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2013
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P/S
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Machines for metal treating, glass working, ceramic processing, plastics processing, semiconducto... |
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2011
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Invention
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Method and device for the single-sided processing of flat workpieces. Method for the single-sided... |
|
|
Invention
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Device and method for determining the position of a working surface of a working disc.
A device ... |
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Invention
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Device and method for determining the position of a working surface of a working disc. The invent... |
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2010
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Invention
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Device and method for the double-sided processing of flat work pieces.
The invention relates to ... |
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Invention
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Device and method for the double-sided processing of flat work pieces with optimized supply of th... |
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|
Invention
|
Method for machining flat workpieces. The invention relates to a method for machining flat workpi... |
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|
Invention
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Method for machining flat workpieces. The invention relates to a method for machining flat work p... |
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|
Invention
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Method for the material-removing machining of very thin work pieces in a double sided grinding ma... |
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Invention
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Method for the material-removing machining of very thin work pieces in a double side grinding mac... |
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2009
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Invention
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Apparatus for double-sided, grinding machining of flat workpieces. The invention relates to an ap... |
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Invention
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Device for grinding both sides of flat workpieces. The invention relates to a device for grinding... |
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|
Invention
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Method for measuring the thickness of disc-shaped work pieces machined in a machine tool. The inv... |
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|
Invention
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Method for measuring the thickness of a discoidal workpiece.
The invention relates to a method f... |
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Invention
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Method for measuring the thickness of a discoidal workpiece. The invention relates to a method fo... |
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2008
|
Invention
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Machining machine with means for acquiring machining parameters. A machining machine with an uppe... |
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2007
|
Invention
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Method for profiling the perimeter border of a semiconductor wafer.
A method for profiling the p... |
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|
Invention
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Two-side working machine. A two-side working machine, comprising an upper and a lower working dis... |
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2005
|
Invention
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Double sided polishing machine. Double-sided polishing machine with an upper and a lower working ... |
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2003
|
Invention
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Device for polishing digital storage discs. A device for polishing digital storage discs includin... |
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2002
|
Invention
|
Method and apparatus for automatically loading a double-sided polishing machine with wafer crysta... |
|
|
Invention
|
Apparatus and method for the chemical mechanical polishing of the surface of circular flat workpi... |
|
|
Invention
|
Chuck means for flat workpieces, in particular semi-conductor wafers. A chuck means for flat work... |
|
|
Invention
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Loading and unloading station for a device for the processing of circular flat work-pieces, espec... |
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2001
|
Invention
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Holder for flat workpieces, particularly semiconductor wafers. A holder for flat workpieces, part... |
|
|
Invention
|
Holder for flat workpieces, particularly semiconductor wafers. A holder for semiconductor wafers ... |
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2000
|
Invention
|
Apparatus for removing semiconductor wafers from within the runner disks of a double-sided polish... |
|
|
Invention
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Double-disk polishing machine, particularly for tooling semiconductor wafers. A double-disk polis... |
|
1998
|
Invention
|
Holder for flat subjects in particular semiconductor wafers. A holder for flat subjects, in parti... |
|
|
Invention
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Device for the chemical-mechanical polishing of an object, in particular a semiconductor wafer. A... |
|
1996
|
Invention
|
Polishing machine. A polishing machine comprising a frame, an upper and a lower working wheel eac... |
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Invention
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Appartus for the surface machining of workpieces. An apparatus for the surface machining of the w... |
