points on the surface of the workpiece, and for which an inspection scan path is followed which includes adjustments in relation to the distance between the inspection portion and the surface of the workpiece and is determined based at least in part on the coarse surface profile data from the autofocus process.
G01N 21/88 - Recherche de la présence de criques, de défauts ou de souillures
G02B 7/09 - Montures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour lentilles avec mécanisme de mise au point ou pour faire varier le grossissement adaptés pour la mise au point automatique ou pour faire varier le grossissement de façon automatique
G02B 7/10 - Montures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour lentilles avec mécanisme de mise au point ou pour faire varier le grossissement par déplacement axial relatif de plusieurs lentilles, p. ex. lentilles d'objectif à distance focale variable
G03F 7/00 - Production par voie photomécanique, p. ex. photolithographique, de surfaces texturées, p. ex. surfaces impriméesMatériaux à cet effet, p. ex. comportant des photoréservesAppareillages spécialement adaptés à cet effet
An inductive encoder system includes a scale including a periodic scale pattern, and a detector portion configured to move along a measuring axis direction relative to the periodic scale pattern. The detector portion includes a field generating portion configured to generate a changing magnetic flux, and a sensing portion comprising one or more sets of sensing elements and configured to provide detector signals which respond to a local effect on the changing magnetic flux provided by the periodic scale pattern, wherein each set of sensing elements is coupled to a set of sensor vias. The detector portion further includes a plurality of shield structures SST, wherein each shield structure SST is located proximate to a set of sensor vias and comprises a plurality of shield vias, and in each shield structure one or more shield loops are formed by the plurality of shield vias as coupled together by conductor portions.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
The measurement machine includes: a holding section where a measurement target is held; a measurement unit (a first measurement unit and a second measurement unit) disposed at a position facing the holding section and provided with sensors that is configured to perform a measurement process on the measurement target; a frame whose position with respect to the holding section is fixed; and a plurality of arms coupling the frame with the measurement unit.
A calibration data acquisition method includes: a first holding step of holding an inspection gauge provided with a plurality of portions to be examined in a first posture with a gauge moving apparatus; a first measuring step of acquiring first distance data by measuring a distance between the plurality of portions to be examined with the three-dimensional measuring apparatus; a second holding step of holding the inspection gauge in a second posture with the gauge moving apparatus, after the first measuring step; a second measuring step of acquiring second distance data by measuring a distance between the plurality of portions to be examined of the inspection gauge in the second posture with the three-dimensional measuring apparatus; and a step of generating calibration data including the first distance data and the second distance data.
G01B 5/008 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer les coordonnées de points en utilisant des machines de mesure de coordonnées
A working machine (base supporting device) includes a base having an upper surface that defines a horizontal plane including X and Y directions; first supports provided for opposite end portions in the X direction of the base and supporting the base in a Z direction; a second support disposed between the opposite end portions of the base supported by the first supports, supporting the base in the Z direction, and being adjustable in a position in the Z direction at which the base is supported; a deflection detecting section that detects an amount of deflection in the Z direction of the base; and a deflection controlling section that controls the second support, in which the deflection controlling section controls, based on the amount of deflection detected by the deflection detecting section, the second support to make the upper surface parallel to the X direction.
An image measuring apparatus includes: a CAD data storage unit that stores CAD data of at least one object and CAD data information including designed dimensions extracted from the CAD data, measurement points corresponding to the design dimensions, and edge detection tool conditions used to detect the edges of the measurement points in advance for each different CAD data; a CAD data retrieval unit that retrieves CAD data from the CAD data storage unit that are similar in shape to the measurement object represented in the captured image; a CAD data setting unit that performs best-fit of the CAD data identified based on the retrieval to the image of the measurement object as the CAD data of the measurement object, and sets the coordinate system of the CAD data; and a measurement performing unit that performs edge detection and dimensional measurement for each measurement point using the CAD data information.
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
G01B 11/03 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
An image measuring apparatus and a program with good operability even when the information display screen is small or the operator's skill level is low is provided. An image measuring apparatus according to the present invention captures an image of a measurement object and measures the dimensions of the measurement object through a plurality of operation steps. The image measuring apparatus comprises: a display unit that displays user interfaces that accept inputs through input operations by an operator; a process control unit that causes the display unit to display only the user interfaces that accept the inputs necessary to use the available functions in each of the operation steps; and a function execution unit that executes the function for which the input related to use is made on the user interface.
An image measuring apparatus includes: a mounting table on which a measurement object is placed; an image capturing unit disposed opposite the mounting table and captures an image of the measurement object; a control unit that controls the image measuring apparatus; and a memory unit that stores at least the shape of the measurement object and the measurement method corresponding to the measurement object, associated to each other. The control unit includes: a placement judging unit that judges whether or not the measurement object is placed on the mounting table in a state ready for measurement based on the image captured by the image capturing unit; and a measurement performing unit that selects a measurement method based on the shape of the measurement object appearing in the image and performs the measurement, when the placement judging unit determines that the measurement object is ready for measurement.
