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2026
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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P/S
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Semiconductor manufacturing machines |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes: a processing chamber;... |
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Invention
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Apparatus and methods for processing bonding semiconductor wafers.
A method for manufacturing se... |
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Invention
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Surface relief grating performance and cost enhancements for augmented reality applications.
Asp... |
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Invention
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Substrate support and substrate processing apparatus.
A structure efficiently provides bias powe... |
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Invention
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High-performance adaptable sampling system.
According to an embodiment, a plasma processing syst... |
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Invention
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Film formation method and film formation apparatus.
A film formation method according to one asp... |
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Invention
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Sidewall inorganic passivation for dielectric etching via surface modification.
A method for pro... |
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Invention
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Formation of low-temperature and high-temperature in-situ doped source and drain epitaxy using se... |
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Invention
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Film deposition apparatus.
A film deposition apparatus includes a processing container, a stage,... |
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Invention
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Substrate processing system, storage module, and substrate processing method.
A substrate proces... |
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Invention
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Edge ring, conductive member, heat conductive member, electro-conductive member, conductive sheet... |
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Invention
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Substrate stage and substrate processing apparatus.
A substrate stage, including: a stage on whi... |
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Invention
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Heat treatment apparatus and heat treatment method.
A heat treatment apparatus includes a proces... |
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Invention
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Substrate processing apparatus and gas supply method.
A substrate processing apparatus includes:... |
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Invention
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Gas recovery system of processing device and gas recovery method of processing device. [Problem] ... |
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Invention
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Development method for patterning metal oxide photoresist. A method for processing a substrate in... |
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Invention
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Information processing method, computer program, and information processing device. The present i... |
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Invention
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Substrate processing system and control method for substrate processing system. This substrate pr... |
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Invention
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Film formation method and film formation device. A film formation method according to one embodim... |
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Invention
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Substrate processing apparatus. This substrate processing apparatus includes: a substrate support... |
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Invention
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Sputtering apparatus and control method.
A sputtering apparatus includes: a holder configured to... |
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Invention
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Rf system, instruction device, and program. This RF system comprises a first RF power supply and ... |
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Invention
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Method for operating substrate processing device, substrate processing device, and program. The p... |
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Invention
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Substrate processing method and substrate processing apparatus. This substrate processing method ... |
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Invention
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Substrate processing device. This substrate processing device comprises a processing container, a... |
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Invention
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Cleaning method and plasma processing apparatus.
A cleaning method includes supplying a cleaning... |
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Invention
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Substrate processing device and method for assembling substrate processing device. This substrate... |
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Invention
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Substrate processing system and substrate conveyance method. A substrate processing system accord... |
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Invention
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Method for forming p-type tin oxide film, and film deposition device. xyy (y<2). The oxide semico... |
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Invention
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Cover and plasma processing apparatus.
A cover that prevents electromagnetic wave leakage from a... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method in... |
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Invention
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Cleaning method, substrate processing method, and substrate processing apparatus. A cleaning meth... |
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Invention
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Substrate processing system. The disclosed substrate processing system includes first to third va... |
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Invention
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Plasma processing apparatus and voltage pulse generator. This plasma processing apparatus compris... |
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Invention
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Substrate support and substrate processing apparatus.
Provided is a substrate support comprising... |
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Invention
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Substrate processing method. A substrate processing method according to one aspect of the present... |
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Invention
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Transport device, substrate processing system, and substrate processing method. Provided is a con... |
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Invention
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Substrate processing system and substrate processing method. This substrate processing system com... |
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Invention
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Plasma treatment device and plasma treatment method. Disclosed is a plasma treatment device inclu... |
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P/S
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Semiconductor manufacturing machines and parts therefor; semiconductor wafer transfer equipment u... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; semiconductor wafer... |
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2025
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Invention
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Adjustable chuck for wafer bonding. Conformal semiconductor chucks are disclosed. The semiconduct... |
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Invention
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Methods for etching semiconductor devices. 4 4 is flowed into the process chamber. A plasma is ge... |
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P/S
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Semiconductor manufacturing machines and parts therefor; flat panel display manufacturing machine... |
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P/S
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Installation, maintenance and repair of semiconductor manufacturing machines; installation, maint... |
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P/S
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Installation, maintenance and repair of semiconductor
manufacturing machines; installation, main... |
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Invention
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Apparatus and method for wafer bonding.
An apparatus is provided for die-to-wafer bonding. The a... |
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Invention
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Methods for reducing critical dimension variation.
A method is provided for processing a substra... |
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Invention
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Methods and systems for plasma etching process.
A method is provided for processing a substrate.... |
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Invention
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Adjustable chuck for wafer bonding.
Conformal semiconductor chucks are disclosed. The semiconduc... |
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Invention
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Bipolar junction transistors with nanosheet structures and methods for manufacturing the same.
O... |
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Invention
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Methods for etching semiconductor devices.
A method is provided for etching a substrate. The met... |
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2024
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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P/S
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Semiconductor manufacturing machines used for coating and deposition processes, and their compone... |
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Invention
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Bonding apparatus, bonding system, and bonding method.
A bonding apparatus 41 includes a first h... |
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Invention
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Separation apparatus, separation system, and separation method.
A separation apparatus is config... |
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P/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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P/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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2023
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Invention
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Carrier for holding an object |
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P/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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P/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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2022
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P/S
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Semiconductor manufacturing machines and their component parts and fittings |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
