|
2022
|
Invention
|
Accelerometer apparatuses and systems. A sensor having a proximal end and a distal end includes a... |
|
|
Invention
|
Mechanically-sensitive semiconducting triode capacitor. A sensor apparatus includes a base, a tap... |
|
|
Invention
|
Accelerometer apparatuses and systems for noise rejection. A sensor apparatus includes a resonato... |
|
2019
|
Invention
|
Accelerometer having a root-mean-square (rms) output. Accelerometers are described herein that ha... |
|
|
Invention
|
Accelerometer having a root-mean-square (rms) output.
Accelerometers are described herein that h... |
|
2018
|
Invention
|
Pseudo soi process. A method of processing a semiconductor substrate having a first conductivity ... |
|
|
Invention
|
Method for manufacturing a micro electro-mechanical system. A method of fabricating a semiconduct... |
|
|
Invention
|
Eutectic bonding with alge. A MEMS device formed in a first semiconductor substrate is sealed usi... |
|
2016
|
Invention
|
Electronic systems with through-substrate interconnects and mems device. Disclosed are systems, m... |
|
|
Invention
|
Phase-based measurement and control of a gyroscope. A gyroscope includes a resonator, a transduce... |
|
2015
|
Invention
|
Pressure sensor including deformable pressure vessel(s). Techniques are described herein that per... |
|
2013
|
Invention
|
Single motor dynamic calibration unit. A calibration unit, system, and method for calibrating a d... |
|
|
Invention
|
Systems and methods for compensating for a misalignment angle between an accelerometer and a magn... |
|
|
Invention
|
Systems and methods for calibrating an accelerometer.
A method for calibrating an accelerometer ... |
|
|
Invention
|
Angular velocity estimation using a magnetometer and accelerometer. A system and method for estim... |
|
2012
|
Invention
|
Strengthened micro-electromechanical system devices and methods of making thereof. In an embodime... |
|
|
Invention
|
Micro-electromechanical system devices having beams and methods of making same. A micro-electrome... |
|
2010
|
Invention
|
Directional tap detection algorithm using an accelerometer. A directional tap detection algorithm... |
|
2008
|
Invention
|
System and method for detection of freefall with spin using two tri-axis accelerometers. A system... |
|
2007
|
Invention
|
Flexible and modular microfluidic device. The systems and methods described herein include a micr... |
|
2006
|
Invention
|
A tri-axis accelerometer. In an embodiment of the present invention there is provided a micro-ele... |
|
|
Invention
|
Microfluidic membrane pump and valve. Plastic microfluidic structures having a substantially rigi... |
|
2004
|
Invention
|
Laminated microfluidic structures and method for making. A method for making a polymeric microflu... |
|
|
Invention
|
Z-axis angular rate micro electro-mechanical systems (mems) sensor. An oscillatory angular rate M... |
|
|
Invention
|
Z-axis angular rate sensor. An oscillatory rate sensor is described for sensing rotation about th... |
|
|
Invention
|
Z-axis angular rate micro electro-mechanical systems (mems) sensor.
An oscillatory angular rate ... |
|
|
Invention
|
Reconfigurable modular microfluidic system and method of fabrication. A reconfigurable modular mi... |
|
2003
|
Invention
|
Methods and devices for microfluidic extraction. Devices for performing liquid extraction of one ... |
|
|
Invention
|
Methods and devices for liquid extraction. Devices for performing liquid extraction of one or mor... |
|
|
Invention
|
Fabrication of ultra-shallow channels for microfluidic devices and systems. A method for etching ... |
|
2002
|
Invention
|
Method of manufacturing an oxide beam. A method of manufacturing an insulating micro-structure (1... |
|
|
Invention
|
Push/pull actuator for microstructures. A relay (10) for switching an electrical signal includes ... |
|
|
Invention
|
Insulating micro-structure and method of manufacturing same. A method of manufacturing an insulat... |
|
|
Invention
|
Accelerometer. An accelerometer (100) comprising a silicon wafer is etched to form a fixed portio... |
|
|
Invention
|
Integrated large area microstructures and micromechanical devices. Deep reactive ion etching crea... |
|
2001
|
Invention
|
Sensor for measuring out-of-plane acceleration. An accelerometer. A silicon wafer is etched to fo... |
|
2000
|
Invention
|
Electrically decoupled micromachined gyroscope. An oscillatory gyroscope is described with decoup... |
|
|
Invention
|
Improved methods of fabricating microelectromechanical and microfluidic devices. Three fundamenta... |
|
|
Invention
|
Trench isolation for micromechanical devices. An isolation process which enhances the performance... |
|
1999
|
Invention
|
Integrated monolithic microfabricated electrospray and liquid chromatography system and method. A... |
|
1998
|
Invention
|
Magnetic shield for primary coil of transcutaneous energy transfer device. A transcutaneous energ... |
|
|
Invention
|
Micromechanical accelerometer for automotive applications. A micromechanical capacitive accelerom... |
|
1995
|
Invention
|
Microelectromechanical accelerometer for automotive applications. A micromechanical capacitive ac... |