A measurement control device includes a screen interface and controls a measurement operation of a measurement machine through the screen interface, the measurement control device including: a normal display screen that forms a part of the screen interface; one or more functional components provided on the normal display screen; a help mode button provided on a part of the normal display screen to switch a normal display mode from/to a help display mode; one or more help icons displayed on the normal display screen in the help display mode in a manner each associated with corresponding one of the functional components; a summary description field displayed on a part of the normal display screen when one of the help icons is selected; a detail display button displayed on a part of the summary description field; and a detailed description field displayed when the detail display button is selected.
G06F 9/451 - Dispositions d’exécution pour interfaces utilisateur
G06F 3/04817 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] fondées sur des propriétés spécifiques de l’objet d’interaction affiché ou sur un environnement basé sur les métaphores, p. ex. interaction avec des éléments du bureau telles les fenêtres ou les icônes, ou avec l’aide d’un curseur changeant de comportement ou d’aspect utilisant des icônes
An inductive linear encoder configured to measure a relative position between two elements along a measuring axis direction includes a scale including a periodic scale pattern and a detector portion configured to move along the measuring axis direction relative to the periodic scale pattern, wherein the detector portion and the scale are separated by a gap. The detector portion includes a field generating portion configured to generate a changing magnetic flux, and a sensing portion configured to provide detector signals which respond to a local effect on the changing magnetic flux provided by adjacent signal modulating elements of the scale pattern. The encoder includes one or more actuators coupled to the detector portion and configured to be electronically controlled to adjust a position of the detector portion so as to adjust the gap based at least in part on the detector signals from the sensing portion.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
84.
Image detection device and image detection method for reducing focusing recovery time
An image detection device includes: a variable focal length lens whose focal length is periodically changed in response to a drive signal that is periodic; an illuminator configured to illuminate a measurement target; an image detector configured to detect an image of the measurement target through the variable focal length lens; a drive controller configured to output the drive signal to the variable focal length lens; a light-emission controller configured to output a light-emission signal, which is in synchronization with the drive signal, to the illuminator; an oscillation sensor configured to detect oscillation information of the variable focal length lens; and a synchronous controller configured to adjust an output timing of the light-emission signal based on the oscillation information.
H04N 23/74 - Circuits de compensation de la variation de luminosité dans la scène en influençant la luminosité de la scène à l'aide de moyens d'éclairage
G02B 3/14 - Lentilles remplies d'un fluide ou à l'intérieur desquelles le vide a été fait à distance focale variable
H04N 23/68 - Commande des caméras ou des modules de caméras pour une prise de vue stable de la scène, p. ex. en compensant les vibrations du boîtier de l'appareil photo
Provided is an automatic measuring device for automating a contact-type measuring instrument that is inexpensive and easy to use. This automatic measuring device is provided with a holding unit that holds at least one of a workpiece and a measuring instrument such that when the workpiece and a movable element are in contact with one another, the relative positions and attitudes of the workpiece and the measuring instrument are changed at a pressure equal to or less than a predetermined measuring pressure that is preset in the measuring instrument, thereby bringing the contacting surfaces of the workpiece and the movable element into close contact with one other. The holding unit comprises: a translation permitting mechanism unit that permits translational displacement within a plane parallel to a measuring axis direction; and a first rotation permitting mechanism unit that permits rotation with an axis that is non-parallel with respect to the measuring axis as the axis of rotation.
A manufacturing method of a scale includes forming a metal-containing layer on a resin layer that is provided on at least a first face of a substrate, forming an outline of a pattern on the metal-containing layer by irradiating a first laser to the metal-containing layer from a side opposite to the substrate, irradiating a second laser to a margin outside of the outline of the metal-containing layer from a side of a second face of the substrate opposite to the first face, and peeling a part of the metal-containing layer corresponding to the margin.
G01D 5/245 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant les caractéristiques d'impulsionsMoyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques produisant des impulsions ou des trains d'impulsions utilisant un nombre variable d'impulsions dans un train
B23K 26/352 - Travail par rayon laser, p. ex. soudage, découpage ou perçage pour le traitement de surface
87.
Inductive position transducer system with impedance circuit portion
An inductive position transducer system is provided, including an inductive position transducer and one or more sensing circuit portions. Each sensing circuit portion is connected to first and second sensing coil terminals and is configured to receive a signal from a respective sensing coil and comprises an impedance circuit portion and an input circuit portion (e.g., of an ASIC). The impedance circuit portion comprises at least first and second impedance circuit portion components. The first impedance circuit portion component is coupled between first and second impedance circuit portion nodes. The second impedance circuit portion component is at least one of: coupled between the first coil terminal and the first impedance circuit portion node; or coupled between the first impedance circuit portion node and the second impedance circuit portion node (for which a third impedance circuit portion component may also be provided in some implementations).
