|
2023
|
Invention
|
Switching circuit. In one embodiment, an impedance matching network includes a variable reactance... |
|
2022
|
Invention
|
Combined rf generator and rf solid-state matching network. In one embodiment, a method of matchin... |
|
|
Invention
|
Rf impedance matching network with series-connected diode switches.
In one embodiment, an RF imp... |
|
|
Invention
|
Rf impedance matching network with clamping circuit.
In one embodiment, an RF impedance matching... |
|
|
Invention
|
Resonant filter for solid state rf impedance matching network.
In one embodiment, an RF impedanc... |
|
|
Invention
|
Impedance matching network and method.
In one embodiment, an impedance matching network includes... |
|
|
Invention
|
Rf impedance matching network.
In one embodiment, an RF impedance matching circuit is disclosed.... |
|
2021
|
Invention
|
Apparatus and method for adjusting a pedestal assembly for a reactor. The invention is directed t... |
|
|
Invention
|
Impedance matching network. In one embodiment, an RF impedance matching network is disclosed. The... |
|
|
Invention
|
High voltage switching circuit. In one embodiment, a switching circuit includes an electronic swi... |
|
2020
|
Invention
|
Impedance matching network for diagnosing plasma chamber. In one embodiment, a method of using an... |
|
|
Invention
|
Semiconductor manufacturing using artificial intelligence. In one embodiment, a method, a method ... |
|
|
Invention
|
Rf impedance matching network. In one embodiment, an impedance matching network includes an elect... |
|
|
Invention
|
Impedance matching network and method. In one embodiment, a method of impedance matching and cont... |
|
|
Invention
|
Impedance matching network and method. In one embodiment, a method of matching an impedance is di... |
|
|
Invention
|
Impedance matching network and method. In one embodiment, the present disclosure may be directed ... |
|
|
Invention
|
Rf impedance matching circuit and systems and methods incorporating same. In one embodiment, an R... |
|
|
Invention
|
Impedance matching network and method with reduced memory requirements. In one embodiment, the pr... |
|
|
Invention
|
Impedance matching network and method. In one embodiment, the present disclosure is directed to a... |
|
|
Invention
|
Impedance matching network and method. In one embodiment, an impedance matching network includes ... |
|
|
Invention
|
Amplitude and phase detection circuit. In one embodiment, a phase detection circuit includes a cu... |
|
|
Invention
|
Switching circuit with voltage bias. In one embodiment, an RF impedance matching network for a pl... |
|
2019
|
Invention
|
Filter for impedance matching. In one embodiment, an RF impedance matching network for a plasma c... |
|
|
Invention
|
Diagnostics for impedance matching network. In one embodiment, the present disclosure is directed... |
|
|
Invention
|
Impedance matching network and method.
In one embodiment, an RF impedance matching network for a... |
|
|
Invention
|
Impedance matching network and method. In one embodiment, an RF impedance matching network for a ... |
|
|
Invention
|
Impedance matching with multi-level power setpoint. In one embodiment, the present disclosure is ... |
|
|
Invention
|
Impedance matching using independent capacitance and frequency control. In one embodiment, the pr... |
|
|
Invention
|
Impedance matching using electronically variable capacitance and frequency considerations. In one... |
|
|
Invention
|
Impedance matching with restricted capacitor switching. In one embodiment, an RF impedance matchi... |
|
|
Invention
|
Rf power amplifier. In one embodiment, an RF power amplifier includes a first transistor and a se... |
|
|
Invention
|
Switching circuit. In one embodiment, an impedance matching network includes at least one electro... |
|
2018
|
Invention
|
Parasitic capacitance compensation circuit. In one embodiment, a parasitic capacitance compensati... |
|
|
Invention
|
Rf impedance matching circuit and systems and methods incorporating same. In one embodiment, a se... |
|
|
Invention
|
Restricted capacitor switching. In one embodiment, the present disclosure is directed to a method... |
|
2017
|
Invention
|
Thermal atomic layer etching processes. Thermal atomic layer etching processes are disclosed. In ... |
|
|
Invention
|
Impedance matching network using heat pipe inductor.
In one embodiment, the invention may be an ... |
|
|
Invention
|
Switching circuit. In one embodiment, an impedance matching network is disclosed that includes a ... |
|
|
Invention
|
Switching circuit for rf currents. In one embodiment, a switching circuit includes a first switch... |
|
|
Invention
|
System for providing variable capacitance. In one embodiment, a radio frequency (RF) impedance ma... |
|
2015
|
Invention
|
Rf impedance matching network. An RF impedance matching network includes an RF input configured t... |