G01D 5/22 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile influençant deux bobines par une action différentielle
G01B 7/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques
There is provided an automatic measuring apparatus that automates an inexpensive and easy-to-use contact-type measuring device. An automatic measuring apparatus includes a measuring device including a movable element that is displaceable with respect to a fixed element and moves forward and backward to be brought into contact with or away from a workpiece, and a displacement detection part that detects a displacement or position of the movable element, and an automatic operation part that automates the forward/backward movement of the movable element by power. When the movable element is brought into contact with the workpiece, vibration is applied directly or indirectly to at least one of the workpiece and the measuring device in such a manner that contacting surfaces of the workpiece and the measuring device are in close contact with each other by changing a relative position and posture between the workpiece and the measuring device.
G01B 7/02 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer la longueur, la largeur ou l'épaisseur
G01B 3/38 - Calibres à mâchoire ouverte et faces opposées, c.-à-d. compas à calibrer, où la distance interne entre les faces est fixe, mais peut être réglée à l'avance
G01B 7/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques
An automatic measuring apparatus includes a measuring device that measures a dimension of a workpiece, the measuring device including a movable element that is displaceable with respect to a fixed element and moves forward and backward to be brought into contact with or away from the workpiece, and a displacement detection part that detects a displacement or position of the movable element, and an automatic operation part that automates the forward/backward movement of the movable element by power. A workpiece holding part that holds the workpiece in such a manner that a position and posture of the workpiece is changed at a pressure lower than a predetermined measurement pressure set in advance in the measuring device when the movable element is brought into contact with the workpiece.
G01B 3/24 - Calibres à aiguille sensible, p. ex. calibres à cadrans à mâchoire ouverte, c.-à-d. compas à calibrer
G01B 5/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques
G01B 5/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
09 - Appareils et instruments scientifiques et électriques
Produits et services
Optical inspection and measuring apparatus and instruments; image processing apparatus; vision measuring apparatus and instruments; profile projectors; downloadable computer software for processing digital images; downloadable and/or recorded computer operating programs for optical inspection, optical measuring and image processing; electron microscopes; digital graphic scanners
An encoder that can measure displacement with high accuracy by canceling out the effects of external noise is provided. The encoder includes a rotor, a stator and a calculation unit. The stator has an even number of detectors that read the graduations and output a signal. The calculation unit has a phase calculation unit that calculates the phase based on the signals output by the detectors, and an averaging unit that averages the phase calculated by the phase calculation unit. The even number of detectors are each located at a position displaced by an integer multiple of the period of the graduations along the measurement direction from the other adjacent detectors.
An encoder that can measure displacement with high accuracy by canceling out the effects of external noise is provided. The encoder includes a rotor, a stator and a calculation unit. The stator has an even number of detectors that read the graduations and output a signal. The calculation unit has a phase calculation unit that calculates the phase based on the signals output by the detectors, and an averaging unit that averages the phase calculated by the phase calculation unit. The even number of detectors are each located at a position displaced by an integer multiple of the period of the graduations along the measurement direction from the other adjacent detectors.
The first signal output by half of the detectors and the second signal output by the other half of the detectors to have opposite polarity at the input to the phase calculation unit.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
G01B 7/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour tester l'alignement des axes
There is provided a displacement measuring apparatus capable of reducing power consumption in a sleep mode. An operation mode of a signal processing unit includes a measurement operation execution mode to calculate a displacement or position as a measurement value using a sensor signal from a displacement sensor, and a sleep mode to reduce power consumption compared to the measurement operation execution mode. In the sleep mode, the signal processing unit performs a substitute calculation process at a predetermined sampling frequency to calculate a substitute value related to the displacement or position using fewer sensor signals than in the measurement operation execution mode. The operation-mode control unit assumes that a variation of the displacement sensor has been detected when there is a variation in the substitute value, cancels the sleep mode, and switches the signal processing unit to the measurement operation execution mode.
G01B 7/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour tester l'alignement des axes
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
94.
MEASUREMENT INFORMATION MANAGEMENT DEVICE, MEASUREMENT PROGRAM, MEASUREMENT METHOD, AND MEASUREMENT SYSTEM
This measurement information management device comprises a measurement information management unit that transmits a measurement command signal, receives measurement result signals respectively transmitted from a plurality of measurement instruments, and manages the plurality of measurement result signals. The measurement information management unit is provided with a first wireless transmission/reception unit that transmits the measurement command signal by using a first communication scheme and that receives the measurement result signals. The first wireless transmission/reception unit transmits the measurement command signal a plurality of times at different timings by using different wireless frequency bands, and receives the measurement result signals transmitted by second wireless transmission/reception units of the plurality of measurement instruments at mutually different timings by using a second communication scheme in which are used different wireless frequency bands from those of the first communication scheme.
Three-dimensional geometry measurement apparatuses includes: a first identification part that identifies a primary absolute phase value corresponding to each of a plurality of pixels of a first image capturing part; a second identification part that identifies a secondary absolute phase value corresponding to each of a plurality of pixels of a second image capturing part; a conversion identification part that identifies a conversion value for converting primary coordinates or secondary coordinates; and a geometry identification part that converts the primary coordinates or the secondary coordinates on the basis of the conversion value, and identifies a three-dimensional geometry of an object to be measured on the basis of the converted coordinates.
G06T 7/521 - Récupération de la profondeur ou de la forme à partir de la télémétrie laser, p. ex. par interférométrieRécupération de la profondeur ou de la forme à partir de la projection de lumière structurée
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
A method for eliminating lens flare that eliminates lens flare is provided. The lens flare elimination method performs: a step for acquiring images by irradiating the coaxial episcopic illumination light with varying irradiation intensities and capturing images at each irradiation intensity while the object is not placed on the mounting table; a step for capturing an image of the object by irradiating the object placed on the mounting table with the coaxial episcopic illumination light at an arbitrary irradiation intensity; a step for estimating an image for correction, which is the image at the irradiation intensity irradiated when the measurement object is captured, based on the images acquired in the image acquiring step; and a step for generating a post-correction image in which the lens flare is eliminated from the image of the object by obtaining the difference between the image of the object and the image for correction.
H04N 25/61 - Traitement du bruit, p. ex. détection, correction, réduction ou élimination du bruit le bruit provenant uniquement de l'objectif, p. ex. l'éblouissement, l'ombrage, le vignettage ou le "cos4"
An image measuring apparatus, according to the present invention, captures an image of the measurement object and measures the dimensions of the measurement point of the measurement object by analyzing the image. The image measuring apparatus comprises: a display unit that displays the image of the measurement object; an input unit that accepts input of the trajectory traced by an operator on the image displayed on the display unit; an edge detection unit that detects an edge based on the traced trajectory on the image; and a measurement performing unit that performs measurement based on one or more detected edges.
G01B 11/03 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
A variable focal length lens device includes: a variable focal length optical system configured to change a focal length; a beam splitter configured to cause passing light, which is reflected off an object and passes through the variable focal length optical system, to branch into branched beams; an image-forming lens configured to condense the branched beams respectively; an image sensor configured to capture an image of the object by receiving the branched beam condensed by the image-forming lens; and an image sensor configured to capture an image of the object by receiving the branched beam condensed by the image-forming lens. An imaging distance on a first optical axis from the image sensor to the image-forming lens and an imaging distance on a second optical axis from the image sensor to the image-forming lens are different from each other.
H04N 23/45 - Caméras ou modules de caméras comprenant des capteurs d'images électroniquesLeur commande pour générer des signaux d'image à partir de plusieurs capteurs d'image de type différent ou fonctionnant dans des modes différents, p. ex. avec un capteur CMOS pour les images en mouvement en combinaison avec un dispositif à couplage de charge [CCD] pour les images fixes
G02B 3/14 - Lentilles remplies d'un fluide ou à l'intérieur desquelles le vide a été fait à distance focale variable
A calibration jig that calibrates a measurement apparatus for measuring a three-dimensional geometry of a measurement target, including: a plurality of elements to be measured, a frame part to which the plurality of elements to be measured are attached, and a mechanism part that moves the frame part, wherein the mechanism part includes: a rotation mechanism that rotates the frame part about a first axis; a first swinging mechanism that swings the frame part about a second axis orthogonal to the first axis; and a second swinging mechanism that swings the frame part about a third axis orthogonal to the first axis and the second axis.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
100.
Calibration jig, calibration method, and measurement system
A calibration jig which calibrates a measurement apparatus that measures a three-dimensional geometry of a measurement target and includes a plurality of imaging parts that capture the measurement target, the calibration jig including: a plurality of elements to be measured; and a frame part to which the plurality of elements to be measured are attached, wherein each of the plurality of elements to be measured includes a main body part having a predetermined shape; and a plurality of label parts provided on the main body part, wherein an identification code for identifying the elements to be measured is shown on each label part.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
G06K 7/14 - Méthodes ou dispositions pour la lecture de supports d'enregistrement par radiation électromagnétique, p. ex. lecture optiqueMéthodes ou dispositions pour la lecture de supports d'enregistrement par radiation corpusculaire utilisant la lumière sans sélection des longueurs d'onde, p. ex. lecture de la lumière blanche réfléchie
